JP6377572B2 - Ｘ線発生装置、及びその調整方法 - Google Patents

Ｘ線発生装置、及びその調整方法 Download PDF

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Publication number
JP6377572B2
JP6377572B2 JP2015096316A JP2015096316A JP6377572B2 JP 6377572 B2 JP6377572 B2 JP 6377572B2 JP 2015096316 A JP2015096316 A JP 2015096316A JP 2015096316 A JP2015096316 A JP 2015096316A JP 6377572 B2 JP6377572 B2 JP 6377572B2
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electron beam
electron
target
metal
cross
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Japanese (ja)
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JP2016213078A (ja
JP2016213078A5 (enExample
Inventor
野々口　雅弘
雅弘 野々口
野口　学
学 野口
加藤　光一
光一 加藤
隆二 西田
隆二 西田
雄二 日下
雄二 日下
将史 影山
将史 影山
友弘 茶木
友弘 茶木
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Rigaku Corp
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Rigaku Corp
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Priority to JP2015096316A priority Critical patent/JP6377572B2/ja
Priority to US15/145,107 priority patent/US10283313B2/en
Priority to EP16001053.4A priority patent/EP3093867B1/en
Publication of JP2016213078A publication Critical patent/JP2016213078A/ja
Publication of JP2016213078A5 publication Critical patent/JP2016213078A5/ja
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/025—X-ray tubes with structurally associated circuit elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/088—Laminated targets, e.g. plurality of emitting layers of unique or differing materials

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • X-Ray Techniques (AREA)
JP2015096316A 2015-05-11 2015-05-11 Ｘ線発生装置、及びその調整方法 Active JP6377572B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015096316A JP6377572B2 (ja) 2015-05-11 2015-05-11 Ｘ線発生装置、及びその調整方法
US15/145,107 US10283313B2 (en) 2015-05-11 2016-05-03 X-ray generator and adjustment method therefor
EP16001053.4A EP3093867B1 (en) 2015-05-11 2016-05-10 X-ray generator and adjustment method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015096316A JP6377572B2 (ja) 2015-05-11 2015-05-11 Ｘ線発生装置、及びその調整方法

Publications (3)

Publication Number Publication Date
JP2016213078A JP2016213078A (ja) 2016-12-15
JP2016213078A5 JP2016213078A5 (enExample) 2018-03-08
JP6377572B2 true JP6377572B2 (ja) 2018-08-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015096316A Active JP6377572B2 (ja) 2015-05-11 2015-05-11 Ｘ線発生装置、及びその調整方法

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US (1) US10283313B2 (enExample)
EP (1) EP3093867B1 (enExample)
JP (1) JP6377572B2 (enExample)

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EP3312868A1 (en) 2016-10-21 2018-04-25 Excillum AB Structured x-ray target
EP3413691A1 (en) * 2017-06-08 2018-12-12 Koninklijke Philips N.V. Apparatus for generating x-rays
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
EP3589082A1 (en) * 2018-06-25 2020-01-01 Excillum AB Determining width and height of electron spot
EP3599619B1 (de) * 2018-07-25 2025-11-19 Siemens Healthineers AG Röntgenemitter und verfahren zum erzeugen von röntgenstrahlung
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
WO2020051061A1 (en) 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis
CN110049610B (zh) 2019-04-24 2021-01-22 上海联影医疗科技股份有限公司 焦点大小的控制方法、装置、设备及存储介质
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
US11101098B1 (en) 2020-04-13 2021-08-24 Hamamatsu Photonics K.K. X-ray generation apparatus with electron passage
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
US11961694B2 (en) * 2021-04-23 2024-04-16 Carl Zeiss X-ray Microscopy, Inc. Fiber-optic communication for embedded electronics in x-ray generator
US11864300B2 (en) 2021-04-23 2024-01-02 Carl Zeiss X-ray Microscopy, Inc. X-ray source with liquid cooled source coils
US12035451B2 (en) 2021-04-23 2024-07-09 Carl Zeiss X-Ray Microscopy Inc. Method and system for liquid cooling isolated x-ray transmission target
DE102021204540B3 (de) * 2021-05-05 2022-09-29 Siemens Healthcare Gmbh Elektronenemittervorrichtung
DE102021210851B3 (de) * 2021-09-28 2023-03-02 Siemens Healthcare Gmbh Verfahren und System zur Kalibration eines Röntgenstrahlers
EP4195235A1 (en) * 2021-12-08 2023-06-14 Excillum AB Method and arrangement for an x-ray source
US12278080B2 (en) 2022-01-13 2025-04-15 Sigray, Inc. Microfocus x-ray source for generating high flux low energy x-rays
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
WO2023215204A1 (en) 2022-05-02 2023-11-09 Sigray, Inc. X-ray sequential array wavelength dispersive spectrometer
US12213238B2 (en) * 2022-10-18 2025-01-28 Carl Zeiss X-ray Microscopy, Inc. Reflection target X-ray source with steered beam on target
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

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JPS63122985A (ja) * 1986-11-12 1988-05-26 Mitsubishi Electric Corp 荷電粒子ビ−ムの密度分布測定装置
US5105456A (en) * 1988-11-23 1992-04-14 Imatron, Inc. High duty-cycle x-ray tube
DE19614222C1 (de) * 1996-04-10 1997-08-21 Siemens Ag Röntgenröhre mit ringförmiger Anode
US5892809A (en) * 1997-09-10 1999-04-06 Wittry; David B. Simplified system for local excitation by monochromatic x-rays
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GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
JP2002008960A (ja) * 2000-06-19 2002-01-11 Advantest Corp ターゲットマーク部材、その製造方法および電子ビーム露光装置
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US8259905B2 (en) * 2009-05-18 2012-09-04 King Fahd University Of Petroleum And Minerals X-ray tube having a rotating and linearly translating anode
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Also Published As

Publication number Publication date
JP2016213078A (ja) 2016-12-15
US10283313B2 (en) 2019-05-07
US20160336140A1 (en) 2016-11-17
EP3093867A1 (en) 2016-11-16
EP3093867B1 (en) 2021-05-05

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