JP2016032073A - 太陽電池セルの製造方法および太陽電池セルの製造装置 - Google Patents

太陽電池セルの製造方法および太陽電池セルの製造装置 Download PDF

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Publication number
JP2016032073A
JP2016032073A JP2014155111A JP2014155111A JP2016032073A JP 2016032073 A JP2016032073 A JP 2016032073A JP 2014155111 A JP2014155111 A JP 2014155111A JP 2014155111 A JP2014155111 A JP 2014155111A JP 2016032073 A JP2016032073 A JP 2016032073A
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Japan
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silicon
silicon substrate
based substrate
substrate
tank
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JP2014155111A
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Japanese (ja)
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JP2016032073A5 (enExample
Inventor
元 告野
Hajime Tsugeno
元 告野
文寿 山本
Fumihisa Yamamoto
文寿 山本
崇 澤井
Takashi Sawai
崇 澤井
小林　淳二
Junji Kobayashi
淳二 小林
安永　望
Nozomi Yasunaga
望 安永
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP2014155111A priority Critical patent/JP2016032073A/ja
Publication of JP2016032073A publication Critical patent/JP2016032073A/ja
Publication of JP2016032073A5 publication Critical patent/JP2016032073A5/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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JP2014155111A 2014-07-30 2014-07-30 太陽電池セルの製造方法および太陽電池セルの製造装置 Pending JP2016032073A (ja)

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JP2014155111A JP2016032073A (ja) 2014-07-30 2014-07-30 太陽電池セルの製造方法および太陽電池セルの製造装置

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JP2014155111A JP2016032073A (ja) 2014-07-30 2014-07-30 太陽電池セルの製造方法および太陽電池セルの製造装置

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JP2016032073A true JP2016032073A (ja) 2016-03-07
JP2016032073A5 JP2016032073A5 (enExample) 2017-11-30

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110237709A (zh) * 2019-07-10 2019-09-17 中威新能源(成都)有限公司 基于太阳电池制造工艺的硅片表面抑制氧化方法
CN112259444A (zh) * 2020-10-19 2021-01-22 绍兴同芯成集成电路有限公司 一种高疏水性超薄晶圆清洗方法
CN114864744A (zh) * 2022-05-05 2022-08-05 普乐新能源科技(徐州)有限公司 一种纳米硅浆料的高效清洗方法及系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11260778A (ja) * 1998-03-06 1999-09-24 Sony Corp 枚葉式表面洗浄方法及び装置
JP2006344765A (ja) * 2005-06-09 2006-12-21 Shin Etsu Handotai Co Ltd 太陽電池用基板の製造方法および太陽電池
JP2011129867A (ja) * 2009-11-17 2011-06-30 Shirakuseru Kk ボロン拡散層を有するシリコン太陽電池セル及びその製造方法
JP2012009722A (ja) * 2010-06-28 2012-01-12 Sumco Corp 太陽電池基板用半導体ウェーハの洗浄方法
US20130220410A1 (en) * 2011-09-07 2013-08-29 Air Products And Chemicals, Inc. Precursors for Photovoltaic Passivation
JP2014096459A (ja) * 2012-11-08 2014-05-22 Mitsubishi Electric Corp 太陽電池用半導体基板の表面処理方法、太陽電池用半導体基板の製造方法、太陽電池の製造方法及び太陽電池製造装置
JP2014220346A (ja) * 2013-05-07 2014-11-20 株式会社村田製作所 太陽電池セルおよびその製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11260778A (ja) * 1998-03-06 1999-09-24 Sony Corp 枚葉式表面洗浄方法及び装置
JP2006344765A (ja) * 2005-06-09 2006-12-21 Shin Etsu Handotai Co Ltd 太陽電池用基板の製造方法および太陽電池
JP2011129867A (ja) * 2009-11-17 2011-06-30 Shirakuseru Kk ボロン拡散層を有するシリコン太陽電池セル及びその製造方法
JP2012009722A (ja) * 2010-06-28 2012-01-12 Sumco Corp 太陽電池基板用半導体ウェーハの洗浄方法
US20130220410A1 (en) * 2011-09-07 2013-08-29 Air Products And Chemicals, Inc. Precursors for Photovoltaic Passivation
JP2014096459A (ja) * 2012-11-08 2014-05-22 Mitsubishi Electric Corp 太陽電池用半導体基板の表面処理方法、太陽電池用半導体基板の製造方法、太陽電池の製造方法及び太陽電池製造装置
JP2014220346A (ja) * 2013-05-07 2014-11-20 株式会社村田製作所 太陽電池セルおよびその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110237709A (zh) * 2019-07-10 2019-09-17 中威新能源(成都)有限公司 基于太阳电池制造工艺的硅片表面抑制氧化方法
CN112259444A (zh) * 2020-10-19 2021-01-22 绍兴同芯成集成电路有限公司 一种高疏水性超薄晶圆清洗方法
CN114864744A (zh) * 2022-05-05 2022-08-05 普乐新能源科技(徐州)有限公司 一种纳米硅浆料的高效清洗方法及系统
CN114864744B (zh) * 2022-05-05 2024-04-02 普乐新能源科技(泰兴)有限公司 一种纳米硅浆料的高效清洗方法及系统

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