JP2016511545A5 - - Google Patents
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- Publication number
- JP2016511545A5 JP2016511545A5 JP2015558994A JP2015558994A JP2016511545A5 JP 2016511545 A5 JP2016511545 A5 JP 2016511545A5 JP 2015558994 A JP2015558994 A JP 2015558994A JP 2015558994 A JP2015558994 A JP 2015558994A JP 2016511545 A5 JP2016511545 A5 JP 2016511545A5
- Authority
- JP
- Japan
- Prior art keywords
- doped portion
- dopant
- semi
- insulating
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002019 doping agent Substances 0.000 claims 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 6
- 229910052799 carbon Inorganic materials 0.000 claims 6
- 229910052742 iron Inorganic materials 0.000 claims 6
- 150000004767 nitrides Chemical class 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 4
- 230000004888 barrier function Effects 0.000 claims 2
- 230000005669 field effect Effects 0.000 claims 2
- 229910002601 GaN Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- 230000007423 decrease Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/775,661 US9306009B2 (en) | 2013-02-25 | 2013-02-25 | Mix doping of a semi-insulating Group III nitride |
| US13/775,661 | 2013-02-25 | ||
| PCT/US2014/017658 WO2014130802A1 (en) | 2013-02-25 | 2014-02-21 | Mix doping of a semi-insulating group iii nitride |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016511545A JP2016511545A (ja) | 2016-04-14 |
| JP2016511545A5 true JP2016511545A5 (enExample) | 2016-06-02 |
| JP6306615B2 JP6306615B2 (ja) | 2018-04-04 |
Family
ID=50238490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015558994A Active JP6306615B2 (ja) | 2013-02-25 | 2014-02-21 | 半絶縁性ｉｉｉ族窒化物の混合ドーピング |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9306009B2 (enExample) |
| EP (2) | EP2959499A1 (enExample) |
| JP (1) | JP6306615B2 (enExample) |
| WO (1) | WO2014130802A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6151487B2 (ja) * | 2012-07-10 | 2017-06-21 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
| JP6283250B2 (ja) * | 2014-04-09 | 2018-02-21 | サンケン電気株式会社 | 半導体基板及び半導体素子 |
| US10062756B2 (en) | 2014-10-30 | 2018-08-28 | Semiconductor Components Industries, Llc | Semiconductor structure including a doped buffer layer and a channel layer and a process of forming the same |
| JP6539128B2 (ja) * | 2015-06-29 | 2019-07-03 | サンケン電気株式会社 | 半導体デバイス用基板、半導体デバイス、並びに半導体デバイスの製造方法 |
| JP6759886B2 (ja) * | 2016-09-06 | 2020-09-23 | 富士通株式会社 | 半導体結晶基板、半導体装置、半導体結晶基板の製造方法及び半導体装置の製造方法 |
| JP6615075B2 (ja) * | 2016-09-15 | 2019-12-04 | サンケン電気株式会社 | 半導体デバイス用基板、半導体デバイス、及び、半導体デバイス用基板の製造方法 |
| TWI642183B (zh) * | 2017-12-25 | 2018-11-21 | 新唐科技股份有限公司 | 氮化物半導體元件 |
| CN109887838B (zh) * | 2018-12-04 | 2021-12-24 | 中国电子科技集团公司第十三研究所 | 一种氮化镓材料掺杂铁元素的方法 |
| US11101378B2 (en) | 2019-04-09 | 2021-08-24 | Raytheon Company | Semiconductor structure having both enhancement mode group III-N high electron mobility transistors and depletion mode group III-N high electron mobility transistors |
| US11545566B2 (en) * | 2019-12-26 | 2023-01-03 | Raytheon Company | Gallium nitride high electron mobility transistors (HEMTs) having reduced current collapse and power added efficiency enhancement |
| US11362190B2 (en) | 2020-05-22 | 2022-06-14 | Raytheon Company | Depletion mode high electron mobility field effect transistor (HEMT) semiconductor device having beryllium doped Schottky contact layers |
| US12176430B2 (en) * | 2020-07-24 | 2024-12-24 | Vanguard International Semiconductor Corporation | Semiconductor structure and semiconductor device |
| WO2022068256A1 (zh) * | 2020-09-30 | 2022-04-07 | 苏州能讯高能半导体有限公司 | 半导体器件的外延结构及其制备方法 |
| CN114551593B (zh) * | 2022-01-17 | 2025-08-12 | 江西兆驰半导体有限公司 | 一种外延片、外延片生长方法及高电子迁移率晶体管 |
| EP4484620A4 (en) | 2022-02-22 | 2025-06-04 | Mitsubishi Chemical Corporation | GAN epitaxial substrate |
| KR20240163110A (ko) | 2022-03-14 | 2024-11-18 | 미쯔비시 케미컬 주식회사 | GaN 에피택셜 기판 |
| JP7779207B2 (ja) * | 2022-06-22 | 2025-12-03 | 信越半導体株式会社 | 窒化物半導体ウェーハ、及びその製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US95A (en) | 1836-12-02 | Manufacture of | ||
| US7170A (en) | 1850-03-12 | Cast-iron | ||
| US7170095B2 (en) | 2003-07-11 | 2007-01-30 | Cree Inc. | Semi-insulating GaN and method of making the same |
| US7135715B2 (en) * | 2004-01-07 | 2006-11-14 | Cree, Inc. | Co-doping for fermi level control in semi-insulating Group III nitrides |
| JP4728582B2 (ja) * | 2004-02-18 | 2011-07-20 | 古河電気工業株式会社 | 高電子移動度トランジスタ |
| US7456443B2 (en) * | 2004-11-23 | 2008-11-25 | Cree, Inc. | Transistors having buried n-type and p-type regions beneath the source region |
| US7459718B2 (en) * | 2005-03-23 | 2008-12-02 | Nichia Corporation | Field effect transistor |
| KR101515100B1 (ko) * | 2008-10-21 | 2015-04-24 | 삼성전자주식회사 | 발광 다이오드 및 그 제조 방법 |
| JP5697012B2 (ja) * | 2009-03-31 | 2015-04-08 | 古河電気工業株式会社 | 溝の形成方法、および電界効果トランジスタの製造方法 |
| JP5328704B2 (ja) * | 2010-03-24 | 2013-10-30 | 日立電線株式会社 | 窒化物半導体エピタキシャルウェハおよび電界効果型トランジスタ素子 |
| JP5696392B2 (ja) | 2010-07-29 | 2015-04-08 | 住友電気工業株式会社 | 半導体装置 |
| JP2012243886A (ja) * | 2011-05-18 | 2012-12-10 | Sharp Corp | 半導体装置 |
-
2013
- 2013-02-25 US US13/775,661 patent/US9306009B2/en active Active
-
2014
- 2014-02-21 JP JP2015558994A patent/JP6306615B2/ja active Active
- 2014-02-21 EP EP14708753.0A patent/EP2959499A1/en not_active Withdrawn
- 2014-02-21 WO PCT/US2014/017658 patent/WO2014130802A1/en not_active Ceased
- 2014-02-21 EP EP23170936.1A patent/EP4254506A3/en active Pending
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