CN110646776A - 紧凑光学封装中具有单个mems扫描器的芯片级lidar - Google Patents
紧凑光学封装中具有单个mems扫描器的芯片级lidar Download PDFInfo
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Abstract
一种LIDAR系统、一种用于LIDAR系统的光耦合器以及一种光连通的方法。LIDAR系统包括光耦合器,该光耦合器具有与光子芯片光连通的芯片侧面和与扫描器光连通的扫描器侧面,光耦合器包括偏振旋转器和双折射光楔。从第一位置朝向光耦合器芯片侧面发射第一光束以经由光耦合器沿着在光耦合器的扫描器侧面的光路引导第一光束。沿着在扫描器侧面的光路接收第二光束,并且朝向第二位置引导第二光束。
Description
引言
本发明涉及芯片级LIDAR(激光雷达)系统,并且具体地涉及用于在LIDAR芯片系统的光子芯片和扫描器之间引导光的光耦合器。
基于芯片的LIDAR系统包括发射和接收光的光子芯片,和将射出光引导至空间中的选定点并且将反射光从空间中的选定点引导至光子芯片的MENS(微机电系统)扫描器。射出光束通常从光子芯片的第一位置离开光子芯片,并且反射光在光子芯片的第二位置进入光子芯片。第一位置和第二位置隔开选定的距离,因此要求射出光和反射光穿过MENS扫描器和光子芯片之间隔开的光路。因此,期望提供一种光耦合设备,引导光沿着第一光路在一个方向上穿过,并且引导光沿着另一光路在另一方向上穿过。
发明内容
在一个示例性实施例中,公开了一种LIDAR系统。该LIDAR系统包括光耦合器,该光耦合器具有与光子芯片光连通的芯片侧面和与扫描器光连通的扫描器侧面,光耦合器包括偏振旋转器和双折射光楔,其中光耦合器将在芯片侧面处从光子芯片的第一位置接收的第一光束沿着光路朝向扫描器引导,并将在扫描器侧面处接收的第二光束沿着光路引导至光子芯片的第二位置。
除本文描述的一个或多个特征外,偏振旋转器是法拉第旋转器。第一光束进入双折射光楔的偏振方向与进入双折射光楔的第二光束的偏振方向不同。第一光束在双折射光楔经历第一折射角,并且第二光束在双折射光楔经历第二折射角,其中第一折射角和第二折射角之间的差异是由于偏振方向的不同。光耦合器还包括准直光学器件。光耦合器还包括在扫描器侧面的偏振器,该偏振器使第一光束和第二光束偏振。在第二位置处的半波片改变第二光束的偏振。光子芯片从第一位置发射第一光束,并在第二位置接收第二光束。扫描器包括在光路中的MENS扫描器,用于将第一光束引导至空间中的选定点,并且从空间中的选定点接收第二光束。
在一个示例性实施例中,公开了一种用于LIDAR系统的光耦合器。该光耦合器包括与光子芯片光连通的芯片侧面、与扫描器光连通的扫描器侧面、偏振旋转器以及双折射光楔。该光耦合器将在芯片侧面处从光子芯片空间的第一位置接收的第一光束沿着扫描器处的光路引导,并将在扫描器侧面接收的第二光束沿着光路引导至光子芯片的第二位置。
除本文描述的一个或多个特征以外,偏振旋转器还包括法拉第旋转器,该法拉第旋转器配置成使至少第二光束的偏振旋转,其中第一光束进入双折射光楔的偏振方向与进入双折射光楔的第二光束的偏振方向不同。光耦合器还包括准直光学器件。光路包括MENS扫描器,该MENS扫描器将第一光束引导至空间中的选定点,并且从空间中的选定点接收第二光束。光耦合器还包括使第一光束和第二光束偏振的偏振器。在第二位置处的半波片改变入射第二光束的偏振。光子芯片的第一位置包括激光器,并且第二位置包括光子芯片的边缘耦合器。
在另一个示例性实施例中,公开了一种光连通的方法。该方法包括从第一位置朝向具有偏振旋转器和双折射光楔的光耦合器发射第一光束,经由光耦合器沿着在光耦合器的扫描器侧面的光路引导第一光束,沿着在扫描器侧面的光路接收第二光束,以及在芯片侧面处朝向光子芯片的第二位置引导第二光束。
除本文描述的一个或多个特征外,偏振旋转器是法拉第旋转器。该方法还包括在法拉第旋转器处使至少第二光束的偏振旋转,和在双折射光楔处基于第一光束和第二光束各自的偏振更改它们的光路。该方法还包括在第二位置使用半波片改变第二光束的偏振。该方法还包括使用光路中的MEMS扫描器将第一光束引导至空间中的选定点,和从空间中的选定点接收第二光束。
结合附图,从下面的具体实施方式中,本发明的上述特征和优点以及其他特征和优点是清楚明白的。
附图说明
其他特征、优点以及细节仅以示例的方式出现在下面的具体实施方式中,具体实施方式参考附图,其中:
图1示出了LIDAR系统的原理图;以及
图2示出了图1的LIDAR系统的详细视图。
具体实施方式
以下描述在本质上仅仅是示例性的,而并非旨在限制本申请及其用途。应当理解,整个附图中,相应的附图标记表示相同或相应的部件和特征。
根据示例性实施例,图1示出了LIDAR系统100的原理图。LIDAR系统100包括光子芯片102、光耦合器104以及微机电系统(MEMS)扫描器106。处理器108控制光子芯片102的操作,以便执行LIDAR系统100的操作。光子芯片102包括光源,诸如激光器、光波导网络以及一组光电二极管。激光器生成发射出光子芯片102的射出光束115。由于射出光束115与物体110的相互作用,在一组光电二极管中反射光束117与射出光束115的小部分(﹤10%)光学混合。处理器108通过控制光源操作的波形来控制光源的操作。处理器108还接收来自光电二极管的数据,然后从该数据确定物体110的各种参数。
在操作中,处理器108控制光子芯片102的光源生成调制的射出光束115。射出光束115穿过光耦合器104,光耦合器104准直射出光束115并将射出光束115朝向MENS扫描器106引导。MEMS扫描器106将射出光束115在角度范围内引导至LIDAR系统100的周围区域中。
MEMS扫描器106包括诸如振动镜之类的振动构件。处理器108控制振动构件的振动,以便在选定的角度范围内引导射出光束115。在各种实施例中,MEMS扫描器106是二维(2D)MEMS扫描器,并且处理器108控制振动构件在两个角度的方向(诸如方位角和仰角)中的振动。
反射光束117在物体110与射出光束115相互作用时形成。在MENS扫描器106处接收反射光束117的部分。MEMS扫描器106将反射光束117引导至光耦合器104中,光耦合器104将反射光束117传递到光子芯片102中。本文参照图2进一步讨论光耦合器104的细节。
在各种实施例中,LIDAR系统100可以与车辆相关联,并且物体110可以是车辆外部的任何物体,诸如另一车辆、行人、电线杆等。LIDAR系统100确定诸如物体110的范围、多普勒、方位角以及仰角之类的参数,然后车辆使用这些参数相对于物体110导航,以避免与物体110接触。
图2示出了图1的LIDAR系统100的详细视图。LIDAR系统100包括光子芯片102、光耦合器104以及MENS扫描器106。在光耦合器104和MENS扫描器106之间的光路中的镜面202将光在光耦合器104和MENS扫描器106之间来回地引导。
在一个实施例中,光子芯片102包括激光器210或其他合适的光源,用于生成从光子芯片102发射的射出光束115。光子芯片102还包括边缘耦合器212,其放置在离激光器210选定距离处,用于在光子芯片102处接收入射光。波导管214被连接至激光器210和边缘耦合器212,以便将来自激光器210的(在激光器后端发射的)光和来自边缘耦合器210的光提供给光电探测器216。光电探测器216根据从激光器210产生的出射光束115和在边缘耦合器212处接收的入射光束117之间获得的光学频率差来确定环境中图1所示物体110的范围和速度。
在替代实施例中,激光器210可以在光子芯片102的另一位置处。然而,对于任何实施例来说,光子芯片102包括第一位置204和第二位置206,其中射出光115从第一位置204离开光子芯片102,反射光117在第二位置206处进入光子芯片102。第一位置204和第二位置206之间具有间距。在各种实施例中,光耦合器104的性能可以选择,以便与光子芯片的第一位置204和第二位置206两者进行光连通。
光耦合器104包括面对光子芯片102的芯片侧面220和面对镜面202的扫描器侧面222。来自光子芯片102的第一位置204的射出光115在芯片侧面220进入光耦合器104。同样,反射光117以光子芯片102的第二位置206的方向在芯片侧面220处离开光耦合器104。在扫描器侧面222,射出光115和反射光117分别在单个点处进入和离开光耦合器104,从而使射出光115和反射光117能够沿着相同的光路行进,尽管方向相反。
从扫描器侧面222离开光耦合器104的射出光被朝向镜面202引导,该镜面202将射出光115重新引导至扫描器106的振动膜228上。扫描器106通过膜228的振动在角度范围内使射出光115的光路转向。该角度范围可以是二维的,以方位角和仰角为特征。因此,沿着与环境中出射光相同的光路行进的入射光被扫描器106和镜面202引导,以投射到光耦合器104上。
回到光耦合器104,光耦合器104包括准直光学器件230、双反射光楔232、法拉第旋转器234以及偏振器236。准直光学器件230包括准直透镜和用于使激光束变圆的变形棱镜对。光耦合器104元件可以在单个光学封装中提供,在LIDAR系统100的制造过程中,该单个光学封装可以作为单个单元放置在光子芯片102和扫描仪器106之间。
在光子芯片102的第一位置204处从激光器210射出的射出光115是发散光束。准直器230将发散光束转换成平行或基本平行的光束。穿过光耦合器104的反射光117是平行或基本平行的光束,直到准直器230将反射光117转换成会聚光束。
双反射光楔232、法拉第旋转器234以及偏振器236用于使射出光115和反射光117的光路分离,使得在光耦合器104的扫描器侧面222上,射出光115和反射光117沿着相同的光路行进,而在光耦合器104的芯片侧面220上,射出光的光路穿过激光器210,而反射光117的光路穿过边缘耦合器112。
双折射材料是这样的材料,在该材料中通过该材料的光所经历的折射率取决于光的偏振和传播方向。双折射光楔232将两个正交偏振光束分离成两个隔开的方向。
法拉第旋转器234通过利用法拉第效应使光的偏振旋转。法拉第旋转器包括暴露于磁场线的透明介质,磁场线以与光束方向近于相同(或相反)的方向对齐。在磁场存在的情况下,在穿过介质的过程中光的偏振方向被连续地旋转。应当理解,在替代实施例中,可以使用其他设备或使光的偏振矢量旋转的偏振旋转器来代替法拉第旋转器234。
射出光束115在穿过光耦合器104时依次遇到准直光学器件230、双折射光楔232、法拉第旋转器234和偏振器236。由激光器210射出的射出光束通常是线性偏振光束。准直光学器件230产生准直线性偏振光束,该光束穿过双折射光楔232。射出光115进入双折射光楔232时的线性偏振方向导致射出光115在双折射光楔232处的第一折射角。法拉第旋转器234使射出光115的光束旋转,并且偏振器236允许具有偏振器236的选定偏振方向的光通过。
在相反方向行进的反射光束117通常是部分偏振光束,这种光束在穿过光耦合器104时依次遇到偏振器236、法拉第旋转器234、双折射光楔232以及准直光学器件230。偏振器236传递具有选定偏振的反射光117,然后法拉第旋转器使反射光117的偏振矢量旋转。反射光117进入双折射光楔232时的偏振方向导致反射光117在双折射光楔232处的第二折射角。双折射光楔232以朝向光子芯片102的第二位置206的方向使反射光117折射,然后准直光学器件230将反射光117聚焦到光子芯片102的第二位置206上。
操作法拉第旋转器234,以使射出光束115进入双折射光楔232的偏振与进入双折射光楔232的反射光束117的偏振不同。因此,射出光束115和反射光束117在双折射光楔232处经历不同的折射角。射出光束的折射角允许从光子芯片102的第一位置204接收的射出光被引导至选定的光路上。反射光束117的折射角允许沿着与射出光相同的光路接收的反射光被引导向光子芯片102的第二位置206。在各种实施例中,选定光耦合器104的芯片侧面220与光子芯片104的第一位置204和第二位置206之间的距离,使得射出光115和反射光117的光路分别与第一位置204和第二位置206对齐。
放置在边缘耦合器212上的半波片240调节反射光束117的偏振,使得进入光子芯片102的光在波导管中具有相同的激光偏振,从而导致可以在光电探测器216处检测到的激光和反射光的相互作用。
虽然上述公开已根据示例性实施例进行了描述,但是本领域技术人员应当理解,在不脱离本发明范围的情况下可以做各种改变,并且可以用等同物代替其元件。此外,在不脱离本公开的基本范围的情况下,可以做许多修改以使具体的情况或材料适应本发明的教导。因此,本发明意在使本发明不限于所公开的具体实施例,而将包括在其范围内的所有实施例。
Claims (10)
1.一种LIDAR系统,所述系统包括:
光耦合器,所述光耦合器具有与光子芯片光连通的芯片侧面和与扫描器光连通的扫描器侧面,所述光耦合器包括偏振旋转器和双折射光楔,其中所述光耦合器将在所述芯片侧面从所述光子芯片的第一位置接收的第一光束沿着光路朝向所述扫描器引导,并且将在所述扫描器侧面接收的第二光束沿着所述光路引导至所述光子芯片的第二位置。
2.根据权利要求1所述的LIDAR系统,其中所述第一光束进入所述双折射光楔的偏振方向与进入所述双折射光楔的所述第二光束的偏振方向不同。
3.根据权利要求1所述的LIDAR系统,其中所述第一光束在所述双折射光楔处经历第一折射角,并且所述第二光束在所述双折射光楔处经历第二折射角,其中所述第一折射角和所述第二折射角之间的差异是由于所述偏振方向的不同。
4.根据权利要求1所述的LIDAR系统,其中所述光耦合器还包括准直光学器件。
5.根据权利要求1所述的LIDAR系统,其中所述光耦合器还包括在扫描器侧面的偏振器,所述偏振器偏使所述第一光束和所述第二光束偏振。
6.根据权利要求1所述的LIDAR系统,还包括在所述第二位置用于改变所述第二光束的偏振的半波片。
7.一种光连通的方法,所述方法包括:
从第一位置朝向具有偏振旋转器和双折射光楔的光耦合器的芯片侧面发射第一光束;
经由所述光耦合器沿着在所述光耦合器的扫描器侧面的光路引导所述第一光束;
沿着在所述扫描器侧面的所述光路接收第二光束;以及
在所述芯片侧面处朝向所述光子芯片的第二位置引导所述第二光束。
8.根据权利要求7所述的方法,其中所述偏振旋转器还包括法拉第旋转器,所述方法还包括在法拉第旋转器处使至少所述第二光束的偏振旋转,和在所述双折射光楔处基于所述第一光束和所述第二光束各自的偏振更改它们的光路。
9.根据权利要求8所述的方法,还包括在所述第二位置使用半波片改变所述第二光束的偏振。
10.根据权利要求7所述的方法,还包括使用在所述光路中的MENS扫描器将所述第一光束引导至空间中的选定点,和从空间中的所述选定点接收所述第二光束。
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