JP7096538B2 - 開放空間均圧化通路および側方閉じ込めを備えた平坦な基板縁部接触部 - Google Patents
開放空間均圧化通路および側方閉じ込めを備えた平坦な基板縁部接触部 Download PDFInfo
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- JP7096538B2 JP7096538B2 JP2017202502A JP2017202502A JP7096538B2 JP 7096538 B2 JP7096538 B2 JP 7096538B2 JP 2017202502 A JP2017202502 A JP 2017202502A JP 2017202502 A JP2017202502 A JP 2017202502A JP 7096538 B2 JP7096538 B2 JP 7096538B2
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- Organic Chemistry (AREA)
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Description
本願は、2016年10月28日出願の米国仮出願第62/414,072号の利益を主張する。上記の出願の開示全体が、参照によって本明細書に組み込まれる。
本発明は、以下の適用例としても実現可能である。
<適用例1>
基板処理システムのためのペデスタルであって、
基板対向面を含むペデスタル本体と、
前記基板対向面の上に配置され、前記基板の半径方向外側縁部を支持するように構成された環状バンドと、
前記ペデスタル本体の前記基板対向面に規定され、前記環状バンドの半径方向内側に配置された空洞であって、前記空洞は、前記基板の底面と前記ペデスタル本体の前記基板対向面との間に空間を形成する、空洞と、
前記ペデスタル本体を貫通して前記空洞と流体連通することで、処理中に前記基板の両面における圧力を均一にする複数のベントと、
を備える、ペデスタル。
<適用例2>
適用例1に記載のペデスタルであって、前記バンドは、4mm~12mmの範囲の幅を有する、ペデスタル。
<適用例3>
適用例1に記載のペデスタルであって、前記バンドは、5mm~9mmの範囲の幅を有する、ペデスタル。
<適用例4>
適用例1に記載のペデスタルであって、前記バンドは、6mm~7mmの範囲の幅を有する、ペデスタル。
<適用例5>
適用例1に記載のペデスタルであって、前記バンドは、2~32の範囲の表面粗さ(Ra)を有する、ペデスタル。
<適用例6>
適用例5に記載のペデスタルであって、前記表面粗さ(Ra)は、2~24の範囲である、ペデスタル。
<適用例7>
適用例5に記載のペデスタルであって、前記表面粗さ(Ra)は、2~16の範囲である、ペデスタル。
<適用例8>
適用例1に記載のペデスタルであって、前記複数のベントは、
前記ペデスタル本体の半径方向外側から半径方向内向きに伸びる第1ベント部分と、
前記第1ベント部分の半径方向内側端部から前記空洞まで伸びる第2ベント部分と、
を備える、ペデスタル。
<適用例9>
適用例1に記載のペデスタルであって、前記複数のベントは、
前記ペデスタル本体の底部側から前記空洞に向かって軸方向に伸びる第1ベント部分と、
前記第1ベント部分を前記空洞に接続する複数の孔を含む第2ベント部分と、
を備える、ペデスタル。
<適用例10>
適用例1に記載のペデスタルであって、前記バンドは、導電材料の表面上に形成された誘電体コーティング、コーティングされていない導電材料、コーティングされていない金属、および、コーティングされていない誘電材料からなる群より選択された材料で形成される、ペデスタル。
<適用例11>
適用例1に記載のペデスタルであって、さらに、
前記基板および前記バンドの半径方向外側に配置されたリングを備え、
前記リングの上面は、前記基板の上面よりも上方に配置され、
前記リングは、誘電材料で形成されている、ペデスタル。
<適用例12>
適用例11に記載のペデスタルであって、前記誘電材料は、アルミナ、窒化アルミニウム、サファイア、石英、および、酸化シリコーンからなる群より選択される、ペデスタル。
<適用例13>
適用例1に記載のペデスタルであって、さらに、
前記基板の半径方向内側かつ下方に配置された半径方向内側表面と、前記基板の半径方向外側に配置された半径方向外側表面とを含むリングを備え、
前記リングの上面は、前記基板の上面と平行であり、
前記リングは、誘電材料で形成されている、ペデスタル。
<適用例14>
適用例13に記載のペデスタルであって、前記誘電材料は、アルミナ、窒化アルミニウム、サファイア、石英、および、酸化シリコーンからなる群より選択される、ペデスタル。
<適用例15>
適用例1に記載のペデスタルであって、前記ペデスタル本体は、その半径方向外側縁部の周りに環状ノッチを備え、前記ペデスタルは、さらに、
前記環状ノッチ内に配置されたリングを備え、
前記リングの底面は、前記基板の底面よりも下方にあり、
前記リングの上面は、前記基板の上面よりも下方にあり、
前記リングは、誘電材料で形成されている、ペデスタル。
<適用例16>
適用例15に記載のペデスタルであって、前記誘電材料は、アルミナ、窒化アルミニウム、サファイア、石英、および、酸化シリコーンからなる群より選択される、ペデスタル。
<適用例17>
適用例1に記載のペデスタルであって、さらに、
前記基板の中央を支持するために前記空洞内に配置された複数のピンを備え、
前記ピンの上面は、処理中に前記環状バンドの上面よりも下方、平行、または、上方のいずれかにある、ペデスタル。
<適用例18>
適用例1に記載のペデスタルであって、さらに、
前記基板の中央を支持するための複数の突起を備え、
前記突起の上面は、前記環状バンドの上面よりも下方、平行、または、上方のいずれかにある、ペデスタル。
<適用例19>
適用例1に記載のペデスタルであって、前記基板の前記半径方向外側縁部に沿った前記基板の裏面は、処理中に前記バンドと平行である、ペデスタル。
<適用例20>
基板処理システムであって、
処理チャンバと、
前記処理チャンバ内に配置された適用例1のペデスタルと、
前記処理チャンバ内に配置されたRF発生器と、
を備える、基板処理システム。
<適用例21>
適用例20に記載の基板処理システムであって、さらに、
前記ペデスタル本体から伸張可能な複数の最小接触面積(MCA)ピンと、
前記MCAピンの上面が、前記バンドよりも下方、平行、または、上方のいずれかになるように、処理中に前記MCAピンを伸ばすように構成されたコントローラと、
を備える、基板処理システム。
<適用例22>
適用例1に記載の基板処理システムであって、さらに、前記空洞内で前記ペデスタル本体から上向きに伸びる複数の突起を備える、基板処理システム。
Claims (19)
- 基板処理システムのためのペデスタルであって、
基板対向面、及び、その半径方向外側縁部の周りに環状ノッチを含むペデスタル本体と、
前記基板対向面の上に配置され、基板の半径方向外側縁部を支持するように構成された環状バンドと、
前記ペデスタル本体の前記基板対向面に規定され、前記環状バンドの半径方向内側に配置された空洞であって、前記空洞は、前記基板の底面と前記ペデスタル本体の前記基板対向面との間に空間を形成する、空洞と、
前記ペデスタル本体を貫通して前記空洞と流体連通することで、処理中に前記基板の両面における圧力を均一にする複数のベントであって、前記複数のベントは、各々、
前記ペデスタル本体の半径方向外側から半径方向内向きに伸びる第1ベント部分と、
前記第1ベント部分の半径方向内側端部から前記空洞まで垂直に伸びる第2ベント部分と、を備える、複数のベントと、
前記ペデスタル本体とは別体として、前記ペデスタル本体上の前記環状ノッチ内に配置されたリングと、
を備え、
前記リングの底面は、前記基板の底面よりも下方にあり、
前記リングの上面は、前記基板の上面よりも下方にあり、
前記リングは、誘電材料で形成されている、ペデスタル。 - 請求項1に記載のペデスタルであって、前記環状バンドは、4mm~12mmの範囲の幅を有する、ペデスタル。
- 請求項1に記載のペデスタルであって、前記環状バンドは、5mm~9mmの範囲の幅を有する、ペデスタル。
- 請求項1に記載のペデスタルであって、前記環状バンドは、6mm~7mmの範囲の幅を有する、ペデスタル。
- 請求項1に記載のペデスタルであって、前記環状バンドは、2~32の範囲の表面粗さ(Ra)を有する、ペデスタル。
- 請求項5に記載のペデスタルであって、前記表面粗さ(Ra)は、2~24の範囲である、ペデスタル。
- 請求項5に記載のペデスタルであって、前記表面粗さ(Ra)は、2~16の範囲である、ペデスタル。
- 請求項1に記載のペデスタルであって、前記環状バンドは、導電材料の表面上に形成された誘電体コーティング、コーティングされていない導電材料、コーティングされていない金属、および、コーティングされていない誘電材料からなる群より選択された材料で形成される、ペデスタル。
- 基板処理システムのためのペデスタルであって、
基板対向面を含むペデスタル本体と、
前記基板対向面の上に配置され、基板の半径方向外側縁部を支持するように構成された環状バンドと、
前記ペデスタル本体の前記基板対向面に規定され、前記環状バンドの半径方向内側に配置された空洞であって、前記空洞は、前記基板の底面と前記ペデスタル本体の前記基板対向面との間に空間を形成する、空洞と、
前記ペデスタル本体を貫通して前記空洞と流体連通することで、処理中に前記基板の両面における圧力を均一にする複数のベントであって、前記複数のベントは、各々、
前記ペデスタル本体の半径方向外側から半径方向内向きに伸びる第1ベント部分と、
前記第1ベント部分の半径方向内側端部から前記空洞まで垂直に伸びる第2ベント部分と、を備える、複数のベントと、
前記ペデスタル本体とは別体として、前記ペデスタル本体上の前記基板および前記環状バンドの半径方向外側に配置されたリングと、を備え、
前記リングの上面は、前記基板の上面よりも上方に配置され、
前記リングは、誘電材料で形成されている、ペデスタル。 - 請求項9に記載のペデスタルであって、前記誘電材料は、アルミナ、窒化アルミニウム、サファイア、石英、および、酸化シリコンからなる群より選択される、ペデスタル。
- 基板処理システムのためのペデスタルであって、
基板対向面を含むペデスタル本体と、
前記基板対向面の上に配置され、基板の半径方向外側縁部を支持するように構成された環状バンドと、
前記ペデスタル本体の前記基板対向面に規定され、前記環状バンドの半径方向内側に配置された空洞であって、前記空洞は、前記基板の底面と前記ペデスタル本体の前記基板対向面との間に空間を形成する、空洞と、
前記ペデスタル本体を貫通して前記空洞と流体連通することで、処理中に前記基板の両面における圧力を均一にする複数のベントであって、前記複数のベントは、各々、
前記ペデスタル本体の半径方向外側から半径方向内向きに伸びる第1ベント部分と、
前記第1ベント部分の半径方向内側端部から前記空洞まで垂直に伸びる第2ベント部分と、を備える、複数のベントと、
前記ペデスタル本体とは別体として、前記ペデスタル本体の上に配置されたリングであって、前記基板の半径方向内側かつ下方に配置された半径方向内側表面と、前記基板の半径方向外側に配置された半径方向外側表面とを含むリングと、を備え、
前記リングの上面は、前記基板の上面と平行であり、
前記リングは、誘電材料で形成されている、ペデスタル。 - 請求項11に記載のペデスタルであって、前記誘電材料は、アルミナ、窒化アルミニウム、サファイア、石英、および、酸化シリコンからなる群より選択される、ペデスタル。
- 請求項1に記載のペデスタルであって、前記誘電材料は、アルミナ、窒化アルミニウム、サファイア、石英、および、酸化シリコンからなる群より選択される、ペデスタル。
- 請求項1に記載のペデスタルであって、さらに、
前記基板の中央を支持するために前記空洞内に配置された複数のピンを備え、
前記ピンの上面は、処理中に前記環状バンドの上面よりも下方、平行、または、上方のいずれかにある、ペデスタル。 - 請求項1に記載のペデスタルであって、さらに、
前記基板の中央を支持するための複数の突起を備え、
前記突起の上面は、前記環状バンドの上面よりも下方、平行、または、上方のいずれかにある、ペデスタル。 - 請求項1に記載のペデスタルであって、前記環状バンドは、前記基板が処理中に前記環状バンドと平行になるように、前記半径方向外側縁部に沿った前記基板の裏面を支持するように構成されている、ペデスタル。
- 基板処理システムであって、
処理チャンバと、
前記処理チャンバ内に配置された請求項1のペデスタルと、
前記処理チャンバ内に配置されたRF発生器と、
を備える、基板処理システム。 - 請求項17に記載の基板処理システムであって、さらに、
前記ペデスタル本体から伸張可能な複数の最小接触面積(MCA)ピンと、
前記MCAピンの上面が、前記環状バンドよりも下方、平行、または、上方のいずれかになるように、処理中に前記MCAピンを伸ばすように構成されたコントローラと、
を備える、基板処理システム。 - 請求項1に記載のペデスタルであって、さらに、前記空洞内で前記ペデスタル本体から上向きに伸びる複数の突起を備える、ペデスタル。
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2017
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- 2017-10-19 JP JP2017202502A patent/JP7096538B2/ja active Active
- 2017-10-23 TW TW106136280A patent/TWI765924B/zh active
- 2017-10-27 CN CN201711022418.2A patent/CN108091592B/zh active Active
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KR20220114517A (ko) | 2022-08-17 |
KR20230163977A (ko) | 2023-12-01 |
US10622243B2 (en) | 2020-04-14 |
TWI765924B (zh) | 2022-06-01 |
CN108091592A (zh) | 2018-05-29 |
JP7373022B2 (ja) | 2023-11-01 |
KR20180046867A (ko) | 2018-05-09 |
JP2022120080A (ja) | 2022-08-17 |
US20180122685A1 (en) | 2018-05-03 |
JP2018078284A (ja) | 2018-05-17 |
KR102430432B1 (ko) | 2022-08-05 |
TW201833974A (zh) | 2018-09-16 |
CN117038508A (zh) | 2023-11-10 |
SG10201708448UA (en) | 2018-05-30 |
CN108091592B (zh) | 2023-08-25 |
US11443975B2 (en) | 2022-09-13 |
US20200227304A1 (en) | 2020-07-16 |
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