JP2016504199A5 - - Google Patents
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- JP2016504199A5 JP2016504199A5 JP2015552777A JP2015552777A JP2016504199A5 JP 2016504199 A5 JP2016504199 A5 JP 2016504199A5 JP 2015552777 A JP2015552777 A JP 2015552777A JP 2015552777 A JP2015552777 A JP 2015552777A JP 2016504199 A5 JP2016504199 A5 JP 2016504199A5
- Authority
- JP
- Japan
- Prior art keywords
- laser
- pulse
- laser pulse
- pulse energy
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005540 biological transmission Effects 0.000 claims 15
- 238000000034 method Methods 0.000 claims 8
- 238000012937 correction Methods 0.000 claims 4
- 238000012545 processing Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 2
- 230000000644 propagated effect Effects 0.000 claims 2
- 238000013507 mapping Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361751810P | 2013-01-11 | 2013-01-11 | |
| US61/751,810 | 2013-01-11 | ||
| PCT/US2014/010902 WO2014110276A1 (en) | 2013-01-11 | 2014-01-09 | Laser pulse energy control systems and methods |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016504199A JP2016504199A (ja) | 2016-02-12 |
| JP2016504199A5 true JP2016504199A5 (enExample) | 2017-02-09 |
| JP6339102B2 JP6339102B2 (ja) | 2018-06-06 |
Family
ID=51164398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015552777A Active JP6339102B2 (ja) | 2013-01-11 | 2014-01-09 | レーザパルスエネルギー制御システム及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9486877B2 (enExample) |
| EP (1) | EP2943311A4 (enExample) |
| JP (1) | JP6339102B2 (enExample) |
| KR (1) | KR102231727B1 (enExample) |
| CN (1) | CN104903044B (enExample) |
| TW (1) | TWI718087B (enExample) |
| WO (1) | WO2014110276A1 (enExample) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10613513B2 (en) * | 2013-02-11 | 2020-04-07 | The Aerospace Corporation | Systems and methods for modifying material substrates |
| US10838406B2 (en) | 2013-02-11 | 2020-11-17 | The Aerospace Corporation | Systems and methods for the patterning of material substrates |
| FR3010924B1 (fr) * | 2013-09-20 | 2015-11-06 | Essilor Int | Dispositif et procede de marquage laser d'une lentille ophtalmique |
| JP6355496B2 (ja) * | 2014-09-17 | 2018-07-11 | 住友重機械工業株式会社 | レーザ加工装置及びパルスレーザビームの出力方法 |
| DE102014226921A1 (de) * | 2014-12-23 | 2016-06-23 | Carl Zeiss Smt Gmbh | Strahlungsquellenmodul |
| TWI701517B (zh) | 2014-12-23 | 2020-08-11 | 德商卡爾蔡司Smt有限公司 | 光學構件 |
| WO2016144290A1 (en) * | 2015-03-06 | 2016-09-15 | Intel Corporation | Acousto-optics deflector and mirror for laser beam steering |
| US9785050B2 (en) | 2015-06-26 | 2017-10-10 | Cymer, Llc | Pulsed light beam spectral feature control |
| CN116213918B (zh) | 2015-09-09 | 2026-07-14 | 伊雷克托科学工业股份有限公司 | 镭射处理设备、镭射处理工件的方法及相关配置 |
| US10838603B2 (en) | 2015-11-20 | 2020-11-17 | Nlight, Inc. | Programmable waveform simulator |
| CN105598582B (zh) * | 2016-02-04 | 2017-07-21 | 广东正业科技股份有限公司 | 一种激光能量调节装置及激光微加工设备 |
| CN106238905B (zh) * | 2016-06-14 | 2019-06-21 | 昆山国显光电有限公司 | 一种激光能量自动补偿方法及设备 |
| CN106064279A (zh) * | 2016-07-27 | 2016-11-02 | 深圳英诺激光科技有限公司 | 一种激光打标、漂白装置及其加工方法 |
| CN107946895B (zh) * | 2016-10-12 | 2024-08-30 | 深圳大学 | 激光能量稳定装置及其稳定方法 |
| WO2018126078A1 (en) | 2016-12-30 | 2018-07-05 | Electro Scientific Industries, Inc. | Method and system for extending optics lifetime in laser processing apparatus |
| US9985414B1 (en) * | 2017-06-16 | 2018-05-29 | Banner Engineering Corp. | Open-loop laser power-regulation |
| US10333269B2 (en) | 2017-09-27 | 2019-06-25 | Apple Inc. | Controlling output power of a laser amplifier with variable pulse rate |
| CN108057953A (zh) * | 2017-12-13 | 2018-05-22 | 广东正业科技股份有限公司 | 一种激光加工系统及激光能量控制方法 |
| JP7043128B2 (ja) * | 2018-01-31 | 2022-03-29 | 住友重機械工業株式会社 | レーザ制御装置及びレーザ加工方法 |
| US11433480B2 (en) * | 2018-03-23 | 2022-09-06 | Lawrence Livermore National Security, Llc | Additive manufacturing power map to mitigate overhang structure |
| JP7241615B2 (ja) * | 2018-06-29 | 2023-03-17 | ビアメカニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
| US11454836B2 (en) | 2018-06-29 | 2022-09-27 | Via Mechanics, Ltd. | Laser processing apparatus and laser processing method |
| EP3670064A1 (en) * | 2018-12-21 | 2020-06-24 | Etxe-Tar, S.A. | Method and system for supervision of a scan of an energy beam |
| NL2025013A (en) | 2019-03-07 | 2020-09-11 | Asml Netherlands Bv | Laser system for source material conditioning in an euv light source |
| JP7418169B2 (ja) | 2019-08-27 | 2024-01-19 | 株式会社ディスコ | レーザー加工装置 |
| CN115776923B (zh) * | 2020-03-09 | 2025-01-07 | 山东迈特莱斯金属表面科技有限公司 | 激光冲击喷丸过程中用于脉冲激光光束控制的装置和方法 |
| US11609116B2 (en) | 2020-08-27 | 2023-03-21 | Banner Engineering Corp | Open-loop photodiode gain regulation |
| DE102020122598A1 (de) * | 2020-08-28 | 2022-03-03 | Trumpf Laser- Und Systemtechnik Gmbh | Verfahren zum Bearbeiten eines Materials |
| CN114178679B (zh) * | 2020-09-15 | 2024-07-02 | 台达电子工业股份有限公司 | 激光加工装置 |
| JP2022063595A (ja) * | 2020-10-12 | 2022-04-22 | 住友重機械工業株式会社 | レーザ加工機の制御装置、レーザ加工機、及びレーザ加工方法 |
| TWI746320B (zh) | 2020-12-18 | 2021-11-11 | 財團法人工業技術研究院 | 產生及更新定位分布圖的方法及其系統 |
| EP4312921A4 (en) * | 2021-03-23 | 2025-05-14 | Clerio Vision, Inc. | COORDINATED SCANNING AND POWER CONTROL OF LASER FOR SHAPING STRUCTURES IN OPHTHALMIC LENSES |
| US12419684B2 (en) * | 2021-05-21 | 2025-09-23 | Boston Scientific Scimed, Inc. | Systems and methods for calibrating laser pulses |
| CN113649694B (zh) * | 2021-08-12 | 2024-02-27 | 武汉逸飞激光股份有限公司 | 圆柱电池集流体焊接方法 |
| CN116207000A (zh) * | 2021-11-30 | 2023-06-02 | 合肥本源量子计算科技有限责任公司 | 一种激光退火系统及激光退火方法 |
| CN114473196A (zh) * | 2021-12-29 | 2022-05-13 | 深圳泰德激光技术股份有限公司 | 激光焊接设备、方法、控制器及存储介质 |
| CN114498277A (zh) * | 2021-12-31 | 2022-05-13 | 中国科学院空天信息创新研究院 | 一种窄线宽脉冲激光器稳频装置 |
| CN115102020B (zh) * | 2022-07-14 | 2025-11-07 | 杭州奥创光子技术有限公司 | 一种脉冲激光输出控制装置及控制方法 |
| TWI869831B (zh) * | 2023-04-25 | 2025-01-11 | 聚嶸科技股份有限公司 | 用於複合材料鑽孔的GHz脈衝串雷射光源系統與方法 |
| CN116604202B (zh) * | 2023-06-16 | 2025-06-27 | 中冶南方工程技术有限公司 | 一种激光头距离感应器的精确校准控制方法与系统 |
| JP7672594B1 (ja) * | 2024-08-09 | 2025-05-07 | 三菱電機株式会社 | レーザ装置およびレーザ加工装置 |
| CN119457405A (zh) * | 2024-12-20 | 2025-02-18 | 舜意科技(山东)有限公司 | 一种光束调节系统及激光加工设备 |
| CN120395208A (zh) * | 2025-07-04 | 2025-08-01 | 深圳市大族数控科技股份有限公司 | 激光加工缺陷监测方法、玻璃基板激光加工方法及设备 |
| CN122275017B (zh) * | 2026-05-28 | 2026-08-07 | 无锡超强伟业科技有限公司 | 基于激光信号反馈的机械臂激光加工过程控制方法及系统 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3764937A (en) * | 1972-04-26 | 1973-10-09 | United Aircraft Corp | Frequency controlled, passively q-switch laser |
| US5593606A (en) | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
| US5841099A (en) * | 1994-07-18 | 1998-11-24 | Electro Scientific Industries, Inc. | Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets |
| JPH1085967A (ja) * | 1996-09-20 | 1998-04-07 | Matsushita Electric Ind Co Ltd | レーザ誘起プラズマ検出方法とそれを用いるレーザ制御方法およびレーザ加工機 |
| KR100260766B1 (ko) * | 1998-02-18 | 2000-08-01 | 구본준 | 레이저 어닐 장비 |
| US6370174B1 (en) | 1999-10-20 | 2002-04-09 | Cymer, Inc. | Injection seeded F2 lithography laser |
| TW482705B (en) | 1999-05-28 | 2002-04-11 | Electro Scient Ind Inc | Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias |
| JP2001038479A (ja) * | 1999-07-27 | 2001-02-13 | Toyota Motor Corp | レーザー加工装置とレーザー加工方法 |
| US6552301B2 (en) * | 2000-01-25 | 2003-04-22 | Peter R. Herman | Burst-ultrafast laser machining method |
| US6676878B2 (en) * | 2001-01-31 | 2004-01-13 | Electro Scientific Industries, Inc. | Laser segmented cutting |
| JP2003136270A (ja) | 2001-11-02 | 2003-05-14 | Hitachi Via Mechanics Ltd | レーザ加工装置 |
| US6998567B2 (en) * | 2003-01-31 | 2006-02-14 | Trimedyne, Inc. | Generation and application of efficient solid-state laser pulse trains |
| US6706999B1 (en) | 2003-02-24 | 2004-03-16 | Electro Scientific Industries, Inc. | Laser beam tertiary positioner apparatus and method |
| US7148448B2 (en) * | 2003-10-31 | 2006-12-12 | General Electric Company | Monitored laser shock peening |
| JP4443208B2 (ja) * | 2003-12-12 | 2010-03-31 | 日立ビアメカニクス株式会社 | スキャナ装置 |
| JP2005219077A (ja) * | 2004-02-04 | 2005-08-18 | Sumitomo Heavy Ind Ltd | レーザエネルギ調整装置、及びレーザエネルギ調整方法、及びレーザ加工機 |
| US7133188B2 (en) * | 2004-06-07 | 2006-11-07 | Electro Scientific Industries, Inc. | AOM modulation techniques employing an upstream Bragg adjustment device |
| US7923306B2 (en) | 2004-06-18 | 2011-04-12 | Electro Scientific Industries, Inc. | Semiconductor structure processing using multiple laser beam spots |
| US7259354B2 (en) | 2004-08-04 | 2007-08-21 | Electro Scientific Industries, Inc. | Methods for processing holes by moving precisely timed laser pulses in circular and spiral trajectories |
| US20090046751A1 (en) * | 2004-10-28 | 2009-02-19 | Stephen Hastings | Method and apparatus for precise control of laser processing of materials |
| DE502005011156D1 (de) * | 2005-04-27 | 2011-05-05 | Vitro Laser Gmbh | Suboberflächenmarkierungen in einem transparenten Körper |
| US7244906B2 (en) * | 2005-08-30 | 2007-07-17 | Electro Scientific Industries, Inc. | Energy monitoring or control of individual vias formed during laser micromachining |
| US7767930B2 (en) * | 2005-10-03 | 2010-08-03 | Aradigm Corporation | Method and system for LASER machining |
| JP2008049383A (ja) | 2006-08-28 | 2008-03-06 | Sumitomo Heavy Ind Ltd | ビーム照射方法及びビーム照射装置 |
| US8026158B2 (en) | 2007-06-01 | 2011-09-27 | Electro Scientific Industries, Inc. | Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window |
| JP5025391B2 (ja) * | 2007-08-30 | 2012-09-12 | 住友重機械工業株式会社 | レーザ加工装置及び加工方法 |
| GB0800333D0 (en) | 2008-01-09 | 2008-02-20 | Ucl Business Plc | Beam deflection apparatus and methods |
| US8680430B2 (en) | 2008-12-08 | 2014-03-25 | Electro Scientific Industries, Inc. | Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features |
| US20100252959A1 (en) | 2009-03-27 | 2010-10-07 | Electro Scientific Industries, Inc. | Method for improved brittle materials processing |
| TWI594828B (zh) * | 2009-05-28 | 2017-08-11 | 伊雷克托科學工業股份有限公司 | 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法 |
| KR102383125B1 (ko) | 2010-10-22 | 2022-04-08 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 빔 디더링 및 스카이빙을 위한 레이저 처리 시스템 및 방법 |
-
2014
- 2014-01-09 CN CN201480004050.5A patent/CN104903044B/zh active Active
- 2014-01-09 US US14/151,420 patent/US9486877B2/en active Active
- 2014-01-09 JP JP2015552777A patent/JP6339102B2/ja active Active
- 2014-01-09 EP EP14737541.4A patent/EP2943311A4/en not_active Withdrawn
- 2014-01-09 KR KR1020157017949A patent/KR102231727B1/ko active Active
- 2014-01-09 WO PCT/US2014/010902 patent/WO2014110276A1/en not_active Ceased
- 2014-01-10 TW TW103100936A patent/TWI718087B/zh active
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