JP2017043843A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP2017043843A JP2017043843A JP2016162743A JP2016162743A JP2017043843A JP 2017043843 A JP2017043843 A JP 2017043843A JP 2016162743 A JP2016162743 A JP 2016162743A JP 2016162743 A JP2016162743 A JP 2016162743A JP 2017043843 A JP2017043843 A JP 2017043843A
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- 238000003860 storage Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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- 229910052720 vanadium Inorganic materials 0.000 description 1
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- 238000007740 vapor deposition Methods 0.000 description 1
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 1
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Abstract
【解決手段】ターゲットホルダと、基板ホルダと、第1の電源と、第2の電源と、を有し、ターゲットホルダは、第1の電源と電気的に接続され、基板ホルダは、第2の電源と電気的に接続され、第2の電源は、接地電位よりも高い電位を印加する機能を有する成膜装置である。
【選択図】図4
Description
本発明の一態様は、ターゲットホルダと、基板ホルダと、第1の電源と、第2の電源と、を有し、ターゲットホルダは、第1の電源と電気的に接続され、基板ホルダは、第2の電源と電気的に接続され、第2の電源は、接地電位よりも高い電位を印加する機能を有する成膜装置である。
本発明の一態様は、(1)において、第2の電源は、成膜時に生成されるプラズマ電位よりも高い電位を印加する機能を有する成膜装置である。
本発明の一態様は、ターゲットホルダと、基板ホルダと、第1の導入口と、第2の導入口と、を有し、第1の導入口は、基板ホルダよりもターゲットホルダの近くに配置され、第2の導入口は、ターゲットホルダよりも基板ホルダの近くに配置され、第1の導入口は、第1のガスを導入する機能を有し、第2の導入口は、第2のガスを導入する機能を有する成膜装置である。
本発明の一態様は、(3)において、成膜時に、ターゲットホルダの近傍は第1のガスの濃度が高く、基板ホルダの近傍は第2のガスの濃度が高い成膜装置である。
本発明の一態様は、(1)乃至(4)のいずれか一において、ターゲットホルダの正面から垂直距離で30mmの平面において、ターゲットホルダの正面に垂直方向の最大磁束密度が50G以上150G以下の成膜装置である。
本発明の一態様は、第1のターゲットホルダと、第2のターゲットホルダと、基板ホルダと、第1の電源と、第2の電源と、を有し、第1のターゲットホルダおよび第2のターゲットホルダは、第1の電源と電気的に接続され、基板ホルダは、第2の電源と電気的に接続され、第2の電源は、接地電位よりも高い電位を印加する機能を有する成膜装置である。
本発明の一態様は、(6)において、第2の電源は、成膜時に生成されるプラズマ電位よりも高い電位を印加する機能を有する成膜装置である。
本発明の一態様は、第1のターゲットホルダと、第2のターゲットホルダと、基板ホルダと、第1の導入口と、第2の導入口と、を有し、第1の導入口は、基板ホルダよりも第1のターゲットホルダおよび第2のターゲットホルダの近くに配置され、第2の導入口は、第1のターゲットホルダおよび第2のターゲットホルダよりも基板ホルダの近くに配置され、第1の導入口は、第1のガスを導入する機能を有し、第2の導入口は、第2のガスを導入する機能を有する成膜装置である。
本発明の一態様は、(8)において、成膜時に、第1のターゲットホルダおよび第2のターゲットホルダの近傍は第1のガスの濃度が高く、基板ホルダの近傍は第2のガスの濃度が高い成膜装置である。
本発明の一態様は、(6)乃至(9)のいずれか一において、第1のターゲットホルダの正面から垂直距離で30mmの平面において、第1のターゲットホルダの正面に垂直方向の最大磁束密度が50G以上150G以下の成膜装置である。
本発明の一態様は、(6)乃至(10)のいずれか一において、第2のターゲットホルダの正面から垂直距離で30mmの平面において、第2のターゲットホルダの正面に垂直方向の最大磁束密度が50G以上150G以下の成膜装置である。
以下では、本発明の一態様に係る成膜装置について説明する。
以下では、上記の図1及び図2に示す成膜装置とは異なる構造の成膜室を有する成膜装置について図3を用いて説明する。
以下では、本発明の一態様に係る平行平板型のスパッタリング装置について説明する。本項目で説明するスパッタリング装置は、例えば、上記の図1、図2に示す成膜装置の成膜室206a、206b及び206cなどに用いることができる。なお、以下に示すスパッタリング装置では、理解を容易にするため、または成膜時における動作を説明するため、基板およびターゲットなどを配置した状態で示す。ただし、基板およびターゲットなどは、使用者が設置する物であるため、本発明の一態様に係るスパッタリング装置が基板およびターゲットを有さない場合もある。
以下では、上記の平行平板型のスパッタリング装置とは、異なる構造を有する対向ターゲット式のスパッタリング装置について説明する。本項目で説明するスパッタリング装置は、例えば、上記の図1、図3に示す成膜装置の成膜室206a、206b及び206cなどに用いることができる。なお、以下に示すスパッタリング装置では、理解を容易にするため、または成膜時における動作を説明するため、基板およびターゲットなどを配置した状態で示す。ただし、基板およびターゲットなどは、使用者が設置する物であるため、本発明の一態様に係るスパッタリング装置が基板およびターゲットを有さない場合もある。
以下では、In−M−Zn酸化物の組成について説明する。なお、元素Mは、アルミニウム、ガリウム、イットリウムまたはスズなどとする。そのほかの元素Mに適用可能な元素としては、ホウ素、シリコン、チタン、鉄、ニッケル、ゲルマニウム、ジルコニウム、モリブデン、ランタン、セリウム、ネオジム、ハフニウム、タンタル、タングステン、マグネシウムなどがある。
以下では、酸化物半導体の構造について説明する。
まずは、CAAC−OSについて説明する。
次に、nc−OSについて説明する。
a−like OSは、nc−OSと非晶質酸化物半導体との間の構造を有する酸化物半導体である。
図14(A)、図14(B)および図14(C)は、本発明の一態様に係るトランジスタの上面図および断面図である。図14(A)は上面図であり、図14(B)および図14(C)は、それぞれ図14(A)に示す一点鎖線A1−A2、および一点鎖線A3−A4に対応する断面図である。なお、図14(A)の上面図では、図の明瞭化のために一部の要素を省いて図示している。
図18(A)、図18(B)および図18(C)は、本発明の一態様に係るトランジスタの上面図および断面図である。図18(A)は上面図であり、図18(B)および図18(C)は、それぞれ図18(A)に示す一点鎖線F1−F2、および一点鎖線F3−F4に対応する断面図である。なお、図18(A)の上面図では、図の明瞭化のために一部の要素を省いて図示している。
図21(A)、図21(B)および図21(C)は、本発明の一態様に係るトランジスタの上面図および断面図である。図21(A)は上面図であり、図21(B)および図21(C)は、それぞれ図21(A)に示す一点鎖線G1−G2、および一点鎖線G3−G4に対応する断面図である。なお、図21(A)の上面図では、図の明瞭化のために一部の要素を省いて図示している。
100a ターゲット
100b ターゲット
110 バッキングプレート
110a バッキングプレート
110b バッキングプレート
120 ターゲットホルダ
120a ターゲットホルダ
120b ターゲットホルダ
122a 部材
122b 部材
130 マグネットユニット
130a マグネットユニット
130b マグネットユニット
130N マグネット
130N1 マグネット
130N2 マグネット
130S マグネット
132 マグネットホルダ
140 プラズマ
142 部材
160 基板
170 基板ホルダ
190 電源
200 成膜装置
201 大気側基板供給室
202 大気側基板搬送室
203a ロードロック室
203b アンロードロック室
204 搬送室
205 基板加熱室
206a 成膜室
206b 成膜室
206c 成膜室
251 クライオトラップ
252 ステージ
261 カセットポート
262 アライメントポート
263 搬送ロボット
264 ゲートバルブ
265 加熱ステージ
266 ターゲットホルダ
266a ターゲットホルダ
266b ターゲットホルダ
267a 部材
267b 部材
268 基板ホルダ
269 基板
270 真空ポンプ
271 クライオポンプ
272 ターボ分子ポンプ
280 マスフローコントローラ
280a マスフローコントローラ
280b マスフローコントローラ
281 精製機
281a 精製機
281b 精製機
282a ガス加熱機構
282b ガス加熱機構
283a 第1の導入口
283b 第2の導入口
284 部材
291a 電源
291aa 電源
291ab 電源
291b 電源
400 基板
402 絶縁体
404 導電体
406a 絶縁体
406b 半導体
406c 絶縁体
408 絶縁体
410 絶縁体
412 絶縁体
413 導電体
416a 導電体
416b 導電体
500 基板
502 絶縁体
503 絶縁体
504 導電体
506a 絶縁体
506b 半導体
506c 絶縁体
508 絶縁体
512 絶縁体
513 導電体
516a 導電体
516b 導電体
600 基板
602 絶縁体
602a 絶縁体
602b 絶縁体
602c 絶縁体
603 絶縁体
604 導電体
606a 絶縁体
606b 半導体
606c 絶縁体
607a 領域
607b 領域
608 絶縁体
612 絶縁体
613 導電体
616a 導電体
616b 導電体
618 絶縁体
620 絶縁体
Claims (11)
- ターゲットホルダと、基板ホルダと、第1の電源と、第2の電源と、を有し、
前記ターゲットホルダは、前記第1の電源と電気的に接続され、
前記基板ホルダは、前記第2の電源と電気的に接続され、
前記第2の電源は、接地電位よりも高い電位を印加する機能を有することを特徴とする成膜装置。 - 請求項1において、
前記第2の電源は、成膜時に生成されるプラズマ電位よりも高い電位を印加する機能を有することを特徴とする成膜装置。 - ターゲットホルダと、基板ホルダと、第1の導入口と、第2の導入口と、を有し、
前記第1の導入口は、前記基板ホルダよりも前記ターゲットホルダの近くに配置され、
前記第2の導入口は、前記ターゲットホルダよりも前記基板ホルダの近くに配置され、
前記第1の導入口は、第1のガスを導入する機能を有し、
前記第2の導入口は、第2のガスを導入する機能を有することを特徴とする成膜装置。 - 請求項3において、
成膜時に、前記ターゲットホルダの近傍は前記第1のガスの濃度が高く、前記基板ホルダの近傍は前記第2のガスの濃度が高いことを特徴とする成膜装置。 - 請求項1乃至請求項4のいずれか一において、
前記ターゲットホルダの正面から垂直距離で30mmの平面において、前記ターゲットホルダの正面に垂直方向の最大磁束密度が50G以上150G以下であることを特徴とする成膜装置。 - 第1のターゲットホルダと、第2のターゲットホルダと、基板ホルダと、第1の電源と、第2の電源と、を有し、
前記第1のターゲットホルダおよび前記第2のターゲットホルダは、前記第1の電源と電気的に接続され、
前記基板ホルダは、前記第2の電源と電気的に接続され、
前記第2の電源は、接地電位よりも高い電位を印加する機能を有することを特徴とする成膜装置。 - 請求項6において、
前記第2の電源は、成膜時に生成されるプラズマ電位よりも高い電位を印加する機能を有することを特徴とする成膜装置。 - 第1のターゲットホルダと、第2のターゲットホルダと、基板ホルダと、第1の導入口と、第2の導入口と、を有し、
前記第1の導入口は、前記基板ホルダよりも前記第1のターゲットホルダおよび前記第2のターゲットホルダの近くに配置され、
前記第2の導入口は、前記第1のターゲットホルダおよび前記第2のターゲットホルダよりも前記基板ホルダの近くに配置され、
前記第1の導入口は、第1のガスを導入する機能を有し、
前記第2の導入口は、第2のガスを導入する機能を有することを特徴とする成膜装置。 - 請求項8において、
成膜時に、前記第1のターゲットホルダおよび前記第2のターゲットホルダの近傍は前記第1のガスの濃度が高く、前記基板ホルダの近傍は前記第2のガスの濃度が高いことを特徴とする成膜装置。 - 請求項6乃至請求項9のいずれか一において、
前記第1のターゲットホルダの正面から垂直距離で30mmの平面において、前記第1のターゲットホルダの正面に垂直方向の最大磁束密度が50G以上150G以下であることを特徴とする成膜装置。 - 請求項6乃至請求項10のいずれか一において、
前記第2のターゲットホルダの正面から垂直距離で30mmの平面において、前記第2のターゲットホルダの正面に垂直方向の最大磁束密度が50G以上150G以下であることを特徴とする成膜装置。
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JP2020530531A (ja) * | 2016-10-07 | 2020-10-22 | パターニア・カンパニー・リミテッドPatternia Co., Ltd. | Rfスパッタリング装置を用いたoled用有機薄膜層の形成方法及び前記rfスパッタリング装置、並びに前記rfスパッタリング装置で使用されるターゲットを成形する装置 |
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CN107365968B (zh) * | 2017-08-24 | 2019-09-17 | 武汉华星光电半导体显示技术有限公司 | 一种溅镀装置及溅镀系统 |
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TWI794340B (zh) | 2017-12-07 | 2023-03-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置以及半導體裝置的製造方法 |
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US11824511B2 (en) | 2018-03-21 | 2023-11-21 | Qorvo Us, Inc. | Method for manufacturing piezoelectric bulk layers with tilted c-axis orientation |
WO2019207429A1 (ja) | 2018-04-27 | 2019-10-31 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
JP7472100B2 (ja) * | 2019-03-15 | 2024-04-22 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US11401601B2 (en) | 2019-09-13 | 2022-08-02 | Qorvo Us, Inc. | Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same |
US20230257869A1 (en) * | 2020-06-30 | 2023-08-17 | Qorvo Biotechnologies, Llc | System for depositing piezoelectric materials, methods for using the same, and materials deposited with the same |
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