JP2017024127A - ホウ素化合物を添加した切削砥石 - Google Patents
ホウ素化合物を添加した切削砥石 Download PDFInfo
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- JP2017024127A JP2017024127A JP2015146500A JP2015146500A JP2017024127A JP 2017024127 A JP2017024127 A JP 2017024127A JP 2015146500 A JP2015146500 A JP 2015146500A JP 2015146500 A JP2015146500 A JP 2015146500A JP 2017024127 A JP2017024127 A JP 2017024127A
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- cutting
- grindstone
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- cutting grindstone
- abrasive grains
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- 238000005520 cutting process Methods 0.000 title claims abstract description 154
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title description 2
- 229910052796 boron Inorganic materials 0.000 title description 2
- 239000006061 abrasive grain Substances 0.000 claims abstract description 47
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 24
- 239000010432 diamond Substances 0.000 claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 239000002184 metal Substances 0.000 claims abstract description 24
- 150000001639 boron compounds Chemical group 0.000 claims abstract description 21
- 239000002245 particle Substances 0.000 claims description 19
- 239000011347 resin Substances 0.000 abstract description 14
- 229920005989 resin Polymers 0.000 abstract description 14
- 239000005011 phenolic resin Substances 0.000 abstract description 5
- 230000000052 comparative effect Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000001788 irregular Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
- B24D3/285—Reaction products obtained from aldehydes or ketones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/02—Wheels in one piece
Abstract
Description
図1に示す切削砥石65は、例えば、外形が環状のワッシャー型のレジンボンド砥石であり、ダイヤモンド砥粒にホウ素化合物であるcBN砥粒および金属ホウ化物であるZrB2粒を添加し、フェノール樹脂等からなるレジンボンドで固定したものである。
比較例1においては、実施例1の切削砥石65の代わりに切削砥石65aを用いて、実施例1の切削砥石65を用いた場合と同様に、被加工物Wに対する切削を行った。切削砥石65aは、平均粒径が45μmのダイヤモンド砥粒にホウ素化合物としてB4C砥粒(平均粒径15μm)を添加しフェノール樹脂等からなるレジンボンドB1で固定した、外形が環状のワッシャー型のレジンボンド砥石であり、厚みが150μmである。
比較例2においては、実施例1の切削砥石65の代わりに切削砥石65bを用いて、実施例1の切削砥石65を用いた場合と同様に、被加工物Wに対する切削を行った。切削砥石65bは、平均粒径が35μmのダイヤモンド砥粒に金属ホウ化物としてZrB2粒(平均粒径2〜3μm)を添加しフェノール樹脂等からなるレジンボンドB1で固定した、外形が環状のワッシャー型のレジンボンド砥石であり、厚みが150μmである。
6A:スピンドルユニット
60:スピンドルハウジング 61:スピンドル
62:固定フランジ 620:フランジ部 621:ボス部 621a:ネジ
63:ナット
67:着脱フランジ 67a:係合孔 68:固定ナット
1:切削装置 12:アライメント手段 120:撮像手段
6:切削手段 69:切削水供給ノズル
3:保持テーブル
30:保持治具 30a:保持治具の保持面(保持テーブルの保持面) 300:逃げ溝
32:治具ベース 32a:吸引管
W:被加工物 Wa:被加工物の上面 Wc:デバイス領域 Wd:電極部
S:分割予定ライン D:デバイス B:バリ
65a:比較例1の切削砥石 65b:比較例2の切削砥石
Claims (3)
- 被加工物を切削する切削砥石であって、
ダイヤモンド砥粒にホウ素化合物および金属ホウ化物を添加し、ボンドで固定した切削砥石。 - 前記ダイヤモンド砥粒は前記ホウ素化合物よりも粒径が小さい請求項1に記載の切削砥石。
- 前記ホウ素化合物はcBNであり、前記金属ホウ化物はZrB2であり、前記ボンドはレジンボンドである請求項1又は2に記載の切削砥石。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015146500A JP6549927B2 (ja) | 2015-07-24 | 2015-07-24 | ホウ素化合物を添加した切削砥石 |
TW105119572A TWI680837B (zh) | 2015-07-24 | 2016-06-22 | 添加了硼化合物的切削砥石 |
KR1020160086191A KR102381100B1 (ko) | 2015-07-24 | 2016-07-07 | 붕소 화합물을 첨가한 절삭 지석 |
CN201610548543.6A CN106363544B (zh) | 2015-07-24 | 2016-07-13 | 添加有硼化合物的切削磨具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015146500A JP6549927B2 (ja) | 2015-07-24 | 2015-07-24 | ホウ素化合物を添加した切削砥石 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017024127A true JP2017024127A (ja) | 2017-02-02 |
JP6549927B2 JP6549927B2 (ja) | 2019-07-24 |
Family
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JP2015146500A Active JP6549927B2 (ja) | 2015-07-24 | 2015-07-24 | ホウ素化合物を添加した切削砥石 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6549927B2 (ja) |
KR (1) | KR102381100B1 (ja) |
CN (1) | CN106363544B (ja) |
TW (1) | TWI680837B (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6327258U (ja) * | 1986-07-29 | 1988-02-23 | ||
JPS6374567A (ja) * | 1986-09-18 | 1988-04-05 | Micron Seimitsu Kk | Cbn研削砥石 |
JP2010017826A (ja) * | 2008-07-14 | 2010-01-28 | Toyobo Co Ltd | 薄刃砥石およびダイシング方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6121980A (ja) * | 1984-07-10 | 1986-01-30 | 旭硝子株式会社 | ZrB↓2質複合焼結体 |
JP3069831B2 (ja) * | 1994-12-16 | 2000-07-24 | 株式会社利根 | 鋳物切断用カッター |
JP2971768B2 (ja) * | 1995-02-01 | 1999-11-08 | 株式会社ノリタケカンパニーリミテド | 導電性ビトリファイド砥石の製造方法 |
CA2618658A1 (en) * | 2005-08-11 | 2007-02-15 | Element Six (Production) (Pty) Ltd | Polycrystalline diamond abrasive element and method of its production |
JP2009119559A (ja) * | 2007-11-15 | 2009-06-04 | Disco Abrasive Syst Ltd | 切削ブレード |
TWI613285B (zh) * | 2010-09-03 | 2018-02-01 | 聖高拜磨料有限公司 | 粘結的磨料物品及形成方法 |
JP2012056012A (ja) * | 2010-09-08 | 2012-03-22 | Disco Corp | 切削砥石 |
JP2012086291A (ja) * | 2010-10-18 | 2012-05-10 | Disco Corp | 切削砥石 |
US8435896B2 (en) * | 2011-03-03 | 2013-05-07 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Stable, concentratable chemical mechanical polishing composition and methods relating thereto |
JP5636144B2 (ja) * | 2012-01-18 | 2014-12-03 | 株式会社ノリタケカンパニーリミテド | ビトリファイド超砥粒砥石 |
JP5882958B2 (ja) | 2013-03-01 | 2016-03-09 | 東芝テック株式会社 | 電子レシートシステム、商品販売データ処理装置、電子レシート管理サーバ、情報処理装置およびプログラム |
CN103922747B (zh) * | 2014-04-30 | 2015-10-21 | 郑州磨料磨具磨削研究所有限公司 | 陶瓷结合剂超硬材料磨具注射成型料及注射成型方法 |
-
2015
- 2015-07-24 JP JP2015146500A patent/JP6549927B2/ja active Active
-
2016
- 2016-06-22 TW TW105119572A patent/TWI680837B/zh active
- 2016-07-07 KR KR1020160086191A patent/KR102381100B1/ko active IP Right Grant
- 2016-07-13 CN CN201610548543.6A patent/CN106363544B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6327258U (ja) * | 1986-07-29 | 1988-02-23 | ||
JPS6374567A (ja) * | 1986-09-18 | 1988-04-05 | Micron Seimitsu Kk | Cbn研削砥石 |
JP2010017826A (ja) * | 2008-07-14 | 2010-01-28 | Toyobo Co Ltd | 薄刃砥石およびダイシング方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102381100B1 (ko) | 2022-03-30 |
TW201722625A (zh) | 2017-07-01 |
CN106363544A (zh) | 2017-02-01 |
CN106363544B (zh) | 2020-12-22 |
KR20170012027A (ko) | 2017-02-02 |
JP6549927B2 (ja) | 2019-07-24 |
TWI680837B (zh) | 2020-01-01 |
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