JP2016031947A5 - - Google Patents

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Publication number
JP2016031947A5
JP2016031947A5 JP2014152285A JP2014152285A JP2016031947A5 JP 2016031947 A5 JP2016031947 A5 JP 2016031947A5 JP 2014152285 A JP2014152285 A JP 2014152285A JP 2014152285 A JP2014152285 A JP 2014152285A JP 2016031947 A5 JP2016031947 A5 JP 2016031947A5
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JP
Japan
Prior art keywords
film
polished
ions
manufacturing
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014152285A
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English (en)
Japanese (ja)
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JP2016031947A (ja
JP6196589B2 (ja
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Priority to JP2014152285A priority Critical patent/JP6196589B2/ja
Priority claimed from JP2014152285A external-priority patent/JP6196589B2/ja
Priority to US14/643,218 priority patent/US10008390B2/en
Publication of JP2016031947A publication Critical patent/JP2016031947A/ja
Publication of JP2016031947A5 publication Critical patent/JP2016031947A5/ja
Application granted granted Critical
Publication of JP6196589B2 publication Critical patent/JP6196589B2/ja
Priority to US15/992,223 priority patent/US20180277388A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014152285A 2014-07-25 2014-07-25 半導体装置の製造方法および半導体製造装置 Active JP6196589B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014152285A JP6196589B2 (ja) 2014-07-25 2014-07-25 半導体装置の製造方法および半導体製造装置
US14/643,218 US10008390B2 (en) 2014-07-25 2015-03-10 Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
US15/992,223 US20180277388A1 (en) 2014-07-25 2018-05-30 Manufacturing method of semiconductor device and semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014152285A JP6196589B2 (ja) 2014-07-25 2014-07-25 半導体装置の製造方法および半導体製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017155935A Division JP2017228785A (ja) 2017-08-10 2017-08-10 半導体装置の製造方法および半導体製造装置

Publications (3)

Publication Number Publication Date
JP2016031947A JP2016031947A (ja) 2016-03-07
JP2016031947A5 true JP2016031947A5 (enExample) 2016-04-14
JP6196589B2 JP6196589B2 (ja) 2017-09-13

Family

ID=55167297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014152285A Active JP6196589B2 (ja) 2014-07-25 2014-07-25 半導体装置の製造方法および半導体製造装置

Country Status (2)

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US (2) US10008390B2 (enExample)
JP (1) JP6196589B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10777424B2 (en) 2018-02-27 2020-09-15 Kabushiki Kaisha Toshiba Method for manufacturing semiconductor device
US20250112050A1 (en) * 2023-09-28 2025-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. Polishing apparatus having beam for surface treatment and polishing method using the same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2626502B2 (ja) * 1993-09-14 1997-07-02 日本電気株式会社 半導体装置及びその製造方法
JP3514908B2 (ja) * 1995-11-13 2004-04-05 株式会社東芝 研磨剤
JPH09162144A (ja) 1995-12-05 1997-06-20 Toshiba Corp 半導体装置の製造方法
JP3147089B2 (ja) 1998-06-23 2001-03-19 日本電気株式会社 半導体装置の製造方法
JP2001044201A (ja) 1999-07-29 2001-02-16 Hitachi Ltd 半導体集積回路装置の製造方法
DE10056872C1 (de) * 2000-11-16 2002-06-13 Advanced Micro Devices Inc Implantationsüberwachung unter Anwendung mehrerer Implantations- und Temperschritte
US6713385B1 (en) * 2002-10-31 2004-03-30 Intel Corporation Implanting ions in shallow trench isolation structures
JP2004207385A (ja) * 2002-12-24 2004-07-22 Rohm Co Ltd マスク、その製造方法およびこれを用いた半導体装置の製造方法
JP2007002268A (ja) 2005-06-21 2007-01-11 Plasma Ion Assist Co Ltd 研磨用部材の表面処理方法及びその物品
JP2008016692A (ja) * 2006-07-07 2008-01-24 Fujifilm Corp 半導体装置の製造方法
US8153513B2 (en) * 2006-07-25 2012-04-10 Silicon Genesis Corporation Method and system for continuous large-area scanning implantation process
US7767583B2 (en) * 2008-03-04 2010-08-03 Varian Semiconductor Equipment Associates, Inc. Method to improve uniformity of chemical mechanical polishing planarization
JP2011138826A (ja) * 2009-12-25 2011-07-14 Nitta Haas Inc 半導体デバイス用基板およびｓｏｉ基板

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