JP2016502733A5 - - Google Patents
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- Publication number
- JP2016502733A5 JP2016502733A5 JP2015539715A JP2015539715A JP2016502733A5 JP 2016502733 A5 JP2016502733 A5 JP 2016502733A5 JP 2015539715 A JP2015539715 A JP 2015539715A JP 2015539715 A JP2015539715 A JP 2015539715A JP 2016502733 A5 JP2016502733 A5 JP 2016502733A5
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- scanning assembly
- beam scanning
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 description 52
- 150000002500 ions Chemical class 0.000 description 13
- 239000000758 substrate Substances 0.000 description 12
- 238000005468 ion implantation Methods 0.000 description 8
- 230000010355 oscillation Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/658,990 | 2012-10-24 | ||
| US13/658,990 US9165744B2 (en) | 2012-10-24 | 2012-10-24 | Apparatus for treating ion beam |
| PCT/US2013/066160 WO2014066375A1 (en) | 2012-10-24 | 2013-10-22 | Apparatus for treating ion beam |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016502733A JP2016502733A (ja) | 2016-01-28 |
| JP2016502733A5 true JP2016502733A5 (enExample) | 2016-10-06 |
| JP6453756B2 JP6453756B2 (ja) | 2019-01-16 |
Family
ID=49519127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015539715A Active JP6453756B2 (ja) | 2012-10-24 | 2013-10-22 | イオンビーム処理装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9165744B2 (enExample) |
| JP (1) | JP6453756B2 (enExample) |
| KR (1) | KR102039920B1 (enExample) |
| CN (1) | CN104823263B (enExample) |
| TW (1) | TWI597760B (enExample) |
| WO (1) | WO2014066375A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9881711B2 (en) | 2014-09-12 | 2018-01-30 | Mitsubishi Electric Corporation | Beam transport system and particle beam therapy system |
| JP6462718B2 (ja) * | 2014-12-04 | 2019-01-30 | 株式会社東芝 | 粒子線ビーム調整装置及び方法、粒子線治療装置 |
| US9679745B2 (en) * | 2015-10-14 | 2017-06-13 | Varian Semiconductor Equipment Associates, Inc. | Controlling an ion beam in a wide beam current operation range |
| CN113380598A (zh) * | 2020-03-09 | 2021-09-10 | 北京烁科中科信电子装备有限公司 | 一种离子注入机电扫描图形识别注入方法 |
| US11217427B1 (en) * | 2020-11-27 | 2022-01-04 | Applied Materials, Inc. | System, apparatus and method for bunched ribbon ion beam |
| CN113140436A (zh) * | 2021-04-22 | 2021-07-20 | 大连交通大学 | 扫描式氩离子源 |
| CN115376874B (zh) * | 2022-08-23 | 2024-10-18 | 浙江陶特容器科技股份有限公司 | 一种基于离子注入机的离子束注入控制方法及装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5769653A (en) * | 1980-10-20 | 1982-04-28 | Fujitsu Ltd | Charged particle beam device |
| JP2881649B2 (ja) * | 1989-03-22 | 1999-04-12 | 日本真空技術株式会社 | イオン注入装置 |
| JP3859437B2 (ja) * | 2000-08-04 | 2006-12-20 | 株式会社東芝 | 荷電ビーム露光装置 |
| JP4032111B2 (ja) | 2001-07-19 | 2008-01-16 | 独立行政法人産業技術総合研究所 | 荷電粒子ビーム装置 |
| GB0408751D0 (en) * | 2004-04-20 | 2004-05-26 | Micromass Ltd | Mass spectrometer |
| JP5085887B2 (ja) * | 2006-05-30 | 2012-11-28 | 株式会社Ｓｅｎ | ビーム処理装置及びビーム処理方法 |
| JP5329050B2 (ja) | 2007-04-20 | 2013-10-30 | 株式会社Ｓｅｎ | ビーム処理装置 |
-
2012
- 2012-10-24 US US13/658,990 patent/US9165744B2/en active Active
-
2013
- 2013-10-08 TW TW102136402A patent/TWI597760B/zh active
- 2013-10-22 WO PCT/US2013/066160 patent/WO2014066375A1/en not_active Ceased
- 2013-10-22 CN CN201380061200.1A patent/CN104823263B/zh active Active
- 2013-10-22 KR KR1020157013442A patent/KR102039920B1/ko active Active
- 2013-10-22 JP JP2015539715A patent/JP6453756B2/ja active Active
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