JP2016502288A5 - - Google Patents

Download PDF

Info

Publication number
JP2016502288A5
JP2016502288A5 JP2015549771A JP2015549771A JP2016502288A5 JP 2016502288 A5 JP2016502288 A5 JP 2016502288A5 JP 2015549771 A JP2015549771 A JP 2015549771A JP 2015549771 A JP2015549771 A JP 2015549771A JP 2016502288 A5 JP2016502288 A5 JP 2016502288A5
Authority
JP
Japan
Prior art keywords
optical
mems
optical signal
swept
tunable vcsel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015549771A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016502288A (ja
Filing date
Publication date
Priority claimed from US13/723,829 external-priority patent/US20140176958A1/en
Application filed filed Critical
Publication of JP2016502288A publication Critical patent/JP2016502288A/ja
Publication of JP2016502288A5 publication Critical patent/JP2016502288A5/ja
Pending legal-status Critical Current

Links

JP2015549771A 2012-12-21 2013-12-20 接合されたｍｅｍｓ波長可変ミラーのｖｃｓｅｌ掃引光源を備えたｏｃｔシステム Pending JP2016502288A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/723,829 2012-12-21
US13/723,829 US20140176958A1 (en) 2012-12-21 2012-12-21 OCT System with Bonded MEMS Tunable Mirror VCSEL Swept Source
PCT/US2013/076866 WO2014100564A1 (en) 2012-12-21 2013-12-20 Oct system with bonded mems tunable mirror vcsel swept source

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018215954A Division JP6765407B2 (ja) 2012-12-21 2018-11-16 接合されたｍｅｍｓ波長可変ミラーのｖｃｓｅｌ掃引光源を備えたｏｃｔシステム

Publications (2)

Publication Number Publication Date
JP2016502288A JP2016502288A (ja) 2016-01-21
JP2016502288A5 true JP2016502288A5 (enExample) 2016-12-28

Family

ID=49958703

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015549771A Pending JP2016502288A (ja) 2012-12-21 2013-12-20 接合されたｍｅｍｓ波長可変ミラーのｖｃｓｅｌ掃引光源を備えたｏｃｔシステム
JP2018215954A Active JP6765407B2 (ja) 2012-12-21 2018-11-16 接合されたｍｅｍｓ波長可変ミラーのｖｃｓｅｌ掃引光源を備えたｏｃｔシステム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018215954A Active JP6765407B2 (ja) 2012-12-21 2018-11-16 接合されたｍｅｍｓ波長可変ミラーのｖｃｓｅｌ掃引光源を備えたｏｃｔシステム

Country Status (6)

Country Link
US (4) US20140176958A1 (enExample)
EP (1) EP2936629B1 (enExample)
JP (2) JP2016502288A (enExample)
CA (1) CA2891979C (enExample)
DK (1) DK2936629T3 (enExample)
WO (1) WO2014100564A1 (enExample)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9444218B1 (en) * 2013-05-10 2016-09-13 Oplink Communications, Inc. Compact WDM optical modules
EP2963744B1 (en) * 2014-06-30 2019-04-03 Canon Kabushiki Kaisha Surface emitting laser and optical coherence tomography apparatus including the same
JP6548365B2 (ja) * 2014-07-11 2019-07-24 キヤノン株式会社 面発光レーザ及び光干渉断層計
US11025029B2 (en) 2015-07-09 2021-06-01 International Business Machines Corporation Monolithic III-V nanolaser on silicon with blanket growth
US9625379B2 (en) * 2015-07-15 2017-04-18 International Business Machines Corporation Gas sensor with integrated optics and reference cell
US12265259B2 (en) 2019-01-23 2025-04-01 Teramount Ltd. Waveguide mode coupling
US12164159B2 (en) 2021-12-22 2024-12-10 Teramount Ltd. Backside optical connector
US11585991B2 (en) 2019-02-28 2023-02-21 Teramount Ltd. Fiberless co-packaged optics
USRE50979E1 (en) * 2015-10-08 2026-08-04 Teramount Ltd. Electro-optical interconnect platform
US12379555B2 (en) 2021-10-27 2025-08-05 Teramount Ltd. Detachable connector for co-packaged optics
US12189195B2 (en) 2015-10-08 2025-01-07 Teramount Ltd. Optical coupling
US12124087B2 (en) 2015-10-08 2024-10-22 Teramount Ltd. Wideband surface coupling
US10924638B2 (en) 2016-06-27 2021-02-16 Intel Corporation Compact, low cost VCSEL projector for high performance stereodepth camera
JP2018139268A (ja) * 2017-02-24 2018-09-06 浜松ホトニクス株式会社 波長可変光源
DE102017205144B4 (de) 2017-03-27 2019-03-14 Jenoptik Laser Gmbh Oberflächenemittierender Halbleiterlaser mit veränderlicher Wellenzahl
WO2018215388A1 (en) 2017-05-22 2018-11-29 Uab Brolis Semiconductors Tunable hybrid iii-v/ iv laser sensor system-on-a-chip for real-time monitoring of a blood constituent concentration level
EP3747092B1 (en) 2018-02-02 2025-03-05 Brolis Sensor Technology, UAB Wavelength determination for widely tunable lasers and laser systems thereof
EP3530175A1 (en) 2018-02-26 2019-08-28 Nokia Technologies Oy Apparatus for optical coherence tomography
JP7443248B2 (ja) * 2018-05-11 2024-03-05 エクセリタス テクノロジーズ コーポレイション 幾何学的分離を採用する光ポンピングチューナブルｖｃｓｅｌ
DK3791451T3 (da) 2018-05-11 2025-03-03 Excelitas Tech Corp Polarisationsstyring af afstembar vcsel ved hjælp af ikke-ensartede chipbindinger
CN112313303B (zh) * 2018-05-18 2022-12-30 尤尼斯拜特罗有限责任公司 具有膨胀补偿功能的光学装置
US12253391B2 (en) 2018-05-24 2025-03-18 The Research Foundation For The State University Of New York Multielectrode capacitive sensor without pull-in risk
US11139635B2 (en) 2018-06-19 2021-10-05 Excelitas Technologies Corp. Quantum well placement in a tunable VCSEL
US20200096311A1 (en) 2018-09-24 2020-03-26 Axsun Technologies, Inc. OCT system calibration method for improved image resolution and reduced image artifacts
KR20210086703A (ko) * 2018-11-05 2021-07-08 엑셀리타스 테크놀로지스 코포레이션 양방향 구동으로 결합된 파장 가변형 수직 공진 표면광 레이저
US11382517B2 (en) 2019-03-11 2022-07-12 D4D Technologies, Llc Intra-oral scanning device with integrated optical coherence tomography (OCT)
EP4014290B1 (en) 2019-08-15 2023-11-08 Excelitas Technologies Corp. Tunable vcsel with combined gain and dbr mirror
US11036291B1 (en) * 2019-11-12 2021-06-15 Facebook Technologies, Llc Polarization-stabilized beam-shaping illuminator
CN110854247B (zh) * 2019-11-19 2021-04-27 南京邮电大学 基于mems扫描微镜的发射方向可控的蓝光微led器件及其制备方法
CA3107172C (en) * 2020-01-30 2024-02-13 Thorlabs Quantum Electronics, Inc. Tunable laser assembly
CA3111302A1 (en) * 2020-03-09 2021-09-09 Thorlabs Quantum Electronics, Inc. Tunable laser assembly and method of control
KR20230114743A (ko) 2020-10-14 2023-08-01 엑셀리타스 테크놀로지스 코포레이션 스트레인 보상 반도체 dbr을 갖는 튜닝 가능 vcsel
CN112362313B (zh) * 2021-01-11 2021-04-23 深圳市星汉激光科技股份有限公司 一种激光芯片耐回返光能力的光路测试系统及方法
WO2022212303A1 (en) * 2021-03-29 2022-10-06 Excelitas Technologies Corp. Tunable vcsel polarization control with intracavity subwavelength grating
JP7537386B2 (ja) * 2021-07-06 2024-08-21 横河電機株式会社 光共振器及び面発光レーザー
US11699894B2 (en) 2021-08-16 2023-07-11 Excelitas Technologies Corp. Bonded tunable VCSEL with bi-directional actuation
KR102726950B1 (ko) * 2022-09-16 2024-11-07 주식회사 솔레오 레이저 증폭 장치 및 이를 포함하는 레이저 가공 장치
US20250167512A1 (en) * 2022-12-12 2025-05-22 Bandwidth10, LTD. Vcsel transceiver module

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2510348B2 (ja) * 1990-10-12 1996-06-26 日本電信電話株式会社 短パルス発生用レ―ザ装置
JP3151892B2 (ja) * 1991-12-20 2001-04-03 日本電気株式会社 光ファイバ分散補償方法およびその装置
US5778018A (en) 1994-10-13 1998-07-07 Nec Corporation VCSELs (vertical-cavity surface emitting lasers) and VCSEL-based devices
US5608519A (en) * 1995-03-20 1997-03-04 Gourley; Paul L. Laser apparatus and method for microscopic and spectroscopic analysis and processing of biological cells
US5742720A (en) * 1995-08-30 1998-04-21 Matsushita Electric Industrial Co., Ltd. Optical coupling module and method for producing the same
US5995531A (en) 1997-11-04 1999-11-30 Motorola, Inc. VCSEL having polarization control and method of making same
US6424669B1 (en) * 1999-10-29 2002-07-23 E20 Communications, Inc. Integrated optically pumped vertical cavity surface emitting laser
US6963598B1 (en) 2000-05-23 2005-11-08 Finisar Corporation System and method for VCSEL polarization control
US6804270B1 (en) * 2000-07-21 2004-10-12 Coretek Inc. Efficient fiber-semiconductor tunable laser source
JP2002057395A (ja) * 2000-08-07 2002-02-22 Toshiba Corp レーザ発振増幅装置
US20030026313A1 (en) 2001-01-19 2003-02-06 Siros Technologies, Inc. Polarization control of a VCSEL using an external cavity
US6768756B2 (en) * 2001-03-12 2004-07-27 Axsun Technologies, Inc. MEMS membrane with integral mirror/lens
US6810062B2 (en) 2001-04-11 2004-10-26 Axsun Technologies, Inc. Passive optical resonator with mirror structure suppressing higher order transverse spatial modes
US6808276B2 (en) * 2001-05-08 2004-10-26 Axsun Technologies, Inc. Suspended high reflectivity coating on release structure and fabrication process therefor
AU2002327432A1 (en) 2001-08-08 2003-02-24 Santur Corporation Method and system for selecting an output of a vcsel array
US6868104B2 (en) * 2001-09-06 2005-03-15 Finisar Corporation Compact laser package with integrated temperature control
US6785317B2 (en) 2001-09-10 2004-08-31 Vrije Universiteit Brussels Enhanced polarization control and stabilization by macroscopic in-plane anisotropic strain in vertical-cavity surface-emitting lasers
US7416674B2 (en) 2001-11-08 2008-08-26 Axsun Technologies, Inc. Method for fabricating micro optical elements using CMP
US6862136B2 (en) * 2002-01-31 2005-03-01 Cyoptics Ltd. Hybrid optical transmitter with electroabsorption modulator and semiconductor optical amplifier
US6661830B1 (en) * 2002-10-07 2003-12-09 Coherent, Inc. Tunable optically-pumped semiconductor laser including a polarizing resonator mirror
US6970488B2 (en) * 2002-10-16 2005-11-29 Eastman Kodak Company Tunable organic VCSEL system
JP4138629B2 (ja) 2003-11-06 2008-08-27 株式会社東芝 面発光型半導体素子及びその製造方法
JP4568125B2 (ja) 2005-01-17 2010-10-27 株式会社東芝 面発光型半導体素子
US7415049B2 (en) 2005-03-28 2008-08-19 Axsun Technologies, Inc. Laser with tilted multi spatial mode resonator tuning element
US20070030873A1 (en) 2005-08-03 2007-02-08 Finisar Corporation Polarization control in VCSELs using photonics crystals
KR101228108B1 (ko) * 2005-11-09 2013-01-31 삼성전자주식회사 펌프 빔 반사층을 갖는 외부 공진기형 면발광 레이저
KR20070058246A (ko) 2005-12-01 2007-06-08 삼성전자주식회사 후방 광펌핑 방식의 외부 공진기형 면발광 레이저
KR101270166B1 (ko) 2006-01-17 2013-05-31 삼성전자주식회사 외부 공진기형 면발광 레이저
US7468997B2 (en) * 2006-01-20 2008-12-23 Praevium Research, Inc. System for swept source optical coherence tomography
JP4898263B2 (ja) * 2006-04-07 2012-03-14 サンテック株式会社 光干渉断層画像表示システム
US8179930B2 (en) * 2006-12-22 2012-05-15 Google Inc. Phase control by active thermal adjustments in an external cavity laser
US8705047B2 (en) 2007-01-19 2014-04-22 Thorlabs, Inc. Optical coherence tomography imaging system and method
US8310681B2 (en) 2007-06-22 2012-11-13 Compact Imaging, Inc. Orthogonal reference analysis system with enhanced SNR
US8189642B1 (en) * 2007-08-08 2012-05-29 Emcore Corporation VCSEL semiconductor device
US8059277B2 (en) * 2007-08-27 2011-11-15 Axsun Technologies, Inc. Mode hopping swept frequency laser for FD OCT and method of operation
DE102008009110A1 (de) * 2008-02-14 2009-08-20 Osram Opto Semiconductors Gmbh Halbleiterlasermodul
US8564783B2 (en) * 2008-05-15 2013-10-22 Axsun Technologies, Inc. Optical coherence tomography laser with integrated clock
EP2677272B1 (en) * 2008-05-15 2018-01-31 Axsun Technologies LLC Oct combining probes and integrated systems
DE102008028312A1 (de) 2008-06-13 2009-12-17 Carl Zeiss Meditec Ag SS-OCT-Interferometrie zur Vermessung einer Probe
US20100322624A1 (en) 2008-08-22 2010-12-23 National Taiwan University Of Science And Technology Bidirectional transmission network apparatus based on tunable rare-earth-doped fiber laser
US8670129B2 (en) 2009-09-03 2014-03-11 Axsun Technologies, Inc. Filtered ASE swept source for OCT medical imaging
US8526472B2 (en) * 2009-09-03 2013-09-03 Axsun Technologies, Inc. ASE swept source with self-tracking filter for OCT medical imaging
US8665450B2 (en) * 2009-10-02 2014-03-04 Axsun Technologies, Inc. Integrated dual swept source for OCT medical imaging
JP5497530B2 (ja) * 2010-05-14 2014-05-21 日本電信電話株式会社 光送信器
US20120162662A1 (en) 2010-12-27 2012-06-28 Axsun Technologies, Inc. Actively Mode Locked Laser Swept Source for OCT Medical Imaging
US8687666B2 (en) 2010-12-28 2014-04-01 Axsun Technologies, Inc. Integrated dual swept source for OCT medical imaging
US8660164B2 (en) * 2011-03-24 2014-02-25 Axsun Technologies, Inc. Method and system for avoiding package induced failure in swept semiconductor source

Similar Documents

Publication Publication Date Title
JP6765407B2 (ja) 接合されたｍｅｍｓ波長可変ミラーのｖｃｓｅｌ掃引光源を備えたｏｃｔシステム
US8660164B2 (en) Method and system for avoiding package induced failure in swept semiconductor source
CN110646776B (zh) 紧凑光学封装中具有单个mems扫描器的芯片级lidar
JP6514841B1 (ja) 光モジュール
JP5898077B2 (ja) Ｏｃｔ医療用画像化のためのフィルタａｓｅ掃引源
US8144332B2 (en) Temperature measurement apparatus and method
CN113381295B (zh) 可调谐激光器组件、稳定激光器和成像系统
US8804787B1 (en) Narrow linewidth semiconductor laser
CN104703105B (zh) 双fp腔光纤声传感探头及其传感系统
US11256047B2 (en) Optical assembly
JP2018506072A (ja) 小型化ｏｃｔパッケージおよびその組立品
JP2022544743A (ja) Ｌｉｄａｒチップと共に使用するためのｌｉｄａｒアダプタ
JP2011238698A (ja) レーザモジュール
US10845242B2 (en) Measuring device based on an optical measurement in an opto-mechanical cavity
KR102594111B1 (ko) 두께 측정 장치 및 두께 측정 방법
KR20170098518A (ko) 광센서
TW201823675A (zh) 一種鐳射發射接收裝置以及鐳射探測與測量系統
JP6893449B2 (ja) 光モジュール
CN114175683A (zh) 用于测量位移的光学换能器及方法
KR20170014154A (ko) 광섬유 분포 온도 센서 시스템
CN204718755U (zh) 全光纤阀门泄漏超声监测系统
JP2015070131A5 (enExample)
JP7060326B2 (ja) 半導体レーザモジュール
CN105004487A (zh) 全光纤阀门泄漏超声监测系统
WO2018168929A1 (ja) 光モジュール