JP2016526699A5 - - Google Patents
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- JP2016526699A5 JP2016526699A5 JP2016519621A JP2016519621A JP2016526699A5 JP 2016526699 A5 JP2016526699 A5 JP 2016526699A5 JP 2016519621 A JP2016519621 A JP 2016519621A JP 2016519621 A JP2016519621 A JP 2016519621A JP 2016526699 A5 JP2016526699 A5 JP 2016526699A5
- Authority
- JP
- Japan
- Prior art keywords
- harmonic
- nlo
- crystal
- periodically poled
- nonlinear optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013078 crystal Substances 0.000 claims description 52
- 230000003287 optical effect Effects 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical group CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361833716P | 2013-06-11 | 2013-06-11 | |
| US61/833,716 | 2013-06-11 | ||
| US14/294,019 | 2014-06-02 | ||
| US14/294,019 US9509112B2 (en) | 2013-06-11 | 2014-06-02 | CW DUV laser with improved stability |
| PCT/US2014/041965 WO2014201152A1 (en) | 2013-06-11 | 2014-06-11 | Cw duv laser with improved stability |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017174729A Division JP6382417B2 (ja) | 2013-06-11 | 2017-09-12 | 安定性が向上されたcw duvレーザー |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016526699A JP2016526699A (ja) | 2016-09-05 |
| JP2016526699A5 true JP2016526699A5 (enExample) | 2017-07-20 |
| JP6211180B2 JP6211180B2 (ja) | 2017-10-11 |
Family
ID=52005442
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016519621A Active JP6211180B2 (ja) | 2013-06-11 | 2014-06-11 | 安定性が向上されたcw duvレーザー |
| JP2017174729A Active JP6382417B2 (ja) | 2013-06-11 | 2017-09-12 | 安定性が向上されたcw duvレーザー |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017174729A Active JP6382417B2 (ja) | 2013-06-11 | 2017-09-12 | 安定性が向上されたcw duvレーザー |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9509112B2 (enExample) |
| EP (1) | EP3008779B1 (enExample) |
| JP (2) | JP6211180B2 (enExample) |
| KR (2) | KR102117566B1 (enExample) |
| CN (2) | CN114389139A (enExample) |
| IL (1) | IL264501B (enExample) |
| TW (1) | TWI614558B (enExample) |
| WO (1) | WO2014201152A1 (enExample) |
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| US9509112B2 (en) * | 2013-06-11 | 2016-11-29 | Kla-Tencor Corporation | CW DUV laser with improved stability |
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| US9568803B2 (en) | 2014-05-22 | 2017-02-14 | Lumentum Operations Llc | Cascaded optical harmonic generation |
| US10228607B2 (en) | 2014-05-22 | 2019-03-12 | Lumentum Operations Llc | Second harmonic generation |
| US9748729B2 (en) * | 2014-10-03 | 2017-08-29 | Kla-Tencor Corporation | 183NM laser and inspection system |
| US10436720B2 (en) * | 2015-09-18 | 2019-10-08 | KLA-Tenfor Corp. | Adaptive automatic defect classification |
| US10458904B2 (en) | 2015-09-28 | 2019-10-29 | Ball Aerospace & Technologies Corp. | Differential absorption lidar |
| JPWO2018008142A1 (ja) | 2016-07-08 | 2019-04-18 | ギガフォトン株式会社 | 波長変換装置 |
| CN106025777B (zh) * | 2016-08-01 | 2019-02-05 | 苏州艾思兰光电有限公司 | 一种半导体泵浦激光清洗机的激光光路系统 |
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| US10175555B2 (en) * | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
| CN110050229B (zh) * | 2017-05-17 | 2020-06-09 | 三菱电机株式会社 | 波长转换装置 |
| US10840666B2 (en) * | 2017-06-20 | 2020-11-17 | Boston Scientific Scimed, Inc. | Laser systems and methods |
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| CN109617545B (zh) * | 2018-12-12 | 2021-03-12 | 汕头大学 | 具有两种三次谐波增强以及光电开关功能的装置及方法 |
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| CN113196596B (zh) * | 2018-12-18 | 2024-08-20 | Ipg光子公司 | 基于图案化srb4bo7或pbb4o7晶体的高功率激光转换器 |
| US11340284B2 (en) * | 2019-07-23 | 2022-05-24 | Kla Corporation | Combined transmitted and reflected light imaging of internal cracks in semiconductor devices |
| US11005227B2 (en) * | 2019-09-05 | 2021-05-11 | Nufern | Multi-wavelength adjustable-radial-mode fiber laser |
| CN111106521A (zh) * | 2019-12-24 | 2020-05-05 | 北京科益虹源光电技术有限公司 | 一种和频装置和激光器 |
| CN111129935A (zh) * | 2019-12-24 | 2020-05-08 | 北京科益虹源光电技术有限公司 | 一种和频方法 |
| KR102887811B1 (ko) | 2020-05-25 | 2025-11-17 | 주식회사 엘지에너지솔루션 | 양극 스크랩을 이용한 활물질 재사용 방법 |
| CN113759644B (zh) | 2020-06-02 | 2022-12-27 | 华为技术有限公司 | 光源系统以及激光投影显示设备 |
| US11237455B2 (en) * | 2020-06-12 | 2022-02-01 | Kla Corporation | Frequency conversion using stacked strontium tetraborate plates |
| US11448939B2 (en) * | 2020-09-24 | 2022-09-20 | Massachusetts Institute Of Technology | Efficient spectrum-spanning terahertz frequency synthesis via dielectric structure with nonlinear medium |
| CN112234424A (zh) * | 2020-10-20 | 2021-01-15 | 山东大学 | 一种基于Nd:YAG和Er:YAG激光器和频产生的248nm高功率深紫外激光器 |
| CN112490841A (zh) * | 2020-11-27 | 2021-03-12 | 北京科益虹源光电技术有限公司 | 一种调控213nm激光输出功率的方法及其装置 |
| KR102374247B1 (ko) * | 2021-05-12 | 2022-03-15 | (재)한국나노기술원 | 고효율 uv-c 발광 장치 |
| US12379642B2 (en) | 2021-06-11 | 2025-08-05 | Kla Corporation | Tunable DUV laser assembly |
| US11567391B1 (en) | 2021-11-24 | 2023-01-31 | Kla Corporation | Frequency conversion using interdigitated nonlinear crystal gratings |
| US11899338B2 (en) * | 2021-12-11 | 2024-02-13 | Kla Corporation | Deep ultraviolet laser using strontium tetraborate for frequency conversion |
| JP7132455B1 (ja) * | 2022-06-28 | 2022-09-06 | レーザーテック株式会社 | 光源装置、検査装置、および調整方法 |
| KR20240109032A (ko) | 2023-01-03 | 2024-07-10 | 삼성전자주식회사 | 광학 계측 설비, 그를 이용한 광학 계측 방법 및 그를 이용한 반도체 장치의 제조 방법 |
| US20250084557A1 (en) | 2023-09-11 | 2025-03-13 | Kla Corporation | Growth of strontium tetraborate crystals |
| CN121566259B (zh) * | 2026-01-21 | 2026-03-31 | 山东大学 | 一种连续波深紫外激光器及方法 |
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-
2014
- 2014-06-02 US US14/294,019 patent/US9509112B2/en active Active
- 2014-06-11 KR KR1020167000553A patent/KR102117566B1/ko active Active
- 2014-06-11 CN CN202210041743.8A patent/CN114389139A/zh active Pending
- 2014-06-11 TW TW103120220A patent/TWI614558B/zh active
- 2014-06-11 CN CN201480039637.XA patent/CN105379032B/zh active Active
- 2014-06-11 JP JP2016519621A patent/JP6211180B2/ja active Active
- 2014-06-11 KR KR1020207014935A patent/KR102257267B1/ko active Active
- 2014-06-11 EP EP14811528.0A patent/EP3008779B1/en active Active
- 2014-06-11 WO PCT/US2014/041965 patent/WO2014201152A1/en not_active Ceased
-
2016
- 2016-10-26 US US15/335,266 patent/US10044166B2/en active Active
-
2017
- 2017-09-12 JP JP2017174729A patent/JP6382417B2/ja active Active
-
2019
- 2019-01-28 IL IL264501A patent/IL264501B/en unknown
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