JP2014509778A5 - - Google Patents

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Publication number
JP2014509778A5
JP2014509778A5 JP2014502556A JP2014502556A JP2014509778A5 JP 2014509778 A5 JP2014509778 A5 JP 2014509778A5 JP 2014502556 A JP2014502556 A JP 2014502556A JP 2014502556 A JP2014502556 A JP 2014502556A JP 2014509778 A5 JP2014509778 A5 JP 2014509778A5
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JP
Japan
Prior art keywords
ion beam
axis
scanned
along
dithering
Prior art date
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Application number
JP2014502556A
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English (en)
Japanese (ja)
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JP2014509778A (ja
JP6152087B2 (ja
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Publication date
Priority claimed from US13/077,112 external-priority patent/US8378313B2/en
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Publication of JP2014509778A publication Critical patent/JP2014509778A/ja
Publication of JP2014509778A5 publication Critical patent/JP2014509778A5/ja
Application granted granted Critical
Publication of JP6152087B2 publication Critical patent/JP6152087B2/ja
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JP2014502556A 2011-03-31 2012-03-29 走査されたイオンビームの均一性改善 Active JP6152087B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/077,112 US8378313B2 (en) 2011-03-31 2011-03-31 Uniformity of a scanned ion beam
US13/077,112 2011-03-31
PCT/US2012/000178 WO2012134600A1 (en) 2011-03-31 2012-03-29 Improved uniformity of a scanned ion beam

Publications (3)

Publication Number Publication Date
JP2014509778A JP2014509778A (ja) 2014-04-21
JP2014509778A5 true JP2014509778A5 (enExample) 2017-02-02
JP6152087B2 JP6152087B2 (ja) 2017-06-21

Family

ID=46062725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014502556A Active JP6152087B2 (ja) 2011-03-31 2012-03-29 走査されたイオンビームの均一性改善

Country Status (6)

Country Link
US (1) US8378313B2 (enExample)
JP (1) JP6152087B2 (enExample)
KR (1) KR101927784B1 (enExample)
CN (1) CN103477416B (enExample)
TW (1) TWI600045B (enExample)
WO (1) WO2012134600A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9218941B2 (en) * 2014-01-15 2015-12-22 Axcelis Technologies, Inc. Ion implantation system and method with variable energy control
JP6415090B2 (ja) * 2014-04-23 2018-10-31 住友重機械イオンテクノロジー株式会社 イオン注入装置及びイオン注入方法
US10328529B2 (en) * 2015-08-26 2019-06-25 Electro Scientific Industries, Inc Laser scan sequencing and direction with respect to gas flow
CN106816367A (zh) * 2016-03-29 2017-06-09 长沙学院 一种控制离子圆形注入的二维扫描装置
CN110600354B (zh) * 2019-10-03 2021-12-28 山东昆仲信息科技有限公司 一种芯片生产用离子注入设备
US20210398772A1 (en) * 2020-06-17 2021-12-23 Axcelis Technologies, Inc. Tuning apparatus for minimum divergence ion beam

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283631A (en) 1980-02-22 1981-08-11 Varian Associates, Inc. Bean scanning and method of use for ion implantation
US4736107A (en) 1986-09-24 1988-04-05 Eaton Corporation Ion beam implanter scan control system
GB9005204D0 (en) * 1990-03-08 1990-05-02 Superion Ltd Apparatus and methods relating to scanning ion beams
AU2002231340A1 (en) * 2000-12-27 2002-07-08 Proteros, Llc Compact beamline and ion implanter system using same
JP3692999B2 (ja) * 2001-10-26 2005-09-07 日新イオン機器株式会社 イオン注入方法およびその装置
US6908836B2 (en) 2002-09-23 2005-06-21 Applied Materials, Inc. Method of implanting a substrate and an ion implanter for performing the method
JP4133883B2 (ja) * 2003-12-04 2008-08-13 日新イオン機器株式会社 イオンビーム装置
US6992308B2 (en) 2004-02-27 2006-01-31 Axcelis Technologies, Inc. Modulating ion beam current
US7078714B2 (en) 2004-05-14 2006-07-18 Nissin Ion Equipment Co., Ltd. Ion implanting apparatus
JP2006019048A (ja) * 2004-06-30 2006-01-19 Toshiba Corp イオン注入装置および半導体装置の製造方法
US7078707B1 (en) * 2005-01-04 2006-07-18 Axcelis Technologies, Inc. Ion beam scanning control methods and systems for ion implantation uniformity
US7176470B1 (en) 2005-12-22 2007-02-13 Varian Semiconductor Equipment Associates, Inc. Technique for high-efficiency ion implantation
US7498590B2 (en) * 2006-06-23 2009-03-03 Varian Semiconductor Equipment Associates, Inc. Scan pattern for an ion implanter
US7615763B2 (en) * 2006-09-19 2009-11-10 Axcelis Technologies, Inc. System for magnetic scanning and correction of an ion beam
US7589333B2 (en) * 2006-09-29 2009-09-15 Axcelis Technologies, Inc. Methods for rapidly switching off an ion beam
US7750320B2 (en) * 2006-12-22 2010-07-06 Axcelis Technologies, Inc. System and method for two-dimensional beam scan across a workpiece of an ion implanter
JP2011086643A (ja) 2009-10-13 2011-04-28 Panasonic Corp 不純物注入方法及びイオン注入装置

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