JP2016540892A5 - - Google Patents
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- JP2016540892A5 JP2016540892A5 JP2016536676A JP2016536676A JP2016540892A5 JP 2016540892 A5 JP2016540892 A5 JP 2016540892A5 JP 2016536676 A JP2016536676 A JP 2016536676A JP 2016536676 A JP2016536676 A JP 2016536676A JP 2016540892 A5 JP2016540892 A5 JP 2016540892A5
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- line
- deposition
- arrangement
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 50
- 230000008021 deposition Effects 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 33
- 238000001704 evaporation Methods 0.000 claims description 23
- 230000008020 evaporation Effects 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 229910052783 alkali metal Inorganic materials 0.000 claims description 10
- 150000001340 alkali metals Chemical class 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 7
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 239000011364 vaporized material Substances 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 10
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 12
- 229910052744 lithium Inorganic materials 0.000 description 12
- 238000010926 purge Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910001338 liquidmetal Inorganic materials 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 230000003796 beauty Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- -1 lithium Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2013/075850 WO2015082022A1 (en) | 2013-12-06 | 2013-12-06 | Depositing arrangement, deposition apparatus and methods of operation thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016540892A JP2016540892A (ja) | 2016-12-28 |
| JP2016540892A5 true JP2016540892A5 (enExample) | 2017-02-09 |
| JP6647202B2 JP6647202B2 (ja) | 2020-02-14 |
Family
ID=49886884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016536676A Active JP6647202B2 (ja) | 2013-12-06 | 2013-12-06 | 堆積アレンジメント、堆積装置、及びこれらの操作方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20170022598A1 (enExample) |
| EP (1) | EP3077567B1 (enExample) |
| JP (1) | JP6647202B2 (enExample) |
| KR (1) | KR102137181B1 (enExample) |
| CN (2) | CN105874095A (enExample) |
| TW (1) | TWI652363B (enExample) |
| WO (1) | WO2015082022A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018103137A (ja) * | 2016-12-28 | 2018-07-05 | セイコーエプソン株式会社 | 液体吐出装置、方法およびコンピュータープログラム |
| US20210147975A1 (en) * | 2018-04-18 | 2021-05-20 | Applied Materials, Inc. | Evaporation source for deposition of evaporated material on a substrate, deposition apparatus, method for measuring a vapor pressure of evaporated material, and method for determining an evaporation rate of an evaporated material |
| EP3895236B1 (en) * | 2018-12-12 | 2025-08-13 | Elevated Materials Germany GmbH | Free-span coating systems and methods |
| WO2020251696A1 (en) | 2019-06-10 | 2020-12-17 | Applied Materials, Inc. | Processing system for forming layers |
| US11624113B2 (en) * | 2019-09-13 | 2023-04-11 | Asm Ip Holding B.V. | Heating zone separation for reactant evaporation system |
| KR102615500B1 (ko) * | 2019-10-21 | 2023-12-19 | 가부시키가이샤 아루박 | 막 형성장치 |
| CN115279935A (zh) * | 2020-03-26 | 2022-11-01 | 应用材料公司 | 蒸发源、具有蒸发源的沉积设备及其方法 |
| KR102859881B1 (ko) * | 2020-11-18 | 2025-09-12 | 주식회사 엘지화학 | 유기발광다이오드의 증착장치 |
| RU2765222C1 (ru) * | 2020-12-30 | 2022-01-26 | Тхе Баттериес Сп. з о.о. | Способ формирования пленки LiCoO2 и устройство для его реализации |
| CN116670321A (zh) * | 2021-01-15 | 2023-08-29 | 应用材料公司 | 用于提供液化材料的设备、用于配量液化材料的配量系统及方法 |
| CN113215535B (zh) * | 2021-05-21 | 2022-11-22 | 泊肃叶科技(沈阳)有限公司 | 一种蒸发速率智能可调的蒸发镀膜机 |
| CN120548781A (zh) * | 2022-10-28 | 2025-08-26 | 提升材料德国有限公司 | 多孔介质蒸发器 |
| CN119651320A (zh) * | 2023-09-15 | 2025-03-18 | 中国科学院大连化学物理研究所 | 一种大流量碱金属原子蒸气生产装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2664852A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
| JPH01234560A (ja) * | 1988-03-11 | 1989-09-19 | Ulvac Corp | 蒸着装置における低融点蒸発材の供給方法及び装置 |
| US5135817A (en) * | 1988-07-06 | 1992-08-04 | Kabushiki Kaisha Kobe Seiko Sho | Zn-Mg alloy vapor deposition plated metals of high corrosion resistance, as well as method of producing them |
| JPH02118064A (ja) * | 1988-10-27 | 1990-05-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPH0372037A (ja) * | 1989-08-14 | 1991-03-27 | Toshiba Corp | 金属蒸気発生装置 |
| JPH06291040A (ja) * | 1992-03-03 | 1994-10-18 | Rintetsuku:Kk | 液体気化供給方法と液体気化供給器 |
| JPH06322501A (ja) * | 1993-05-12 | 1994-11-22 | Nippon Steel Corp | スリットノズル溶融メッキ法における溶融金属の吐出量制御方法 |
| US5492724A (en) * | 1994-02-22 | 1996-02-20 | Osram Sylvania Inc. | Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor |
| WO1999016929A1 (en) * | 1997-09-26 | 1999-04-08 | Advanced Technology Materials, Inc. | Liquid reagent delivery system |
| JP4338246B2 (ja) * | 1998-11-27 | 2009-10-07 | キヤノンアネルバ株式会社 | Ｃｕ−ＣＶＤプロセス用原料とＣｕ−ＣＶＤ装置 |
| LV13383B (en) * | 2004-05-27 | 2006-02-20 | Sidrabe As | Method and device for vacuum vaporization metals or alloys |
| WO2006083929A2 (en) * | 2005-02-03 | 2006-08-10 | Applied Materials, Inc. | A physical vapor deposition plasma reactor with rf source power applied to the target |
| FR2900070B1 (fr) * | 2006-04-19 | 2008-07-11 | Kemstream Soc Par Actions Simp | Dispositif d'introduction ou d'injection ou de pulverisation d'un melange de gaz vecteur et de composes liquides et procede de mise en oeuvre dudit dispositif. |
| US20110308453A1 (en) * | 2008-01-31 | 2011-12-22 | Applied Materials, Inc. | Closed loop mocvd deposition control |
| EP2831305B1 (en) * | 2012-03-30 | 2016-03-02 | Tata Steel Nederland Technology B.V. | Method and apparatus for feeding liquid metal to an evaporator device |
-
2013
- 2013-12-06 KR KR1020167018037A patent/KR102137181B1/ko active Active
- 2013-12-06 US US15/039,328 patent/US20170022598A1/en not_active Abandoned
- 2013-12-06 CN CN201380081379.7A patent/CN105874095A/zh active Pending
- 2013-12-06 JP JP2016536676A patent/JP6647202B2/ja active Active
- 2013-12-06 EP EP13814860.6A patent/EP3077567B1/en active Active
- 2013-12-06 CN CN202010001262.5A patent/CN111441015A/zh active Pending
- 2013-12-06 WO PCT/EP2013/075850 patent/WO2015082022A1/en not_active Ceased
-
2014
- 2014-12-02 TW TW103141823A patent/TWI652363B/zh not_active IP Right Cessation
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