JP2016014657A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016014657A5 JP2016014657A5 JP2015113703A JP2015113703A JP2016014657A5 JP 2016014657 A5 JP2016014657 A5 JP 2016014657A5 JP 2015113703 A JP2015113703 A JP 2015113703A JP 2015113703 A JP2015113703 A JP 2015113703A JP 2016014657 A5 JP2016014657 A5 JP 2016014657A5
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- optical axis
- inclination
- tilting
- measuring apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 11
- 238000001514 detection method Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015113703A JP6566416B2 (ja) | 2014-06-10 | 2015-06-04 | 光ビーム測定装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014119392 | 2014-06-10 | ||
| JP2014119392 | 2014-06-10 | ||
| JP2015113703A JP6566416B2 (ja) | 2014-06-10 | 2015-06-04 | 光ビーム測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016014657A JP2016014657A (ja) | 2016-01-28 |
| JP2016014657A5 true JP2016014657A5 (enExample) | 2018-04-12 |
| JP6566416B2 JP6566416B2 (ja) | 2019-08-28 |
Family
ID=54769344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015113703A Active JP6566416B2 (ja) | 2014-06-10 | 2015-06-04 | 光ビーム測定装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9488519B2 (enExample) |
| JP (1) | JP6566416B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6878866B2 (ja) * | 2016-12-15 | 2021-06-02 | 株式会社サタケ | 光学式選別機用光学ユニット |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61140887A (ja) * | 1984-12-14 | 1986-06-27 | 富士通株式会社 | ２軸ゴニオステ−ジ |
| JP3529486B2 (ja) * | 1995-04-18 | 2004-05-24 | 株式会社東芝 | 光ディスクドライブの組み立て方法 |
| JP2000352505A (ja) * | 1999-04-05 | 2000-12-19 | Toshiba Corp | 膜厚測定方法および装置、薄膜処理装置並びに半導体装置の製造方法 |
| JP2003121572A (ja) * | 2001-10-10 | 2003-04-23 | Fuji Photo Optical Co Ltd | 載物ステージ |
| JP2006330210A (ja) | 2005-05-24 | 2006-12-07 | Olympus Corp | レンズの心出し方法及び装置 |
| JP2009243920A (ja) * | 2008-03-28 | 2009-10-22 | Jfe Steel Corp | 基準板、表面検査装置の光軸調整方法、及び表面検査装置 |
| JP5134603B2 (ja) * | 2009-09-09 | 2013-01-30 | 株式会社日立ハイテクノロジーズ | 光ビーム調整方法及び光ビーム調整装置 |
| US8325344B2 (en) * | 2009-12-18 | 2012-12-04 | Hewlett-Packard Development Company, L.P. | Optical density determination methods and apparatus |
-
2015
- 2015-06-04 JP JP2015113703A patent/JP6566416B2/ja active Active
- 2015-06-04 US US14/730,762 patent/US9488519B2/en active Active