JP2016122837A - キャリアリング構造及びこれを含むチャンバシステム - Google Patents
キャリアリング構造及びこれを含むチャンバシステム Download PDFInfo
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- JP2016122837A JP2016122837A JP2015241860A JP2015241860A JP2016122837A JP 2016122837 A JP2016122837 A JP 2016122837A JP 2015241860 A JP2015241860 A JP 2015241860A JP 2015241860 A JP2015241860 A JP 2015241860A JP 2016122837 A JP2016122837 A JP 2016122837A
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 61
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
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Images
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
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- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
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- H—ELECTRICITY
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【解決手段】キャリアリング200は、環状の円板形状を有し、外縁側からウエハ101縁側へ広がるキャリアリング上面を有する。ウエハ縁側は、キャリアリング上面よりも低いキャリアリング下面を含み、複数の接触サポート構造も含む。各接触サポート構造は、キャリアリング下面の縁に位置付けられ、キャリアリング下面とキャリアリング上面との間の高さを有し、先細の縁と隅とを有する。キャリアリング上面とキャリアリング下面との間には、上向き縁が頂部に配され下方内縁が底部に配されるように段差が定められる。上向き縁及び下方内縁は、丸みを帯びた鋭くない縁を有し、各接触サポート構造の頂部は、ウエハを上下降及び移動させるためにウエハの底縁面に接触するように構成される。
【選択図】図1
Description
PECVDに使用されるチャンバは、処理時にウエハを支えるためのセラミック台座を使用し、これは、高温下での処理を可能にする。用途の1つは、アッシング可能ハードマスク(AHM)の成長である。AHMは、半導体処理で使用される膜であり、「アッシング」と呼ばれる技術によって除去可能である。具体的には、AHMは、多くはエッチング停止層として使用される。193nm又はそれ未満のリソグラフィ方式は、下にある誘電体層又は金属障壁層に対して高いエッチング選択性を有するために、これらのAHMを必要とする。
Claims (23)
- 成膜用に実装されたチャンバに使用するためのキャリアリングであって、
外縁側とウエハ縁側とを伴う環状の円板形状を有するキャリアリングであって、前記外縁側から前記ウエハ縁側へ広がるキャリアリング上面を有し、前記ウエハ縁側は、
前記キャリアリング上面よりも低いキャリアリング下面と、
複数の接触サポート構造であって、それぞれ、前記キャリアリング下面の縁に位置付けられ、前記キャリアリング下面と前記キャリアリング上面との間の高さを有し、先細の縁と隅とを有する、複数の接触サポート構造と、
前記キャリアリング上面と前記キャリアリング下面との間の段差であって、前記段差の頂部には上向き縁が配され、前記段差の底部には下方内縁が配される、段差と、
を含む、キャリアリングを備え、
前記接触サポート構造のそれぞれの頂部は、ウエハを持ち上げる及び下降させる及び移動させるために前記ウエハの底縁面に接触するように構成される、キャリアリング。 - 請求項1に記載のキャリアリングであって、
前記ウエハ縁側は、更に、前記キャリアリング下面と前記接触サポート構造との間の移行部に内方接触縁を含み、
前記上向き縁及び前記下方内縁は、それぞれ、丸みを帯びた鋭くない縁を有する、キャリアリング。 - 請求項1に記載のキャリアリングであって、
前記接触サポート構造の前記先細の縁及び隅は、鋭い隅を有さない実質的に湾曲した表面を有する、キャリアリング。 - 請求項1に記載のキャリアリングであって、
成膜に使用される前記チャンバは、
ウエハサポート領域と、前記ウエハサポート領域を取り囲むキャリアサポート表面とを有する台座であって、前記キャリアサポート表面は、前記ウエハサポート領域から一段下がっている、台座と、
前記台座の第1の側部周りに配置される第1のアームと、前記台座の第2の側部周りに配置される第2のアームとを有するフォークと、
を含み、
前記第1のアーム及び前記第2のアームは、それぞれ、前記キャリアリングの上面に接触しない非係合状態にあるときは、前記キャリアサポート表面の下方に位置付けられ、係合状態にあるときは、前記ウエハを持ち上げるために前記キャリアリングの前記上面に接触する、キャリアリング。 - 請求項4に記載のキャリアアームであって、
前記ウエハは、前記ウエハサポート領域の上に配されたときに前記キャリアサポート表面の一部の上に張り出すように構成され、各接触サポート構造は、前記ウエハの前記張り出しの下に配置されるように構成される、キャリアリング。 - 請求項5に記載のキャリアリングであって、
前記非係合状態では、前記ウエハの前記底縁面と各接触サポート構造の頂部との間に非接触分離距離が定められる、キャリアリング。 - 請求項6に記載のキャリアリングであって、
前記係合状態では、前記ウエハの前記底縁面と前記接触サポート構造のそれぞれの頂部との間に接触がなされ、前記各接触サポート構造の頂部を覆う成膜材料は、前記係合状態で接触がなされるときに前記各接触サポート構造の頂部を覆う状態に実質的に維持される、キャリアリング。 - 請求項1に記載のキャリアリングであって、
前記チャンバは、更に、
動作時に前記台座の上に配置されるように構成されたシャワーヘッドであって、前記ウエハ上への成膜を可能にするためにプロセスガスを提供するように構成されたシャワーヘッドと、
整合回路網を通して前記台座に接続された高周波(RF)電力供給部であって、更に、動作時に前記ウエハ上への前記成膜を可能にするRF電力供給部と、
を含む、キャリアリング。 - 請求項8に記載のキャリアリングであって、
前記成長される膜は、後続のエッチング動作においてエッチングストップとして使用されるアッシング可能ハードマスク(AHM)である、キャリアリング。 - 請求項8に記載のチャンバであって、更に、
前記チャンバ内に形成されたステーション群であって、各ステーションは、台座、フォーク、及びキャリアリングを含む、ステーション群と、
前記ステーション群の各ステーションの各フォークの動きを同時に制御するように構成された機構であって、前記動きは、
前記キャリアリングをそれぞれ持ち上げる又は下降させることと、
前記キャリアリングをそれぞれ前記ステーション群の別のステーションへ回転させることと、
を含む、機構と、
備えるチャンバ。 - ウエハ上への成膜を処理するためのチャンバであって、
ウエハサポート領域と、前記ウエハサポート領域を取り囲むキャリアサポート表面とを有する台座であって、前記キャリアサポート表面は、前記ウエハサポート領域から一段下がっている、台座と、
前記台座の第1の側部周りに配置される第1のアームと、前記台座の第2の側部周りに配置される第2のアームとを有するフォークであって、前記第1のアーム及び前記第2のアームは、それぞれ、非係合状態にあるときは、前記キャリアサポート表面の下方に配置され、係合状態にあるときは、前記キャリアサポート表面の上方へ上昇するように構成される、フォークと、
外縁側とウエハ縁側とを伴う環状の円板形状を有するキャリアリングであって、前記外縁側から前記ウエハ縁側へ広がるキャリアリング上面を有し、前記ウエハ縁側は、
前記キャリアリング上面よりも低いキャリアリング下面と、
複数の接触サポート構造であって、それぞれ、前記キャリアリング下面の縁に位置付けられ、前記キャリアリング下面と前記キャリアリング上面との間の高さを有し、先細の縁と隅とを有する、複数の接触サポート構造と、
を含む、キャリアリングと、
を備え、
前記接触サポート構造のそれぞれの頂部は、前記ウエハを上昇させる及び移動させるために前記フォークが前記キャリアリングを持ち上げるときに前記ウエハの底縁面に接触するように構成される、チャンバ。 - 請求項11に記載のチャンバであって、
前記ウエハ縁側は、更に、前記キャリアリング上面が上向き縁において下向きに移行するところが先細であり、前記上向き縁は、前記台座の前記ウエハサポート領域の上にあるときの前記ウエハの縁と向かい合うように位置付けられるように構成される、チャンバ。 - 請求項11に記載のチャンバであって、
前記ウエハ縁側は、
前記キャリアリング上面と前記キャリアリング下面との間の段差であって、前記段差の頂部には上向き縁が配され、前記段差の底部には下方内縁が配される、段差を含み、
前記上向き縁及び前記下方内縁は、それぞれ、丸みを帯びた鋭くない縁を有する、チャンバ。 - 請求項13に記載のチャンバであって、
前記ウエハ縁側は、更に、前記キャリアリング下面と前記接触サポート構造との間の移行部に内方接触縁を含む、チャンバ。 - 請求項11に記載のチャンバであって、
前記接触サポート構造の前記先細の縁及び隅は、鋭い隅を有さない実質的に湾曲した表面を有する、チャンバ。 - 請求項11に記載のチャンバであって、
前記ウエハは、前記ウエハサポート領域の上に配されたときに前記キャリアサポート表面の一部の上に張り出すように構成され、各接触サポート構造は、前記ウエハの前記張り出しの下に配置されるように構成される、チャンバ。 - 請求項16記載のチャンバであって、
前記非係合状態では、前記ウエハの前記底縁面と各接触サポート構造の頂部との間に非接触分離距離が定められる、チャンバ。 - 請求項17に記載のチャンバであって、
前記係合状態では、前記ウエハの前記底縁面と前記接触サポート構造のそれぞれの頂部との間に接触がなされ、前記各接触サポート構造の頂部を覆う成膜材料は、前記係合状態で接触がなされるときに前記各接触サポート構造の頂部を覆う状態に実質的に維持される、チャンバ。 - 請求項11に記載のチャンバであって、更に、
動作時に前記台座の上に配置されるように構成されたシャワーヘッドであって、前記ウエハ上への成膜を可能にするためにプロセスガスを提供するように構成されたシャワーヘッドと、
整合回路網を通して前記台座に接続された高周波(RF)電力供給部であって、更に、動作時に前記ウエハ上への前記成膜を可能にするRF電力供給部と、
を備えるチャンバ。 - 請求項19に記載のチャンバであって、
前記成長される膜は、後続のエッチング動作においてエッチングストップとして使用されるアッシング可能ハードマスク(AHM)である、チャンバ。 - 請求項19に記載のチャンバであって、更に、
前記チャンバ内に形成されたステーション群であって、各ステーションは、台座、フォーク、及びキャリアリングを含む、ステーション群と、
前記ステーション群の各ステーションの各フォークの動きを同時に制御するように構成された機構であって、前記動きは、
前記キャリアリングをそれぞれ持ち上げる又は下降させることと、
前記キャリアリングをそれぞれ前記ステーション群の別のステーションへ回転させることと、
を含む、機構と、
備えるチャンバ。 - 請求項21に記載のチャンバであって、
前記ステーションは、それぞれ、前記台座の少なくとも1つにリフトピンを含み、前記リフトピンは、エンドエフェクタが前記チャンバのステーションにおいてウエハを取り上げる又は降ろすことを可能にするために前記ウエハを上昇させるために使用される、チャンバ。 - 請求項21に記載のチャンバであって、
動作時に前記機構、前記プロセスガス、及び前記RF電力供給部を管理するためのコントローラにインターフェース接続されたチャンバ。
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KR20160072056A (ko) | 2016-06-22 |
TWI671781B (zh) | 2019-09-11 |
CN108538778A (zh) | 2018-09-14 |
US10242848B2 (en) | 2019-03-26 |
TW201635329A (zh) | 2016-10-01 |
CN105702617B (zh) | 2019-10-22 |
JP6619639B2 (ja) | 2019-12-11 |
KR20200022414A (ko) | 2020-03-03 |
CN105702617A (zh) | 2016-06-22 |
US20160172165A1 (en) | 2016-06-16 |
KR102421858B1 (ko) | 2022-07-15 |
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