JP2016213078A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016213078A5 JP2016213078A5 JP2015096316A JP2015096316A JP2016213078A5 JP 2016213078 A5 JP2016213078 A5 JP 2016213078A5 JP 2015096316 A JP2015096316 A JP 2015096316A JP 2015096316 A JP2015096316 A JP 2015096316A JP 2016213078 A5 JP2016213078 A5 JP 2016213078A5
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- electron
- target
- metal
- ray generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 373
- 239000002184 metal Substances 0.000 claims description 132
- 229910052751 metal Inorganic materials 0.000 claims description 132
- 238000005259 measurement Methods 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 28
- 238000012360 testing method Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000010949 copper Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- 238000000605 extraction Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910001338 liquidmetal Inorganic materials 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000002909 rare earth metal compounds Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 238000004846 x-ray emission Methods 0.000 description 1
Images
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015096316A JP6377572B2 (ja) | 2015-05-11 | 2015-05-11 | Ｘ線発生装置、及びその調整方法 |
| US15/145,107 US10283313B2 (en) | 2015-05-11 | 2016-05-03 | X-ray generator and adjustment method therefor |
| EP16001053.4A EP3093867B1 (en) | 2015-05-11 | 2016-05-10 | X-ray generator and adjustment method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015096316A JP6377572B2 (ja) | 2015-05-11 | 2015-05-11 | Ｘ線発生装置、及びその調整方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016213078A JP2016213078A (ja) | 2016-12-15 |
| JP2016213078A5 true JP2016213078A5 (enExample) | 2018-03-08 |
| JP6377572B2 JP6377572B2 (ja) | 2018-08-22 |
Family
ID=56108434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015096316A Active JP6377572B2 (ja) | 2015-05-11 | 2015-05-11 | Ｘ線発生装置、及びその調整方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10283313B2 (enExample) |
| EP (1) | EP3093867B1 (enExample) |
| JP (1) | JP6377572B2 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
| EP3312868A1 (en) | 2016-10-21 | 2018-04-25 | Excillum AB | Structured x-ray target |
| EP3413691A1 (en) * | 2017-06-08 | 2018-12-12 | Koninklijke Philips N.V. | Apparatus for generating x-rays |
| WO2019236384A1 (en) | 2018-06-04 | 2019-12-12 | Sigray, Inc. | Wavelength dispersive x-ray spectrometer |
| EP3589082A1 (en) * | 2018-06-25 | 2020-01-01 | Excillum AB | Determining width and height of electron spot |
| EP3599619B1 (de) * | 2018-07-25 | 2025-11-19 | Siemens Healthineers AG | Röntgenemitter und verfahren zum erzeugen von röntgenstrahlung |
| CN112470245B (zh) | 2018-07-26 | 2025-03-18 | 斯格瑞公司 | 高亮度x射线反射源 |
| WO2020051061A1 (en) | 2018-09-04 | 2020-03-12 | Sigray, Inc. | System and method for x-ray fluorescence with filtering |
| US11056308B2 (en) | 2018-09-07 | 2021-07-06 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
| CN110049610B (zh) | 2019-04-24 | 2021-01-22 | 上海联影医疗科技股份有限公司 | 焦点大小的控制方法、装置、设备及存储介质 |
| US11152183B2 (en) | 2019-07-15 | 2021-10-19 | Sigray, Inc. | X-ray source with rotating anode at atmospheric pressure |
| US11101098B1 (en) | 2020-04-13 | 2021-08-24 | Hamamatsu Photonics K.K. | X-ray generation apparatus with electron passage |
| US11145481B1 (en) * | 2020-04-13 | 2021-10-12 | Hamamatsu Photonics K.K. | X-ray generation using electron beam |
| US11961694B2 (en) * | 2021-04-23 | 2024-04-16 | Carl Zeiss X-ray Microscopy, Inc. | Fiber-optic communication for embedded electronics in x-ray generator |
| US11864300B2 (en) | 2021-04-23 | 2024-01-02 | Carl Zeiss X-ray Microscopy, Inc. | X-ray source with liquid cooled source coils |
| US12035451B2 (en) | 2021-04-23 | 2024-07-09 | Carl Zeiss X-Ray Microscopy Inc. | Method and system for liquid cooling isolated x-ray transmission target |
| DE102021204540B3 (de) * | 2021-05-05 | 2022-09-29 | Siemens Healthcare Gmbh | Elektronenemittervorrichtung |
| DE102021210851B3 (de) * | 2021-09-28 | 2023-03-02 | Siemens Healthcare Gmbh | Verfahren und System zur Kalibration eines Röntgenstrahlers |
| EP4195235A1 (en) * | 2021-12-08 | 2023-06-14 | Excillum AB | Method and arrangement for an x-ray source |
| US12278080B2 (en) | 2022-01-13 | 2025-04-15 | Sigray, Inc. | Microfocus x-ray source for generating high flux low energy x-rays |
| US12360067B2 (en) | 2022-03-02 | 2025-07-15 | Sigray, Inc. | X-ray fluorescence system and x-ray source with electrically insulative target material |
| WO2023177981A1 (en) | 2022-03-15 | 2023-09-21 | Sigray, Inc. | System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector |
| WO2023215204A1 (en) | 2022-05-02 | 2023-11-09 | Sigray, Inc. | X-ray sequential array wavelength dispersive spectrometer |
| US12213238B2 (en) * | 2022-10-18 | 2025-01-28 | Carl Zeiss X-ray Microscopy, Inc. | Reflection target X-ray source with steered beam on target |
| US12181423B1 (en) | 2023-09-07 | 2024-12-31 | Sigray, Inc. | Secondary image removal using high resolution x-ray transmission sources |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3010815C2 (de) * | 1980-03-20 | 1982-08-19 | Siemens AG, 1000 Berlin und 8000 München | Hochstrom-Elektronenquelle |
| JPS63122985A (ja) * | 1986-11-12 | 1988-05-26 | Mitsubishi Electric Corp | 荷電粒子ビ−ムの密度分布測定装置 |
| US5105456A (en) * | 1988-11-23 | 1992-04-14 | Imatron, Inc. | High duty-cycle x-ray tube |
| DE19614222C1 (de) * | 1996-04-10 | 1997-08-21 | Siemens Ag | Röntgenröhre mit ringförmiger Anode |
| US5892809A (en) * | 1997-09-10 | 1999-04-06 | Wittry; David B. | Simplified system for local excitation by monochromatic x-rays |
| JP2000133178A (ja) | 1998-10-26 | 2000-05-12 | Rigaku Corp | Ｘ線発生装置 |
| GB9906886D0 (en) * | 1999-03-26 | 1999-05-19 | Bede Scient Instr Ltd | Method and apparatus for prolonging the life of an X-ray target |
| JP2002008960A (ja) * | 2000-06-19 | 2002-01-11 | Advantest Corp | ターゲットマーク部材、その製造方法および電子ビーム露光装置 |
| US20040240616A1 (en) * | 2003-05-30 | 2004-12-02 | Applied Nanotechnologies, Inc. | Devices and methods for producing multiple X-ray beams from multiple locations |
| DE10120808C2 (de) * | 2001-04-27 | 2003-03-13 | Siemens Ag | Röntgenröhre, insbesondere Drehkolbenröntgenröhre |
| US7436931B2 (en) * | 2002-12-11 | 2008-10-14 | Koninklijke Philips Electronics N.V. | X-ray source for generating monochromatic x-rays |
| US6965662B2 (en) * | 2002-12-17 | 2005-11-15 | Agilent Technologies, Inc. | Nonplanar x-ray target anode for use in a laminography imaging system |
| US20040240618A1 (en) * | 2003-04-04 | 2004-12-02 | Mcguire Edward L. | Multi-spectrum X-ray generation |
| US7949101B2 (en) * | 2005-12-16 | 2011-05-24 | Rapiscan Systems, Inc. | X-ray scanners and X-ray sources therefor |
| EP1679733A3 (en) * | 2004-01-23 | 2007-04-04 | Tohken Co., Ltd. | X-ray microscopic inspection apparatus |
| JP2010146992A (ja) * | 2008-12-22 | 2010-07-01 | Omron Corp | 走査型ｘ線管 |
| US8259905B2 (en) * | 2009-05-18 | 2012-09-04 | King Fahd University Of Petroleum And Minerals | X-ray tube having a rotating and linearly translating anode |
| DE102010009276A1 (de) | 2010-02-25 | 2011-08-25 | Dürr Dental AG, 74321 | Röntgenröhre sowie System zur Herstellung von Röntgenbildern für die zahnmedizinische oder kieferorthopädische Diagnostik |
| US9380690B2 (en) * | 2010-12-22 | 2016-06-28 | Excillum Ab | Aligning and focusing an electron beam in an X-ray source |
| US8831179B2 (en) * | 2011-04-21 | 2014-09-09 | Carl Zeiss X-ray Microscopy, Inc. | X-ray source with selective beam repositioning |
| US20150117616A1 (en) * | 2012-05-11 | 2015-04-30 | Hamamatsu Photonics K.K. | X-ray generation device and x-ray generation method |
| JP6114981B2 (ja) * | 2012-10-17 | 2017-04-19 | 株式会社リガク | Ｘ線発生装置 |
| US9068927B2 (en) * | 2012-12-21 | 2015-06-30 | General Electric Company | Laboratory diffraction-based phase contrast imaging technique |
| US9008278B2 (en) * | 2012-12-28 | 2015-04-14 | General Electric Company | Multilayer X-ray source target with high thermal conductivity |
| KR20150001214A (ko) * | 2013-06-26 | 2015-01-06 | 삼성전자주식회사 | 엑스선 촬영장치 및 방법 |
| US20150092924A1 (en) * | 2013-09-04 | 2015-04-02 | Wenbing Yun | Structured targets for x-ray generation |
| JP6166145B2 (ja) * | 2013-10-16 | 2017-07-19 | 浜松ホトニクス株式会社 | Ｘ線発生装置 |
-
2015
- 2015-05-11 JP JP2015096316A patent/JP6377572B2/ja active Active
-
2016
- 2016-05-03 US US15/145,107 patent/US10283313B2/en active Active
- 2016-05-10 EP EP16001053.4A patent/EP3093867B1/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6377572B2 (ja) | Ｘ線発生装置、及びその調整方法 | |
| JP2016213078A5 (enExample) | ||
| JP6554288B2 (ja) | 荷電粒子線装置 | |
| CN104241066B (zh) | 对带电粒子设备中的样品成像的方法 | |
| JP6242745B2 (ja) | 荷電粒子線装置及び当該装置を用いる検査方法 | |
| US10274441B2 (en) | Generating an image of an object or a representation of data about the object | |
| US10304654B2 (en) | Charged particle beam device | |
| US11282672B2 (en) | Charged particle beam apparatus and sample processing observation method | |
| JP2010055756A (ja) | 荷電粒子線の照射方法及び荷電粒子線装置 | |
| US12494343B2 (en) | Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distance | |
| EP2124244A1 (en) | Ultra high precision measurement tool with control loop | |
| JP6377578B2 (ja) | Ｘ線発生装置、及びその調整方法 | |
| CN114628209A (zh) | 用于调节粒子束显微镜的方法和粒子束显微镜 | |
| US8471202B2 (en) | Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method | |
| JP6266467B2 (ja) | 電子顕微鏡、およびモノクロメーターの調整方法 | |
| JP2008210702A (ja) | 荷電粒子ビーム装置及び印加電圧制御方法 | |
| JP5458472B2 (ja) | Ｘ線管 | |
| JP2007073517A (ja) | Ｘ線又はｅｕｖを発生させるための装置 | |
| US12327708B2 (en) | Charged particle beam device and aberration correction method | |
| JP2009170322A (ja) | 荷電粒子線装置 | |
| JP5478683B2 (ja) | 荷電粒子線の照射方法及び荷電粒子線装置 | |
| JP3960544B2 (ja) | ビーム調整用試料、ビーム調整方法及びビーム調整装置 | |
| US20120305797A1 (en) | Method and particle beam device for focusing a particle beam | |
| JP4382067B2 (ja) | 回路パターン検査装置 | |
| JP3802525B2 (ja) | 荷電粒子顕微鏡 |