JP2016025166A - Cutting device and cutting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting device that can stably divide an object into individual pieces even when products are small.SOLUTION: A sealed board 12 is cut along a first cutting line 32 into an intermediate body 36 by using a first cutting condition. Subsequently, the intermediate body 36 is cut into individual pieces by using a second cutting condition. Accordingly, the intermediate body 36 is divided into products P corresponding to areas 34 surrounded by first cutting lines 32 and second cutting lines 33. The flow rate of cutting water under the second cutting condition for division into the products P is set to be smaller than the flow rate of cutting water under the first cutting condition when the intermediate body 36 is formed. By reducing the flow rate of cutting water under the second condition, the products P can be prevented from being displaced or scattered from a predetermined position of a cutting table 11 by the water pressure of the cutting water even when the products P are small.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a cutting apparatus and a cutting method for manufacturing a plurality of products obtained by cutting an object to be cut.

  A substrate consisting of a printed circuit board, a lead frame, etc. is virtually divided into a plurality of grid-like areas, chip-like elements are attached to each area, and then the whole board is sealed with resin. That's it. A product obtained by cutting a sealed substrate by a cutting mechanism using a rotary blade or the like and dividing it into individual region units becomes a product.

  Conventionally, a predetermined region of a sealed substrate is cut by a cutting mechanism such as a rotary blade using a cutting device. For example, a BGA (Ball Grid Array Package) product is cut as follows. First, it is placed on the cutting table and sucked with the substrate-side surface of the sealed substrate facing up. Next, the sealed substrate is aligned (positioned). By aligning, the position of a virtual cutting line that divides a plurality of regions is set. Next, the cutting table that adsorbs the sealed substrate and the cutting mechanism are relatively moved. The cutting water is sprayed onto the cut portion of the sealed substrate, and the sealed substrate is cut along the cutting line set on the sealed substrate by the cutting mechanism. An individualized product is manufactured by cutting the sealed substrate.

  In recent years, with the progress of semiconductor miniaturization, products manufactured tend to become smaller and smaller. For example, in analog products and discrete products, there are many products having a size of 2 mm or less on one side. When individualizing a reduced product, by spraying cutting water, the individualized product is displaced from a predetermined position on the cutting table, or the product flies off the cutting table. The phenomenon that occurs. These phenomena are considered to occur because the water pressure applied to the product by the cutting water is higher than the adsorption force for adsorbing the singulated product at a predetermined position of the cutting table. When such a phenomenon occurs, the product is chipped or cracked, and the quality of the product is significantly reduced. In addition, the product yield is greatly deteriorated. Therefore, when separating the sealed substrate, it is important to securely fix the product so as not to move from a predetermined position of the cutting table.

  As a dicing apparatus that efficiently cleans the workpiece being cut, “(substantially) first cleaning water injection means for injecting cleaning water toward the workpiece being cut, and (substantially) during the cutting process” Second cleaning water spraying means for spraying cleaning water toward the workpiece, (substantially) cutting water spraying means for supplying cutting water toward the end face of the cutting blade, and both side surfaces of the cutting blade There is proposed a dicing apparatus that is provided with cooling water jetting means that supplies cooling water toward the cutting portion of the workpiece by the cutting blade (for example, paragraphs [0008] and [0008] of [Patent Document 1]. 0011], FIG. 3, FIG. 4).

JP 2007-188974 A

  However, the dicing apparatus disclosed in Patent Document 1 has the following problems. As shown in FIG. 3 of Patent Document 1, the cutting device 10 of the dicing apparatus 1 includes a rotary blade 14, a cutting table 60, a fixed water curtain nozzle (corresponding to a first washing water injection means) 62, a sponge block (scrub) 64, a moving water curtain nozzle (corresponding to the second cleaning water jetting means) 66, and the like.

  Further, the flange cover (a part of the apparatus main body) 72 is provided with a cutting water supply nozzle (corresponding to cutting water supply means) 76 and a cooling water supply nozzle (corresponding to cooling water supply means) 78. The cutting water supply nozzle 76 is disposed to face the rotary blade 14, and the cutting water sprayed from the cutting water supply nozzle 76 is supplied to the rotary blade 14 immediately before cutting. Further, a pair of cooling water supply nozzles 78 are provided across the rotary blade 14, and the cooling water sprayed from the cooling water supply nozzle 78 is supplied to the rotary blade 14 being cut and the cutting portion of the wafer W. The rotary blade 14 and the cutting part are cooled.

  According to the configuration of such an apparatus, when the size of the chip formed on the wafer W is reduced, it is separated into pieces by the processing water sprayed from the cutting water supply means and the cooling water supply means. There is a risk that the tip will fly easily.

  SUMMARY OF THE INVENTION The present invention solves the above-mentioned problem, and in a cutting device, even when the product becomes small, the product does not deviate or fly out from a predetermined position of the cutting table, and can be separated into pieces stably. It is an object of the present invention to provide a cutting device and a cutting method capable of performing the above.

  In order to solve the above problems, a cutting apparatus according to the present invention includes a table on which a workpiece having a plurality of regions surrounded by a plurality of cutting lines is placed, a cutting means for cutting the workpiece, A moving mechanism that relatively moves the table and the cutting means, and a cutting water supply mechanism that supplies cutting water to a processing point where the cutting means and the workpiece are in contact with each other. A cutting device used when manufacturing a product corresponding to each of the above, and includes a control unit that controls a cutting condition for cutting an object to be cut. A first cutting condition for generating an intermediate body including a plurality of regions by cutting the workpiece along the cutting direction, and a second cutting condition for separating the intermediate body into a product by cutting the intermediate body; Cutting at the second cutting condition Water flow rate is equal to or less than the flow rate of cutting fluid in the first cutting conditions.

  Further, in the cutting device according to the present invention, in the above-described cutting device, the relative moving speed between the table and the cutting means in the second cutting condition is smaller than the relative moving speed in the first cutting condition. It is characterized by that.

  The cutting device according to the present invention is characterized in that, in the above-described cutting device, at least a flow rate of the cutting water is controlled by a flow rate adjusting means.

  Further, the cutting device according to the present invention is characterized in that, in the above-described cutting device, at least a flow rate of the cutting water is controlled by the switching means.

  Moreover, the cutting device according to the present invention includes a measuring unit that measures the flow rate of processing water that contains at least cutting water and is used for cutting in the above-described cutting device, and is based on a measurement value measured by the measuring unit. The flow rate of the processing water in the first cutting condition and the second cutting condition is controlled.

  Further, the cutting device according to the present invention includes a cooling water supply mechanism that supplies cooling water from both sides of the cutting unit toward the lower side of the cutting unit in the above-described cutting unit, and the flow rate of the cooling water in the second cutting condition Is smaller than the flow rate of the cooling water in the first cutting condition.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a sealed substrate.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a substrate on which circuit elements respectively corresponding to a plurality of regions are formed.

  In order to solve the above problems, a cutting method according to the present invention includes a step of placing a workpiece having a plurality of regions surrounded by a plurality of cutting lines on a table, and the table and the cutting means relatively A step of moving, a step of cutting the workpiece using the cutting means by relatively moving the table and the cutting means, and a cutting water supply mechanism at a work point where the cutting means and the workpiece are in contact with each other A cutting method comprising: a step of supplying cutting water using a step of controlling cutting conditions for cutting an object to be cut, wherein the cutting step is performed on a part of a plurality of cutting lines. A first step of generating an intermediate including a plurality of regions by cutting the workpiece along the cut, and a second step of separating the intermediate into a product by cutting the intermediate In the controlling step, Characterized by the flow rate of the cutting water in the process control cutting water supply mechanism to less than the flow rate of the cutting water in the first step.

  Further, in the cutting method according to the present invention, in the above-described cutting method, the relative movement speed between the table and the cutting means in the second step is set to the relative speed in the first step in the relative moving step. The moving speed is smaller than a typical moving speed.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, at least the flow rate of the cutting water is controlled using a flow rate adjusting means in the controlling step.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, at least the flow rate of the cutting water is controlled using a switching means in the controlling step.

  Further, the cutting method according to the present invention includes the step of measuring the flow rate of the processing water that contains at least cutting water and is used for cutting in the above-described cutting method, and in the control step, the measurement is performed in the measurement step. Based on the measured value, the flow rate of the processing water in the first step and the second step is controlled.

  Further, the cutting method according to the present invention includes the step of supplying cooling water using the cooling water supply mechanism toward the lower side of the cutting means in the cutting method described above, and the step of controlling the second step The cooling water supply mechanism is controlled so that the flow rate of the cooling water in is lower than the flow rate of the cooling water in the first step.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a sealed substrate.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a substrate on which circuit elements respectively corresponding to a plurality of regions are formed.

  According to the present invention, in the cutting apparatus, a table on which a workpiece having a plurality of regions surrounded by a plurality of cutting lines is placed, a cutting means for cutting the workpiece, and the table and the cutting means are relative to each other. A moving mechanism for moving the cutting device, a cutting water supply mechanism for supplying cutting water to a processing point where the cutting means and the object to be cut contact, and a control unit for controlling cutting conditions. According to the first cutting condition, the object to be cut is cut along a part of the plurality of cutting lines to generate an intermediate. According to the second cutting condition, the product is manufactured by cutting the intermediate body into individual pieces to be cut. The flow rate of the cutting water under the second cutting condition is made smaller than the flow rate of the cutting water under the first cutting condition. Thereby, even when the product is small, it is possible to prevent the product from being displaced from a predetermined position of the table or flying due to the hydraulic pressure of the cutting water.

FIG. 1A is a plan view of the periphery of a rotary blade, and FIG. 1B is a schematic cross-sectional view of the rotary blade as viewed from the side opposite to the spindle. In Example 1 of the cutting device concerning the present invention, it is a schematic diagram showing a processing water supply mechanism which supplies processing water to each nozzle shown in FIG. (A)-(c) is a top view which shows the process in which the cutting device which concerns on this invention cut | disconnects a sealed substrate. FIG. 3A is a plan view showing a cutting line set on the sealed substrate, and FIG. 3B shows a state after the sealed substrate is cut along the first cutting line. FIG. 3C is a plan view showing a state after the sealed substrate is separated into pieces. In Example 2 of the cutting device which concerns on this invention, it is the schematic which shows the process water supply mechanism which supplies process water to each nozzle shown by FIG. In Example 3 of the cutting device which concerns on this invention, it is a top view which shows the outline | summary of a cutting device.

  As shown in FIG. 3, first, the sealed substrate 12 is cut along the first cutting line 32 to form the intermediate 36 using the first cutting condition. Next, the intermediate body 36 is cut into pieces by using the second cutting conditions. As a result, the intermediate body 36 is separated into products P corresponding to the regions 34 surrounded by the first cutting line 32 and the second cutting line 33. The flow rate of the cutting water in the second cutting condition when the product P is separated into pieces is reduced with respect to the flow rate of the cutting water in the first cutting condition when the intermediate body 36 is formed. By reducing the flow rate of the cutting water in the second cutting condition, even when the product P becomes small, the product P is prevented from being displaced from the predetermined position of the cutting table 11 or flying due to the water pressure of the cutting water. be able to.

  A working water supply mechanism of a cutting device according to a first embodiment of the present invention will be described with reference to FIGS. Any figure in the present application document is schematically omitted or exaggerated as appropriate for easy understanding. About the same component, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

  As shown in FIG. 1A, the cutting device includes a spindle 1, and the spindle 1 has a rotating shaft 2. A rotary blade 3 is attached to the rotary shaft 2. A rotary blade cover 4 (indicated by a two-dot chain line in the figure) is attached to the spindle 1. The rotary blade 3 is covered with a rotary blade cover 4. A nozzle for supplying processing water to the workpiece and the rotary blade 3 is attached to the rotary blade cover 4. For example, one cutting water supply nozzle 5, two cooling water supply nozzles 6, and two cleaning water supply nozzles 7 are attached to the rotary blade cover 4. The cutting water supply nozzle 5 is connected to the cutting water supply pipe 8, the two cooling water supply nozzles 6 are connected to the cooling water supply pipe 9, and the two cleaning water supply nozzles 7 are connected to the cleaning water supply pipe 10. , Each connected.

  As shown in FIG. 1B, a sealed substrate 12, which is an object to be cut, is fixed on the cutting table 11 by suction or an adhesive sheet. The sealed substrate 12 is an object to be cut that is finally cut into pieces. The sealed substrate 12 covers a substrate 13 made of a printed circuit board, a lead frame, etc., a plurality of chip-like components (not shown) mounted in a plurality of regions of the substrate 13, and a plurality of regions collectively. The sealing resin 14 thus formed is included. The sealed substrate 12 is fixed to the cutting table 11 with the substrate 13 side facing up.

  As shown in FIGS. 1A and 1B, the cutting water 15 is jetted from the cutting water supply nozzle 5 toward the processing point where the sealed substrate 12 and the rotary blade 3 come into contact. The cutting water 15 has a function of reducing friction between the rotary blade 3 and the sealed substrate 12 by preventing clogging on the side surface of the rotary blade 3. The two cooling water supply nozzles 6 are arranged so as to sandwich the rotary blade 3. Each cooling water supply nozzle 6 is arranged so as to be parallel to the side surface of the rotary blade 3 and the upper surface of the sealed substrate 12. Cooling water 16 is jetted from the cooling water supply nozzle 6 toward a predetermined portion including the side surface of the rotary blade 3. The cooling water 16 has a function of cooling the rotary blade 3 and the sealed substrate 12. Further, the cleaning water 17 is jetted from the two cleaning water supply nozzles 7 toward a predetermined portion near the side surface of the rotary blade 3 on the upper surface of the sealed substrate 12. The cleaning water 17 has a function of removing chips generated by the rotary blade 3. In addition to powdery and granular materials, the chips include elongated end materials that are generated when the sealed substrate 12 is cut along the cutting line at the end of the sealed substrate 12.

  As shown in FIG. 1B, the cutting table 11 reciprocates in the Y direction at a feed speed V by a moving mechanism (not shown). The rotary blade 3 is rotated at a high rotational speed R counterclockwise by a motor (not shown) incorporated in the spindle 1.

  As shown in FIG. 2, the water supply mechanism 18 in the factory is a water supply mechanism that supplies, for example, pure water as processed water to a large number of apparatuses in the factory. Since the water supply mechanism 18 supplies the processed water to a large number of apparatuses in the factory, the pressure of the supplied processed water tends to fluctuate depending on the operation status of the apparatus. When the pressure of the processing water supplied from the factory decreases, a predetermined pressure cannot be obtained for the processing water supplied to each device, and the flow rate of the processing water decreases. Therefore, it is preferable to set the working water supplied from the factory water supply mechanism 18 to about 0.3 to 0.5 MPa in consideration of a decrease in pressure and the like.

  Processing water is supplied from the water supply mechanism 18 of the factory to the cutting device. Each branch pipe of the cutting apparatus, specifically, the cutting water supply pipe 8, the cooling water supply pipe 9, and the cleaning water supply pipe 10 are connected to the water supply mechanism 18 through the common pipe 19 of the cutting apparatus. Is done. The common pipe 19 is provided with a pressure regulator (regulator) 20 that adjusts the pressure of the processing water. The processing water supplied from the water supply mechanism 18 to the common pipe 19 is lowered to a predetermined pressure by the pressure regulator 20. The processing water whose pressure has been reduced to a predetermined pressure is supplied to each branch pipe at a predetermined flow rate. In FIG. 2, for example, processing water of 12 L / min at the maximum is supplied to the common pipe 19 of the cutting apparatus, and a predetermined amount of processing water is supplied from the common pipe 19 to each branch pipe. The common pipe 19 is provided with a flow rate sensor 21 that measures the flow rate of the processing water supplied from the water supply mechanism 18.

  In the cutting apparatus, a control unit 22 that controls cutting conditions for cutting the sealed substrate 12 (see FIG. 1) is provided. For example, the flow rate of the cutting water 15, the cooling water 16, and the cleaning water 17 sprayed onto the sealed substrate 12, the moving speed V of the cutting table 11, the rotational speed R of the rotary blade 3, and the like are controlled by the control unit 22. Be controlled. The control unit 22 is connected to a flow rate sensor 21 provided in the common pipe 19 via a signal line 23.

  The cutting water supply pipe 8, the cooling water supply pipe 9, and the cleaning water supply pipe 10 are respectively provided with flow rate controllers 24, 25, and 26 for adjusting the flow rate of the supplied processing water. Each flow controller 24, 25, 26 is connected to the control unit 22 via a signal line 27, 28, 29. The flow rate of the cutting water 15 injected from the cutting water supply nozzle 5, the cooling water 16 injected from the cooling water supply nozzle 6, and the cleaning water 17 injected from the cleaning water supply nozzle 7 is a flow rate controller 24. , 25 and 26, respectively. The cutting table 11 is connected to the control unit 22 via the signal line 30. The moving speed V of the cutting table 11 is controlled by the control unit 22. The spindle 1 is connected to the control unit 22 via a signal line 31. The rotational speed R of the rotary blade 3 provided on the spindle 1 is controlled by the control unit 22.

  The cutting water 15 is sprayed from the common pipe 19 to the sealed substrate 12 via the cutting water supply pipe 8, the flow rate controller 24, and the cutting water supply nozzle 5 (see FIG. 1) in this order. The cooling water 16 is sprayed from the common pipe 19 to the sealed substrate 12 via the cooling water supply pipe 9, the flow rate controller 25, and the cooling water supply nozzle 6 (see FIG. 1) in this order. The cleaning water 17 is sprayed from the common pipe 19 to the sealed substrate 12 via the cleaning water supply pipe 10, the flow rate controller 26, and the cleaning water supply nozzle 7 (see FIG. 1) in this order. The processing water supplied from the water supply mechanism 18 of the factory to the common pipe 19 of the cutting device is controlled to a predetermined flow rate by the flow rate controllers 24, 25, and 26 provided in each branch pipe, and the processing water of a predetermined flow rate from each nozzle. Is sprayed onto the sealed substrate 12.

  The flow rate sensor 21 provided in the common pipe 19 of the cutting device measures the flow rate of the processing water supplied to the common pipe 19. Based on the measured flow rate of the processed water, the control unit 22 controls the flow rate of the processed water supplied to each flow rate controller 24, 25, 26. Thus, for example, even if the pressure of the processing water supplied from the water supply mechanism 18 decreases and the flow rate of the processing water decreases, the control unit 22 causes each flow controller 24 to supply a predetermined flow rate of the processing water. , 25 and 26 are controlled.

  The control unit 22 is connected to the flow rate sensor 21, the flow rate controllers 24, 25, and 26, the cutting table 11, the spindle 1, and the like via respective signal lines. Accordingly, setting and changing of the cutting conditions in the cutting device can be controlled by the control unit 22. The flow rate of the processing water sprayed from the cutting water supply nozzle 5, the cooling water supply nozzle 6, and the cleaning water supply nozzle 7 can be optimally controlled by the control unit 22.

  In Example 1, the case where the flow sensor 21 was provided in the common piping 19 of the cutting device was shown. Not limited to this, as a modification, flow rate sensors 21a, 21b, and 21c (shown by two-dot chain lines in the drawing) are respectively provided in the cutting water supply pipe 8, the cooling water supply pipe 9, and the cleaning water supply pipe 10. Can be provided. In that case, each flow sensor 21a, 21b, 21c is connected to the control part 22 via a signal line (not shown), respectively. Based on the flow rate of the processed water measured by the flow rate sensors 21a, 21b, and 21c, the control unit 22 controls the flow rate controllers 24, 25, and 26 so as to supply a predetermined flow rate of processed water.

  With reference to FIGS. 1-3, the structure of the sealed substrate 12 and the process of cutting the sealed substrate 12 into pieces in Example 1 will be described. As shown in FIG. 3A, the sealed substrate 12 includes a substrate 13 and a sealing resin 14 (shown by a thick dotted line in the drawing) made of a cured resin. In the sealed substrate 12, a plurality of first cutting lines 32 along the short direction and a plurality of second cutting lines 33 along the longitudinal direction are set. The regions 34 surrounded by the first cutting line 32 and the second cutting line 33 are separated into individual products P (see FIG. 3C). In FIG. 3A, for example, ten first cutting lines 32 are set in the short direction, and four second cutting lines 33 are set in the long direction. Therefore, three regions 34 are formed in the short direction and nine regions 34 are formed in the longitudinal direction, and a total of 27 regions 34 are formed in a lattice shape.

  First, in order to cut the sealed substrate 12, the surface on the substrate 13 side is turned up, and the sealed substrate 12 is fixed to the cutting table 11 by suction or an adhesive sheet (see FIG. 1B). In the case of adsorption, each region 34 provided in the sealed substrate 12 is adsorbed by the respective adsorption holes 35 provided in the cutting table 11. Therefore, the product P corresponding to each region 34 is adsorbed by the respective adsorbing holes 35 even in the state of being separated into pieces.

  Next, the cutting table 11 and the spindle 1 are relatively moved (see FIG. 1). The term “relatively move” includes the following three modes. These modes include a mode in which the cutting table 11 is fixed and the spindle 1 is moved, a mode in which the spindle 1 is fixed and the cutting table 11 is moved, and both the cutting table 11 and the spindle 1 are moved. It is an aspect.

  In the first embodiment, as shown in FIG. 1, the spindle 1 is fixed, and the cutting table 11 is moved in the Y direction at a feed speed V (mm / sec) by a moving mechanism (not shown). First, the spindle 1 is lowered so that the lower end of the rotary blade 3 is deeper than the lower surface of the sealing resin 14. Next, the rotary blade 3 attached to the tip of the spindle 1 is rotated at a high speed with the rotation speed R counterclockwise. Next, the cutting table 11 is moved at the feed speed V in the + Y direction, and along the first cutting line 32 and the second cutting line 33 (see FIG. 3A) set on the sealed substrate 12. Then, the sealed substrate 12 is cut. When cutting, the cutting water 15 is supplied from the cutting water supply nozzle 5, the cooling water 16 is supplied from the cooling water supply nozzle 6, and the cleaning water 17 is supplied from the cleaning water supply nozzle 7 to the sealed substrate 12 and the rotary blade 3. Inject each towards.

  Next, with reference to FIG. 3, the operation | movement which cut | disconnects the sealed substrate 12 concretely is demonstrated. First, as shown in FIG. 3A, the sealed substrate 12 is cut along the rightmost cutting line in the drawing among the first cutting lines 32 set in the short direction. In this case, the sealed substrate 12 is cut using the first cutting condition. As the first cutting condition, for example, the flow rate of the cutting water 15 injected from the cutting water supply nozzle 5 is 4 L / min, and the flow rate of the cooling water 16 injected from the two cooling water supply nozzles 6 is 4 L / min. The flow rate of the cleaning water 17 sprayed from the two cleaning water supply nozzles 7 is 2 L / min, the feed speed of the cutting table 11 is 40 mm / sec, and the rotation speed of the rotary blade 3 is 30,000 rpm / min. Set (see FIG. 1).

  Next, as shown in FIG. 3B, the first cutting condition is used to seal along the remaining nine of the ten first cutting lines 32 set in the short direction. The stopped substrate 12 is cut. By cutting the sealed substrate 12 along a total of ten first cutting lines 32 set in the short direction, nine intermediate bodies 36 (portions indicated by shading in the figure) are formed. . The intermediate bodies 36 are separated from each other along the longitudinal direction with a gap corresponding to the eight first cutting lines 32 interposed therebetween. Each intermediate body 36 has three regions 34 along the short direction. Each intermediate body 36 is sucked to the cutting table 11 by three suction holes 35 corresponding to the three regions 34 of the intermediate body 36. The portion outside the outermost cutting line in the left-right direction in FIG. 3A, in other words, the rightmost portion of the rightmost cutting line and the leftmost portion of the leftmost cutting line are not formed of elongated end members. As a special part, it is removed by being washed away with washing water or the like (see FIG. 3B).

  Next, as shown in FIG. 3C, the cutting table 11 is rotated 90 degrees. Next, the sealed substrate 12 is cut along the four second cutting lines 33 set in the longitudinal direction. In this case, first, the first cutting condition is used, and the second cutting line 33 is cut into the most cutting line (for example, the cutting line corresponding to the rightmost part in FIG. 3C). Then, the sealed substrate 12 is cut. The portion (not shown) on the right side of the cutting line corresponding to the rightmost portion in FIG. 3 (c) is removed by being washed away with washing water or the like as an unnecessary portion made of an elongated end material.

  Subsequently, using the second cutting conditions, the sealed substrate 12 is cut along the remaining three of the four second cutting lines 33 set in the longitudinal direction. By cutting each of the three second cutting lines, a product P corresponding to the segmented region 34 is completed. Each product P is sucked to the cutting table 11 by the suction holes 35 corresponding to the respective regions 34.

  When the product P corresponding to the segmented region 34 is completed by cutting a single cutting line, the second cutting condition is used. As the second cutting condition, for example, the flow rate of the cutting water 15 injected from the cutting water supply nozzle 5 is 2 L / min, and the flow rate of the cooling water 16 injected from the two cooling water supply nozzles 6 is 2 L / min. The flow rate of the cleaning water 17 sprayed from the two cleaning water supply nozzles 7 is 2 L / min, the feed speed of the cutting table 11 is 20 mm / sec, and the rotation speed of the rotary blade 3 is 30,000 rpm / min. Set (see FIG. 1). In this case, with respect to the first cutting condition, the flow rate of the cutting water 15 is changed to 1/2, the flow rate of the cooling water 16 is changed to 1/2, and the feed rate of the cutting table 11 is changed to 1/2. Then, the second cutting condition was set.

  As described above, the first cutting condition is used in cases other than the case where the product P is completed by cutting a certain cutting line. When the product P corresponding to the segmented region 34 is completed by cutting a single cutting line, the second cutting condition is used. By cutting the sealed substrate 12 using these cutting conditions, the sealed substrate 12 is separated into regions 34 surrounded by the first cutting line 32 and the second cutting line 33, respectively. Is done. Each divided region 34 corresponds to the product P. Each product P is sucked to the cutting table 11 by the suction holes 35 corresponding to the respective regions 34. A plurality of products P is completed by cutting the sealed substrate 12 along the first cutting line 32 and the second cutting line 33 into pieces.

  In this embodiment, as the second cutting condition, the flow rate of the cutting water 15 and the flow rate of the cooling water 16 are reduced to 1/2, and the feed speed of the cutting table 11 is reduced to 1/2, The sealed substrate 12 was separated into pieces. Not limited to this, as a second cutting condition, the flow rate of the cutting water 15 is reduced to ½, and the feeding speed of the cutting table 11 is reduced to ½ to separate the sealed substrate 12 into pieces. Can be Furthermore, as the second cutting condition, only the flow rate of the cutting water 15 can be reduced to ½, and the sealed substrate 12 can be singulated.

  For example, the flow rate of the cutting water 15 under the second cutting condition is made smaller than the flow rate of the cutting water 15 under the first cutting condition. This causes the following effects. The first effect is that a phenomenon that the product P is displaced due to the cutting water 15 colliding with these products P is suppressed. A second effect is that a phenomenon in which the product P is separated from a predetermined position of the cutting table 11 and flows out due to the cutting water 15 colliding with the products P is suppressed. These effects are remarkable when one side (short side) of the product P is 3 mm or less. These effects are more remarkable when one side (short side) of the product P is 2 mm or less.

  According to the present embodiment, the product P is singulated with respect to the first cutting condition used in the step (including the step of forming the intermediate 36) not corresponding to the step of singulating the product P. The second cutting condition is optimized. For example, the flow rate of the cutting water in the second cutting condition is reduced with respect to the flow rate of the cutting water in the first cutting condition. Thereby, even when the product P becomes small, it is possible to prevent the product P from being displaced from a predetermined position of the cutting table 11 or flying due to the water pressure of the cutting water 15.

  The second cutting condition can be set in accordance with the size of the product P so that the separated product P does not deviate or fly from a predetermined position of the cutting table 11. Specifically, in addition to the above-described flow rate of the cutting water 15, the flow rate of the cooling water 16, the flow rate of the cleaning water 17, the feed rate of the cutting table 11, the rotational speed of the rotary blade 3, etc. are optimized, The cutting conditions can be set. In the second cutting condition, in addition to reducing the flow rate of the cutting water 15, reducing the flow rate of the cooling water 16, reducing the feed rate of the cutting table 11, etc. It is effective to prevent the table 11 from being displaced or flying from a predetermined position.

  Further, according to the present embodiment, the flow rates of the cutting water 15 and the cooling water 16 to be injected are reduced to ½ with respect to the first cutting condition in the second cutting condition. As a result, the amount of processing water used when the product P is separated into pieces can be saved.

  Further, according to the present embodiment, as the first cutting condition and the second cutting condition, the flow rate of the cutting water 15, the flow rate of the cooling water 16, the flow rate of the cleaning water 17, the feed rate of the cutting table 11, and The number of rotations of the rotary blade 3 is set. These cutting conditions can be set and controlled using the control unit 22 provided in the cutting apparatus. Therefore, according to the size of the product P, the cutting condition can be easily set or changed using the control unit 22.

  Further, according to the present embodiment, the flow rate sensor 21 measures the flow rate of the processing water supplied to the cutting device. Even if the pressure of the processing water supplied from the water supply mechanism 18 of the factory to the cutting device decreases and the flow rate decreases, the control unit 22 supplies a predetermined flow rate based on the measured flow rate of the processing water. Each flow controller 24, 25, 26 is controlled. Therefore, a predetermined flow rate of processing water can be sprayed from the respective nozzles onto the sealed substrate 12.

  With reference to FIG. 4, the processing water supply mechanism in Example 2 of the cutting device based on this invention is demonstrated. The same components as those in the processing water supply mechanism shown in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  The processing water supplied from the water supply mechanism 18 of the factory to the cutting device is depressurized to a predetermined pressure by the pressure regulator 20, and a predetermined flow rate of processing water is supplied to each branch pipe. In FIG. 4, for example, processing water of up to 16 L / min is supplied to the common pipe 19, and a predetermined amount of processing water is supplied from the common pipe 19 to each branch pipe.

  The three branch pipes 37, 38, 39 included in the cutting device are provided with flow rate adjustment throttles 40, 41, 42 for adjusting the flow rate of the processing water supplied from the common pipe 19, respectively. For example, the processing water is supplied to the branch pipe 37 by the flow rate adjusting throttle 40. The flow control throttle 41 supplies 4 L / min of processed water to the branch pipe 38. The flow control throttle 42 supplies 2 L / min of processed water to the branch pipe 39.

  The branch pipe 37 is further branched into a branch pipe 37A connected to the cutting water supply nozzle 5 and a branch pipe 37B connected to the cooling water supply nozzle 6. The branch pipe 38 is further branched into a branch pipe 38 </ b> A connected to the cooling water supply nozzle 6 and a branch pipe 38 </ b> B connected to the cutting water supply nozzle 5. The branch pipe 39 is connected to the cleaning water supply nozzle 7.

  The branch pipe 37 is provided with an electromagnetic valve 43, the branch pipe 38 is provided with an electromagnetic valve 44, and the branch pipe 39 is provided with an electromagnetic valve 45. The electromagnetic valve 43 is connected to the control unit 22 via a signal line 46. The electromagnetic valve 44 is connected to the control unit 22 via a signal line 47. The electromagnetic valve 45 is connected to the control unit 22 via a signal line 48. The solenoid valves 43, 44, 45 are controlled to be opened and closed by the control unit 22. By opening the solenoid valves 43, 44, 45, the processing water is supplied to each nozzle.

  The cutting table 11 is connected to the control unit 22 via the signal line 30. The moving speed V of the cutting table 11 is controlled by the control unit 22. The spindle 1 is connected to the control unit 22 via a signal line 31. The number of rotations of the rotary blade 3 provided on the spindle 1 is controlled by the control unit 22.

  With reference to FIG. 3, FIG. 4, the process of cut | disconnecting and separating the board | substrate 12 which has been sealed in Example 2 is demonstrated. For example, the processing water supplied to the branch pipe 37 is adjusted to 8 L / min by the flow rate adjusting throttle 40. The processing water supplied to the branch pipe 38 is adjusted to 4 L / min by the flow rate adjusting throttle 41. The processing water supplied to the branch pipe 39 is adjusted to 2 L / min by the flow rate adjusting throttle 42.

  As in the first embodiment, as the first cutting condition, the flow rate of the cutting water 15 injected from the cutting water supply nozzle 5 is 4 L / min, and the flow rate of the cooling water 16 injected from the two cooling water supply nozzles 6 4 L / min, the flow rate of the cleaning water 17 sprayed from the two cleaning water supply nozzles 7 is 2 L / min, the feed speed of the cutting table 11 is 40 mm / sec, and the rotational speed of the rotary blade 3 is 30, Set to 000 rpm / min.

  As a second cutting condition used when the intermediate body 36 shown in FIG. 3B is singulated, the flow rate of the cutting water 15 sprayed from the cutting water supply nozzle 5 is 2 L / min. The flow rate of the cooling water 16 injected from the cooling water supply nozzle 6 is 2 L / min, the flow rate of the cleaning water 17 injected from the two cleaning water supply nozzles 7 is 2 L / min, and the feed speed of the cutting table 11 is 20 mm / sec and the rotation speed of the rotary blade 3 are set to 30,000 rpm / min.

  When the sealed substrate 12 is cut using the first cutting condition, as shown in FIG. 4, the control unit 22 causes the solenoid valve 43 of the branch pipe 37 and the solenoid valve 45 of the branch pipe 39 to And the solenoid valve 44 of the branch pipe 38 is closed. As a result, 4 L / min of processing water is supplied from the branch pipe 37 to the cutting water supply nozzle 5 via the branch pipe 37A. Process water is supplied from the branch pipe 37 to the cooling water supply nozzle 6 via the branch pipe 37B. 2 L / min of processing water is supplied from the branch pipe 39 to the cleaning water supply nozzle 7. Similarly to Example 1, the sealed substrate 12 is cut using the first cutting conditions to form the intermediate 36.

  When the intermediate body 36 is cut using the second cutting condition, the control valve 22 opens the solenoid valve 44 of the branch pipe 38 and the solenoid valve 45 of the branch pipe 39 as shown in FIG. The electromagnetic valve 43 of the branch pipe 37 is closed. Thus, 2 L / min of processing water is supplied from the branch pipe 38 to the cooling water supply nozzle 6 via the branch pipe 38A. Processing water is supplied from the branch pipe 38 to the cutting water supply nozzle 5 via the branch pipe 38B. 2 L / min of processing water is supplied from the branch pipe 39 to the cleaning water supply nozzle 7. Similar to Example 1, the intermediate 36 is cut into pieces using the second cutting conditions. A plurality of products P are manufactured by cutting and sealing the sealed substrate 12 using the first cutting condition and the second cutting condition.

  According to the present embodiment, first, the first cutting condition is set by opening the electromagnetic valve 43 of the branch pipe 37 and closing the electromagnetic valve 44 of the branch pipe 38. Using the first cutting condition, the sealed substrate 12 is cut to form the intermediate 36. Next, the second cutting condition is set by opening the electromagnetic valve 44 of the branch pipe 38 and closing the electromagnetic valve 43 of the branch pipe 37. Using the second cutting conditions, the intermediate 36 is cut into pieces P. The second cutting condition is optimized with respect to the first cutting condition, and the sealed substrate 12 is separated into products P. Thereby, even when the product P becomes small, it is possible to prevent the product P from being displaced from a predetermined position of the cutting table 11 or flying due to the hydraulic pressure of the processing water.

  Further, according to the present embodiment, the flow rates of the cutting water 15 and the cooling water 16 to be injected are reduced to ½ with respect to the first cutting condition in the second cutting condition. As a result, the amount of processing water used when the product P is separated into pieces can be saved.

  A third embodiment of the cutting device according to the present invention will be described with reference to FIG. The cutting device 49 shown in FIG. 5 divides a workpiece into a plurality of products P. The cutting device 49 includes a receiving unit A, a cutting unit B, a cleaning unit C, an inspection unit D, and a storage unit E as components (modules).

  Each component (each unit A to E) is detachable and replaceable with respect to other components, and each component is prepared in advance so as to have a plurality of different specifications according to expected specifications. The A cutting device 49 is configured including the components A to E.

  The receiving unit A is provided with a prestage 50. A pre-stage 50 receives a sealed substrate 12 corresponding to an object to be cut from a resin sealing device, which is a device in the previous process. The sealed substrate 12 (for example, a BGA-type sealed substrate) is disposed on the prestage 50 with the surface on the substrate 13 side up.

  The cutting device 49 is a twin-cut table type cutting device. Therefore, the cutting unit B is provided with two cutting stages 51A and 51B. The two cutting stages 51A and 51B can be moved in the Y direction in the drawing and can be rotated in the θ direction by a moving mechanism (not shown). Cutting tables 11A and 11B are mounted on the cutting stages 51A and 51B. The cutting unit B includes a substrate placing unit 52, a substrate cutting unit 53, and a substrate cleaning unit 54.

  The substrate platform 52 is provided with an alignment camera 55. The camera 55 can move independently in the X direction in the substrate platform 52. In the substrate 12 that has been sealed, the alignment mark is detected by the camera 55 in the substrate mounting section 52, and the virtual first cutting line 32 and the second cutting line 33 are set (FIG. 3A). reference).

  The substrate cutting unit 53 is provided with two spindles 1A and 1B. The cutting device 49 is a twin spindle configuration cutting device. The two spindles 1A and 1B can move independently in the X direction and the Z direction. The two spindles 1A and 1B are provided with rotary blades 3A and 3B, respectively, as cutting means. These rotary blades 3A and 3B cut the sealed substrate 12 by rotating in a plane including the Y direction and the Z direction, respectively.

  Each spindle 1A, 1B is provided with cutting water supply nozzles 5A, 5B for injecting cutting water 15 to suppress frictional heat generated by the rotating blades 3A, 3B rotating at high speed. The cutting water 15 is sprayed toward the processing point where the rotary blades 3A and 3B cut the sealed substrate 12. The spindle 1A or 1B is provided with a kerf checking camera (not shown) for inspecting the position, width, chipping (chipping) of the cutting groove (kerf) cut by the rotary blade 3A or 3B. . The camera is provided so as to capture an image on a cutting line that the rotary blade 3A or 3B cuts.

  In the substrate cleaning unit 54, a cleaning mechanism (see FIG. 1B) for cleaning the surface on the substrate 13 side of the assembly 56 composed of a plurality of products P cut into pieces by cutting the sealed substrate 12. (Not shown) is provided.

  The cleaning unit C is provided with a cleaning mechanism 57 that cleans the sealing resin 14 side surface of each product P (see FIG. 1B). The cleaning mechanism 57 is provided with a cleaning roller 58 so as to be rotatable about the Y direction. An assembly 56 composed of a plurality of products P is disposed above the cleaning mechanism 58 that cleans the surface on the sealing resin 14 side. The assembly 56 is fixed by adsorbing the surface on the substrate 13 side by a transport mechanism (not shown). That is, it is fixed to the transport mechanism with the surface on the sealing resin 14 side down. The transport mechanism is movable in the X direction and the Z direction. As the transport mechanism descends and reciprocates in the X direction, the surface on the sealing resin 14 side of the assembly 56 is cleaned by the cleaning roller 58.

  The inspection unit D is provided with an inspection stage 59. The assembly 56 composed of a plurality of products P cut into pieces by cutting the sealed substrate 12 is collectively transferred to the inspection stage 59. The inspection stage 59 is configured to be movable in the X direction and to be rotatable about the Y direction. The assembly 56 made up of a plurality of separated products P (for example, BGA products) is inspected by the inspection camera 60 on the surface on the sealing resin 14 side and the surface on the substrate 13 side, so that a non-defective product and a defective product are obtained. And sorted. The assembly 56 composed of the inspected products P is transferred to the index table 61. The inspection unit D is provided with a plurality of transfer mechanisms 62 for transferring the products P arranged on the index table 61 to the tray.

  The storage unit E is provided with a non-defective product tray 63 for storing non-defective products and a defective product tray (not shown) for storing defective products. The products P sorted into non-defective products and defective products by the transfer mechanism 62 are accommodated in each tray. Although only one good product tray 63 is shown in the figure, a plurality of good product trays 63 are provided in the storage unit E.

  In the present embodiment, the control unit 22 for setting and controlling the operation and cutting conditions of the cutting device 49 is provided in the receiving unit A. Not only this but the control part 22 may be provided in another unit.

  In the present embodiment, the twin-cut table type and twin-spindle cutting device 49 has been described. The present invention is not limited to this, and the present invention can also be applied to a single-cut table type, twin-spindle-type cutting device, twin-cut table type, single-spindle-type cutting device, or the like.

  In each embodiment, first, the sealed substrate 12 is cut along the first cutting line 32 formed in the short direction, and then the second cutting line 33 formed in the longitudinal direction. The sealed substrate 12 was cut along Not limited to this, as a modification, the sealed substrate 12 may be cut along the second cutting line 33, and then the sealed substrate 12 may be cut along the first cutting line 32. .

  As another modification, the sealed substrate 12 is cut into a plurality of blocks along a part of the first cutting lines 32 of the ten first cutting lines 32 formed in the short direction. Also good. For example, the sealed substrate 12 is cut along the four first cutting lines 32 including both ends, and three blocks having the same size are generated. Subsequently, the intermediate body is cut along the first cutting line 32 and the second cutting line 33 sequentially (or in reverse order) for the entire intermediate body made up of each block. The method of first cutting the sealed substrate 12 into a plurality of blocks is effective when the sealed substrate 12 is largely deformed such as warpage or undulation. In any of the modified examples, the second cutting condition is used when the product P corresponding to the segmented region 34 is completed by cutting a certain cutting line.

  Moreover, in each Example, the case where the rotary blade 3 was used as a cutting | disconnection means was shown, It was not limited to this, As a cutting means, the wire saw, the band saw, the water jet, and the thin column shape were injected. You may use the laser beam etc. which advance in the jet water. In other words, the present invention can be applied to cutting processing having a mode in which a processing liquid (processing fluid) is supplied to a processing point or its periphery when a workpiece is cut.

  Moreover, in each Example, the case where the pure water was used as processing water containing the cutting water 15, the cooling water 16, etc. was shown. Not only this but as processing water containing cutting water 15, cooling water 16, etc., the liquid containing additives, such as surfactant and a rust preventive agent other than pure water, can be used.

  Moreover, in each Example, the case where the sealed board | substrate 12 was cut | disconnected as a to-be-cut object was shown. However, the present invention is not limited to this, and the present invention can be applied to the case where the next object to be cut is cut into individual pieces as objects other than the sealed substrate 12. First, a semiconductor wafer made of silicon or a compound semiconductor is singulated. Secondly, a product such as a chip resistor, a chip capacitor, or a chip-type sensor is manufactured by dividing a ceramic substrate or the like on which circuit elements such as a resistor, a capacitor, or a sensor are built. In these two cases, a semiconductor wafer, a ceramic substrate, or the like corresponds to a substrate on which circuit elements corresponding to a plurality of regions are formed. Third, the resin molded product is separated into individual pieces to produce optical components such as lenses, optical modules, and light guide plates. Fourth, it is a case where a general molded product is manufactured by dividing a resin molded product into individual pieces. The contents described so far can be applied to various cases including the above four cases.

  Moreover, in each Example, the case where the to-be-cut object which has a rectangular shape with a longitudinal direction and a transversal direction as a to-be-cut object was cut | disconnected was shown. The present invention is not limited to this, and the contents described so far can also be applied when cutting a workpiece having a square shape or cutting a workpiece having a substantially circular shape such as a semiconductor wafer. .

  In addition, the contents described so far can also be applied to the case of cutting an object to be cut that includes a curve or a broken line in the cutting line. In this case, the product P corresponding to each divided region 34 has an irregular outer shape including a curve or a broken line on the outer periphery like a certain type of memory card.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary within the scope not departing from the gist of the present invention. It is.

1, 1A, 1B Spindle 2 Rotating shaft 3, 3A, 3B Rotating blade (cutting means)
4 Rotating blade cover 5, 5A, 5B Cutting water supply nozzle (cutting water supply mechanism)
6 Cooling water supply nozzle (cooling water supply mechanism)
7 Cleaning Water Supply Nozzle 8 Cutting Water Supply Pipe 9 Cooling Water Supply Pipe 10 Cleaning Water Supply Pipe 11, 11A, 11B Cutting Table (Table)
12 Sealed substrate (object to be cut)
13 Substrate 14 Sealing resin 15 Cutting water (Cutting water, processing water)
16 Cooling water (processed water)
17 Washing water (processed water)
18 Factory water supply mechanism 19 Common piping 20 Pressure regulator 21, 21a, 21b, 21c Flow rate sensor (measurement unit)
22 control unit 23, 27, 28, 29, 30, 31 signal line 24 flow rate controller (flow rate adjusting means)
25, 26 Flow controller 32 First cutting line (cutting line)
33 Second cutting line (cutting line)
34 Area (Product)
35 Adsorption hole 36 Intermediate 37, 38, 39 Branch piping 40, 41, 42 Flow rate adjusting throttle 43 Solenoid valve (switching means)
44, 45 Solenoid valve 46, 47, 48 Signal line 49 Cutting device 50 Prestage 51A, 51B Cutting stage 52 Substrate placing part 53 Substrate cutting part 54 Substrate cleaning part 55 Camera for alignment 56 Assembly of a plurality of products P 57 Cleaning mechanism 58 Cleaning roller 59 Inspection stage 60 Inspection camera 61 Index table 62 Transfer mechanism 63 Non-defective tray V Feeding speed R Rotational speed A Receiving unit B Cutting unit C Cleaning unit D Inspection unit E Storage unit P Product

Claims (16)

A table on which an object to be cut having a plurality of regions surrounded by a plurality of cutting lines is placed; a cutting means for cutting the object to be cut; and a moving mechanism for relatively moving the table and the cutting means. A cutting water supply mechanism that supplies cutting water to a processing point where the cutting means and the workpiece are in contact with each other, and divides the workpiece to produce a product corresponding to each of the regions Cutting device used for
A control unit for controlling cutting conditions for cutting the workpiece,
The control unit cuts the intermediate body with a first cutting condition for generating an intermediate body including a plurality of the regions by cutting the workpiece along a part of the plurality of cutting lines. And having at least a second cutting condition for singulation into the product,
The cutting device characterized in that the flow rate of the cutting water under the second cutting condition is smaller than the flow rate of the cutting water under the first cutting condition. The cutting device according to claim 1, wherein
The cutting apparatus characterized in that a relative moving speed between the table and the cutting means in the second cutting condition is smaller than the relative moving speed in the first cutting condition. The cutting device according to claim 1 or 2,
A cutting apparatus characterized in that at least the flow rate of the cutting water is controlled by a flow rate adjusting means. The cutting device according to claim 1 or 2,
A cutting apparatus characterized in that at least the flow rate of the cutting water is controlled by switching means. In the cutting device according to any one of claims 1 to 4,
A measuring unit that includes at least the cutting water and measures a flow rate of the processing water used for cutting;
A cutting apparatus that controls a flow rate of the processing water under the first cutting condition and the second cutting condition based on a measurement value measured by the measurement unit. In the cutting device according to any one of claims 1 to 5,
A cooling water supply mechanism for supplying cooling water from both sides of the cutting means toward the lower side of the cutting means;
The cutting device characterized in that the flow rate of the cooling water in the second cutting condition is smaller than the flow rate of the cooling water in the first cutting condition. In the cutting device according to any one of claims 1 to 6,
The cutting apparatus, wherein the object to be cut is a sealed substrate. In the cutting device according to any one of claims 1 to 6,
The cutting object is a substrate on which circuit elements respectively corresponding to the plurality of regions are formed. Placing a workpiece having a plurality of regions surrounded by a plurality of cutting lines on a table; relatively moving the table and the cutting means; and relatively moving the table and the cutting means A step of cutting the workpiece using the cutting means by moving, and a step of supplying cutting water to a processing point where the cutting means and the workpiece are in contact with each other using a cutting water supply mechanism A cutting method comprising:
Comprising a step of controlling cutting conditions for cutting the workpiece,
The step of cutting includes a first step of generating an intermediate including a plurality of the regions by cutting the object to be cut along a part of the plurality of cutting lines, and cutting the intermediate And at least a second step for singulating the product,
In the controlling step, the cutting water supply mechanism is controlled so that the flow rate of the cutting water in the second step is smaller than the flow rate of the cutting water in the first step. Method. The cutting method according to claim 9, wherein
In the relatively moving step, the relative moving speed between the table and the cutting means in the second step is made smaller than the relative moving speed in the first step. Cutting method characterized. The cutting method according to claim 9 or 10,
In the controlling step, the flow rate adjusting means is used to control at least the flow rate of the cutting water. The cutting method according to claim 9 or 10,
In the controlling step, at least the flow rate of the cutting water is controlled using a switching means. In the cutting method according to any one of claims 9 to 12,
Comprising a step of measuring a flow rate of the processing water that contains at least the cutting water and is used for cutting,
In the controlling step, the flow rate of the processing water in the first step and the second step is controlled based on the measured value measured in the measuring step. In the cutting method according to any one of claims 9 to 13,
Supplying cooling water using a cooling water supply mechanism toward the lower side of the cutting means,
In the step of controlling, the cooling water supply mechanism is controlled so that the flow rate of the cooling water in the second step is smaller than the flow rate of the cooling water in the first step. Method. In the cutting method in any one of Claims 9-14,
The cutting method, wherein the object to be cut is a sealed substrate. In the cutting method in any one of Claims 9-14,
The cutting method according to claim 1, wherein the object to be cut is a substrate on which circuit elements respectively corresponding to the plurality of regions are formed.

Images