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  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
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  • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
  • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
  • H10D62/8503—Nitride Group III-V materials, e.g. AlN or GaN
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  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02436—Intermediate layers between substrates and deposited layers
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  • H01L21/02104—Forming layers
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  • H01L21/0257—Doping during depositing
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  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02518—Deposited layers
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  • H01L21/02573—Conductivity type
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  • H10D30/00—Field-effect transistors [FET]
  • H10D30/01—Manufacture or treatment
  • H10D30/015—Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
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  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D30/00—Field-effect transistors [FET]
  • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
  • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
  • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
  • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
  • H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
  • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
  • H10D62/854—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs further characterised by the dopants

Definitions

• the present disclosure relates to a semi-insulating Group III nitride and methods of manufacturing the same and more particularly relates to mixed doping of a semi-insulating Group III nitride (e.g., Gallium Nitride) where the semi-insulating Group III nitride is useful as, inter alia, a buffer layer of a semiconductor device.
• a semi-insulating Group III nitride e.g., Gallium Nitride
• Group III nitrides such as Gallium Nitride (GaN) and related lll-V alloys are highly desirable materials for semiconductor devices and particularly for high temperature and high frequency applications.
• GaN Gallium Nitride
• FETs lateral Field Effect Transistors
• a semi-insulating GaN buffer layer is highly desirable. Due to the lack of large area native GaN substrates, semi-insulating GaN is most often grown on a heteroepitaxial substrate such as Silicon Carbide (SiC) or sapphire. The use of a heteroepitaxial substrate is problematic due to lattice mismatch between the heteroepitaxial substrate and the GaN.
• the GaN must be grown to a sufficient thickness to overcome the tension or stress induced by the lattice mismatch. Further, because epitaxially grown GaN includes impurities, the GaN must be sufficiently doped to become semi-insulating.
• U.S. Patent No. 7,170, 095 entitled “Semi-Insulating GaN and Method of Making the Same,” which issued January 30, 2007 and is hereby incorporated herein by reference in its entirety describes methods of making semi-insulating GaN using a deep acceptor dopant such as, for example, Manganese (Mn), Iron (Fe), Cobalt (Co), Nickel (Ni), Copper (Cu), or the like to compensate for donor impurities in the GaN.
• a deep acceptor dopant such as, for example, Manganese (Mn), Iron (Fe), Cobalt (Co), Nickel (Ni), Copper (Cu), or the like to compensate for donor impurities in the GaN.
• Mn Manganese
• Fe Iron
• Cobalt Co
• a semi-insulating Group III nitride layer includes a first doped portion that is doped with a first dopant and a second doped portion that is doped with a second dopant that is different than the first dopant.
• the first doped portion extends to a first thickness of the semi- insulating Group III nitride layer.
• the second doped portion extends from approximately the first thickness of the semi-insulating Group III nitride layer to a second thickness of the semi-insulating Group III nitride layer.
• the first dopant is Iron (Fe), and the second dopant is Carbon (C).
• the semi-insulating Group III nitride layer is a semi- insulating Gallium Nitride (GaN) layer, the first dopant is Fe, and the second dopant is C.
• the semi-insulating Group III nitride layer is a semi-insulating GaN layer
• the first dopant is Fe
• the second dopant is C. Due to the growth process, a residual amount of Fe doping is present in the C doped portion where the residual amount of Fe doping decreases as a thickness of the C doped portion increases.
• the thickness of the C doped portion is sufficient to enable the residual Fe doping concentration in the C doped portion to decrease to a predetermined acceptable residual Fe doping concentration across the C doped portion.
• the Fe doped portion enables the semi-insulating GaN layer to be grown to a desired thickness with low dislocation density while the C doped portion reduces a memory effect, or amount of traps, resulting from the Fe doping.
• the semi-insulating GaN layer is a semi-insulating GaN buffer layer of a semiconductor device such as a lateral Field Effect Transistor (FET) (e.g., a lateral High Electron Mobility Transistor (HEMT)).
• FET Field Effect Transistor
• HEMT High Electron Mobility Transistor
• a semiconductor device includes a semi-insulating Group III nitride layer, a barrier layer on the semi-insulating Group III nitride layer, and source, gate, and drain contacts on the barrier layer opposite the semi- insulating Group III nitride layer.
• the semi-insulating Group III nitride layer includes a first doped portion that is doped with a first dopant and a second doped portion that is doped with a second dopant that is different than the first dopant.
• the first doped portion extends to a first thickness of the semi-insulating Group III nitride layer.
• the second doped portion extends from approximately the first thickness of the semi-insulating Group III nitride layer toward the barrier layer to a second thickness of the semi-insulating Group III nitride layer.
• the first dopant is Fe
• the second dopant is C.
• the semi-insulating Group III nitride layer is GaN
• the first dopant is Fe
• the second dopant is C.
• Figure 1 illustrates one example of a conventional Field Effect
• FET Transistor
• GaN Gallium Nitride
• Figures 2A and 2B illustrate two examples of a doping profile of the semi-insulating GaN base layer of Figure 1 where the semi-insulating GaN base layer is made semi-insulating by doping with Iron (Fe) during a Metal Organic Chemical Vapor Deposition (MOCVD) growth process;
• Fe Iron
• MOCVD Metal Organic Chemical Vapor Deposition
• Figure 3 illustrates one example of a FET that includes a semi- insulating GaN base layer having mixed doping according to one embodiment of the present disclosure
• Figure 4 illustrates one example of a doping profile of the semi- insulating GaN base layer of Figure 3 according to one embodiment of the present disclosure
• Figures 5A through 5G graphically illustrate fabrication of the FET of Figure 3 according to one embodiment of the present disclosure.
• Relative terms such as “below” or “above” or “upper” or “lower” or “horizontal” or “vertical” may be used herein to describe a relationship of one element, layer, or region to another element, layer, or region as illustrated in the Figures. It will be understood that these terms and those discussed above are intended to encompass different orientations of the device in addition to the orientation depicted in the Figures.
• the present disclosure relates to embodiments of a semi-insulating Group III nitride and methods of fabrication thereof. While the discussion below focuses on Gallium Nitride (GaN), the present disclosure is not limited thereto. The present disclosure is applicable to other Group III nitrides and, in particular, other Group lll-V nitrides such as (Ga, Al, ln)N, where "(Ga, Al, ln)N” refers to metal nitride compositions in which the metal moiety can be one, two, or all three of Gallium (Ga), Aluminum (Al), and Indium (In) in appropriate stoichiometric ratio (e.g., GaN, AIN, InN, AIGaN, InGaN, AllnN, or AIGalnN).
• GaN GaN
• AIN InN
• AIGaN InGaN
• AllnN or AIGalnN
• the stoichiometric proportions of the metals in the multi-metal lll-V nitride compositions will be understood to encompass integer as well as non-integer values.
• FIG. 1 illustrates a conventional High Electron Mobility Transistor (HEMT) 10, which is one type of lateral FET.
• the HEMT 10 includes a semi-insulating GaN buffer layer 12 that includes a semi-insulating portion 14 and a channel 16.
• the HEMT 10 also includes an Aluminum Gallium Nitride (AIGaN) barrier layer 18 on the semi- insulating GaN buffer layer 12 adjacent to the channel 16.
• AIGaN Aluminum Gallium Nitride
• the HEMT 10 includes a source contact 20, a gate contact 22, and a drain contact 24 on the AIGaN barrier layer 18 opposite the semi-insulating GaN buffer layer 12.
• the semi-insulating portion 14 of the semi-insulating GaN buffer layer 12 serves as a back barrier against which the gate contact 22 can deplete the channel 16.
• the semi-insulating GaN buffer layer 12 is typically grown on a heteroepitaxial substrate (e.g., a Silicon Carbide (SiC) substrate, a sapphire substrate, or the like) and doped with an appropriate dopant to compensate impurities in the GaN such that the GaN is semi-insulating or negatively charged.
• a heteroepitaxial substrate e.g., a Silicon Carbide (SiC) substrate, a sapphire substrate, or the like
• the two most common dopants used for semi-insulating GaN are Iron (Fe) and Carbon (C).
• Fe and C have substantial issues.
• Fe doping results in large memory effects, which is undesirable particularly for high frequency (e.g., Radio Frequency (RF)) applications.
• C doping results in a substantial amount of defects when growing thick GaN (e.g., greater than 0.5 micrometers or greater than 1 micrometer).
• the semi-insulating GaN buffer layer 12 it is desirable for the semi-insulating GaN buffer layer 12 to be thick in order to alleviate stress due to lattice mismatch when growing the semi-insulating GaN buffer layer 12 on a heteroepitaxial substrate.
• Figure 2A illustrates a situation where the Fe doping is turned off well in advance of the channel 16 such that the amount of residual Fe doping at the interface with the channel 16 is below a predetermined acceptable level, which in this case is 10 16 atoms per cubic centimeter (cm 3 ). While this results in low memory effects in the channel 16, the low amount of Fe doping in the semi-insulating portion 14 of the semi- insulating GaN buffer layer 12 near the channel 16 results in higher current leakage into the semi-insulating portion 14 of the semi-insulating GaN buffer layer 12.
• Figure 2B illustrates a situation where the Fe doping is turned off closer to the channel 16.
• the residual amount of Fe doping in the channel 16 is higher and, as such, there is lower current leakage into the semi-insulating portion 14 of the semi-insulating GaN buffer layer 12.
• the higher residual Fe doping in the channel 16 increases the memory effect in the channel 16 (i.e., increase the amount of traps in the channel 16).
• Fe doping when growing the semi-insulating GaN buffer layer 12 using MOCVD or a similar growth process, C doping provides a sharp turn-off of the doping at the interface between the semi-insulating portion 14 and the channel 16.
• the growth conditions required for high C doping result in a substantial amount of dislocations, or defects, in the semi-insulating GaN buffer layer 12 particularly for thicknesses greater than 0.5 micrometers and even more particularly for thicknesses greater than 1 micrometer.
• the thickness of the semi-insulating GaN buffer layer 12 is preferably greater than 0.5 micrometers and even more preferably greater than 1 micrometer in order to alleviate the stress resulting from a lattice mismatch between the semi-insulating GaN buffer layer 12 and the heteroepitaxial substrate on which the semi-insulating GaN buffer layer 12 is grown. Because a thick layer of GaN is desired, high C doping results in a substantial amount of defects in the semi-insulating GaN buffer layer 12, which in turn results in a higher risk of current collapse.
• FIG. 3 illustrates a HEMT 26 that includes a semi-insulating GaN buffer layer 28 according to one embodiment of the present disclosure.
• the semi-insulating GaN buffer layer 28 may be utilized in other types of semiconductor devices in which a semi-insulating GaN buffer layer is desired.
• semi-insulating GaN is utilized in this embodiment, as discussed above, other Group III nitrides may be used.
• the semi-insulating GaN buffer layer 28 includes a semi- insulating portion 30 and a channel portion 32 on the semi-insulating portion 30. Further, the semi-insulating portion 30 includes a Fe doped portion 34 and a C doped portion 36.
• the Fe doped portion 34 extends from a bottom surface of the semi-insulating GaN buffer layer 28 to a first thickness (t-i ) within the semi- insulating GaN buffer layer 28.
• the C doped portion 36 is on the Fe doped portion 34 and extends from the first thickness (t-i) within the semi-insulating GaN buffer layer 28 to a second thickness (t 2 ) within the semi-insulating GaN buffer layer 28.
• a thickness of the Fe doped portion 34 is greater than or equal to 0.5 micrometers (e.g., in a range of and including 0.5 to 10 micrometers) or more preferably greater than or equal to 1 micrometer (e.g., in a range of and including 1 to 10 micrometers) in order to, among other things, alleviate stress in the semi- insulating GaN buffer layer 28 due to a lattice mismatch between the semi- insulating GaN buffer layer 28 and a heteroepitaxial substrate on which the semi- insulating GaN buffer layer 28 is grown.
• a doping concentration of Fe in the Fe doped portion 34 is in a range of and including 10 17 to 10 19 atoms per cm 3 . The doping concentration of Fe in the Fe doped portion 34 may be constant or may vary over the thickness of the Fe doped portion 34.
• Fe doping is turned off at the point the semi-insulating GaN buffer layer 28 reaches the first thickness (t-i). However, there is a residual amount of Fe doping throughout the C doped portion 36 and the channel portion 32 due to the growth process. A residual Fe doping concentration of the residual Fe doping decreases with thickness or, in other words, decreases throughout the C doped portion 36 and the channel portion 32. In one preferred embodiment, C doping is turned on at approximately the same time that the Fe doping is turned off.
• C doping may be turned on before Fe doping is turned off.
• a thickness of the C doped portion 36 is such that the residual Fe doping concentration at the interface between the C doped portion 36 and the channel portion 32 is less than a predetermined acceptable Fe doping level and an amount of defects resulting from growth of the C doped portion 36 is less than a predetermined threshold amount of defects.
• the predetermined acceptable Fe doping level at the interface between the C doped portion 36 and the channel portion 32 is less than 2x10 16 atoms per cm 3 .
• the predetermined acceptable Fe doping level at the interface between the C doped portion 36 and the channel portion 32 is a value in a range of and including 5x10 15 to 2x10 16 atoms per cm 3 (e.g., 5x10 15 or 1 x10 16 atoms per cm 3 ) .
• the predetermined acceptable Fe doping level may, in some embodiments, be lower than 5x10 15 atoms per cm 3 .
• the predetermined threshold amount of defects is 1 x10 9 defects per cm 2 . However, this is just one example.
• the thickness of the C doped portion 36 is in a range of and including 0.1 to 1 .5 micrometers and, even more preferably, in a range of and including 0.1 to 1 micrometers.
• the thickness of the C doped portion 36 may vary depending on the doping concentration of Fe in the Fe doped portion 34 particularly at the interface between the Fe doped portion 34 and the C doped portion 36.
• concentration of C in the C doped portion 36 is graded.
• the doping concentration of C in the C doped portion 36 may increase from a lower concentration near the Fe doped portion 34 to a high concentration at the interface between the C doped portion 36 and the channel portion 32.
• the Fe doped portion 34 enables the semi-insulating GaN buffer layer 28 to be grown to a large thickness (e.g., greater than or equal to 0.5
• the C doped portion 36 reduces memory effects (i.e., traps) in the channel portion 32 while keeping leakage current into the semi-insulating portion 30 of the semi-insulating GaN buffer layer 28 low.
• the semi-insulating GaN buffer layer 28 provides improved performance for the HEMT 26.
• the HEMT 26 includes an AIGaN barrier layer 38 on the semi-insulating GaN buffer layer 28 adjacent to the channel portion 32.
• the AIGaN barrier layer 38 is only one example of a barrier layer.
• the barrier layer 38 may be formed of materials other than AIGaN (e.g., Aluminum Nitride (AIN)).
• the HEMT 26 includes a source contact 40, a gate contact 42, and drain contact 44 on the AIGaN barrier layer 38 opposite the semi-insulating GaN buffer layer 28.
• Figure 4 illustrates one example of a doping profile of the semi- insulating GaN buffer layer 28 of Figure 3 according to one embodiment of the present disclosure.
• Fe doping is turned off and C doping is turned on at approximately 1 .2 micrometers from the surface of the channel portion 32.
• the doping concentration of Fe in the Fe doped portion 34 is approximately 5x10 18 atoms per cm 3 .
• the semi- insulating GaN buffer layer 28 is grown using MOCVD. As such, after Fe doping is turned off, there is still a residual amount of Fe doping that decreases with thickness.
• the residual Fe doping decrease from approximately 5x10 18 atoms per cm 3 to approximately 1 x10 16 atoms per cm 3 .
• the C doping increases from approximately 5x10 16 atoms per cm 3 to 5x10 19 atoms per cm 3 over the thickness of the C doped portion 36 and then, at the interface to the channel portion 32, the C doping is turned off. As illustrated, there is a sharp turn-off for C doping when using MOCVD.
• the residual Fe doping in the channel portion 32, and thus the memory effect (i.e., amount of traps) in the channel portion 32 is small.
• the C doped portion 36 results in low leakage current into the semi-insulating portion 30 of the semi-insulating GaN buffer layer 28.
• FIGs 5A through 5G graphically illustrate a method of fabrication of the HEMT 26 of Figure 3 according to one embodiment of the present disclosure.
• the process begins with a growth substrate 46 as illustrated in Figure 5A.
• the growth substrate 46 may be, for example, a SiC or sapphire substrate.
• the Fe doped portion 34 of the semi-insulating GaN buffer layer 28 is grown on the growth substrate 46 as illustrated in Figure 5B.
• the growth process is MOCVD.
• the doping concentration of the Fe doped portion 34 is preferably in a range of and including 10 17 to 10 19 atoms per cm 3 , and a thickness of the Fe doped portion 34 is preferably in the range of and including 0.5 to 10 micrometers or more preferably in the range of and including 1 to 10 micrometers.
• the Fe doping concentration may be constant over the thickness of the Fe doped portion 34 or may vary over the thickness of the Fe doped portion 34.
• the doping concentration of C in the C doped portion 36 is preferably greater than 10 18 atoms per cm 3 (e.g., in the range of and including 10 18 to 10 20 atoms per cm 3 ) or more preferably greater than 10 19 atoms per cm 3 (e.g., in the range of and including 10 19 to 10 20 atoms per cm 3 ).
• the thickness of the C doped portion 36 is sufficiently large to allow the residual Fe doping in the C doped portion 36 to decrease to an acceptable level (e.g., less than 10 16 atoms per cm 3 ) and small enough as to not result in an unacceptable amount of defects.
• C doping is turned off to grow the channel portion 32 as illustrated in Figure 5D.
• the thickness of the channel portion 32 can range from 0 (i.e., no channel portion 32) to approximately 0.6 microns.
• the AIGaN barrier layer 38 is grown on the semi-insulating GaN buffer layer 28 adjacent to the channel portion 32, as illustrated in Figure 5E.
• the source contact 40, the gate contact 42, and the drain contact 44 are formed on the AIGaN barrier layer 38 as illustrated in Figure 5F.
• the HEMT 26 is removed from the growth substrate 46 as illustrated in Figure 5G. Note that the growth substrate 46 may be removed earlier in the process depending on the particular implementation. It should also be noted that the HEMT 26 may include additional layers that are not shown.

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