JP2016192486A - 圧電/電歪材料、圧電/電歪体及び共振駆動デバイス - Google Patents
圧電/電歪材料、圧電/電歪体及び共振駆動デバイス Download PDFInfo
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- JP2016192486A JP2016192486A JP2015071565A JP2015071565A JP2016192486A JP 2016192486 A JP2016192486 A JP 2016192486A JP 2015071565 A JP2015071565 A JP 2015071565A JP 2015071565 A JP2015071565 A JP 2015071565A JP 2016192486 A JP2016192486 A JP 2016192486A
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- Prior art keywords
- piezoelectric
- electrostrictive
- moles
- ratio
- sintering
- Prior art date
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- 239000000463 material Substances 0.000 title claims abstract description 42
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 33
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 32
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 32
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 24
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 23
- 150000001875 compounds Chemical class 0.000 claims abstract description 12
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 11
- 238000005245 sintering Methods 0.000 claims description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 29
- 239000011701 zinc Substances 0.000 description 29
- 238000000034 method Methods 0.000 description 18
- 238000000465 moulding Methods 0.000 description 13
- 239000000843 powder Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 239000010936 titanium Substances 0.000 description 6
- 239000007858 starting material Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000001354 calcination Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- HXQQNYSFSLBXQJ-UHFFFAOYSA-N COC1=C(NC(CO)C(O)=O)CC(O)(CO)CC1=NCC(O)=O Chemical compound COC1=C(NC(CO)C(O)=O)CC(O)(CO)CC1=NCC(O)=O HXQQNYSFSLBXQJ-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 1
- JQJCSZOEVBFDKO-UHFFFAOYSA-N lead zinc Chemical compound [Zn].[Pb] JQJCSZOEVBFDKO-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000006072 paste Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 150000003892 tartrate salts Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
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Abstract
【解決手段】ステップS101からステップS105までのステップで形成される圧電/電歪材料は、Pb(Zn,Nb)O3−Pb(Ni,Nb)O3−Pb(Zr,Ti)O3系化合物とMnを含有する。Mnのモル数のNi、Zn、Ti、Zr、Nb及びMnそれぞれのモル数の和に対する比は、0.001以上0.015以下であり。Nbのモル数のNi及びZnそれぞれのモル数の和に対する比は、2.007以上2.125以下である。
【選択図】図1
Description
本実施形態に係る圧電/電歪材料は、Pb(Zn,Nb)O3−Pb(Ni,Nb)O3−Pb(Zr,Ti)O3系化合物を主成分として含有する。本実施形態において、組成物Xが物質Yを「主成分として含む」とは、組成物X全体のうち、物質Yが好ましくは80重量%以上を占め、より好ましくは90重量%以上を占めることを意味する。
上述した圧電/電歪材料を用いた圧電/電歪体の製造方法について説明する。図1は、圧電/電歪体の製造方法を説明するためのフローチャートである。
上述した圧電/電歪体を用いた圧電/電歪デバイスの製造方法について説明する。図2は、共振駆動デバイスの製造方法を説明するためのフローチャートである。
まず、表1に示す組成のPbx[(Zn1/3Nb2/3)a(Ni1/3Nb2/3)b(TicZrd)MneNbf]O3化合物が得られるように、構成元素(Pb、Zr、Ti、Zn、Ni、Mn、Nb)の出発原料の粉末を秤量して混合することによって、圧電/電歪材料を作製した。
Claims (8)
- Pb(Zn,Nb)O3−Pb(Ni,Nb)O3−Pb(Zr,Ti)O3系化合物とMnを含有し、
Mnのモル数のNi、Zn、Ti、Zr、Nb及びMnそれぞれのモル数の和に対する比は、0.001以上0.015以下であり、
Nbのモル数のNi及びZnそれぞれのモル数の和に対する比は、2.007以上2.125以下である、
圧電/電歪材料。 - 一般式Pbx[(Zn1/3Nb2/3)a(Ni1/3Nb2/3)b(TicZrd)MneNbf]O3(ただし、0.98≦x≦1.00、0.2≦a+b≦0.3、0.35≦c≦0.45、0.3≦d≦0.4、0.001≦e≦0.015、0.002≦f≦0.025、2.007≦(2a+2b+f)/(a+b)≦2.125)で表される、
請求項1に記載の圧電/電歪材料。 - 焼結温度が1100℃以下である、
請求項1又は2に記載の圧電/電歪材料。 - Pb(Zn,Nb)O3−Pb(Ni,Nb)O3−Pb(Zr,Ti)O3系化合物とMnを含有する圧電/電歪材料によって構成され、
Mnのモル数のNi、Zn、Ti、Zr、Nb及びMnそれぞれのモル数の和に対する比は、0.001以上0.015以下であり、
Nbのモル数のNi及びZnそれぞれのモル数の和に対する比は、2.007以上2.125以下である、
圧電/電歪体。 - 機械的品質係数Qmが150以上である、
請求項4に記載の圧電/電歪体。 - 圧電定数d31が180pm/V以上である、
請求項4又は5に記載の圧電/電歪体。 - キュリー温度Tcが300℃以上である、
請求項4乃至6のいずれかに記載の圧電/電歪体。 - 請求項4乃至7のいずれかに記載の圧電/電歪体と、
前記圧電/電歪体に接続される一対の電極と、
を備える共振駆動デバイス。
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