JP2016225414A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2016225414A JP2016225414A JP2015108811A JP2015108811A JP2016225414A JP 2016225414 A JP2016225414 A JP 2016225414A JP 2015108811 A JP2015108811 A JP 2015108811A JP 2015108811 A JP2015108811 A JP 2015108811A JP 2016225414 A JP2016225414 A JP 2016225414A
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Abstract
Description
[第1の実施の形態に係る半導体装置の構造]
まず、第1の実施の形態に係る半導体装置の構造について説明する。図1は、第1の実施の形態に係る半導体装置を例示する断面図である。
次に、第1の実施の形態に係る半導体装置の製造方法について説明する。図2〜図6は、第1の実施の形態に係る半導体装置の製造工程を例示する図である。
第2の実施の形態では、基板接続部材30の過剰な倒れを防止する突起部を設ける例を示す。なお、第2の実施の形態において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。
第2の実施の形態で示した突起部のバリエーションについて説明する。第1の突起部19及び第2の突起部29は、基板接続部材30に接することで、基板接続部材30の過剰な倒れを防止するものであるから、その目的を達成できれば如何なる形状であっても構わないが、ここで好適な例をいくつか示す。なお、ここでは、第1の突起部19についてのみ示すが、第2の突起部29についても同様である。
10 第1の基板
11、21 絶縁層
12、14、22、23 配線層
13 パッド
15、16、24、25 ソルダーレジスト層
15x、16x、24x、25x 開口部
19 第1の突起部
20 第2の基板
21x ビアホール
29 第2の突起部
30 基板接続部材
31 コア
32 はんだめっき
32a はんだペースト
40 第1の半導体チップ
45 突起電極
50 アンダーフィル樹脂
60 モールド樹脂
70、90 バンプ
80 第2の半導体チップ
500 振込治具
500x 収容部
600 傾斜用治具
Claims (10)
- 一方の面に搭載された第1の半導体チップと、前記一方の面と前記第1の半導体チップとの間に形成されて前記第1の半導体チップの外形よりも外側に延出した樹脂と、平面視において前記樹脂の外側に配置された第1のパッドと、を備えた第1の基板と、
一方の面及び前記一方の面の反対面となる他方の面を有し、前記他方の面に第2のパッドを備え、前記第2のパッド側が前記第1のパッド側と対向するように、前記第1の基板の上方に積層された第2の基板と、
前記第1の基板と前記第2の基板との間に設けられ、前記第1の基板と前記第2の基板とを電気的に接続する柱状の基板接続部材と、を有し、
前記第2のパッドは、平面視において、前記樹脂と全部又は一部が重複する位置に設けられ、
前記基板接続部材は、前記第1のパッドと前記第2のパッドとの間に斜めに配置されて、一端が前記第1のパッドと接合され、他端が前記第2のパッドと接合されている半導体装置。 - 前記基板接続部材は、柱状のコアと、前記コアの外周面を被覆するはんだめっきと、を備え、
前記はんだめっきが前記第1のパッド上及び前記第2のパッド上に延伸して、前記第1のパッド及び前記第2のパッドと接合されている請求項1記載の半導体装置。 - 前記コアの一端は前記第1のパッドに接し、他端は前記第2のパッドに接している請求項2記載の半導体装置。
- 前記第2の基板の一方の面に第2の半導体チップが搭載され、
前記第2のパッドと前記第2の半導体チップの電極とは、平面視したときに重なる位置に配置されており、前記第2の基板を貫通する垂直配線を介して電気的に接続されている請求項1乃至3の何れか一項記載の半導体装置。 - 前記第1の基板の一方の面の、前記第1のパッドと前記樹脂との間に、前記第2の基板側に突起して前記基板接続部材と接する第1の突起部が設けられている請求項1乃至4の何れか一項記載の半導体装置。
- 前記第2の基板の他方の面の、前記第2のパッドの周囲で、平面視したときに前記第1の半導体チップと重なる位置とは反対側にあたる位置に、前記第1の基板側に突起して前記基板接続部材と接する第2の突起部が設けられている請求項1乃至5の何れか一項記載の半導体装置。
- 前記第1の基板と前記第2の基板との間に充填された第2の樹脂を有する請求項1乃至6の何れか一項記載の半導体装置。
- 一方の面に搭載された第1の半導体チップと、前記一方の面と前記第1の半導体チップとの間に形成されて前記第1の半導体チップの外形よりも外側に延出した樹脂と、平面視において前記樹脂の外側に配置された第1のパッドと、を備えた第1の基板を準備する工程と、
一方の面及び前記一方の面の反対面となる他方の面を有し、前記他方の面に第2のパッドを備えた第2の基板を準備する工程と、
前記第2のパッド側が前記第1のパッド側と対向するように、前記第1の基板の上方に前記第2の基板を積層し、前記第1の基板と前記第2の基板とを基板接続部材を介して電気的に接続する工程と、を有し、
前記第2のパッドは、平面視において、前記樹脂と全部又は一部が重複する位置に設けられ、
前記基板接続部材は、前記第1のパッドと前記第2のパッドとの間に斜めに配置されて、一端が前記第1のパッドと接合され、他端が前記第2のパッドと接合される半導体装置の製造方法。 - 前記第1の基板の一方の面の、前記第1のパッドと前記樹脂との間に、前記第2の基板側に突起して前記基板接続部材と接する第1の突起部を設ける工程を有する請求項8記載の半導体装置の製造方法。
- 前記第2の基板の他方の面の、前記第2のパッドの周囲で、平面視したときに前記第1の半導体チップと重なる位置とは反対側にあたる位置に、前記第1の基板側に突起して前記基板接続部材と接する第2の突起部を設ける工程を有する請求項8又は9記載の半導体装置の製造方法。
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