JP2016070924A - 穿孔検査装置 - Google Patents
穿孔検査装置 Download PDFInfo
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- JP2016070924A JP2016070924A JP2015181555A JP2015181555A JP2016070924A JP 2016070924 A JP2016070924 A JP 2016070924A JP 2015181555 A JP2015181555 A JP 2015181555A JP 2015181555 A JP2015181555 A JP 2015181555A JP 2016070924 A JP2016070924 A JP 2016070924A
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- 238000005286 illumination Methods 0.000 claims abstract description 70
- 230000003287 optical effect Effects 0.000 claims abstract description 24
- 238000011156 evaluation Methods 0.000 claims abstract description 20
- 238000012876 topography Methods 0.000 claims abstract description 12
- 238000003384 imaging method Methods 0.000 claims abstract description 6
- 238000007689 inspection Methods 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 10
- 238000003491 array Methods 0.000 claims description 7
- 238000005553 drilling Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 abstract description 7
- 239000011796 hollow space material Substances 0.000 abstract description 4
- 230000007547 defect Effects 0.000 description 6
- 239000003086 colorant Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/06—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor with illuminating arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2407—Optical details
- G02B23/2461—Illumination
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/10—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths
- H04N23/12—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths with one sensor only
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/698—Control of cameras or camera modules for achieving an enlarged field of view, e.g. panoramic image capture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
- G01N2021/9542—Inspecting the inner surface of hollow bodies, e.g. bores using a probe
- G01N2021/9544—Inspecting the inner surface of hollow bodies, e.g. bores using a probe with emitter and receiver on the probe
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/555—Constructional details for picking-up images in sites, inaccessible due to their dimensions or hazardous conditions, e.g. endoscopes or borescopes
Abstract
Description
4 内面
6 穿孔
8 加工物
10 測定ヘッド
12 軸
14 座標系
16 光学系
18 画像撮影機
20 評価機器
22 照明機器
24 第一の光源配列
24’ 第三の光源配列
26 光学系16の縁
28 支持体
30 発光ダイオード
32 第二の光源配列
34 発光ダイオード
36 正のファイ方向
36’ 負のファイ方向
Claims (15)
- 画像撮影機(18)及びその後に配置された評価機器(20)と画像を伝送する形で接続された光学系(16)が配置された、軸方向を規定する測定ヘッド(10)と、
この光学系(16)により捕捉される内面(4)の撮影範囲を照明する照明機器(22)と、
を備えた、加工物(8)の穿孔(6)の内面(6)を検査する穿孔検査装置(2)において、
この照明機器(22)が、内面(4)のトポグラフィの陰影画像を生成するために、検査すべき内面(4)を異なる照明方向から照明するように構成、設置されていることと、 この評価機器(20)が、画像撮影機(18)により撮影した陰影画像に基づき、このトポグラフィを検出するように構成、設置されていることと、
を特徴とする穿孔検査装置。 - 当該の照明機器(22)が、第一の照明方向から内面(4)を照明する少なくとも一つの第一の光源配列(24)と、第二の照明方向から内面(4)を照明する少なくとも一つの第二の光源配列(32)とを備えていることを特徴とする請求項1に記載の検査装置。
- 当該の第一の光源配列(24)が半径方向から内面(4)を照明し、当該の第二の光源配列(32)が円周方向に接する方向から内面(4)を照明するように構成、設置されていることを特徴とする請求項2に記載の検査装置。
- 少なくとも一つの光源配列(24,32)が回転対称又はほぼ回転対称に内面(4)を照明するように構成、設置されていることを特徴とする請求項2又は3に記載の検査装置。
- 少なくとも一つの光源配列(24,32)が円周方向にリング形状に配置された複数の光源を有することを特徴とする請求項2から4までのいずれか一つに記載の検査装置。
- 当該の光源の少なくとも一部が発光ダイオード(30,34)であることを特徴とする請求項5に記載の検査装置。
- 当該の照明機器(22)が、軸方向に互いに間隔を開けた、互いに対向する方向に照射する少なくとも二つの光源配列(24,24’)を有することを特徴とする請求項2から6までのいずれか一つに記載の検査装置。
- 当該の光源配列(24,24’,32)を駆動するための制御手段を備えていることを特徴とする請求項2から7までのいずれか一つに記載の検査装置。
- 当該の制御手段が、異なる照明方向から時間的に順番に内面(4)を照明するように構成、設置されていることを特徴とする請求項8に記載の検査装置。
- 各照明方向が独自の照明色に対応付けられていることと、
画像撮影機(18)がカラーセンサを備えていることと、
を特徴とする請求項2から9までのいずれか一つに記載の検査装置。 - 当該の測定ヘッド(10)には、測定ヘッド(10)を軸方向に段階的又は連続的に送るための送り機器が配備されていることを特徴とする請求項1から10までのいずれか一つに記載の検査装置。
- 当該の光学系(16)が、全方向視界の光学系であることを特徴とする請求項1から11までのいずれか一つに記載の検査装置。
- 少なくとも測定ヘッド(10)が、有利には、照明機器(22)を含む測定ヘッド(10)が、検査すべき穿孔(6)に挿入することが可能な内視鏡として構成されていることを特徴とする請求項1から12までのいずれか一つに記載の検査装置。
- 当該の画像撮影機(18)がデジタル画像撮影機(画像センサ)であることと、
当該の評価機器(20)がデジタル評価機器であることと、
の一つ以上を特徴とする請求項1から13までのいずれか一つに記載の検査装置。 - 当該の評価機器が、画像撮影機(18)により撮影された陰影画像をシェープフロムシェーディング方法に基づき評価するように構成、設置されていることを特徴とする請求項1から14までのいずれか一つに記載の検査装置。
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CN (2) | CN105486694B (ja) |
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CN103393392B (zh) * | 2013-06-19 | 2015-08-26 | 西安电子科技大学 | 深度与强度可调式的探头激光共聚焦显微内窥镜系统 |
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DE102014118756B4 (de) | 2014-12-16 | 2017-07-27 | Jenoptik Industrial Metrology Germany Gmbh | Messvorrichtung |
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2014
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- 2014-12-17 DE DE202014010793.9U patent/DE202014010793U1/de active Active
- 2014-12-17 DE DE102014118844.6A patent/DE102014118844B4/de active Active
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- 2015-09-25 JP JP2015188155A patent/JP2016070934A/ja active Pending
- 2015-09-29 CN CN201510631335.8A patent/CN105486695A/zh active Pending
- 2015-09-30 US US14/871,646 patent/US20160187265A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
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JP2016070934A (ja) | 2016-05-09 |
DE102014118844B4 (de) | 2016-11-03 |
DE102014118844A1 (de) | 2016-04-07 |
CN105486694A (zh) | 2016-04-13 |
DE202014010793U1 (de) | 2016-08-29 |
JP6284278B2 (ja) | 2018-02-28 |
CN105486695A (zh) | 2016-04-13 |
US20160187264A1 (en) | 2016-06-30 |
US9983149B2 (en) | 2018-05-29 |
CN105486694B (zh) | 2019-03-19 |
US20160187265A1 (en) | 2016-06-30 |
DE102014118753A1 (de) | 2016-04-07 |
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