JP2016528732A - 表面荷電抑制を有するPiNダイオード構造 - Google Patents
表面荷電抑制を有するPiNダイオード構造 Download PDFInfo
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- JP2016528732A JP2016528732A JP2016530049A JP2016530049A JP2016528732A JP 2016528732 A JP2016528732 A JP 2016528732A JP 2016530049 A JP2016530049 A JP 2016530049A JP 2016530049 A JP2016530049 A JP 2016530049A JP 2016528732 A JP2016528732 A JP 2016528732A
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- 230000001629 suppression Effects 0.000 title description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 67
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 36
- 239000010703 silicon Substances 0.000 claims description 36
- 238000001514 detection method Methods 0.000 claims description 12
- 108091006146 Channels Proteins 0.000 claims description 9
- 108010075750 P-Type Calcium Channels Proteins 0.000 claims description 4
- 239000000969 carrier Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000007547 defect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000007943 implant Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000005865 ionizing radiation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14605—Structural or functional details relating to the position of the pixel elements, e.g. smaller pixel elements in the center of the imager compared to pixel elements at the periphery
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/868—PIN diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
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- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Ceramic Engineering (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
[0007]1つの実施形態では、シリコン構造と、このシリコン構造内に形成された複数の側方に離間されたPiNダイオードと、を有する半導体構造が提供される。シリコン構造の表面は、これらのダイオードを通るリーク電流を低減するように構成される。
[0009]1つの実施形態では、PiNダイオードは空乏状態で動作する。
Claims (9)
- シリコン構造と、
前記シリコン構造内に形成された複数の側方に離間されたダイオードと
を備え、
前記シリコン構造の表面が、前記ダイオードを通るリーク電流を低減するように構成される、半導体構造。 - 前記表面がその上に、前記ダイオードを通るリーク電流を低減するようにバイアスされたゲート電極構造を有する、請求項1に記載の半導体構造。
- 前記ダイオードが空乏状態で動作する、請求項1に記載の半導体構造。
- シリコン構造と、
前記シリコン構造内に形成され、各々1つが光子検出素子のピクセルのアレイのうちの1つに対応する、複数の側方に離間されたダイオードと、
前記ダイオードの隣接する対同士の間に配設された部分を有し、前記ダイオードを通るリーク電流を防止するようにバイアスされる、前記シリコン構造の表面上に配設されたゲート電極構造と
を備える半導体構造。 - シリコン構造と、
前記シリコン構造内に形成され、各々1つが光子検出素子のピクセルのアレイのうちの1つに対応し、各々1つが前記シリコン構造の表面で終端するP+ドープ領域を有する、複数の側方に離間されたPiNダイオードと、
複数の開口部を有し、前記開口部の各々1つが前記P+領域のうちの対応する1つの上に配設される、ゲート電極構造と
を備える焦点面アレイ。 - 前記ゲート電極構造に連結されたバイアス電圧源を含み、前記電圧が前記ダイオードを通るリーク電流を防止するように選択される、請求項5に記載の焦点面アレイ。
- 真性シリコン層と、
光子を途中で捕捉するように適合される前記真性シリコン層の1つの表面内に配設された、N+型ドープシリコン層と、
前記真性シリコン層の対向する表面において側方に離間された領域内に配設された複数のP+型ドープシリコン領域と、を備え、前記N+型ドープシリコン領域及び前記複数のP+型ドープシリコン領域が複数の逆バイアスされたPiNダイオードを形成しかつそれらを形成するようにバイアスされ、前記PiNダイオードの各々1つが前記光子検出素子のピクセルのうちの1つに対応し、さらに、
各々1つが複数のP+型ドープシリコン領域の対応する隣接する対の間に配設される複数のN型シリコンドープ領域と、
前記複数のN型シリコンドープ領域の上に配設された部分を有し、前記N+ドープ層と前記P+型ドープシリコン領域との間のリーク電流を低減するようにバイアスされる、前記対向する表面上に配設されたゲート電極構造と
を備える、複数の光子検出素子のピクセルを有する半導体構造。 - 前記ゲート電極構造の下方に配設されたp型チャネルを含み、前記ゲート電極構造のバイアスがチャネルのその価電子帯中のバンドキャリアをその伝導帯に空間的に結合するように選択される、請求項7に記載の半導体構造。
- 前記ダイオードがP+領域及びN+領域を有し、前記開口部の各々1つが前記P+領域又はN+領域のうちの対応する1つの上に配設される、請求項5に記載の半導体構造。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/959,081 US9224768B2 (en) | 2013-08-05 | 2013-08-05 | Pin diode structure having surface charge suppression |
US13/959,081 | 2013-08-05 | ||
PCT/US2014/047957 WO2015020805A1 (en) | 2013-08-05 | 2014-07-24 | PiN DIODE STRUCTURE HAVING SURFACE CHARGE SUPPRESSION |
Related Child Applications (1)
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---|---|---|---|
JP2018002414A Division JP6517380B2 (ja) | 2013-08-05 | 2018-01-11 | 表面荷電抑制を有するPiNダイオード構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016528732A true JP2016528732A (ja) | 2016-09-15 |
JP6276407B2 JP6276407B2 (ja) | 2018-02-07 |
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JP2016530049A Expired - Fee Related JP6276407B2 (ja) | 2013-08-05 | 2014-07-24 | 表面荷電抑制を有するPiNダイオード構造 |
JP2018002414A Expired - Fee Related JP6517380B2 (ja) | 2013-08-05 | 2018-01-11 | 表面荷電抑制を有するPiNダイオード構造 |
JP2019078613A Expired - Fee Related JP6746750B2 (ja) | 2013-08-05 | 2019-04-17 | 表面荷電抑制を有するPiNダイオード構造 |
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JP2018002414A Expired - Fee Related JP6517380B2 (ja) | 2013-08-05 | 2018-01-11 | 表面荷電抑制を有するPiNダイオード構造 |
JP2019078613A Expired - Fee Related JP6746750B2 (ja) | 2013-08-05 | 2019-04-17 | 表面荷電抑制を有するPiNダイオード構造 |
Country Status (4)
Country | Link |
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US (3) | US9224768B2 (ja) |
EP (1) | EP3031082A1 (ja) |
JP (3) | JP6276407B2 (ja) |
WO (1) | WO2015020805A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021513747A (ja) * | 2018-04-18 | 2021-05-27 | レイセオン カンパニー | 可視撮像アレイにおけるクロストーク緩和のためのセグメント化チャネルストップグリッド |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9224768B2 (en) | 2013-08-05 | 2015-12-29 | Raytheon Company | Pin diode structure having surface charge suppression |
CN104618440B (zh) * | 2014-12-31 | 2018-03-23 | 腾讯科技(深圳)有限公司 | 智能设备控制方法及装置 |
JP6991509B2 (ja) | 2017-11-17 | 2022-01-12 | 株式会社システムプラン | バスケットボールのゴールのバックボード発光装置 |
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-
2013
- 2013-08-05 US US13/959,081 patent/US9224768B2/en active Active
-
2014
- 2014-07-24 JP JP2016530049A patent/JP6276407B2/ja not_active Expired - Fee Related
- 2014-07-24 WO PCT/US2014/047957 patent/WO2015020805A1/en active Application Filing
- 2014-07-24 EP EP14755190.7A patent/EP3031082A1/en not_active Withdrawn
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2015
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2018
- 2018-01-11 JP JP2018002414A patent/JP6517380B2/ja not_active Expired - Fee Related
- 2018-09-19 US US16/135,611 patent/US10971538B2/en active Active
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2019
- 2019-04-17 JP JP2019078613A patent/JP6746750B2/ja not_active Expired - Fee Related
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US20190019836A1 (en) | 2019-01-17 |
US10128297B2 (en) | 2018-11-13 |
JP2019114817A (ja) | 2019-07-11 |
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US10971538B2 (en) | 2021-04-06 |
EP3031082A1 (en) | 2016-06-15 |
JP6746750B2 (ja) | 2020-08-26 |
US20160086998A1 (en) | 2016-03-24 |
US9224768B2 (en) | 2015-12-29 |
WO2015020805A1 (en) | 2015-02-12 |
US20150035014A1 (en) | 2015-02-05 |
JP6517380B2 (ja) | 2019-05-22 |
JP6276407B2 (ja) | 2018-02-07 |
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