JP2016157723A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain good deburring effect with an inexpensive configuration, by jetting high pressure water while maintaining high pressure without using a large capacity compressor.SOLUTION: A cutting device (1) includes a chuck table (4) for holding a plate-shaped workpiece (W), a θ table (14) for rotating the chuck table, cutting means (3) for cutting the plate-shaped workpiece by means of a cutting blade (31), cutting feed means (15) performing the cutting feed of the chuck table and cutting means relatively in the X direction, and deburring means (5) for removing the burrs of a cutting groove (G) formed in the plate-shaped workpiece. The deburring means has a deburring nozzle (51) for jetting high pressure water to the upper surface of the plate-shaped workpiece. The chuck table is rotated every predetermined angle, and subjected to cutting feed for the high pressure water jetted from the deburring nozzle.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a cutting apparatus that cuts a plate-shaped workpiece with a cutting blade, and particularly to a cutting apparatus that cuts a package substrate with a cutting blade.

  A plate-like workpiece such as a package substrate is formed by molding a resin on a base material composed of a resin substrate. Burrs are generated in a cutting groove obtained by cutting such a plate-shaped workpiece with a cutting blade. In order to remove this burr, a cutting device provided with an injection nozzle that injects high-pressure water onto a processed plate-like workpiece has been proposed (for example, see Patent Document 1). In the cutting apparatus described in Patent Document 1, a plurality of injection nozzles are arranged in a row, and high-pressure water is injected onto the upper surface of the plate-like workpiece with a width larger than the width in the longitudinal direction of the plate-like workpiece. In this state, the plate-like workpiece and the injection nozzle are relatively moved, whereby high-pressure water is jetted over the entire surface of the plate-like workpiece, and burrs are removed.

JP 2007-125667 A

  However, since the cutting device described in Patent Document 1 is configured to inject high-pressure water with a width larger than the width of the plate-shaped workpiece, when the width of the plate-shaped workpiece is further increased, the width of the injection nozzle is increased. It was necessary to increase the number of injection nozzles. For this reason, it is difficult to maintain the pressure of the high-pressure water ejected from the ejection nozzle in a high state, and as a result of the pressure of the high-pressure water being lowered, there is a problem that a good deburring effect cannot be obtained. In order to maintain the pressure of the high-pressure water, it may be possible to introduce a large-capacity compressor, but this is not preferable from the viewpoint of cost.

  The present invention has been made in view of such a point, and it is possible to inject high-pressure water while maintaining a high pressure without using a large-capacity compressor, and to obtain a good deburring effect with an inexpensive configuration. It aims at providing the cutting device which can be performed.

  The cutting apparatus of the present invention uses a cutting blade to cut a plate-like work held by a chuck table that holds a plate-like work, a chuck table rotating unit that rotates the chuck table, and a cutting blade that is rotatably mounted. A cutting means, a cutting feed means for cutting and feeding the chuck table in the X direction, an index feeding means for index feeding the cutting means in the Y direction, and a plate from a cutting groove obtained by cutting a plate-like work held by the chuck table by the cutting means. Deburring means for removing burrs formed on the workpiece, and the deburring means includes a deburring nozzle having an injection port for jetting high-pressure water toward the upper surface of the plate-like workpiece held by the chuck table; High pressure water supply means for supplying high pressure water to the deburring nozzle, and the chuck table rotating means A rotation driving unit that rotates the chuck table, and an angle command unit that rotates the chuck table at a predetermined angle by the rotation driving unit, and jets high-pressure water from the deburring nozzle and uses the chuck table rotating means to A chuck table positioned at a predetermined angle that is commanded is cut and fed by a cutting feed means, and burrs formed on a plate-like workpiece held by the chuck table can be removed.

  According to this configuration, after the cutting groove is formed in the plate-like workpiece by the cutting blade, the plate-like workpiece is cut and fed to the deburring nozzle that is spraying high-pressure water at every predetermined angle of the chuck table. . Thereby, even if it is a case where the magnitude | size of an injection port is small with respect to a plate-shaped workpiece, high pressure water can be injected to the whole upper surface of a plate-shaped workpiece. As a result, burrs formed on the upper surface of the plate-like workpiece can be removed. Moreover, since it is not necessary to enlarge the injection port according to the size of the plate-like workpiece, high-pressure water can be injected while maintaining a high pressure without using a large-capacity compressor. Therefore, a good deburring effect can be obtained with an inexpensive configuration.

  According to the present invention, a state in which a high pressure is maintained without using a large-capacity compressor by cutting and feeding a plate-like workpiece to a deburring nozzle that jets high-pressure water at every predetermined angle of the chuck table. The high-pressure water can be jetted and a good deburring effect can be obtained with an inexpensive configuration.

It is a perspective view of the cutting device concerning this embodiment. It is a side view of the cutting device concerning this embodiment. FIG. 3 is a schematic diagram when the injection nozzle shown in FIG. 2 is viewed from an arrow A. It is a side view showing cutting operation of the cutting device concerning this embodiment. It is a table | surface which shows the operation | movement pattern of the chuck table in the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a side view which shows the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a top view which shows an example of the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a top view which shows an example of the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a top view which shows an example of the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a top view which shows an example of the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a top view which shows an example of the deburring operation | movement of the cutting device which concerns on this Embodiment. It is a schematic diagram of the injection nozzle which concerns on a modification.

  Hereinafter, the cutting apparatus according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus according to the present embodiment. FIG. 2 is a side view of the cutting apparatus according to the present embodiment. FIG. 3 is a schematic view of the injection nozzle shown in FIG. In the following, an example of the cutting device will be described, but the configuration of the cutting device according to the present embodiment is not limited to this. As long as the plate-like workpiece can be cut, the cutting device may have any configuration. In FIG. 1, the size of the plate workpiece is exaggerated with respect to the chuck table.

  As shown in FIGS. 1 and 2, the cutting apparatus 1 moves the chuck table 4 relative to the cutting means 3 to divide the plate-like workpiece W held on the chuck table 4 into individual chips. It is configured. The plate-like workpiece W is configured by a package substrate in which a plurality (three in the present embodiment) of resin-made convex portions 61 are arranged in the longitudinal direction on the surface of a rectangular resin substrate 60. The resin substrate 60 is, for example, a PCB substrate. The plate-like workpiece W is divided into a plurality of device regions A1 for a semiconductor device in which a plurality of convex portions 61 are disposed and electrodes are disposed therein, and a surplus region A2 around the device region A1. Each device region A1 is partitioned into a plurality of regions by a grid-like division planned line L, and a semiconductor device (not shown) is disposed in each region.

  In the plate-like workpiece W, the surplus area A2 is removed as an end material, and the device area A1 is divided into individual chips along the division line L. The plate-like workpiece W is not limited to a substrate for semiconductor devices, but may be a metal substrate for LED devices. Further, the substrate is not limited to the substrate after mounting the chip, but may be a substrate before mounting the chip. The convex portion 61 of the plate-like workpiece W is formed of, for example, an epoxy resin or a silicone resin, but any resin may be used as long as the convex portion 61 can be formed on the resin substrate 60.

  A rectangular opening (not shown) extending in the X-axis direction (cutting direction) is formed on the upper surface of the housing 11. The opening is covered with an X-axis table 12 movable along with the chuck table 4 and a bellows-shaped waterproof cover 13. Below the waterproof cover 13, ball screw type cutting feed means 15 (see FIG. 2) for moving the chuck table 4 in the X-axis direction is provided.

  The X-axis table 12 is rotatably provided with a chuck table 4 having a rectangular shape when viewed from above via a θ table 14. The θ table 14 functions as a rotational drive unit that rotationally drives the chuck table 4 about the center of the chuck table 4. The chuck table 4 has a suction surface 41 that holds the plate-like workpiece W. On the suction surface 41 of the chuck table 4, a plurality of concave portions 42 are formed side by side in the longitudinal direction corresponding to the plurality of convex portions 61 of the plate-like workpiece W. Each concave portion 42 of the chuck table 4 has a depth corresponding to the height of each convex portion 61 of the plate-like workpiece W, and is formed so as to accommodate each convex portion 61 of the plate-like workpiece W. A support surface 43 is formed around each concave portion 42 so as to support the surplus area A2 around the convex portion 61 of the plate-like workpiece W.

  An entrance groove 44 into which the cutting blade 31 enters is formed on the suction surface 41 of the chuck table 4 in correspondence with the scheduled division line L of the plate-like workpiece W. The bottom surface (suction surface 41) of the recess 42 of the chuck table 4 has a plurality of suction holes (non-removable holes) for sucking and holding individual chips after the division of the plate-like workpiece W in an area partitioned by the entrance grooves 44 in a lattice pattern. (Shown) is formed. In addition, a plurality of suction holes (not shown) for sucking and holding the surplus area A2 of the plate-like workpiece W are formed in the support surface 43 (suction surface 41) around the recess 42. Each suction hole is connected to a suction source (not shown) through a flow path in the chuck table 4.

  The chuck table 4 is reciprocated between a delivery position at the center of the apparatus and a machining position facing the cutting means 3. FIG. 1 shows a state where the chuck table 4 stands by at the delivery position. In the housing 11, a pair of guide rails 16 parallel to the Y-axis direction are provided behind one corner adjacent to the delivery position. The pair of guide rails 16 positions the plate-like workpiece W in the X-axis direction.

  In the vicinity of the pair of guide rails 16, a first transfer arm 17 that transfers the plate-like workpiece W between the guide rails 16 and the chuck table 4 is provided. The plate-shaped workpiece W is transported by turning the L-shaped arm portion 17a of the first transport arm 17 when viewed from above. Further, a spinner type cleaning mechanism 18 is provided behind the chuck table 4 at the delivery position. In the cleaning mechanism 18, cleaning water is sprayed toward the rotating spinner table 18 a to clean the plate-like workpiece W, and then dry air is blown to dry the plate-like workpiece W.

  A support base 19 that supports the cutting means 3 is provided on the housing 11. The cutting means 3 is positioned above the chuck table 4 at the processing position, and is configured to cut the plate-like workpiece W by cutting the cutting blade 31 from the surface of the plate-like workpiece W. The cutting means 3 rotatably mounts a cutting blade 31 that cuts the plate-like workpiece W. The cutting means 3 is index-fed in the Y-axis direction by the index feeding means 20, whereby the cutting means 3 and the chuck table 4 are relatively moved in the Y-axis direction. The cutting means 3 is moved in the Z-axis direction by lifting means (not shown). The index feeding means 20 and the lifting / lowering means are constituted by, for example, a ball screw type moving mechanism.

  The cutting means 3 is configured by attaching a cutting blade 31 to the tip of a spindle 32 and providing a blade cover 33 so as to cover the outer periphery of the cutting blade 31. The cutting blade 31 is composed of, for example, a ring-shaped washer blade, and is formed by bonding abrasive grains such as diamond with a bonding material. The blade cover 33 is formed in a box shape that covers substantially the upper half of the cutting blade 31. The blade cover 33 is provided with a cutting water nozzle 34 that injects cutting water toward the cutting portion. Here, the transfer position side with respect to the processing position will be referred to as the front, and the processing position side with respect to the transfer position will be described as the rear.

  The cutting water nozzle 34 is formed in a substantially L shape extending forward from the rear lower end of the blade cover 33, and the tip of the cutting water nozzle 34 is positioned in a substantially lower half of the cutting blade 31. A plurality of slits 35 (see FIG. 2) are formed at the tip of the cutting water nozzle 34. Cutting water is jetted from the slit 35 toward the cutting blade 31. By cutting the plate-like workpiece W with the cutting blade 31 that rotates at high speed while supplying the cutting water, the plate-like workpiece W is cut along the planned division line.

  A second transfer arm 21 that transfers the plate-like workpiece W between the chuck table 4 and the cleaning mechanism 18 is provided on the side surface 19 a of the support base 19. The arm portion 21a of the second transfer arm 21 extends obliquely, and the plate-like workpiece W is transferred by moving the arm portion 21a in the Y-axis direction. In addition, the support base 19 is provided with a cantilever support portion 23 that supports the imaging unit 22 so as to cross over the movement path (X-axis direction) of the chuck table 4. The imaging unit 22 projects from below the cantilever support unit 23, and the plate-like workpiece W is imaged by the imaging unit 22. An image captured by the imaging unit 22 is used for alignment between the cutting unit 3 and the chuck table 4.

  Further, the cutting device 1 includes deburring means 5 that removes burrs formed on the upper surface of the plate-like workpiece W. The deburring means 5 includes a plurality of deburring nozzles 51 that jet high-pressure water toward the plate-like workpiece W, and high-pressure water supply means 52 that supplies high-pressure water to the deburring nozzles 51. In the present embodiment, a plurality of the above-described deburring nozzles 51 are bundled to form one injection nozzle 50, and this injection nozzle 50 is disposed inside the cantilever support portion 23. The injection nozzle 50 is configured to be movable in the Z-axis direction by lifting means 55 (see FIG. 2).

  The deburring nozzle 51 is formed in a columnar shape extending in the vertical direction. An ejection port 53 that ejects high-pressure water toward the upper surface of the plate-like workpiece W is formed at the lower end of the deburring nozzle 51. The injection port 53 communicates with a flow path (not shown) formed inside the deburring nozzle 51, and high pressure water supply means 52 is connected to the flow path via a valve 54. The high-pressure water supply means 52 supplies a fluid (high-pressure water) whose pressure has been increased by a compressor (not shown) to each deburring nozzle 51.

  Here, the detailed configuration of the injection nozzle 50 will be described with reference to FIG. As shown in FIG. 3, the injection port 53 is formed by a slit long in the Y-axis direction at the center of the deburring nozzle 51. The width of the injection port 53 in the Y-axis direction is greater than or equal to the radius of the deburring nozzle 51 (half the pitch P described later). In this embodiment, seven deburring nozzles 51 having the same shape are divided into two rows in a direction (Y-axis direction) orthogonal to the cutting feed direction (X-axis direction), and the rear side (upstream side) in the X-axis direction. The rows are arranged in four, and the rows on the front side (downstream side) in the X-axis direction are arranged in three. The outer peripheral surfaces of the deburring nozzles 51 are in contact with each other. Here, the distance between the centers of the adjacent deburring nozzles 51 in the Y-axis direction is expressed as a pitch P.

  The three deburring nozzles 51 on the front side in the X-axis direction are shifted by a half pitch with respect to the four deburring nozzles 51 on the rear side in the X-axis direction. Accordingly, one end of the X-axis direction rear side injection port 53 and one end of the X-axis direction front side injection port 53 partially overlap in the X-axis direction. That is, the X-axis direction front injection port 53 is positioned so as to fill the gap S between the end portion of the X-axis direction rear side injection port 53 and the end portion of the adjacent injection port 53. As a result, high-pressure water can be injected in the range R indicated by the two-dot chain line (3 pitch + 1 width of one injection port 53 (hereinafter referred to as injection range R)). Note that the injection range R of the high-pressure water formed by the plurality of injection ports 53 is smaller than the width of the plate-like workpiece W in the short direction.

  Returning to FIG. 1, an input unit 24 is provided at a corner portion of the housing 11 to receive instructions to each part of the apparatus. A monitor 25 is disposed on the upper surface of the support base 19. On the monitor 25, an image captured by the imaging unit 22, processing conditions for the plate-like workpiece W, and the like are displayed. Further, the cutting device 1 is provided with a control unit 26 that performs overall control of each part of the device. The control unit 26 includes a processor that executes various processes, a memory, and the like. The memory is composed of one or a plurality of storage media such as a ROM (Read Only Memory) and a RAM (Random Access Memory) depending on the application. Further, the control means 26 has an angle command unit 27 that issues a command to the θ table 14 so as to rotate the chuck table 4 at a predetermined angle. The control means 26 stores an operation pattern of the chuck table 4 described later in FIG. 5, and the angle command unit 27 issues a command to the θ table 14 based on the operation pattern shown in FIG. As a result, the θ table 14 rotates the chuck table 4 at a predetermined angle in response to a command from the angle command unit 27. In the present embodiment, the θ table 14 and the angle command unit 27 described above constitute a chuck table rotating means.

  In the cutting apparatus 1 configured as described above, after the plate-like workpiece W is sucked and held by the chuck table 4, the cutting means 3 is positioned at a predetermined position. Then, the plate-like workpiece W is cut and fed while the cutting blade 31 is rotated at a high speed, whereby a cutting groove is formed in the plate-like workpiece W. After the cutting process, the plate-like workpiece W is cut and fed to the deburring nozzle 51 that is spraying high-pressure water while changing the angle of the chuck table 4. Thereby, high-pressure water is sprayed on the entire upper surface of the plate-like workpiece W, and burrs formed on the upper surface of the plate-like workpiece W are removed.

  Next, the cutting operation of the cutting apparatus according to the present embodiment will be described with reference to FIG. It is a side view showing cutting operation of the cutting device concerning this embodiment.

  As shown in FIG. 4, first, the plate-like workpiece W is placed on the chuck table 4 with the surface side on which the plurality of convex portions 61 are formed facing downward. At this time, each convex portion 61 of the plate-like workpiece W is accommodated in each concave portion 42 of the chuck table 4, and the device region A <b> 1 contacts the bottom surface of the concave portion 42, while the surplus region A <b> 2 contacts the support surface 43. The plate-like workpiece W is sucked and held on the chuck table 4 (suction surface 41) by the negative pressure generated on the suction surface 41.

  In this state, the chuck table 4 is rotated by the θ table 14 so that the cutting feed direction (X-axis direction) of the cutting feed means 15 and the scheduled division line L of the plate-like workpiece W are aligned in parallel. Then, the cutting means 3 is moved in the Y-axis direction by the index feeding means 20, and the position of the cutting means 3 is adjusted so that the cutting blade 31 is positioned on the division line L of the plate-like workpiece W.

  Next, the cutting means 3 is moved in the Z-axis direction by an elevating means (not shown), and the cutting blade 31 is lowered to a height at which the plate-like workpiece W can be fully cut. The chuck table 4 is moved in the X-axis direction (cutting feed) with respect to the cutting blade 31 that rotates at high speed while jetting high-pressure water from the deburring nozzle 51 toward the plate-like workpiece W. The cutting blade 31 enters the entrance groove 44 and cuts the plate-like workpiece W along the planned division line L. As a result, a cutting groove G along the planned division line L is formed in the plate-like workpiece W. At this time, burrs (not shown) wound along the rotation direction of the cutting blade 31 are generated at the edge portion of the cutting groove G (resin substrate 60).

  When the cutting of one line of the scheduled division lines L is completed, the cutting means 3 is moved in the Y-axis direction by the index feeding means 20 (see FIG. 1), and the cutting blade 31 is positioned on the adjacent division planned line L. Then, cutting is performed along the new division line L. When cutting is completed along all the division lines L in one direction, the cutting of the division lines L in the other direction orthogonal to the division line L in one direction is performed. Thus, when all the division | segmentation scheduled lines L of the plate-shaped workpiece W are cut, the cutting groove G will be formed in the plate-shaped workpiece W, and the burr | flash will be formed in the cutting groove G. FIG.

  Next, a deburring method according to the present embodiment will be described with reference to FIGS. FIG. 5 is a table showing an operation pattern of the chuck table in the deburring operation of the cutting apparatus according to the present embodiment. FIG. 6 is a side view showing the deburring operation of the cutting apparatus according to the present embodiment. 7 to 11 are top views showing an example of the deburring operation of the cutting apparatus according to the present embodiment.

  In the present embodiment, as described in FIG. 3, a plurality of deburring nozzles 51 are bundled to form one injection nozzle 50, and the surface of the plate-like workpiece W has a predetermined width (range R shown in FIG. 3). High pressure water is jetted into the tank. As described above, the injection range R of the high-pressure water formed by the plurality of injection ports 53 is smaller than the width of the plate-like workpiece W. For this reason, even if the plate-like workpiece W is cut and fed once to the jet nozzle 50 in a state where the high-pressure water is jetted from the jet port 53, the high-pressure water is jetted over the entire upper surface of the plate-like workpiece W. I can't.

  Therefore, in the present embodiment, after the plate-like workpiece W is cut and fed several times in the same direction, the chuck table 4 is rotated by a predetermined angle in accordance with a command from the angle command unit 27, and then a new cutting feed is performed. Yes. For this reason, it becomes possible to inject high pressure water to the area | region where the high pressure water was not able to be injected to the plate-shaped workpiece W by the previous cutting feed. Therefore, the chuck table 4 is adjusted to various angles, and the plate-like workpiece W is cut and fed to the injection nozzle 50 at each angle, so that the plate-like workpiece W is adjusted regardless of the injection range R of the injection nozzle 50. High pressure water can be jetted over the entire top surface. As a result, burrs formed on the upper surface of the plate-like workpiece W by cutting can be removed.

  In the present embodiment, the entire upper surface of the plate-like workpiece W refers to the entire device region A1 where semiconductor devices and the like are formed, and the surplus region A2 is not included. As described above, the surplus area A2 is removed as an end material after the division, and there is no problem even if the burr in the surplus area A2 is not removed. Note that the rotation angle of the chuck table 4 may be adjusted so that the high pressure water is also ejected to the entire surplus area A2.

  First, the operation pattern of the chuck table 4 in the burr operation will be described. As shown in FIG. 1 to No. Up to six operation patterns are stored in the control means 26 in advance. “Angle” in the table indicates an angle in the longitudinal direction (chuck table 4) of the plate-like workpiece W with respect to the cutting feed direction (X-axis direction). “Step angle” in the table indicates the feed angle of the chuck table 4. “Number of reciprocations” in the table indicates the number of reciprocations of the cutting feed at each angle.

  No. In the first operation pattern, the angle of the chuck table 4 is fed by 2 ° within a range of 0 ° to 14 °, and cutting feed is performed four times at each angle. No. In the second operation pattern, the angle of the chuck table 4 is fed by −2 ° within a range of −2 ° to −14 °, and cutting feed is performed four times at each angle. No. In the operation pattern 3, the angle of the chuck table 4 is fed by 2 ° within a range of 182 ° to 194 °, and cutting feed is performed four times at each angle. NO. In the operation pattern 4, the angle of the chuck table 4 is fed by −2 ° within a range of 178 ° to 166 °, and cutting feed is performed four times at each angle. No. In the operation pattern 5, the angle of the chuck table 4 is rotated to 52 °, and cutting feed is performed four times at that angle. No. In the operation pattern 6, the angle of the chuck table 4 is rotated to −52 °, and cutting feed is performed four times at that angle.

  In this embodiment, no. 1 to No. The angle of the chuck table 4 is adjusted in the order of 6, and the plate-like workpiece W (chuck table 4) is cut and fed to the injection nozzle 50 at each angle. Hereinafter, referring to FIG. 6 to FIG. 1 to No. Each operation pattern up to 6 will be described. 7 to 11, for convenience of explanation, an area where high-pressure water is injected is indicated as an injection area T.

  As shown in FIGS. In the first operation pattern, the chuck table 4 is rotated so that the angle between the longitudinal direction of the plate-like workpiece W and the cutting feed direction is 0 °. Then, the index feeding means 20 is arranged so that the center in the Y-axis direction of the ejection range R in the ejection nozzle 50 (the plurality of deburring nozzles 51) coincides with the center in the short direction (Y-axis direction) of the plate-like workpiece W. (Refer to FIG. 1). The injection nozzle 50 is lowered by the elevating means 55 and is brought close to the tip of the injection port 53 so as to leave a slight gap with the upper surface of the plate-like workpiece W.

  Then, the plate-like workpiece W (chuck table 4) is cut and fed to the injection nozzle 50 while high-pressure water is injected from the injection port 53 in the injection range R. As a result, high pressure water is jetted onto the upper surface of the plate-like workpiece W by the jet region T. This cutting feed is performed four reciprocations at 0 °. Further, the cutting feed speed during the deburring operation is, for example, 200 mm / sec, and is adjusted to such an extent that the burrs formed in the cutting grooves G can be appropriately removed. Further, as described above, since the tip of the injection port 53 is close to the upper surface of the plate-like workpiece W, the pressure drop of the high-pressure water is reduced until the high-pressure water collides with the upper surface of the plate-like workpiece W. be able to. As a result, the burrs can be removed satisfactorily.

  When the cutting feed is performed four times in one direction (0 °), the chuck table 4 is rotated by 2 °, and the cutting feed is performed four times in the same manner as described above. This operation is repeated until the angle of the chuck table 4 reaches 14 °. As a result, high-pressure water is sprayed onto the upper surface of the plate-like workpiece W by the spray region T shown in FIG.

  Next, no. Two operation patterns are implemented. No. In the operation pattern 2, the chuck table 4 is rotated until the angle of the chuck table 4 becomes −2 °, and the cutting feed is reciprocated four times while jetting high-pressure water. Then, by performing four reciprocating cutting feeds by −2 ° to −14 °, high-pressure water is injected onto the upper surface of the plate-like workpiece W by the amount of the injection region T shown in FIG.

  Next, no. Three operation patterns are implemented. No. In the third operation pattern, the chuck table 4 is rotated until the angle of the chuck table 4 reaches 182 °, and the cutting feed is reciprocated four times again while jetting high-pressure water. Then, by performing four reciprocating cutting feeds in increments of 2 ° up to 194 °, high-pressure water is injected onto the upper surface of the plate-like workpiece W by the amount corresponding to the injection region T as in FIG.

  Next, no. Four operation patterns are implemented. No. In the operation pattern 4, the chuck table 4 is rotated until the angle of the chuck table 4 reaches 178 °, and the cutting feed is reciprocated four times again while jetting high-pressure water. Then, by performing four reciprocating cutting feeds in increments of -2 ° to 166 °, high-pressure water is injected onto the upper surface of the plate-like workpiece W by the injection region T as in FIG.

  And No. 5 and no. Six operation patterns are implemented. No. In the operation pattern 5, as shown in FIG. 10, the chuck table 4 is rotated until the angle becomes 52 °, and the cutting feed is reciprocated four times while jetting high-pressure water. Then, no. In the operation pattern 6, as shown in FIG. 11, the chuck table 4 is rotated until the angle becomes −52 °, and the cutting feed is reciprocated four times while jetting high-pressure water. As described above, in all the device regions A1, high-pressure water is jetted onto the upper surface of the plate-like workpiece W, and burrs formed on the upper surface of the plate-like workpiece W by cutting can be removed.

  As described above, according to the cutting device 1 according to the present embodiment, after the cutting groove G is formed in all the scheduled division lines L of the plate-like workpiece W by the cutting blade 31, the chuck table 4 is set at every predetermined angle. The plate-like workpiece W is cut and fed to the deburring nozzle 51 that is jetting high-pressure water. Thereby, even when the width of the injection range R injected from the injection port 53 is smaller than the width of the plate-like workpiece W, the entire upper surface of the plate-like workpiece W (cuts formed in all device regions A1). High pressure water can be injected into the groove G). That is, regardless of the width of the plate-like workpiece W, the high-pressure water can be sprayed over the entire upper surface of the plate-like workpiece W. As a result, burrs formed on the upper surface of the plate-like workpiece W can be removed. Moreover, since it is not necessary to enlarge the injection port 53 according to the magnitude | size of the plate-shaped workpiece W, high pressure water can be injected in the state which maintained the high pressure without using a large capacity compressor. Therefore, a good deburring effect can be obtained with an inexpensive configuration.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, the seven deburring nozzles 51 are bundled to form the injection nozzle 50. However, the present invention is not limited to this configuration. The number of deburring nozzles 51 is not particularly limited, and may be configured with a small number (for example, five or six). Even when the number is changed, the deburring nozzles 51 are arranged in two rows, and the rows of the deburring nozzles 51 are different by a half pitch. For example, a single injection nozzle 50 (deburring nozzle 51) having an injection port of a predetermined width in the Y-axis direction may be used, but a plurality of injection ports 53 are provided, and the injection ports 53 are arranged in two rows. The nozzles 53 that are configured and have different rows are shifted by a half pitch.

  Further, in the above-described embodiment, the injection port 53 is configured to be formed by a slit that is long in the Y-axis direction, but is not limited to this configuration. The injection port 53 may be formed in, for example, a circle or an ellipse.

  In the above-described embodiment, the width of the injection port 53 in the Y-axis direction is larger than the radius of the deburring nozzle 51. However, the present invention is not limited to this configuration. For example, it is good also as a structure as shown in FIG. FIG. 12 is a schematic diagram of an injection nozzle according to a modification. The injection nozzle 50 according to the modified example is different from the present embodiment in that the width of the injection port 53 in the Y-axis direction is smaller than the radius of the deburring nozzle 51. In this case, by reducing the width of the injection port 53, the pressure of the high-pressure water can be increased and the deburring effect can be enhanced. Further, the high-pressure water ejected from the ejection port 53 is expanded from the diameter of the ejection port 53 when colliding with the plate-like workpiece W, and the spot type becomes a substantially elliptical shape. At this time, the pressure is highest in the central portion of the spot, and the central portion of the spot collides with the burr, so that the burr can be removed from the plate-like workpiece W and effectively removed. In addition, when the width | variety of the injection port 53 becomes small, the injection area | region of high pressure water will become narrow, and as shown in FIG. 12, the injection range R of the Y-axis direction will be formed intermittently. However, as described in FIG. 1 to No. By repeating the deburring (cutting feed) every time the angle of the chuck table 4 is rotated by 2 ° by the operation pattern 4, high-pressure water is injected into the cutting grooves G formed in all the device regions A1. Can do.

  Further, in the above-described embodiment, the cutting groove G is formed by so-called downcut that is performed by rotating the cutting blade 31 in the same direction as the cutting feed direction of the chuck table 4. However, the present invention is limited to this configuration. Not. The cutting groove G may be formed by up-cutting by cutting the cutting blade 31 in a direction opposite to the cutting feed direction of the chuck table 4.

  As described above, the present invention is capable of injecting high-pressure water while maintaining a high pressure without using a large-capacity compressor, and can obtain a good deburring effect with an inexpensive configuration. In particular, it is useful for a cutting apparatus that cuts a package substrate with a cutting blade.

W plate-like workpiece G cutting groove 1 cutting device 14 θ table (rotation drive unit)
DESCRIPTION OF SYMBOLS 15 Cutting feed means 20 Index feed means 27 Angle instruction | command part 3 Cutting means 31 Cutting blade 32 Spindle 33 Blade cover 4 Chuck table 5 Deburring means 50 Injection nozzle 51 Deburring nozzle 52 High pressure water supply means 53 Injection port

Claims (1)

A chuck table for holding a plate-shaped workpiece, a chuck table rotating means for rotating the chuck table, a cutting means for rotatably mounting the cutting blade and cutting the plate-shaped workpiece held by the chuck table with a cutting blade, A cutting feed means for cutting and feeding the chuck table in the X direction, an index feeding means for feeding the cutting means in the Y direction, and a plate from a cutting groove obtained by cutting a plate-like work held by the chuck table by the cutting means. Deburring means for removing burrs formed on the workpiece,
The deburring means includes a deburring nozzle having an injection port for injecting high-pressure water toward the upper surface of the plate-like workpiece held by the chuck table, and high-pressure water supply means for supplying high-pressure water to the deburring nozzle; With
The chuck table rotating means includes a rotation driving unit that rotates the chuck table, and an angle command unit that rotates the chuck table at a predetermined angle by the rotation driving unit,
High pressure water is jetted from the deburring nozzle, and the chuck table positioned at a predetermined angle commanded by the angle command section is cut and fed by the cutting feed means using the chuck table rotating means. A cutting device that enables removal of burrs formed on a plate-like workpiece to be held.

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