JP2016027641A5 - - Google Patents

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Publication number
JP2016027641A5
JP2016027641A5 JP2015129639A JP2015129639A JP2016027641A5 JP 2016027641 A5 JP2016027641 A5 JP 2016027641A5 JP 2015129639 A JP2015129639 A JP 2015129639A JP 2015129639 A JP2015129639 A JP 2015129639A JP 2016027641 A5 JP2016027641 A5 JP 2016027641A5
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JP
Japan
Prior art keywords
substrate
protruding
row
longitudinal direction
members
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Application number
JP2015129639A
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English (en)
Japanese (ja)
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JP6366544B2 (ja
JP2016027641A (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2015129639A external-priority patent/JP6366544B2/ja
Priority to JP2015129639A priority Critical patent/JP6366544B2/ja
Priority to MYPI2016704827A priority patent/MY176791A/en
Priority to SG11201700026XA priority patent/SG11201700026XA/en
Priority to KR1020177002741A priority patent/KR102282899B1/ko
Priority to US15/322,480 priority patent/US10453708B2/en
Priority to CN201580036679.2A priority patent/CN106663620B/zh
Priority to PCT/JP2015/003314 priority patent/WO2016002219A1/ja
Priority to TW104121628A priority patent/TWI686868B/zh
Publication of JP2016027641A publication Critical patent/JP2016027641A/ja
Publication of JP2016027641A5 publication Critical patent/JP2016027641A5/ja
Publication of JP6366544B2 publication Critical patent/JP6366544B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015129639A 2014-07-04 2015-06-29 洗浄装置及びロール洗浄部材 Active JP6366544B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2015129639A JP6366544B2 (ja) 2014-07-04 2015-06-29 洗浄装置及びロール洗浄部材
PCT/JP2015/003314 WO2016002219A1 (ja) 2014-07-04 2015-07-01 洗浄装置及びロール洗浄部材
SG11201700026XA SG11201700026XA (en) 2014-07-04 2015-07-01 Cleaning device and roll cleaning member
KR1020177002741A KR102282899B1 (ko) 2014-07-04 2015-07-01 세정 장치 및 롤 세정 부재
US15/322,480 US10453708B2 (en) 2014-07-04 2015-07-01 Cleaning device and roll cleaning member
CN201580036679.2A CN106663620B (zh) 2014-07-04 2015-07-01 清洗装置及滚筒清洗部件
MYPI2016704827A MY176791A (en) 2014-07-04 2015-07-01 Cleaning device and roll cleaning member
TW104121628A TWI686868B (zh) 2014-07-04 2015-07-03 洗淨裝置及滾筒洗淨構件

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014138685 2014-07-04
JP2014138685 2014-07-04
JP2015129639A JP6366544B2 (ja) 2014-07-04 2015-06-29 洗浄装置及びロール洗浄部材

Publications (3)

Publication Number Publication Date
JP2016027641A JP2016027641A (ja) 2016-02-18
JP2016027641A5 true JP2016027641A5 (enExample) 2017-12-21
JP6366544B2 JP6366544B2 (ja) 2018-08-01

Family

ID=55018792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015129639A Active JP6366544B2 (ja) 2014-07-04 2015-06-29 洗浄装置及びロール洗浄部材

Country Status (8)

Country Link
US (1) US10453708B2 (enExample)
JP (1) JP6366544B2 (enExample)
KR (1) KR102282899B1 (enExample)
CN (1) CN106663620B (enExample)
MY (1) MY176791A (enExample)
SG (1) SG11201700026XA (enExample)
TW (1) TWI686868B (enExample)
WO (1) WO2016002219A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10269555B2 (en) 2015-09-30 2019-04-23 Taiwan Semiconductor Manufacturing Company, Ltd. Post-CMP cleaning and apparatus
JP6990720B2 (ja) * 2018-01-09 2022-01-12 東京エレクトロン株式会社 洗浄装置、洗浄方法及びコンピュータ記憶媒体
USD923890S1 (en) * 2018-09-07 2021-06-29 Maradyne Corporation Mattress surface cleaning agitator
CN109007900B (zh) * 2018-09-20 2023-09-12 安徽科技学院 一种海带无损伤清洗装置及其清洗方法
JP7564811B2 (ja) * 2019-01-31 2024-10-09 アプライド マテリアルズ インコーポレイテッド 基板洗浄デバイス及び基板洗浄方法
USD897111S1 (en) * 2019-03-11 2020-09-29 Ali Ebrahimi Afrouzi Side brush
USD906680S1 (en) * 2019-03-11 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD906681S1 (en) * 2019-03-11 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD906683S1 (en) * 2019-03-11 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD906682S1 (en) * 2019-03-11 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD897112S1 (en) * 2019-03-25 2020-09-29 Ali Ebrahimi Afrouzi Side brush
USD906684S1 (en) * 2019-03-28 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD906685S1 (en) * 2019-04-02 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD907370S1 (en) * 2019-04-05 2021-01-12 Ali Ebrahimi Afrouzi Side brush
USD907925S1 (en) * 2019-04-23 2021-01-19 Ali Ebrahimi Afrouzi Side brush
USD897113S1 (en) * 2019-04-25 2020-09-29 Ali Ebrahimi Afrouzi Side brush
USD906686S1 (en) * 2019-04-30 2021-01-05 Ali Ebrahimi Afrouzi Side brush
USD907371S1 (en) * 2019-05-03 2021-01-12 Ali Ebrahimi Afrouzi Side brush
USD907372S1 (en) * 2019-06-10 2021-01-12 Ali Ebrahimi Afrouzi Side brush
USD907926S1 (en) * 2019-06-10 2021-01-19 Ali Ebrahimi Afrouzi Side brush
CN111790682B (zh) * 2020-06-30 2022-06-28 鹰潭拓新机电股份有限公司 一种模具零件清洗装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6502273B1 (en) 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
JP3403108B2 (ja) 1999-02-26 2003-05-06 アイオン株式会社 洗浄用スポンジローラ
US6299698B1 (en) 1998-07-10 2001-10-09 Applied Materials, Inc. Wafer edge scrubber and method
JP2000270929A (ja) * 1999-03-26 2000-10-03 Shibaura Mechatronics Corp 洗浄用ブラシ
EP1680260B1 (en) * 2003-08-08 2014-04-30 Entegris, Inc. Methods and materials for making a monolithic porous pad cast onto a rotatable base
US20050109371A1 (en) * 2003-10-27 2005-05-26 Applied Materials, Inc. Post CMP scrubbing of substrates
JP2006075718A (ja) 2004-09-09 2006-03-23 Aion Kk 弾性ローラ
JP2008311481A (ja) * 2007-06-15 2008-12-25 Sony Corp 基板洗浄方法、基板洗浄装置及び半導体製造方法
JP2009066527A (ja) * 2007-09-13 2009-04-02 Nec Electronics Corp 洗浄用ローラおよび洗浄装置
US20100043160A1 (en) * 2008-08-20 2010-02-25 United Microelectronics Corp. Wafer cleaning roller
SG183419A1 (en) 2010-02-22 2012-09-27 Entegris Inc Post-cmp cleaning brush
JP5535687B2 (ja) 2010-03-01 2014-07-02 株式会社荏原製作所 基板洗浄方法及び基板洗浄装置
JP2011233646A (ja) * 2010-04-26 2011-11-17 Sumitomo Metal Mining Co Ltd 半導体用基板の洗浄方法

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