CN110646776B - 紧凑光学封装中具有单个mems扫描器的芯片级lidar - Google Patents

紧凑光学封装中具有单个mems扫描器的芯片级lidar Download PDF

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CN110646776B
CN110646776B CN201910440470.2A CN201910440470A CN110646776B CN 110646776 B CN110646776 B CN 110646776B CN 201910440470 A CN201910440470 A CN 201910440470A CN 110646776 B CN110646776 B CN 110646776B
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light beam
scanner
optical
light
chip
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CN110646776A (zh
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O·叶菲莫夫
R·萨基西安
K·萨亚赫
D·哈蒙
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GM Global Technology Operations LLC
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Abstract

一种LIDAR系统、一种用于LIDAR系统的光耦合器以及一种光连通的方法。LIDAR系统包括光耦合器，该光耦合器具有与光子芯片光连通的芯片侧面和与扫描器光连通的扫描器侧面，光耦合器包括偏振旋转器和双折射光楔。从第一位置朝向光耦合器芯片侧面发射第一光束以经由光耦合器沿着在光耦合器的扫描器侧面的光路引导第一光束。沿着在扫描器侧面的光路接收第二光束，并且朝向第二位置引导第二光束。

Description

紧凑光学封装中具有单个MEMS扫描器的芯片级LIDAR
技术领域
本发明涉及芯片级LIDAR（激光雷达）系统，并且具体地涉及用于在LIDAR芯片系统的光子芯片和扫描器之间引导光的光耦合器。
背景技术
基于芯片的LIDAR系统包括发射和接收光的光子芯片，和将射出光引导至空间中的选定点并且将反射光从空间中的选定点引导至光子芯片的MENS（微机电系统）扫描器。射出光束通常从光子芯片的第一位置离开光子芯片，并且反射光在光子芯片的第二位置进入光子芯片。第一位置和第二位置隔开选定的距离，因此要求射出光和反射光穿过MENS扫描器和光子芯片之间隔开的光路。因此，期望提供一种光耦合设备，引导光沿着第一光路在一个方向上穿过，并且引导光沿着另一光路在另一方向上穿过。
发明内容
在一个示例性实施例中，公开了一种LIDAR系统。该LIDAR系统包括光耦合器，该光耦合器具有与光子芯片光连通的芯片侧面和与扫描器光连通的扫描器侧面，光耦合器包括偏振旋转器和双折射光楔，其中光耦合器将在芯片侧面处从光子芯片的第一位置接收的第一光束沿着光路朝向扫描器引导，并将在扫描器侧面处接收的第二光束沿着光路引导至光子芯片的第二位置。
除本文描述的一个或多个特征外，偏振旋转器是法拉第旋转器。第一光束进入双折射光楔的偏振方向与进入双折射光楔的第二光束的偏振方向不同。第一光束在双折射光楔经历第一折射角，并且第二光束在双折射光楔经历第二折射角，其中第一折射角和第二折射角之间的差异是由于偏振方向的不同。光耦合器还包括准直光学器件。光耦合器还包括在扫描器侧面的偏振器，该偏振器使第一光束和第二光束偏振。在第二位置处的半波片改变第二光束的偏振。光子芯片从第一位置发射第一光束，并在第二位置接收第二光束。扫描器包括在光路中的MENS扫描器，用于将第一光束引导至空间中的选定点，并且从空间中的选定点接收第二光束。
在一个示例性实施例中，公开了一种用于LIDAR系统的光耦合器。该光耦合器包括与光子芯片光连通的芯片侧面、与扫描器光连通的扫描器侧面、偏振旋转器以及双折射光楔。该光耦合器将在芯片侧面处从光子芯片空间的第一位置接收的第一光束沿着扫描器处的光路引导，并将在扫描器侧面接收的第二光束沿着光路引导至光子芯片的第二位置。
除本文描述的一个或多个特征以外，偏振旋转器还包括法拉第旋转器，该法拉第旋转器配置成使至少第二光束的偏振旋转，其中第一光束进入双折射光楔的偏振方向与进入双折射光楔的第二光束的偏振方向不同。光耦合器还包括准直光学器件。光路包括MENS扫描器，该MENS扫描器将第一光束引导至空间中的选定点，并且从空间中的选定点接收第二光束。光耦合器还包括使第一光束和第二光束偏振的偏振器。在第二位置处的半波片改变入射第二光束的偏振。光子芯片的第一位置包括激光器，并且第二位置包括光子芯片的边缘耦合器。
在另一个示例性实施例中，公开了一种光连通的方法。该方法包括从第一位置朝向具有偏振旋转器和双折射光楔的光耦合器发射第一光束，经由光耦合器沿着在光耦合器的扫描器侧面的光路引导第一光束，沿着在扫描器侧面的光路接收第二光束，以及在芯片侧面处朝向光子芯片的第二位置引导第二光束。
除本文描述的一个或多个特征外，偏振旋转器是法拉第旋转器。该方法还包括在法拉第旋转器处使至少第二光束的偏振旋转，和在双折射光楔处基于第一光束和第二光束各自的偏振更改它们的光路。该方法还包括在第二位置使用半波片改变第二光束的偏振。该方法还包括使用光路中的MEMS扫描器将第一光束引导至空间中的选定点，和从空间中的选定点接收第二光束。
结合附图，从下面的具体实施方式中，本发明的上述特征和优点以及其他特征和优点是清楚明白的。
附图说明
其他特征、优点以及细节仅以示例的方式出现在下面的具体实施方式中，具体实施方式参考附图，其中：
图1示出了LIDAR系统的原理图；以及
图2示出了图1的LIDAR系统的详细视图。
具体实施方式
以下描述在本质上仅仅是示例性的，而并非旨在限制本申请及其用途。应当理解，整个附图中，相应的附图标记表示相同或相应的部件和特征。
根据示例性实施例，图1示出了LIDAR系统100的原理图。LIDAR系统100包括光子芯片102、光耦合器104以及微机电系统（MEMS）扫描器106。处理器108控制光子芯片102的操作，以便执行LIDAR系统100的操作。光子芯片102包括光源，诸如激光器、光波导网络以及一组光电二极管。激光器生成发射出光子芯片102的射出光束115。由于射出光束115与物体110的相互作用，在一组光电二极管中反射光束117与射出光束115的小部分（﹤10%）光学混合。处理器108通过控制光源操作的波形来控制光源的操作。处理器108还接收来自光电二极管的数据，然后从该数据确定物体110的各种参数。
在操作中，处理器108控制光子芯片102的光源生成调制的射出光束115。射出光束115穿过光耦合器104，光耦合器104准直射出光束115并将射出光束115朝向MENS扫描器106引导。MEMS扫描器106将射出光束115在角度范围内引导至LIDAR系统100的周围区域中。
MEMS扫描器106包括诸如振动镜之类的振动构件。处理器108控制振动构件的振动，以便在选定的角度范围内引导射出光束115。在各种实施例中，MEMS扫描器106是二维（2D）MEMS扫描器，并且处理器108控制振动构件在两个角度的方向（诸如方位角和仰角）中的振动。
反射光束117在物体110与射出光束115相互作用时形成。在MENS扫描器106处接收反射光束117的部分。MEMS扫描器106将反射光束117引导至光耦合器104中，光耦合器104将反射光束117传递到光子芯片102中。本文参照图2进一步讨论光耦合器104的细节。
在各种实施例中，LIDAR系统100可以与车辆相关联，并且物体110可以是车辆外部的任何物体，诸如另一车辆、行人、电线杆等。LIDAR系统100确定诸如物体110的范围、多普勒、方位角以及仰角之类的参数，然后车辆使用这些参数相对于物体110导航，以避免与物体110接触。
图2示出了图1的LIDAR系统100的详细视图。LIDAR系统100包括光子芯片102、光耦合器104以及MENS扫描器106。在光耦合器104和MENS扫描器106之间的光路中的镜面202将光在光耦合器104和MENS扫描器106之间来回地引导。
在一个实施例中，光子芯片102包括激光器210或其他合适的光源，用于生成从光子芯片102发射的射出光束115。光子芯片102还包括边缘耦合器212，其放置在离激光器210选定距离处，用于在光子芯片102处接收入射光。波导管214被连接至激光器210和边缘耦合器212，以便将来自激光器210的(在激光器后端发射的)光和来自边缘耦合器210的光提供给光电探测器216。光电探测器216根据从激光器210产生的出射光束115和在边缘耦合器212处接收的入射光束117之间获得的光学频率差来确定环境中图1所示物体110的范围和速度。
在替代实施例中，激光器210可以在光子芯片102的另一位置处。然而，对于任何实施例来说，光子芯片102包括第一位置204和第二位置206，其中射出光115从第一位置204离开光子芯片102，反射光117在第二位置206处进入光子芯片102。第一位置204和第二位置206之间具有间距。在各种实施例中，光耦合器104的性能可以选择，以便与光子芯片的第一位置204和第二位置206两者进行光连通。
光耦合器104包括面对光子芯片102的芯片侧面220和面对镜面202的扫描器侧面222。来自光子芯片102的第一位置204的射出光115在芯片侧面220进入光耦合器104。同样，反射光117以光子芯片102的第二位置206的方向在芯片侧面220处离开光耦合器104。在扫描器侧面222，射出光115和反射光117分别在单个点处进入和离开光耦合器104，从而使射出光115和反射光117能够沿着相同的光路行进，尽管方向相反。
从扫描器侧面222离开光耦合器104的射出光被朝向镜面202引导，该镜面202将射出光115重新引导至扫描器106的振动膜228上。扫描器106通过膜228的振动在角度范围内使射出光115的光路转向。该角度范围可以是二维的，以方位角和仰角为特征。因此，沿着与环境中出射光相同的光路行进的入射光被扫描器106和镜面202引导，以投射到光耦合器104上。
回到光耦合器104，光耦合器104包括准直光学器件230、双反射光楔232、法拉第旋转器234以及偏振器236。准直光学器件230包括准直透镜和用于使激光束变圆的变形棱镜对。光耦合器104元件可以在单个光学封装中提供，在LIDAR系统100的制造过程中，该单个光学封装可以作为单个单元放置在光子芯片102和扫描仪器106之间。
在光子芯片102的第一位置204处从激光器210射出的射出光115是发散光束。准直器230将发散光束转换成平行或基本平行的光束。穿过光耦合器104的反射光117是平行或基本平行的光束，直到准直器230将反射光117转换成会聚光束。
双反射光楔232、法拉第旋转器234以及偏振器236用于使射出光115和反射光117的光路分离，使得在光耦合器104的扫描器侧面222上，射出光115和反射光117沿着相同的光路行进，而在光耦合器104的芯片侧面220上，射出光的光路穿过激光器210，而反射光117的光路穿过边缘耦合器112。
双折射材料是这样的材料，在该材料中通过该材料的光所经历的折射率取决于光的偏振和传播方向。双折射光楔232将两个正交偏振光束分离成两个隔开的方向。
法拉第旋转器234通过利用法拉第效应使光的偏振旋转。法拉第旋转器包括暴露于磁场线的透明介质，磁场线以与光束方向近于相同(或相反)的方向对齐。在磁场存在的情况下，在穿过介质的过程中光的偏振方向被连续地旋转。应当理解，在替代实施例中，可以使用其他设备或使光的偏振矢量旋转的偏振旋转器来代替法拉第旋转器234。
射出光束115在穿过光耦合器104时依次遇到准直光学器件230、双折射光楔232、法拉第旋转器234和偏振器236。由激光器210射出的射出光束通常是线性偏振光束。准直光学器件230产生准直线性偏振光束，该光束穿过双折射光楔232。射出光115进入双折射光楔232时的线性偏振方向导致射出光115在双折射光楔232处的第一折射角。法拉第旋转器234使射出光115的光束旋转，并且偏振器236允许具有偏振器236的选定偏振方向的光通过。
在相反方向行进的反射光束117通常是部分偏振光束，这种光束在穿过光耦合器104时依次遇到偏振器236、法拉第旋转器234、双折射光楔232以及准直光学器件230。偏振器236传递具有选定偏振的反射光117，然后法拉第旋转器使反射光117的偏振矢量旋转。反射光117进入双折射光楔232时的偏振方向导致反射光117在双折射光楔232处的第二折射角。双折射光楔232以朝向光子芯片102的第二位置206的方向使反射光117折射，然后准直光学器件230将反射光117聚焦到光子芯片102的第二位置206上。
操作法拉第旋转器234，以使射出光束115进入双折射光楔232的偏振与进入双折射光楔232的反射光束117的偏振不同。因此，射出光束115和反射光束117在双折射光楔232处经历不同的折射角。射出光束的折射角允许从光子芯片102的第一位置204接收的射出光被引导至选定的光路上。反射光束117的折射角允许沿着与射出光相同的光路接收的反射光被引导向光子芯片102的第二位置206。在各种实施例中，选定光耦合器104的芯片侧面220与光子芯片104的第一位置204和第二位置206之间的距离，使得射出光115和反射光117的光路分别与第一位置204和第二位置206对齐。
放置在边缘耦合器212上的半波片240调节反射光束117的偏振，使得进入光子芯片102的光在波导管中具有相同的激光偏振，从而导致可以在光电探测器216处检测到的激光和反射光的相互作用。
虽然上述公开已根据示例性实施例进行了描述，但是本领域技术人员应当理解，在不脱离本发明范围的情况下可以做各种改变，并且可以用等同物代替其元件。此外，在不脱离本公开的基本范围的情况下，可以做许多修改以使具体的情况或材料适应本发明的教导。因此，本发明意在使本发明不限于所公开的具体实施例，而将包括在其范围内的所有实施例。

Claims (10)

1.一种LIDAR系统，所述系统包括：
光耦合器，所述光耦合器具有与光子芯片光连通的芯片侧面和与扫描器光连通的扫描器侧面，所述光耦合器包括偏振旋转器和双折射光楔，其中所述光耦合器将在所述芯片侧面从所述光子芯片的第一位置接收的第一光束沿着光路朝向所述扫描器引导，并且将在所述扫描器侧面接收的第二光束沿着所述光路引导至所述光子芯片的第二位置。
2.根据权利要求1所述的LIDAR系统，其中所述第一光束进入所述双折射光楔的偏振方向与进入所述双折射光楔的所述第二光束的偏振方向不同。
3.根据权利要求1所述的LIDAR系统，其中所述第一光束在所述双折射光楔处经历第一折射角，并且所述第二光束在所述双折射光楔处经历第二折射角，其中所述第一折射角和所述第二折射角之间的差异是由于偏振方向的不同。
4.根据权利要求1所述的LIDAR系统，其中所述光耦合器还包括准直光学器件。
5.根据权利要求1所述的LIDAR系统，其中所述光耦合器还包括在扫描器侧面的偏振器，所述偏振器使所述第一光束和所述第二光束偏振。
6.根据权利要求1所述的LIDAR系统，还包括在所述第二位置用于改变所述第二光束的偏振的半波片。
7.一种光连通的方法，所述方法包括：
从光子芯片的第一位置朝向具有偏振旋转器和双折射光楔的光耦合器的芯片侧面发射第一光束；
经由所述光耦合器沿着在所述光耦合器的扫描器侧面的光路引导所述第一光束；
沿着在所述扫描器侧面的所述光路接收第二光束；以及
在所述芯片侧面处朝向所述光子芯片的第二位置引导所述第二光束。
8.根据权利要求7所述的方法，其中所述偏振旋转器还包括法拉第旋转器，所述方法还包括在法拉第旋转器处使至少所述第二光束的偏振旋转，和在所述双折射光楔处基于所述第一光束和所述第二光束各自的偏振更改它们的光路。
9.根据权利要求8所述的方法，还包括在所述第二位置使用半波片改变所述第二光束的偏振。
10.根据权利要求7所述的方法，还包括使用在所述光路中的MENS扫描器将所述第一光束引导至空间中的选定点，和从空间中的所述选定点接收所述第二光束。
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Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11226403B2 (en) * 2017-07-12 2022-01-18 GM Global Technology Operations LLC Chip-scale coherent lidar with integrated high power laser diode
US10908372B2 (en) * 2018-03-05 2021-02-02 The Charles Stark Draper Laboratory, Inc. Systems and methods for isolating excitation and signal paths for chip-scale LIDAR
US20200018857A1 (en) * 2018-07-12 2020-01-16 Silc Technologies, Inc. Optical Sensor System
US11796677B2 (en) * 2018-07-19 2023-10-24 Silc Technologies, Inc. Optical sensor system
EP3834012A1 (en) * 2018-08-09 2021-06-16 FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. Lidar and method for optical remote sensing
US11280884B2 (en) * 2018-08-30 2022-03-22 Photodigm Inc. LIDAR instrument and method for operating a LIDAR instrument
KR20210097696A (ko) * 2018-10-15 2021-08-09 비프로스트 커뮤니케이션즈 에이피에스 고성능 광 수신기를 포함하는 광학 시스템, 장치 및 방법
US11280907B2 (en) * 2018-12-28 2022-03-22 Texas Instruments Incorporated Depth imaging system
CN109730923B (zh) * 2019-03-04 2021-02-19 黑龙江中医药大学 辅助耳穴压籽的耳部穴位自动定位装置、定位系统及定位方法
CN109828286B (zh) * 2019-03-08 2021-07-30 上海禾赛科技有限公司 激光雷达
US11662435B2 (en) * 2019-04-04 2023-05-30 Liturex (Guangzhou) Co. Ltd Chip scale integrated scanning LiDAR sensor
EP3719537B1 (de) 2019-04-04 2021-03-17 Sick Ag Messen von abständen
US11079546B2 (en) * 2019-04-22 2021-08-03 Blackmore Sensors & Analytics, LLC. Providing spatial displacement of transmit and receive modes in LIDAR system
CN110068808A (zh) * 2019-05-29 2019-07-30 南京芯视界微电子科技有限公司 激光雷达的接收机装置及激光雷达
CN112346239B (zh) * 2019-08-07 2022-10-18 华为技术有限公司 激光扫描装置
US11714167B2 (en) 2019-08-21 2023-08-01 Silc Technologies, Inc. LIDAR adapter for use with LIDAR chip
US11556000B1 (en) 2019-08-22 2023-01-17 Red Creamery Llc Distally-actuated scanning mirror
US11320522B1 (en) * 2019-09-17 2022-05-03 Aeva, Inc. System and method for FMCW LIDAR with DC laser
US10845550B1 (en) * 2019-10-18 2020-11-24 The Boeing Company Input coupler for chip-scale laser receiver device
US11644544B2 (en) 2019-10-29 2023-05-09 GM Global Technology Operations LLC LiDAR device including a pseudo-random optical phased array
US11385406B2 (en) 2019-10-29 2022-07-12 Waymo Llc Optical signal routing devices and systems
EP4058824A4 (en) * 2019-11-12 2022-12-28 Pointcloud Inc. TWO-WAY LIGHT DETECTION AND DISTANCE MEASUREMENT SYSTEM
CN111257902A (zh) * 2019-12-17 2020-06-09 北京理工大学 一种基于四象限探测器的调频测距系统及方法
US11579272B2 (en) 2019-12-23 2023-02-14 Toyota Motor Engineering & Manufacturing North America, Inc. Method and reflect array for alignment calibration of frequency modulated LiDAR systems
US11480662B2 (en) 2020-02-12 2022-10-25 Aptiv Technologies Limited Fast-scanning frequency-modulated continuous wave (FMCW) lidar systems
KR102275387B1 (ko) * 2020-02-25 2021-07-09 한화시스템 주식회사 소형 표적 검출 장치 및 방법
ES2868473B2 (es) 2020-04-21 2022-02-28 Mouro Labs S L Sistema LIDAR con cambio de frecuencia Doppler suprimido
EP3916424A1 (de) 2020-05-25 2021-12-01 Scantinel Photonics GmbH Vorrichtung und verfahren zur scannenden messung des abstands zu einem objekt
CN111562564B (zh) * 2020-05-25 2022-04-15 浙江光珀智能科技有限公司 一种调频连续波激光测距非线性校正装置及方法
US11454724B2 (en) * 2020-06-12 2022-09-27 Ours Technology, Llc Lidar beam walk-off correction
US11428785B2 (en) * 2020-06-12 2022-08-30 Ours Technology, Llc Lidar pixel with active polarization control
US11592562B2 (en) 2020-06-22 2023-02-28 LightIC Technologies HK Limited Continuous-wave light detection and ranging (LiDAR) system
US11740338B2 (en) 2020-07-02 2023-08-29 Aptiv Technologies Limited Resolving return signals among pixels in frequency-modulated continuous-wave (FMCW) lidar systems
US11940566B2 (en) * 2020-07-07 2024-03-26 Silc Technologies, Inc. Sequencing of signals in LIDAR systems
US11726206B2 (en) 2020-08-25 2023-08-15 Pony Ai Inc. Systems and methods for linearizing non-linear chirp signals
US11740354B2 (en) 2020-09-30 2023-08-29 Pony Ai Inc. Methods of linearizing non-linear chirp signals
US20220120900A1 (en) * 2020-10-15 2022-04-21 Waymo Llc Light detection and ranging device using combined pulse and continuous optical signals
US10976415B1 (en) * 2020-11-09 2021-04-13 Aeva, Inc. Techniques for image conjugate pitch reduction
FR3116615B1 (fr) * 2020-11-24 2022-11-11 Scintil Photonics Puce photonique et composant photonique integrant une telle puce
CN112859256B (zh) * 2021-01-07 2022-07-08 天津大学 一种基于图像识别的光栅耦合器定位测量方法
CN112953645B (zh) * 2021-01-27 2023-02-28 吉林大学 一种同时实现激光测距与通信的系统与方法
EP4199378A1 (en) * 2021-12-20 2023-06-21 Imec VZW A photonics device and a method for suppressing backreflections in a photonics device
US11719895B1 (en) 2022-02-24 2023-08-08 Globalfoundries U.S. Inc. Spot-size converters with angled facets
DE102023204477A1 (de) 2022-05-12 2023-11-16 Carl Zeiss Smt Gmbh Mikroelektromechanisches System (MEMS)
CN114942424B (zh) * 2022-07-25 2022-11-25 苏州旭创科技有限公司 激光雷达芯片和激光雷达

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0659038A (ja) * 1992-08-07 1994-03-04 Nissan Motor Co Ltd 車両用レーザレーダ
CN101561554A (zh) * 2009-05-20 2009-10-21 中国科学院上海光学精密机械研究所 相位可控双折射空间光桥接器
CN104698541A (zh) * 2015-03-09 2015-06-10 哈尔滨工程大学 一种径向偏振光产生装置
CN107272013A (zh) * 2017-08-02 2017-10-20 周虎基 激光雷达装置与激光雷达检测系统

Family Cites Families (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394060A (en) * 1981-04-15 1983-07-19 Canon Kabushiki Kaisha Light beam scanning system with saw transducer
JPH0681098B2 (ja) * 1985-09-06 1994-10-12 日本電信電話株式会社 光デイジタル送信器
JPH04371911A (ja) 1991-06-21 1992-12-24 Hitachi Ltd 光アイソレータおよび希土類添加ファイバ光増幅装置
US5139879A (en) 1991-09-20 1992-08-18 Allied-Signal Inc. Fluoropolymer blend anti-reflection coatings and coated articles
US5499132A (en) 1992-05-13 1996-03-12 Matsushita Electric Industrial Co., Ltd. Optical passive components
US5835199A (en) * 1996-05-17 1998-11-10 Coherent Technologies Fiber-based ladar transceiver for range/doppler imaging with frequency comb generator
US5852492A (en) * 1996-06-07 1998-12-22 Lockheed Martin Vought Systems Corp. Fused lasar range/intensity image display for a human interpretation of lasar data
US6229947B1 (en) 1997-10-06 2001-05-08 Sandia Corporation Tapered rib fiber coupler for semiconductor optical devices
JPH11218721A (ja) 1997-11-07 1999-08-10 Samsung Electronics Co Ltd 多段複合光学装置
EP0989443A3 (en) 1998-09-22 2004-03-31 Fuji Photo Film Co., Ltd. Anti-reflection film and process for the preparation of the same
US6480331B1 (en) 1999-11-10 2002-11-12 Avanex Corporation Reflection-type polarization-independent optical isolator, optical isolator/amplifier/monitor, and optical system
JP2001201573A (ja) * 2000-01-20 2001-07-27 Mitsubishi Electric Corp コヒーレントレーザレーダ装置および目標測定方法
JP2001264694A (ja) 2000-03-15 2001-09-26 Shin Etsu Chem Co Ltd 偏波無依存型光アイソレータ
JP3771777B2 (ja) * 2000-05-12 2006-04-26 三菱電機株式会社 レーザレーダ装置
US6442310B1 (en) 2000-07-14 2002-08-27 Jds Uniphase Inc. Optical coupling device and method
AU2002364688A1 (en) 2001-04-03 2003-06-10 Little Optics, Inc. Optical waveguide mode transformer
US6962345B2 (en) 2002-02-15 2005-11-08 Dana Corporation MLS gasket with bore edge stopper bead
US7031574B2 (en) 2002-07-10 2006-04-18 Finisar Corporation Plug-in module for providing bi-directional data transmission
US6839170B2 (en) 2002-10-15 2005-01-04 Oplink Communications, Inc. Optical isolator
WO2004061476A1 (ja) * 2002-12-27 2004-07-22 Mitsubishi Denki Kabushiki Kaisha レーザーレーダ装置
US7359593B2 (en) 2003-10-09 2008-04-15 Infinera Corporation Integrated optical mode shape transformer and method of fabrication
JP4672273B2 (ja) 2004-03-24 2011-04-20 富士通株式会社 波長多重光伝送システム及びそれにおける送信波長制御方法
ITRM20040291A1 (it) * 2004-06-16 2004-09-16 Alenia Spazio Spa Apparato di separzione di fascio per lidar monostatici.
US20060002443A1 (en) 2004-06-30 2006-01-05 Gennady Farber Multimode external cavity semiconductor lasers
JP5112870B2 (ja) * 2004-09-28 2013-01-09 キネテイツク・リミテツド 周波数掃引の直線性が改善された周波数変調持続波（ｆｍｃｗ）レーダ
GB0421520D0 (en) * 2004-09-28 2004-10-27 Qinetiq Ltd Frequency modulated continuous wave (FMCW) radar having improved frquency sweep linearity
ATE530113T1 (de) * 2005-02-14 2011-11-15 Digital Signal Corp Laserradarsystem sowie verfahren zur bereitstellung von gechirpter elektromagnetischer strahlung
US7139446B2 (en) * 2005-02-17 2006-11-21 Metris Usa Inc. Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
WO2008121159A2 (en) * 2006-10-19 2008-10-09 Los Alamos National Security Llc Active terahertz metamaterial devices
US7481588B2 (en) 2006-11-21 2009-01-27 Kvh Industries, Inc. Optical fiber composite, devices, and methods of making same
US8891069B2 (en) * 2007-10-09 2014-11-18 Windar Photonics A/S Coherent LIDAR system based on a semiconductor laser and amplifier
US8836439B2 (en) * 2007-10-12 2014-09-16 Los Alamos National Security Llc Dynamic frequency tuning of electric and magnetic metamaterial response
US8121450B2 (en) 2007-12-12 2012-02-21 Lightwire, Inc. Coupling between free space and optical waveguide using etched coupling surfaces
US8674792B2 (en) * 2008-02-07 2014-03-18 Toyota Motor Engineering & Manufacturing North America, Inc. Tunable metamaterials
JP5752040B2 (ja) * 2008-09-11 2015-07-22 ニコン・メトロロジー・エヌヴェ 対チャープｆｍｃｗコヒーレントレーザレーダー用の小型の光ファイバ配置
US8193555B2 (en) 2009-02-11 2012-06-05 Megica Corporation Image and light sensor chip packages
US8934509B2 (en) * 2009-11-23 2015-01-13 Lockheed Martin Corporation Q-switched oscillator seed-source for MOPA laser illuminator method and apparatus
WO2011084863A2 (en) * 2010-01-07 2011-07-14 Cheetah Omni, Llc Fiber lasers and mid-infrared light sources in methods and systems for selective biological tissue processing and spectroscopy
CN102004255B (zh) * 2010-09-17 2012-07-04 中国科学院上海技术物理研究所 啁啾调幅激光雷达距离-多普勒零差探测系统
US8878095B2 (en) 2010-12-17 2014-11-04 Electro Scientific Industries, Inc. Reducing back-reflection in laser micromachining systems
EP2689233A1 (en) * 2011-03-22 2014-01-29 Research Triangle Institute, International Optical sensing device for sensing analytes and related apparatus and methods
KR101883946B1 (ko) * 2012-01-03 2018-07-31 현대모비스 주식회사 밸런스 구조의 ｆｍｃｗ 레이더 장치
US10288805B2 (en) 2012-02-13 2019-05-14 Mellanox Technologies Silicon Photonics Inc. Coupling between optical devices
US9638799B2 (en) * 2012-11-21 2017-05-02 Nikon Corporation Scan mirrors for laser radar
US10119816B2 (en) * 2012-11-21 2018-11-06 Nikon Metrology Nv Low drift reference for laser radar
US10180496B2 (en) * 2012-11-21 2019-01-15 Nikon Corporation Laser radar with remote local oscillator
US8908251B2 (en) * 2013-01-30 2014-12-09 Hrl Laboratories, Llc Tunable optical metamaterial
US9285461B2 (en) * 2013-03-12 2016-03-15 Nokia Technologies Oy Steerable transmit, steerable receive frequency modulated continuous wave radar transceiver
DE102013211846A1 (de) * 2013-06-21 2014-12-24 Robert Bosch Gmbh Verfahren zum Betrieb eines Umfelderfassungssystems eines Fahrzeugs
US9683928B2 (en) 2013-06-23 2017-06-20 Eric Swanson Integrated optical system and components utilizing tunable optical sources and coherent detection and phased array for imaging, ranging, sensing, communications and other applications
US9470913B2 (en) * 2013-07-01 2016-10-18 The Boeing Company Integrated photonic frequency converter and mixer
US9122037B2 (en) 2013-07-18 2015-09-01 Cisco Technology, Inc. Coupling system for optical fibers and optical waveguides
US9720218B2 (en) 2013-08-06 2017-08-01 Howard Hughes Medical Institute Volume imaging
KR101896726B1 (ko) * 2013-12-02 2018-09-07 주식회사 만도 Cw 레이더 센싱 신호 및 fmcw 레이더 센싱 신호 기반의 주변 환경 감지 방법 및 장치
CN103760548B (zh) * 2014-01-09 2016-02-03 中国科学院电子学研究所 一种基于相干体制激光雷达波形的信号处理方法
WO2015184406A1 (en) * 2014-05-30 2015-12-03 Texas Tech University System Hybrid fmcw-intererometry radar for positioning and monitoring and methods of using the same
CN104035101B (zh) * 2014-06-12 2016-03-30 中国科学院上海技术物理研究所 基于强度编码的合成孔径激光雷达系统
GB201411206D0 (en) * 2014-06-24 2014-08-06 Sec Dep For Business Innovation & Skills The And Usw Commercial Services Ltd Dual laser frequency sweep interferometry system and method
CN106461785B (zh) 2014-06-27 2018-01-19 Hrl实验室有限责任公司 压缩扫描激光雷达
CN111337936A (zh) 2015-01-20 2020-06-26 托里派因斯洛基股份有限责任公司 单孔激光测距仪
US10324261B2 (en) 2015-02-18 2019-06-18 Technische Universiteit Eindhoven Multi-port optical probe for photonic IC characterization and packaging
US9335480B1 (en) 2015-03-17 2016-05-10 Huawei Technologies Co., Ltd. Optical alignment using multimode edge couplers
WO2016210401A1 (en) * 2015-06-26 2016-12-29 Mezmeriz Inc. Beat signal bandwidth compression method, apparatus, and applications
US9704260B2 (en) * 2015-07-28 2017-07-11 The Nielsen Company (Us), Llc Methods and apparatus to improve detection and false alarm rate over image segmentation
US9673847B1 (en) * 2015-11-25 2017-06-06 Analog Devices, Inc. Apparatus and methods for transceiver calibration
CN108603758A (zh) 2015-11-30 2018-09-28 卢米诺技术公司 具有分布式激光器和多个传感器头的激光雷达系统和激光雷达系统的脉冲激光器
CN105549001B (zh) * 2015-12-02 2019-01-04 大连楼兰科技股份有限公司 车载毫米波雷达系统多目标检测方法
CN105425224B (zh) * 2015-12-02 2019-01-04 大连楼兰科技股份有限公司 车载毫米波雷达系统多目标个数获取方法及装置
US9823118B2 (en) 2015-12-26 2017-11-21 Intel Corporation Low power, high resolution solid state LIDAR circuit
CN105529538B (zh) * 2016-01-12 2018-12-18 电子科技大学 一种基于连续光栅结构的高功率毫米波宽带模式变换器
US20170336565A1 (en) 2016-05-20 2017-11-23 Judson D. Ryckman Single mode optical coupler
CN205982626U (zh) * 2016-06-30 2017-02-22 南京信息工程大学 基于双标准具的测速系统
US20180081031A1 (en) * 2016-09-19 2018-03-22 Delphi Technologies, Inc. Coherent lidar system for automated vehicles
CN106443634A (zh) * 2016-10-31 2017-02-22 上海博未传感技术有限公司 一种固态激光雷达系统
US10886437B2 (en) 2016-11-03 2021-01-05 Lumileds Llc Devices and structures bonded by inorganic coating
CN106772407A (zh) * 2016-12-02 2017-05-31 深圳市镭神智能系统有限公司 基于mems微镜扫描的激光雷达系统
CN106707291B (zh) * 2016-12-09 2020-01-03 中国科学技术大学 一种双频线性调频相干测风激光雷达
US9810775B1 (en) * 2017-03-16 2017-11-07 Luminar Technologies, Inc. Q-switched laser for LIDAR system
US10254762B2 (en) 2017-03-29 2019-04-09 Luminar Technologies, Inc. Compensating for the vibration of the vehicle
US10615568B2 (en) * 2017-07-12 2020-04-07 GM Global Technology Operations LLC Antireflection structure for integrated laser diode/photonic chip interface
US11226403B2 (en) * 2017-07-12 2022-01-18 GM Global Technology Operations LLC Chip-scale coherent lidar with integrated high power laser diode
US11726184B2 (en) * 2019-03-08 2023-08-15 Leddartech Inc. Component for a LIDAR sensor system, LIDAR sensor system, LIDAR sensor device, method for a LIDAR sensor system and method for a LIDAR sensor device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0659038A (ja) * 1992-08-07 1994-03-04 Nissan Motor Co Ltd 車両用レーザレーダ
CN101561554A (zh) * 2009-05-20 2009-10-21 中国科学院上海光学精密机械研究所 相位可控双折射空间光桥接器
CN104698541A (zh) * 2015-03-09 2015-06-10 哈尔滨工程大学 一种径向偏振光产生装置
CN107272013A (zh) * 2017-08-02 2017-10-20 周虎基 激光雷达装置与激光雷达检测系统

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