JP2016171571A5 - - Google Patents
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- Publication number
- JP2016171571A5 JP2016171571A5 JP2016048065A JP2016048065A JP2016171571A5 JP 2016171571 A5 JP2016171571 A5 JP 2016171571A5 JP 2016048065 A JP2016048065 A JP 2016048065A JP 2016048065 A JP2016048065 A JP 2016048065A JP 2016171571 A5 JP2016171571 A5 JP 2016171571A5
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- electrode
- wave device
- lithium tantalate
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 239000010936 titanium Substances 0.000 claims 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 3
- 229910052719 titanium Inorganic materials 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
Images
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562132046P | 2015-03-12 | 2015-03-12 | |
| US62/132,046 | 2015-03-12 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019217819A Division JP7005579B2 (ja) | 2015-03-12 | 2019-12-02 | 弾性波素子、アンテナデュプレクサ、ダイプレクサ及び通信機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016171571A JP2016171571A (ja) | 2016-09-23 |
| JP2016171571A5 true JP2016171571A5 (enExample) | 2019-03-28 |
Family
ID=55524240
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016048065A Pending JP2016171571A (ja) | 2015-03-12 | 2016-03-11 | 弾性波素子、アンテナデュプレクサ及び電子機器 |
| JP2019217819A Active JP7005579B2 (ja) | 2015-03-12 | 2019-12-02 | 弾性波素子、アンテナデュプレクサ、ダイプレクサ及び通信機器 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019217819A Active JP7005579B2 (ja) | 2015-03-12 | 2019-12-02 | 弾性波素子、アンテナデュプレクサ、ダイプレクサ及び通信機器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10097159B2 (enExample) |
| EP (1) | EP3068049B1 (enExample) |
| JP (2) | JP2016171571A (enExample) |
| KR (1) | KR102526570B1 (enExample) |
| CN (1) | CN105978524A (enExample) |
| SG (1) | SG10201601943WA (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10308522B2 (en) | 2016-05-31 | 2019-06-04 | Skyworks Solutions, Inc. | High Q modified barium magnesium tantalate for high frequency applications |
| JPWO2018092470A1 (ja) * | 2016-11-17 | 2019-06-24 | 株式会社村田製作所 | 弾性波装置 |
| WO2018092511A1 (ja) * | 2016-11-18 | 2018-05-24 | 株式会社村田製作所 | 弾性表面波フィルタおよびマルチプレクサ |
| US10483942B2 (en) | 2017-01-24 | 2019-11-19 | Skyworks Solutions, Inc. | Acoustic wave device with acoustically separated multi-channel feedback |
| JP7068835B2 (ja) | 2018-01-26 | 2022-05-17 | 太陽誘電株式会社 | 弾性波デバイス、フィルタおよびマルチプレクサ |
| WO2022153943A1 (ja) * | 2021-01-12 | 2022-07-21 | 株式会社村田製作所 | 弾性波装置 |
| US12431857B2 (en) | 2021-06-30 | 2025-09-30 | Skyworks Solutions, Inc. | Acoustic wave device with acoustic obstruction structure |
| US12500570B2 (en) | 2021-09-29 | 2025-12-16 | Skyworks Solutions, Inc. | Shear horizontal mode acoustic wave device with multilayer interdigital transducer electrode |
| US20230179171A1 (en) | 2021-12-06 | 2023-06-08 | Skyworks Solutions, Inc. | Multi-band surface acoustic wave filters |
| US12494771B2 (en) | 2022-01-26 | 2025-12-09 | Skyworks Solutions, Inc. | Acoustic-wave receive-side filter topologies |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002176333A (ja) * | 2000-12-07 | 2002-06-21 | Fujitsu Media Device Kk | 弾性表面波フィルタ |
| JP4127170B2 (ja) * | 2003-01-07 | 2008-07-30 | 株式会社村田製作所 | 表面波装置 |
| JP4297139B2 (ja) * | 2003-10-03 | 2009-07-15 | 株式会社村田製作所 | 弾性表面波装置 |
| EP1696562A4 (en) | 2003-12-16 | 2010-07-07 | Murata Manufacturing Co | ACOUSTIC LIMIT WAVE DEVICE |
| CN101964642A (zh) * | 2004-01-13 | 2011-02-02 | 株式会社村田制作所 | 边界声波装置 |
| JP4178328B2 (ja) * | 2005-04-25 | 2008-11-12 | 株式会社村田製作所 | 弾性境界波装置 |
| DE112008001500B8 (de) * | 2007-06-06 | 2016-06-16 | Murata Manufacturing Co., Ltd. | Oberflächenschallwellenvorrichtung |
| JP5355958B2 (ja) | 2008-07-31 | 2013-11-27 | 太陽誘電株式会社 | フィルタ、分波器および通信機器 |
| WO2010137279A1 (ja) | 2009-05-27 | 2010-12-02 | パナソニック株式会社 | 弾性波共振器と、これを用いたアンテナ共用器 |
| JP2011041127A (ja) * | 2009-08-17 | 2011-02-24 | Hitachi Media Electoronics Co Ltd | 弾性波装置 |
| JPWO2011158445A1 (ja) * | 2010-06-17 | 2013-08-19 | パナソニック株式会社 | 弾性波素子 |
| JP2012060419A (ja) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | 弾性表面波デバイス、電子機器及びセンサー装置 |
| JP2012227626A (ja) | 2011-04-15 | 2012-11-15 | Panasonic Corp | 弾性表面波素子 |
| JP5797979B2 (ja) * | 2011-08-31 | 2015-10-21 | 太陽誘電株式会社 | 弾性波デバイス |
| CN103891139B (zh) * | 2011-10-24 | 2016-08-24 | 株式会社村田制作所 | 弹性表面波装置 |
| JP5704263B2 (ja) | 2012-02-06 | 2015-04-22 | 株式会社村田製作所 | フィルタ装置 |
| WO2015025651A1 (ja) * | 2013-08-21 | 2015-02-26 | 株式会社村田製作所 | チューナブルフィルタ |
-
2016
- 2016-03-10 EP EP16159654.9A patent/EP3068049B1/en active Active
- 2016-03-11 JP JP2016048065A patent/JP2016171571A/ja active Pending
- 2016-03-11 CN CN201610137318.3A patent/CN105978524A/zh active Pending
- 2016-03-11 US US15/067,304 patent/US10097159B2/en active Active
- 2016-03-11 KR KR1020160029454A patent/KR102526570B1/ko active Active
- 2016-03-14 SG SG10201601943WA patent/SG10201601943WA/en unknown
-
2019
- 2019-12-02 JP JP2019217819A patent/JP7005579B2/ja active Active
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