JP2016165794A - ナノメートル半導体材料におけるナノ孔の制御製作 - Google Patents
ナノメートル半導体材料におけるナノ孔の制御製作 Download PDFInfo
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Abstract
Description
本出願は、参照によりその全体が本明細書に組み込まれる米国仮出願第61/452,704号(2011年3月15日出願)の利益を主張する。
本発明は、国立衛生研究所により与えられた契約番号R01HG003703の政府の支援によってなされた。政府は本発明に一定の権利を有する。
グラフェンにおける20Åナノ孔の形成
ナノメートル材料のグラフェンを25μm厚多結晶銅基板(Aesar)に化学蒸着で合成した。基剤を連続H2流下、1000℃で約10分間、低圧でアニールし、追加のCH4流に1000℃で約10分間曝露して、グラフェンを成長させ、次に連続ガス流下で室温に冷まし、約2時間を要した。成長した後、グラフェンを、ミクロンスケールの穴の規則的な列を有する薄非晶質炭素フィルムで被覆された金TEMグリッド(Quantifoil、Au 1.2/2.0)に移動した。一滴の脱イオン水をTEMグリッドの上に置き、次にグリッドをグラフェンの上に置き、これを、水滴からの後退界面により引いてグラフェンと接触させた。次に、構造体をFeCl3銅エッチング剤(Transene)の上に浮遊させることにより、銅を下からエッチング除去した。エッチングしたら、次に試料を1N HClに浮遊させてFeCl3から残留鉄を除去し、次に脱イオン水の3回のすすぎに浮遊させて、あらゆる残留塩を除去し、乾燥窒素で乾燥した。
線量に対するグラフェンナノ孔半径の相関関係の特徴決定
そのナノ孔半径を生じるのに用いられる電子の線量の関数として、グラフェンにおけるナノ孔の半径の間の相関関係を定量化するため、実施例1の2工程ナノ孔形成方法を、ここでは、グラフェンにナノ孔核形成部位を生じるイオンビーム線量の1×1013Ar+/cm2及びその部位にナノ孔を生じる電子フルエンスの3190±50e−/Å2/sにより実施した。複数の成長する孔を含有する連続顕微鏡写真画像を得て、半径の関数として顕微鏡写真強度を方位角と組み合わせ、その半径における円周で割ることによって分析した。焦点ぼけ縁縞の変曲点を、ナノ孔の平均半径として確認した。
グラフェンにおける高密度ナノ孔形成
実施例1の方法に続いて、グラフェン領域の6.27×105Å2を、最初に3keVビームのアルゴンイオンに曝露して、ナノ孔核形成部位の形成に、1×1013Ar+/cm2の線量を与え、次に電子ビームに曝露して、9.7×106e−/Å2の線量を与えて、核形成部位にナノ孔を形成した。図7は、得られた構造体の顕微鏡写真であり、矢印により示される32個のナノ孔が確認される。画像におけるいくつかの小型及び大型の孔の場所は、一連の画像の前後の画像を見て決定した。得られたナノ孔密度は、5.1×1011ナノ孔/cm2に相当する。これは、各3keVのAr+がこれらの照射条件下で約5%のナノ孔核形成の確率を有するので、イオンビーム線量の1×1013Ar+/cm2と相関する。
ナノ孔核形成部位を生じない電子ビーム照射の比較例
実験は、ナノ孔核形成部位合成が、上記に記載された方法に従ってナノ孔形成を可能にするために必要であることを確認するために実施した。対照実験では、グラフェン領域の6.27×105Å2を実施例1の様式で調製し、実施例3のグラフェン領域の広がりに相当する。合成グラフェンを、実施例3の様式で80keVの電子ビームに曝露して、電子線量の9.7×106e−/Å2を与えた。この電子ビームエネルギーは、80keVがグラフェン材料の内部領域におけるバルクグラフェン原子を除去するのに必要なものよりも低いので、2工程ナノ孔形成方法の要件を満たす。ナノ孔核形成部位を最初に形成するためのイオンビーム照射工程は、実施しなかった。電子ビーム線量を生じた後、グラフェンを検査し、ナノ孔を含まないことを見出した。このことは、ナノ孔核形成部位を形成しないと、電子ビーム線量はナノ孔を形成しないことを確認する。
Claims (10)
- 約5nm以下の厚さを有する不浸透性自立型ナノメートル材料と、
それぞれのナノ孔が約10nm以下の直径を有し、複数のナノ孔が直径について約±30%以下で変動する単分散である、ナノメートル材料における少なくとも約1000ナノ孔/cm2の複数のナノ孔と
を含む、ナノメートル構造。 - ナノメートル材料が約3nm以下の厚さを有する、請求項1に記載のナノメートル構造。
- それぞれのナノ孔が約4nm以下の直径を有する、請求項1に記載のナノメートル構造。
- ナノメートル材料が、グラフェン、少数層グラフェン、フルオログラフェン、グラファン及びグラフェンオキシドからなる群から選択される、請求項1に記載のナノメートル構造。
- ナノメートル材料が、六方晶BN、単原子ガラス、MoS2、WS2、MoSe2、MoTe2、TaSe2、NbSe2、NiTe2、Bi2Sr2CaCu2Ox及びBi2Te3からなる群から選択される、請求項1に記載のナノメートル構造。
- 約5nm以下の厚さを有する不浸透性自立型ナノメートル材料と、
それぞれのナノ孔が約10nm以下の直径を有し、複数のナノ孔が直径について約±30%以下で変動する単分散である、ナノメートル材料における少なくとも約50ナノ孔/cm2の複数のナノ孔と
を含む、ナノメートル構造。 - ナノメートル材料が約3nm以下の厚さを有する、請求項6に記載のナノメートル構造。
- それぞれのナノ孔が約4nm以下の直径を有する、請求項6に記載のナノメートル構造。
- ナノメートル材料が、グラフェン、少数層グラフェン、フルオログラフェン、グラファン及びグラフェンオキシドからなる群から選択される、請求項6に記載のナノメートル構造。
- ナノメートル材料が、六方晶BN、単原子ガラス、MoS2、WS2、MoSe2、MoTe2、TaSe2、NbSe2、NiTe2、Bi2Sr2CaCu2Ox及びBi2Te3からなる群から選択される、請求項6に記載のナノメートル構造。
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