JP2016535428A5 - - Google Patents
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- Publication number
- JP2016535428A5 JP2016535428A5 JP2016516518A JP2016516518A JP2016535428A5 JP 2016535428 A5 JP2016535428 A5 JP 2016535428A5 JP 2016516518 A JP2016516518 A JP 2016516518A JP 2016516518 A JP2016516518 A JP 2016516518A JP 2016535428 A5 JP2016535428 A5 JP 2016535428A5
- Authority
- JP
- Japan
- Prior art keywords
- jfet
- cap layer
- drain
- detector array
- array structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 28
- 229910052738 indium Inorganic materials 0.000 claims 10
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 10
- 239000000463 material Substances 0.000 claims 10
- 238000000034 method Methods 0.000 claims 10
- 230000003321 amplification Effects 0.000 claims 5
- 239000002019 doping agent Substances 0.000 claims 5
- 238000003199 nucleic acid amplification method Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 4
- 230000005669 field effect Effects 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361882385P | 2013-09-25 | 2013-09-25 | |
| US61/882,385 | 2013-09-25 | ||
| PCT/US2014/057481 WO2015048304A2 (en) | 2013-09-25 | 2014-09-25 | LOW NOISE InGaAs PHOTODIODE ARRAY |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016535428A JP2016535428A (ja) | 2016-11-10 |
| JP2016535428A5 true JP2016535428A5 (enExample) | 2017-11-16 |
Family
ID=52744704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016516518A Pending JP2016535428A (ja) | 2013-09-25 | 2014-09-25 | 低ノイズInGaAsフォトダイオードアレイ |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9935151B2 (enExample) |
| EP (1) | EP3050128A4 (enExample) |
| JP (1) | JP2016535428A (enExample) |
| IL (1) | IL244745A0 (enExample) |
| WO (1) | WO2015048304A2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019533302A (ja) * | 2016-08-31 | 2019-11-14 | ジーレイ スイッツァーランド エスアー | 接合インターフェースの電荷輸送で構成される電磁吸収放射線検出器 |
| CN110546766B (zh) | 2017-05-15 | 2023-11-14 | 索尼半导体解决方案公司 | 光电转换器件和摄像器件 |
| KR102547801B1 (ko) | 2017-08-28 | 2023-06-26 | 삼성전자주식회사 | 적외선 검출기 및 이를 포함하는 적외선 센서 |
| CN109449238A (zh) * | 2018-10-10 | 2019-03-08 | 中国科学院上海技术物理研究所 | 一种大规模小像元铟镓砷焦平面探测器制备方法 |
| US11121302B2 (en) | 2018-10-11 | 2021-09-14 | SeeQC, Inc. | System and method for superconducting multi-chip module |
| WO2020123161A1 (en) * | 2018-12-14 | 2020-06-18 | Flir Commercial Systems, Inc. | Superlattice-based detector systems and methods |
| WO2020202557A1 (ja) * | 2019-04-05 | 2020-10-08 | 三菱電機株式会社 | 半導体受光素子及び半導体受光素子製造方法 |
| CN110660878B (zh) * | 2019-09-26 | 2021-09-03 | 中国电子科技集团公司第十一研究所 | 一种平面碲镉汞雪崩二极管探测器及其制备方法 |
| JP7562250B2 (ja) * | 2019-12-04 | 2024-10-07 | ソニーセミコンダクタソリューションズ株式会社 | 半導体素子および電子機器 |
| US11251210B2 (en) * | 2020-02-07 | 2022-02-15 | Sensors Unlimited, Inc. | Pin diodes with over-current protection |
| CN114267693B (zh) * | 2021-12-22 | 2025-01-28 | 上海韦尔半导体股份有限公司 | 一种图像传感器结构及其制作方法和工作时序 |
| FR3144697A1 (fr) | 2022-12-28 | 2024-07-05 | Soitec | Procédé de fabrication d’un capteur d’image |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2581482B1 (fr) | 1985-05-03 | 1987-07-10 | Labo Electronique Physique | Photodiode pin a faible courant de fuite |
| EP0216572B1 (en) | 1985-09-24 | 1995-04-05 | Kabushiki Kaisha Toshiba | Semiconductor photo-detector having a two-stepped impurity profile |
| JPS63181371A (ja) * | 1987-01-22 | 1988-07-26 | Mitsubishi Electric Corp | 光電子集積回路 |
| DE3711617A1 (de) | 1987-04-07 | 1988-10-27 | Siemens Ag | Monolithisch integrierte wellenleiter-fotodioden-fet-kombination |
| EP0405214A3 (en) * | 1989-06-27 | 1991-06-05 | Siemens Aktiengesellschaft | Pin-fet combination with buried p-type layer |
| KR950000522B1 (ko) | 1991-11-25 | 1995-01-24 | 재단법인 한국전자통신연구소 | 수신용 광전집적 소자 및 그 제조방법 |
| US5387796A (en) | 1993-05-26 | 1995-02-07 | Epitaxx, Inc. | Low leakage current photodetector arrays |
| US5386128A (en) | 1994-01-21 | 1995-01-31 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Monolithic in-based III-V compound semiconductor focal plane array cell with single stage CCD output |
| US5689122A (en) | 1995-08-14 | 1997-11-18 | Lucent Technologies Inc. | InP/InGaAs monolithic integrated demultiplexer, photodetector, and heterojunction bipolar transistor |
| US6297070B1 (en) | 1996-12-20 | 2001-10-02 | Eastman Kodak Company | Active pixel sensor integrated with a pinned photodiode |
| US6005266A (en) * | 1997-03-13 | 1999-12-21 | The Trustees Of Princeton University | Very low leakage JFET for monolithically integrated arrays |
| US6573581B1 (en) * | 1999-03-01 | 2003-06-03 | Finisar Corporation | Reduced dark current pin photo diodes using intentional doping |
| JP3840203B2 (ja) * | 2002-06-27 | 2006-11-01 | キヤノン株式会社 | 固体撮像装置及び固体撮像装置を用いたカメラシステム |
| US7115910B2 (en) | 2003-05-05 | 2006-10-03 | Banpil Photonics, Inc. | Multicolor photodiode array and method of manufacturing thereof |
| US8039882B2 (en) | 2003-08-22 | 2011-10-18 | Micron Technology, Inc. | High gain, low noise photodiode for image sensors and method of formation |
| KR100782463B1 (ko) * | 2005-04-13 | 2007-12-05 | (주)실리콘화일 | 3차원 구조를 갖는 이미지 센서의 분리형 단위화소 및 그제조방법 |
| WO2007094493A1 (ja) | 2006-02-14 | 2007-08-23 | National Institute Of Advanced Industrial Science And Technology | 光電界効果トランジスタ、及びそれを用いた集積型フォトディテクタ |
| US8044435B2 (en) * | 2006-11-14 | 2011-10-25 | Lockheed Martin Corporation | Sub-pixel nBn detector |
| JP5104036B2 (ja) * | 2007-05-24 | 2012-12-19 | ソニー株式会社 | 固体撮像素子とその製造方法及び撮像装置 |
| US7598582B2 (en) | 2007-06-13 | 2009-10-06 | The Boeing Company | Ultra low dark current pin photodetector |
| KR100948596B1 (ko) | 2007-12-10 | 2010-03-23 | 한국전자통신연구원 | 레이저 레이다 영상 신호용 출력제어 회로 집적 광 검출기어레이 집적 소자 및 그의 제조 방법 |
| JP2009289876A (ja) | 2008-05-28 | 2009-12-10 | Sumitomo Electric Ind Ltd | 受光素子、受光素子アレイおよび撮像装置 |
| JP2010050417A (ja) | 2008-08-25 | 2010-03-04 | Sumitomo Electric Ind Ltd | 受光素子アレイ、その製造方法および検出装置 |
| JP2010147158A (ja) | 2008-12-17 | 2010-07-01 | Mitsubishi Electric Corp | 半導体受光素子および半導体受光素子の製造方法 |
| JP5417850B2 (ja) | 2009-01-05 | 2014-02-19 | 住友電気工業株式会社 | 検出装置およびその製造方法 |
| US8253215B2 (en) | 2009-01-15 | 2012-08-28 | Wavefront Holdings, Llc | Mesa heterojunction phototransistor and method for making same |
| US8399909B2 (en) | 2009-05-12 | 2013-03-19 | Osi Optoelectronics, Inc. | Tetra-lateral position sensing detector |
| US7948006B2 (en) * | 2009-06-01 | 2011-05-24 | Jds Uniphase Corporation | Photodiode with high ESD threshold |
| US8399820B2 (en) | 2009-06-23 | 2013-03-19 | Sensors Unlimited, Inc. | Multicolor detectors and applications thereof |
| US8274127B2 (en) | 2009-06-30 | 2012-09-25 | Sumitomo Electric Industries, Ltd. | Photodiode array for image pickup device |
| JP5568979B2 (ja) * | 2009-12-22 | 2014-08-13 | 住友電気工業株式会社 | 検出装置、受光素子アレイ、および検出装置の製造方法 |
| US9065010B2 (en) | 2011-06-28 | 2015-06-23 | Universal Display Corporation | Non-planar inorganic optoelectronic device fabrication |
| FR2977982B1 (fr) | 2011-07-11 | 2014-06-20 | New Imaging Technologies Sas | Matrice de photodiodes ingaas |
-
2014
- 2014-09-25 EP EP14849578.1A patent/EP3050128A4/en not_active Withdrawn
- 2014-09-25 US US15/025,072 patent/US9935151B2/en active Active
- 2014-09-25 JP JP2016516518A patent/JP2016535428A/ja active Pending
- 2014-09-25 WO PCT/US2014/057481 patent/WO2015048304A2/en not_active Ceased
-
2016
- 2016-03-24 IL IL244745A patent/IL244745A0/en unknown
-
2017
- 2017-12-19 US US15/846,556 patent/US10090356B2/en active Active
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