CN109254277B - 具有单个2d mems扫描器的芯片级lidar - Google Patents

具有单个2d mems扫描器的芯片级lidar Download PDF

Info

Publication number
CN109254277B
CN109254277B CN201810762725.2A CN201810762725A CN109254277B CN 109254277 B CN109254277 B CN 109254277B CN 201810762725 A CN201810762725 A CN 201810762725A CN 109254277 B CN109254277 B CN 109254277B
Authority
CN
China
Prior art keywords
light beam
photonic chip
fiber
scanner
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810762725.2A
Other languages
English (en)
Other versions
CN109254277A (zh
Inventor
K·萨亚赫
O·叶菲莫夫
P·R·帕特森
R·萨基西安
J·H·莎夫纳
B·黄
D·哈蒙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GM Global Technology Operations LLC
Original Assignee
GM Global Technology Operations LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GM Global Technology Operations LLC filed Critical GM Global Technology Operations LLC
Publication of CN109254277A publication Critical patent/CN109254277A/zh
Application granted granted Critical
Publication of CN109254277B publication Critical patent/CN109254277B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/003—Bistatic lidar systems; Multistatic lidar systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/86—Combinations of lidar systems with systems other than lidar, radar or sonar, e.g. with direction finders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4911—Transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4913—Circuits for detection, sampling, integration or read-out
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4913—Circuits for detection, sampling, integration or read-out
    • G01S7/4914—Circuits for detection, sampling, integration or read-out of detector arrays, e.g. charge-transfer gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating
    • G01S7/4972—Alignment of sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/27—Optical coupling means with polarisation selective and adjusting means
    • G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
    • G02B6/2766—Manipulating the plane of polarisation from one input polarisation to another output polarisation, e.g. polarisation rotators, linear to circular polarisation converters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback
    • G02B6/4208—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback using non-reciprocal elements or birefringent plates, i.e. quasi-isolators
    • G02B6/4209—Optical features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
    • H01L31/16—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the semiconductor device sensitive to radiation being controlled by the light source or sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/125—Distributed Bragg reflector [DBR] lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/03—Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B2006/0098—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings for scanning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
    • H01L2223/54486—Located on package parts, e.g. encapsulation, leads, package substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Traffic Control Systems (AREA)

Abstract

LIDAR系统、LIDAR芯片和制造LIDAR芯片的方法。该LIDAR系统包括光子芯片，其配置为发射所发射光束并且接收反射光束；扫描器，其用于将发射光束引导朝向空间中的方向并且从选定方向接收反射光束；以及基于光纤的光学耦合器。该光子芯片和该扫描器被放置在半导体集成平台(SIP)上。该基于光纤的光学耦合器被放置在该光子芯片的顶部以光学地耦合到该光子芯片用于将来自该光子芯片的发射光束引导到该扫描器，并且用于将来自该扫描器的反射光束引导到该光子芯片。

Description

具有单个2D MEMS扫描器的芯片级LIDAR
技术领域
本公开涉及LIDAR(光检测和测距)系统，并且具体地涉及一种形成在芯片上的LIDAR系统。
背景技术
LIDAR是一种遥感方法，它使用脉冲或频率或相位调制激光形式的光来测量选定物体的范围和其它参数。LIDAR系统的使用日益地需要减小外形尺寸和具有更轻的重量，同时仍然提供可靠的测量。因此，希望提供一种重量轻且体积小的LIDAR系统。
发明内容
在一个示例性实施例中，公开了一种LIDAR系统。该LIDAR系统包括光子芯片，其配置为发射所发射光束并且接收反射光束；扫描器，其用于将发射光束引导朝向空间中的方向并且从选定方向接收反射光束；以及基于光纤的光学耦合器，其用于将来自该光子芯片的发射光引导到该扫描器并且用于将来自该扫描器的反射光引导到该光子芯片。
除了本文描述的一个或多个特征以外，该基于光纤的光学耦合器进一步包括基于光纤的环行器和基于光纤的准直器。第一光纤提供发射光束从该光子芯片到该基于光纤的环行器的光学传送，而第二光纤提供反射光束从该基于光纤的环行器到光子芯片的光学传送。该光子芯片进一步包括发射器光束边缘或光栅耦合器，其与该第一光纤对准用于将所发射光束发射到该基于光纤的环行器；以及接收器光束边缘或光栅耦合器，其与该第二光纤对准以用于将该反射光束发射到该光子芯片。该光子芯片和扫描器被设置在半导体集成平台上，而该基于光纤的光学耦合器被设置在光子芯片的顶部上。该系统进一步包括处理器，其配置为操作该光子芯片以产生该发射光并且接收与该反射光有关的数据以便确定物体的参数，该物体经由与该发射光的相互作用而产生该反射光。在各种实施例中，光源是分布式布拉格光栅激光二极管，而扫描器是二维微机电(MEMS)扫描器。
在另一示例性实施例中，公开了一种制造LIDAR芯片的方法。该方法包括将光子芯片和扫描器放置在半导体集成平台(SIP)上、将基于光纤的光学耦合器放置在该光子芯片的顶部以光学地耦合到该光子芯片用于将来自该光子芯片的发射光束引导到该扫描器，并且用于将来自该扫描器的反射光束引导到该光子芯片。
除了本文描述的一个或多个特征以外，该基于光纤的光学耦合器进一步包括基于光纤的环行器和基于光纤的准直器。该基于光纤的光学耦合器被放置在该光子芯片的顶部，以经由第一光纤和第二光纤将该基于光纤的环行器光学地耦合到该光子芯片。具体地，该基于光纤的耦合器被沉积在该光子芯片上，使得该光子芯片的发射器光束边缘或光栅耦合器与该第一光纤对准并且该光子芯片的接收器光束边缘或光栅耦合器与该第二光纤对准。通过将该SIP耦合到包括处理器的印刷电路板来将该光子芯片耦合到该处理器。在各种实施例中，该印刷电路板包括模数转换器。
在又一示例性实施例中，公开了一种LIDAR芯片。该LIDAR芯片包括半导体集成平台(SIP)；光子芯片，其耦合到SIP的顶表面并且配置为发射所发射光束并接收反射光束；扫描器，其耦合到该SIP的顶表面并且配置为将发射光束引导朝向空间中的选定方向并从选定方向接收反射光束；以及基于光纤的光学耦合器，其被沉积在该光子芯片的顶部用于将来自该光子芯片的发射光引导到该扫描器并且用于将来自该扫描器的反射光引导到该光子芯片。
除了本文描述的一个或多个特征以外，该基于光纤的光学耦合器进一步包括基于光纤的环行器和基于光纤的准直器。第一光纤提供发射光束从该光子芯片到该基于光纤的环行器的光学传送，而第二光纤提供反射光束从该基于光纤的环行器到光子芯片的光学传送。该光子芯片进一步包括发射器光束边缘或光栅耦合器，其与该第一光纤对准用于将所发射光束发射到该基于光纤的环行器；以及接收器光束边缘或光栅耦合器，其与该第二光纤对准以用于将该反射光束发射到该光子芯片。该SIP耦合到包括处理器的印刷电路板。该处理器配置为向与该光子芯片相关联的光源提供波形，从该光子芯片的光电检测器接收数据，并且根据从该光子芯片接收的数据来确定物体的参数。
从结合附图取得的本公开的最佳模式的以下详细描述，上述特征和优点以及本公开的其它特征和优点容易地显而易见。
附图说明
其它特征、优点和细节仅借助于示例出现在以下详细描述中，该详细描述参考附图，其中：
图1示出了LIDAR系统的框图；
图2示出了适用于图1的LIDAR系统的示例性光子芯片；
图3A示出了示例性实施例中的组装式LIDAR芯片的侧视图；
图3B示出了集成LIDAR芯片的俯视图；并且
图4示出了说明制造LIDAR光子芯片的方法的流程图。
具体实施方式
以下描述仅仅具有示例性本质并且不旨在限制本公开、其应用或用途。应当理解的是，在整个附图中，对应的附图标号指示相同或对应的部分和特征。
根据示例性实施例，图1示出了LIDAR系统100的框图。LIDAR系统100包括光子芯片102、光学耦合器104和微机电系统(MEMS)扫描器106。处理器108控制光子芯片102的操作以便执行LIDAR系统100的操作。在各种实施例中，LIDAR系统100被设置在驻留于印刷电路板上的半导体集成芯片上。如关于图2进一步详细讨论，光子芯片102包括光源，诸如激光器、光学波导网络和一组光电二极管。激光器产生发射光束115，其朝向物体110发射。由于物体110与发射光束115的相互作用而产生的反射光束117在一组光电二极管中与发射光束的一部分(<10％)光学混合。处理器108通过控制调制光源的波形来控制光源的操作。处理器108进一步从光电二极管接收数据，并且根据该数据来确定物体110的各种参数。
在操作中，处理器108控制光子芯片102的光源以产生发射光束115。发射光束115通过光学耦合器104，其准直发射光束115并且将发射光束115引导朝向MEMS扫描器106。MEMS扫描器106使发射光束115在一定角度范围内转向进入LIDAR系统100的周围区域。
MEMS扫描器106包括振动构件，诸如振动镜。处理器108控制振动构件的振荡以便使发射光束115在选定角度范围内转向。在各种实施例中，MEMS扫描器106是二维(2D)MEMS，并且处理器108控制振动构件在两个角度方向上的振荡，诸如方位角和仰角。
当物体110与发射光束115相互作用时，形成反射光束117。在MEMS扫描器106处接收反射光束117的一部分。MEMS扫描器106将反射光束117引导到光学耦合器104中，该光学耦合器将反射光束117改向到光子芯片102中。
在各种实施例中，LIDAR系统100可以与车辆相关联，并且物体110可以是车辆外部的任何物体，诸如另一台车辆、行人、电线杆等。LIDAR系统100确定诸如范围、多普勒效应以及物体110的方位角和仰角等参数，并且车辆使用这些参数来相对于物体110进行导航以避免与物体110接触。
图2示出了适用于图1的LIDAR系统100的示例性光子芯片102。在各种实施例中，光子芯片102是扫描调频连续波(FMCW)LIDAR芯片。在各种实施例中，光子芯片102可以是硅光子芯片。光子芯片102从诸如激光器202等相干光源接收光。激光器202可以独立于光子芯片102，或者可以是光子芯片102的集成部件。激光器202可以是可以进行调频的任何单频激光器。在一个实施例中，激光器202是分布式布拉格反射器(DBR)激光器。在各种实施例中，激光器202产生频率为1550纳米(nm)的光或被认为对人眼安全的其它波长的光。激光器202经由边缘耦合器耦合到发射器波导204，该边缘耦合器从激光器202接收光。发射器波导204将来自激光器202的光经由发射器光束边缘或光栅耦合器220导出光子芯片102作为发射光束115。
本地振荡器(LO)波导206经由位于光源202与边缘或光栅耦合器220之间的定向耦合器/分束器或多模干涉(MMI)耦合器/分束器210光学地耦合到发射器波导204。定向或MMI耦合器/分束器210将来自激光器202的光分束成持续在发射器波导204中传播的发射光束115和在本地振荡器波导206中传播的本地振荡器光束。在各种实施例中，对于发射器波束，分束比可以是90％，而对于本地振荡器波束，分束比可以是10％。本地振荡器光束指向执行光束测量的双平衡光电检测器214。
入射或反射光束117经由接收器光束边缘或光栅耦合器222进入接收器波导208。接收器波导208将反射光束117从接收器光束边缘或光栅耦合器222引导到双平衡光电检测器214。接收器波导208在位于边缘或光栅耦合器222与光电检测器214之间的定向或MMI耦合器/组合器212处光学地耦合到本地振荡器波导206。因此，本地振荡器光束和反射光束117在被接收于双平衡光电检测器214处之前在定向或MMI耦合器/组合器212处彼此相互作用。在各种实施例中，发射器波导204，本地振荡器波导206和接收器波导208可以是光纤。
双平衡光电检测器214检测由于发射器光束从物体110(图1)反射回来而在发射光束115与反射光束117中引起的频率差。双平衡光电检测器214耦合到处理器108(图1)。处理器108(图1)根据频率差来确定物体110的参数，诸如范围或距离、物体110的到达方向以及物体110相对于LIDAR系统100的速度。
图3A示出了示例性实施例中的组装式LIDAR芯片的侧视图300。组装式LIDAR芯片包括光子芯片102、光学耦合器104和MEMS扫描器106。光子芯片102和MEMS扫描器106形成或放置在半导体集成平台(SIP)302的顶表面上。SIP 302固定到印刷电路板320。印刷电路板320可以包括模数转换器和数字信号处理器，诸如图1的处理器108，用于驱动光子芯片102的电子装置并且用于对来自光子芯片102的光电检测器的数据进行后处理。在各种实施例中，光子芯片102包括激光器202(图2)。光学耦合器104被放置在光子芯片102的顶部上，使得发射器光束边缘或光栅耦合器220和接收器光束边缘或光栅耦合器222与光学耦合器104的对应波导对准。光学耦合器104包括基于光纤的环行器306和包封在基板304中并且由该基板支撑的基于光纤的准直器308，该基板可以是塑料基板。包封在基板304中的各种光纤光学地连接环行器306、准直器308以及光学耦合器104的各种输入和输出。典型的光纤312说明了将光子芯片102连接到环行器306的光学波导。图3B示出了示出光学元件之间的光纤连接的更详细视图。
图3B示出了集成LIDAR系统100的俯视图320。俯视图320示出了连接光学耦合器104的各种光学元件的光学波导的细节。具体地，光纤312a提供从发射器光束边缘或光栅耦合器220到环行器306的光学路径。光纤312b提供从环行器306到接收器光束边缘或光栅耦合器222的光学路径。光纤314在环行器306与准直器308之间提供光学路径。
环行器306分离发射光束115和反射光束117的光学路径，使得沿着选定光学路径进入环行器306的反射光束117在光子芯片102的第一位置处被引导到接收器光束边缘或光栅耦合器222中，而经由发射光束边缘或光栅耦合器220在第二位置处离开光子芯片102的发射光束115沿着相同的选定光学路径被引导。
现在参考图3A和3B，离开光子芯片102的发射光束115按顺序传播通过环行器306、准直器308并且从耦合器104中传出以照射在镜310上，该镜将发射光束115反射到MEMS扫描器106上。MEMS扫描器106基于其振动构件的角度定向将发射光束115引导朝向空间中的选定方向。以发射光束115的反方向行进的反射光束117照射在MEMS扫描器106的振动构件上，并且从MEMS扫描器106反射到镜310上并进入准直器308。然后，反射光束117从准直器308通过环行器306并进入光子芯片102。虽然发射光束115和反射光束117在图3A中被示为具有不同的光学路径，但是这仅用于说明目的。在各种实施例中，发射光束115被引导到空间中的选定方向，并且反射光束117从空间中的相同选定方向接收。因此，发射光束115和反射光束117沿着MEMS扫描器106与空间中的选定方向之间的相同光学路径行进。
图4示出了说明制造本文公开的LIDAR光子芯片的方法400的流程图。在框402中，制造光子芯片。光子芯片的制造包括在光子芯片102内形成各种波导(即，发射器光束波导204、本地振荡器波导206和接收器光束波导208)、定向或MMI耦合器/分束器210和212，以及边缘或光栅耦合器220和222。在框404中，还将激光器集成到光子芯片中。在框406中，集成光子芯片102和MEMS扫描器106集成到半导体集成平台(SIP)302上。在框408中，将基于光纤的光学耦合器104放置在光子芯片102的顶部，以便将发射光束边缘或光栅耦合器220与光学耦合器104的光纤312a对准，并且将接收器光束边缘或光栅耦合器222与光学耦合器104的光纤312b对准。在框410中，将SIP 302集成到印刷电路板320上。
虽然已经参考示例性实施例描述了以上公开内容，但是本领域技术人员将会理解，在不脱离本公开内容的范围的情况下，可进行各种改变并且可用等同物替换其元件。另外，在不脱离本公开的实质范围的情况下，可进行许多修改以使特定的情况或材料适应本公开的教导。因此，希望本公开不限于所公开的特定实施例，而是将包括落入本申请范围内的所有实施例。

Claims (4)

1.一种LIDAR系统，包括：
光子芯片，其配置为发射光束并且接收反射光束；
扫描器，其用于将所述发射光束引导朝向空间中的方向并且从选定方向接收所述反射光束；以及
基于光纤的光学耦合器，其用于将来自所述光子芯片的所述发射光束引导到所述扫描器，并且用于将来自所述扫描器的所述反射光束引导到所述光子芯片，其中，所述基于光纤的光学耦合器还包括基于光纤的准直器，以用于接收来自所述扫描器的反射光束；
镜，所述镜用于将从所述光学耦合器中传出的所述发射光束反射到所述扫描器上以及使来自所述扫描器的所述反射光束反射进入所述准直器；
其中所述基于光纤的光学耦合器进一步包括基于光纤的环行器，且来自所述基于光纤的准直器的反射光束穿过所述基于光纤的环行器；
所述系统进一步包括第一光纤，其用于将来自所述光子芯片的所述发射光束光学地传送到所述基于光纤的环行器；以及第二光纤，其用于将来自所述基于光纤的环行器的所述反射光束光学地传送到所述光子芯片；
其中所述光子芯片进一步包括发射器光束边缘或光栅耦合器，其与所述第一光纤对准用于将所述发射光束发射到所述基于光纤的环行器；以及接收器光束边缘或光栅耦合器，其与所述第二光纤对准以用于将所述反射光束发射到所述光子芯片。
2.根据权利要求1所述的LIDAR系统，进一步包括处理器，其配置为操作所述光子芯片以产生所述发射光束并且接收与所述反射光束有关的数据以便确定物体的参数，所述物体经由与所述发射光束的相互作用而产生所述反射光束。
3.一种制造LIDAR芯片的方法，包括：
将光子芯片和扫描器放置在半导体集成平台上；以及
将基于光纤的光学耦合器放置在所述光子芯片的顶部以光学地耦合到所述光子芯片用于将来自所述光子芯片的发射光束引导到所述扫描器，并且用于将来自所述扫描器的反射光束引导到所述光子芯片，其中，所述基于光纤的光学耦合器包括基于光纤的准直器，以用于接收来自所述扫描器的反射光束；
放置镜，所述镜用于将从所述光学耦合器中传出的所述发射光束反射到所述扫描器上，以及使来自所述扫描器的所述反射光束反射进入所述准直器；
其中所述基于光纤的光学耦合器进一步包括基于光纤的环行器，且来自所述基于光纤的准直器的反射光束穿过所述基于光纤的环行器；
所述方法进一步包括将所述基于光纤的光学耦合器放置在所述光子芯片的顶部，以经由第一光纤和第二光纤将所述基于光纤的环行器光学地耦合到所述光子芯片；
所述方法进一步包括将所述基于光纤的耦合器沉积在所述光子芯片上，使得所述光子芯片的发射器光束边缘或光栅耦合器与所述第一光纤对准并且所述光子芯片的接收器光束边缘或光栅耦合器与所述第二光纤对准。
4.根据权利要求3所述的方法，进一步包括经由将所述半导体集成平台耦合到包括处理器的印刷电路板来将所述光子芯片耦合到所述处理器。
CN201810762725.2A 2017-07-12 2018-07-12 具有单个2d mems扫描器的芯片级lidar Active CN109254277B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762531414P 2017-07-12 2017-07-12
US62/531414 2017-07-12
US16/018,831 US11002832B2 (en) 2017-07-12 2018-06-26 Chip-scale LIDAR with a single 2D MEMS scanner
US16/018831 2018-06-26

Publications (2)

Publication Number Publication Date
CN109254277A CN109254277A (zh) 2019-01-22
CN109254277B true CN109254277B (zh) 2023-10-31

Family

ID=64998803

Family Applications (9)

Application Number Title Priority Date Filing Date
CN201810751217.4A Active CN109254278B (zh) 2017-07-12 2018-07-10 相干激光雷达系统的校准与对准
CN201810755436.XA Active CN109254305B (zh) 2017-07-12 2018-07-11 用于同时距离-多普勒感测的双波长激光器芯片级激光雷达
CN201810755828.6A Active CN109254275B (zh) 2017-07-12 2018-07-11 激光二极管光学频率调制线性化算法
CN201810755512.7A Active CN109254296B (zh) 2017-07-12 2018-07-11 异构集成的芯片级激光雷达系统
CN201810755894.3A Active CN109254276B (zh) 2017-07-12 2018-07-11 用于芯片级激光雷达中的无源对准的曲面镜结构的异质集成
CN201810762725.2A Active CN109254277B (zh) 2017-07-12 2018-07-12 具有单个2d mems扫描器的芯片级lidar
CN201810776440.4A Pending CN109254359A (zh) 2017-07-12 2018-07-12 减少集成激光二极管的反射的光子集成电路边缘耦合器结构
CN201910261645.3A Pending CN110389329A (zh) 2017-07-12 2019-04-02 具有集成高功率激光二极管的芯片级相干激光雷达
CN201910440470.2A Active CN110646776B (zh) 2017-07-12 2019-05-24 紧凑光学封装中具有单个mems扫描器的芯片级lidar

Family Applications Before (5)

Application Number Title Priority Date Filing Date
CN201810751217.4A Active CN109254278B (zh) 2017-07-12 2018-07-10 相干激光雷达系统的校准与对准
CN201810755436.XA Active CN109254305B (zh) 2017-07-12 2018-07-11 用于同时距离-多普勒感测的双波长激光器芯片级激光雷达
CN201810755828.6A Active CN109254275B (zh) 2017-07-12 2018-07-11 激光二极管光学频率调制线性化算法
CN201810755512.7A Active CN109254296B (zh) 2017-07-12 2018-07-11 异构集成的芯片级激光雷达系统
CN201810755894.3A Active CN109254276B (zh) 2017-07-12 2018-07-11 用于芯片级激光雷达中的无源对准的曲面镜结构的异质集成

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN201810776440.4A Pending CN109254359A (zh) 2017-07-12 2018-07-12 减少集成激光二极管的反射的光子集成电路边缘耦合器结构
CN201910261645.3A Pending CN110389329A (zh) 2017-07-12 2019-04-02 具有集成高功率激光二极管的芯片级相干激光雷达
CN201910440470.2A Active CN110646776B (zh) 2017-07-12 2019-05-24 紧凑光学封装中具有单个mems扫描器的芯片级lidar

Country Status (3)

Country Link
US (9) US11226403B2 (zh)
CN (9) CN109254278B (zh)
DE (2) DE102019109649A1 (zh)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11226403B2 (en) * 2017-07-12 2022-01-18 GM Global Technology Operations LLC Chip-scale coherent lidar with integrated high power laser diode
US10908372B2 (en) * 2018-03-05 2021-02-02 The Charles Stark Draper Laboratory, Inc. Systems and methods for isolating excitation and signal paths for chip-scale LIDAR
US20200018857A1 (en) * 2018-07-12 2020-01-16 Silc Technologies, Inc. Optical Sensor System
US11796677B2 (en) * 2018-07-19 2023-10-24 Silc Technologies, Inc. Optical sensor system
EP3834012A1 (en) * 2018-08-09 2021-06-16 FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. Lidar and method for optical remote sensing
US11280884B2 (en) * 2018-08-30 2022-03-22 Photodigm Inc. LIDAR instrument and method for operating a LIDAR instrument
JP7406833B2 (ja) * 2018-10-15 2023-12-28 ビフレスト コミュニケーションズ アぺーエス 高性能光受信機を含む光学システム及びその方法
US11280907B2 (en) * 2018-12-28 2022-03-22 Texas Instruments Incorporated Depth imaging system
CN109730923B (zh) * 2019-03-04 2021-02-19 黑龙江中医药大学 辅助耳穴压籽的耳部穴位自动定位装置、定位系统及定位方法
CN109828286B (zh) * 2019-03-08 2021-07-30 上海禾赛科技有限公司 激光雷达
EP3719537B1 (de) 2019-04-04 2021-03-17 Sick Ag Messen von abständen
US11662435B2 (en) * 2019-04-04 2023-05-30 Liturex (Guangzhou) Co. Ltd Chip scale integrated scanning LiDAR sensor
US11079546B2 (en) * 2019-04-22 2021-08-03 Blackmore Sensors & Analytics, LLC. Providing spatial displacement of transmit and receive modes in LIDAR system
CN110068808A (zh) * 2019-05-29 2019-07-30 南京芯视界微电子科技有限公司 激光雷达的接收机装置及激光雷达
CN112346239B (zh) * 2019-08-07 2022-10-18 华为技术有限公司 激光扫描装置
US11714167B2 (en) * 2019-08-21 2023-08-01 Silc Technologies, Inc. LIDAR adapter for use with LIDAR chip
US11556000B1 (en) 2019-08-22 2023-01-17 Red Creamery Llc Distally-actuated scanning mirror
US11320522B1 (en) * 2019-09-17 2022-05-03 Aeva, Inc. System and method for FMCW LIDAR with DC laser
US10845550B1 (en) * 2019-10-18 2020-11-24 The Boeing Company Input coupler for chip-scale laser receiver device
US11385406B2 (en) * 2019-10-29 2022-07-12 Waymo Llc Optical signal routing devices and systems
US11639988B2 (en) 2019-10-29 2023-05-02 GM Global Technology Operations LLC Photonic circulator for a LiDAR device
WO2021097064A1 (en) * 2019-11-12 2021-05-20 Pointcloud Inc. Dual path light detection and ranging system
CN111257902A (zh) * 2019-12-17 2020-06-09 北京理工大学 一种基于四象限探测器的调频测距系统及方法
US11579272B2 (en) 2019-12-23 2023-02-14 Toyota Motor Engineering & Manufacturing North America, Inc. Method and reflect array for alignment calibration of frequency modulated LiDAR systems
US11480662B2 (en) 2020-02-12 2022-10-25 Aptiv Technologies Limited Fast-scanning frequency-modulated continuous wave (FMCW) lidar systems
KR102275387B1 (ko) * 2020-02-25 2021-07-09 한화시스템 주식회사 소형 표적 검출 장치 및 방법
ES2868473B2 (es) 2020-04-21 2022-02-28 Mouro Labs S L Sistema LIDAR con cambio de frecuencia Doppler suprimido
CN111562564B (zh) * 2020-05-25 2022-04-15 浙江光珀智能科技有限公司 一种调频连续波激光测距非线性校正装置及方法
EP3916424A1 (de) 2020-05-25 2021-12-01 Scantinel Photonics GmbH Vorrichtung und verfahren zur scannenden messung des abstands zu einem objekt
US11454724B2 (en) 2020-06-12 2022-09-27 Ours Technology, Llc Lidar beam walk-off correction
US11428785B2 (en) * 2020-06-12 2022-08-30 Ours Technology, Llc Lidar pixel with active polarization control
US11592562B2 (en) * 2020-06-22 2023-02-28 LightIC Technologies HK Limited Continuous-wave light detection and ranging (LiDAR) system
US11740338B2 (en) 2020-07-02 2023-08-29 Aptiv Technologies Limited Resolving return signals among pixels in frequency-modulated continuous-wave (FMCW) lidar systems
US11940566B2 (en) * 2020-07-07 2024-03-26 Silc Technologies, Inc. Sequencing of signals in LIDAR systems
US11971508B2 (en) 2020-07-08 2024-04-30 Aptiv Technologies AG Varying waveforms across frames in frequency-modulated continuous-wave (FMCW) lidar systems
US11726206B2 (en) 2020-08-25 2023-08-15 Pony Ai Inc. Systems and methods for linearizing non-linear chirp signals
US11740354B2 (en) 2020-09-30 2023-08-29 Pony Ai Inc. Methods of linearizing non-linear chirp signals
US20220120900A1 (en) * 2020-10-15 2022-04-21 Waymo Llc Light detection and ranging device using combined pulse and continuous optical signals
US10976415B1 (en) * 2020-11-09 2021-04-13 Aeva, Inc. Techniques for image conjugate pitch reduction
FR3116615B1 (fr) * 2020-11-24 2022-11-11 Scintil Photonics Puce photonique et composant photonique integrant une telle puce
CN112859256B (zh) * 2021-01-07 2022-07-08 天津大学 一种基于图像识别的光栅耦合器定位测量方法
CN112953645B (zh) * 2021-01-27 2023-02-28 吉林大学 一种同时实现激光测距与通信的系统与方法
EP4199378A1 (en) * 2021-12-20 2023-06-21 Imec VZW A photonics device and a method for suppressing backreflections in a photonics device
US11719895B1 (en) 2022-02-24 2023-08-08 Globalfoundries U.S. Inc. Spot-size converters with angled facets
DE102023204477A1 (de) 2022-05-12 2023-11-16 Carl Zeiss Smt Gmbh Mikroelektromechanisches System (MEMS)
CN114942424B (zh) * 2022-07-25 2022-11-25 苏州旭创科技有限公司 激光雷达芯片和激光雷达

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106415309A (zh) * 2014-06-27 2017-02-15 Hrl实验室有限责任公司 扫描激光雷达及其制造方法
CN106443634A (zh) * 2016-10-31 2017-02-22 上海博未传感技术有限公司 一种固态激光雷达系统

Family Cites Families (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394060A (en) * 1981-04-15 1983-07-19 Canon Kabushiki Kaisha Light beam scanning system with saw transducer
JPH0681098B2 (ja) * 1985-09-06 1994-10-12 日本電信電話株式会社 光デイジタル送信器
JPH04371911A (ja) 1991-06-21 1992-12-24 Hitachi Ltd 光アイソレータおよび希土類添加ファイバ光増幅装置
US5139879A (en) 1991-09-20 1992-08-18 Allied-Signal Inc. Fluoropolymer blend anti-reflection coatings and coated articles
US5499132A (en) 1992-05-13 1996-03-12 Matsushita Electric Industrial Co., Ltd. Optical passive components
JPH0659038A (ja) * 1992-08-07 1994-03-04 Nissan Motor Co Ltd 車両用レーザレーダ
US5835199A (en) * 1996-05-17 1998-11-10 Coherent Technologies Fiber-based ladar transceiver for range/doppler imaging with frequency comb generator
US5852492A (en) * 1996-06-07 1998-12-22 Lockheed Martin Vought Systems Corp. Fused lasar range/intensity image display for a human interpretation of lasar data
US6229947B1 (en) 1997-10-06 2001-05-08 Sandia Corporation Tapered rib fiber coupler for semiconductor optical devices
JPH11218721A (ja) 1997-11-07 1999-08-10 Samsung Electronics Co Ltd 多段複合光学装置
EP1754994B1 (en) 1998-09-22 2007-12-12 FUJIFILM Corporation Process for the preparation of an anti-reflection film
US6480331B1 (en) 1999-11-10 2002-11-12 Avanex Corporation Reflection-type polarization-independent optical isolator, optical isolator/amplifier/monitor, and optical system
JP2001201573A (ja) * 2000-01-20 2001-07-27 Mitsubishi Electric Corp コヒーレントレーザレーダ装置および目標測定方法
JP2001264694A (ja) 2000-03-15 2001-09-26 Shin Etsu Chem Co Ltd 偏波無依存型光アイソレータ
JP3771777B2 (ja) * 2000-05-12 2006-04-26 三菱電機株式会社 レーザレーダ装置
US6442310B1 (en) 2000-07-14 2002-08-27 Jds Uniphase Inc. Optical coupling device and method
WO2003044580A2 (en) 2001-04-03 2003-05-30 Little Optics, Inc. Optical waveguide mode transformer
US6962345B2 (en) 2002-02-15 2005-11-08 Dana Corporation MLS gasket with bore edge stopper bead
US7031574B2 (en) 2002-07-10 2006-04-18 Finisar Corporation Plug-in module for providing bi-directional data transmission
US6839170B2 (en) 2002-10-15 2005-01-04 Oplink Communications, Inc. Optical isolator
JP4053542B2 (ja) * 2002-12-27 2008-02-27 三菱電機株式会社 レーザーレーダ装置
US7359593B2 (en) 2003-10-09 2008-04-15 Infinera Corporation Integrated optical mode shape transformer and method of fabrication
JP4672273B2 (ja) 2004-03-24 2011-04-20 富士通株式会社 波長多重光伝送システム及びそれにおける送信波長制御方法
ITRM20040291A1 (it) * 2004-06-16 2004-09-16 Alenia Spazio Spa Apparato di separzione di fascio per lidar monostatici.
US20060002443A1 (en) 2004-06-30 2006-01-05 Gennady Farber Multimode external cavity semiconductor lasers
JP5112870B2 (ja) * 2004-09-28 2013-01-09 キネテイツク・リミテツド 周波数掃引の直線性が改善された周波数変調持続波（ｆｍｃｗ）レーダ
GB0421520D0 (en) * 2004-09-28 2004-10-27 Qinetiq Ltd Frequency modulated continuous wave (FMCW) radar having improved frquency sweep linearity
CN101166947B (zh) * 2005-02-14 2010-05-19 数字信号公司 用于提供线性调频电磁辐射的系统和方法
US7139446B2 (en) * 2005-02-17 2006-11-21 Metris Usa Inc. Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
WO2008121159A2 (en) * 2006-10-19 2008-10-09 Los Alamos National Security Llc Active terahertz metamaterial devices
US7481588B2 (en) 2006-11-21 2009-01-27 Kvh Industries, Inc. Optical fiber composite, devices, and methods of making same
CN101849196A (zh) * 2007-10-09 2010-09-29 丹麦技术大学 基于半导体激光器和放大器的相干激光雷达系统
US8836439B2 (en) * 2007-10-12 2014-09-16 Los Alamos National Security Llc Dynamic frequency tuning of electric and magnetic metamaterial response
US8121450B2 (en) 2007-12-12 2012-02-21 Lightwire, Inc. Coupling between free space and optical waveguide using etched coupling surfaces
US8674792B2 (en) * 2008-02-07 2014-03-18 Toyota Motor Engineering & Manufacturing North America, Inc. Tunable metamaterials
US8687173B2 (en) * 2008-09-11 2014-04-01 Nikon Metrology N.V. Compact fiber optic geometry for a counter chirp FMCW coherent laser radar
US8193555B2 (en) 2009-02-11 2012-06-05 Megica Corporation Image and light sensor chip packages
CN101561554A (zh) * 2009-05-20 2009-10-21 中国科学院上海光学精密机械研究所 相位可控双折射空间光桥接器
US8934509B2 (en) * 2009-11-23 2015-01-13 Lockheed Martin Corporation Q-switched oscillator seed-source for MOPA laser illuminator method and apparatus
WO2011084863A2 (en) * 2010-01-07 2011-07-14 Cheetah Omni, Llc Fiber lasers and mid-infrared light sources in methods and systems for selective biological tissue processing and spectroscopy
CN102004255B (zh) * 2010-09-17 2012-07-04 中国科学院上海技术物理研究所 啁啾调幅激光雷达距离-多普勒零差探测系统
US8878095B2 (en) 2010-12-17 2014-11-04 Electro Scientific Industries, Inc. Reducing back-reflection in laser micromachining systems
US20140080729A1 (en) * 2011-03-22 2014-03-20 Research Triangle Institute, International Optical sensing device for sensing analytes and related apparatus and methods
KR101883946B1 (ko) * 2012-01-03 2018-07-31 현대모비스 주식회사 밸런스 구조의 ｆｍｃｗ 레이더 장치
US10288805B2 (en) 2012-02-13 2019-05-14 Mellanox Technologies Silicon Photonics Inc. Coupling between optical devices
US9638799B2 (en) * 2012-11-21 2017-05-02 Nikon Corporation Scan mirrors for laser radar
US10119816B2 (en) * 2012-11-21 2018-11-06 Nikon Metrology Nv Low drift reference for laser radar
US9618619B2 (en) * 2012-11-21 2017-04-11 Nikon Corporation Radar systems with dual fiber coupled lasers
US8908251B2 (en) * 2013-01-30 2014-12-09 Hrl Laboratories, Llc Tunable optical metamaterial
US9285461B2 (en) * 2013-03-12 2016-03-15 Nokia Technologies Oy Steerable transmit, steerable receive frequency modulated continuous wave radar transceiver
DE102013211846A1 (de) * 2013-06-21 2014-12-24 Robert Bosch Gmbh Verfahren zum Betrieb eines Umfelderfassungssystems eines Fahrzeugs
US9683928B2 (en) * 2013-06-23 2017-06-20 Eric Swanson Integrated optical system and components utilizing tunable optical sources and coherent detection and phased array for imaging, ranging, sensing, communications and other applications
US9470913B2 (en) * 2013-07-01 2016-10-18 The Boeing Company Integrated photonic frequency converter and mixer
US9122037B2 (en) 2013-07-18 2015-09-01 Cisco Technology, Inc. Coupling system for optical fibers and optical waveguides
US9720218B2 (en) 2013-08-06 2017-08-01 Howard Hughes Medical Institute Volume imaging
KR101896726B1 (ko) * 2013-12-02 2018-09-07 주식회사 만도 Cw 레이더 센싱 신호 및 fmcw 레이더 센싱 신호 기반의 주변 환경 감지 방법 및 장치
CN103760548B (zh) * 2014-01-09 2016-02-03 中国科学院电子学研究所 一种基于相干体制激光雷达波形的信号处理方法
WO2015184406A1 (en) * 2014-05-30 2015-12-03 Texas Tech University System Hybrid fmcw-intererometry radar for positioning and monitoring and methods of using the same
CN104035101B (zh) * 2014-06-12 2016-03-30 中国科学院上海技术物理研究所 基于强度编码的合成孔径激光雷达系统
GB201411206D0 (en) * 2014-06-24 2014-08-06 Sec Dep For Business Innovation & Skills The And Usw Commercial Services Ltd Dual laser frequency sweep interferometry system and method
WO2016118637A1 (en) 2015-01-20 2016-07-28 Volfson Leo Single aperture laser range finder
KR102679530B1 (ko) 2015-02-18 2024-06-27 스마트 포토닉스 홀딩 비.브이. 포토닉 ic 특성화 및 패키징을 위한 멀티-포트 광 프로브
CN104698541B (zh) * 2015-03-09 2017-11-21 哈尔滨工程大学 一种径向偏振光产生装置
US9335480B1 (en) 2015-03-17 2016-05-10 Huawei Technologies Co., Ltd. Optical alignment using multimode edge couplers
KR20180030057A (ko) * 2015-06-26 2018-03-21 메즈메리즈, 인코포레이티드. 비트 신호 대역폭 압축 방법, 장치 및 애플리케이션
US9704260B2 (en) * 2015-07-28 2017-07-11 The Nielsen Company (Us), Llc Methods and apparatus to improve detection and false alarm rate over image segmentation
US9673847B1 (en) * 2015-11-25 2017-06-06 Analog Devices, Inc. Apparatus and methods for transceiver calibration
WO2017095817A1 (en) * 2015-11-30 2017-06-08 Luminar Technologies, Inc. Lidar system with distributed laser and multiple sensor heads and pulsed laser for lidar system
CN105549001B (zh) * 2015-12-02 2019-01-04 大连楼兰科技股份有限公司 车载毫米波雷达系统多目标检测方法
CN105425224B (zh) * 2015-12-02 2019-01-04 大连楼兰科技股份有限公司 车载毫米波雷达系统多目标个数获取方法及装置
US9823118B2 (en) 2015-12-26 2017-11-21 Intel Corporation Low power, high resolution solid state LIDAR circuit
CN105529538B (zh) * 2016-01-12 2018-12-18 电子科技大学 一种基于连续光栅结构的高功率毫米波宽带模式变换器
US20170336565A1 (en) 2016-05-20 2017-11-23 Judson D. Ryckman Single mode optical coupler
CN205982626U (zh) * 2016-06-30 2017-02-22 南京信息工程大学 基于双标准具的测速系统
US20180081031A1 (en) * 2016-09-19 2018-03-22 Delphi Technologies, Inc. Coherent lidar system for automated vehicles
US10886437B2 (en) 2016-11-03 2021-01-05 Lumileds Llc Devices and structures bonded by inorganic coating
CN106772407A (zh) * 2016-12-02 2017-05-31 深圳市镭神智能系统有限公司 基于mems微镜扫描的激光雷达系统
CN106707291B (zh) * 2016-12-09 2020-01-03 中国科学技术大学 一种双频线性调频相干测风激光雷达
US9810775B1 (en) * 2017-03-16 2017-11-07 Luminar Technologies, Inc. Q-switched laser for LIDAR system
US10254762B2 (en) 2017-03-29 2019-04-09 Luminar Technologies, Inc. Compensating for the vibration of the vehicle
US11226403B2 (en) * 2017-07-12 2022-01-18 GM Global Technology Operations LLC Chip-scale coherent lidar with integrated high power laser diode
US10615568B2 (en) * 2017-07-12 2020-04-07 GM Global Technology Operations LLC Antireflection structure for integrated laser diode/photonic chip interface
CN107272013A (zh) * 2017-08-02 2017-10-20 周虎基 激光雷达装置与激光雷达检测系统
US11726184B2 (en) * 2019-03-08 2023-08-15 Leddartech Inc. Component for a LIDAR sensor system, LIDAR sensor system, LIDAR sensor device, method for a LIDAR sensor system and method for a LIDAR sensor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106415309A (zh) * 2014-06-27 2017-02-15 Hrl实验室有限责任公司 扫描激光雷达及其制造方法
CN106443634A (zh) * 2016-10-31 2017-02-22 上海博未传感技术有限公司 一种固态激光雷达系统

Also Published As

Publication number Publication date
CN109254296A (zh) 2019-01-22
US20190018121A1 (en) 2019-01-17
US20190018139A1 (en) 2019-01-17
US11002832B2 (en) 2021-05-11
CN109254278B (zh) 2023-04-07
CN109254275B (zh) 2023-07-04
CN109254278A (zh) 2019-01-22
US20190018114A1 (en) 2019-01-17
CN109254275A (zh) 2019-01-22
US10976414B2 (en) 2021-04-13
US20190018110A1 (en) 2019-01-17
CN109254305B (zh) 2023-05-16
US11092671B2 (en) 2021-08-17
US11226403B2 (en) 2022-01-18
US20190018140A1 (en) 2019-01-17
CN110389329A (zh) 2019-10-29
US20190018112A1 (en) 2019-01-17
US10564263B2 (en) 2020-02-18
US10914821B2 (en) 2021-02-09
US11067670B2 (en) 2021-07-20
CN110646776A (zh) 2020-01-03
CN109254276B (zh) 2023-05-09
CN109254277A (zh) 2019-01-22
CN109254305A (zh) 2019-01-22
US20190018198A1 (en) 2019-01-17
US20190018113A1 (en) 2019-01-17
US20190018120A1 (en) 2019-01-17
DE102019114579A1 (de) 2020-01-02
CN109254296B (zh) 2023-07-04
DE102019109649A1 (de) 2019-10-24
CN109254276A (zh) 2019-01-22
CN110646776B (zh) 2023-05-02
CN109254359A (zh) 2019-01-22
US10914822B2 (en) 2021-02-09

Similar Documents

Publication Publication Date Title
CN109254277B (zh) 具有单个2d mems扫描器的芯片级lidar
JP6743761B2 (ja) 測距センサ
CN109799510B (zh) 距离测量传感器
JP5752040B2 (ja) 対チャープｆｍｃｗコヒーレントレーザレーダー用の小型の光ファイバ配置
US11796677B2 (en) Optical sensor system
US11579294B2 (en) Lidar system with integrated frequency shifter for true doppler detection
CN110988911B (zh) 芯片级激光雷达系统的混合光学相位阵列和mems光束控制
CN111077508B (zh) 多光子芯片激光雷达系统架构
US20200018857A1 (en) Optical Sensor System
US11573297B2 (en) Lidar system with integrated circulator
US20200110179A1 (en) Transimpedance amplifier for lidar system
WO2019005258A4 (en) A cw lidar wind velocity sensor for operation on a stratospheric vehicle
CN110907915B (zh) 距离性能增强的芯片级激光雷达
CN110857978B (zh) 单mems反射镜芯片级激光雷达
CN110907916B (zh) 使用背板出射的相干检测
US20230019946A1 (en) Optical device for heterodyne interferometry
WO2024108406A1 (zh) 一种光信号处理装置、芯片、激光雷达和终端
US20230393281A1 (en) Systems and Methods for Flight Navigation Using Lidar Devices

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant