JP2016003354A - Surface processing device for long-sized resin film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface processing device in which a cooling can roll 14 and surface processing means having a thermal load are included in a vacuum chamber 12 and with which a long-sized resin film F is difficult to wrinkle.SOLUTION: At a position near a cooling can roll in which a long-sized resin film is carried, film guide means is arranged which comprises a near roll 16 provided in parallel with the cooling can roll and a pair of near roll retainers 30 provided on both axial end sides of the near roll and each having a support part 22 supporting the near roll rotatably on a tip side and a rotary shaft 20 on a base end side, the tip side swinging. A surface-to-surface distance L1 between the near roll and the cooling can roll and a length L2 of the long-sized resin film interposed between the near roll and cooling can roll can be adjusted by specifying angles of the rotary shafts of the near roll retainers and fixing the retainers.

Description

  In the present invention, a surface treatment means with a thermal load and a cooling can roll are provided in a vacuum chamber, and a long resin film such as a polyimide film conveyed by roll-to-roll is wound around the outer peripheral surface of the cooling can roll. The present invention relates to a surface treatment apparatus for a long resin film in which the surface side of a long resin film that is not in contact with the outer peripheral surface of a roll is surface-treated by a surface treatment means. The present invention relates to an improvement of a surface treatment apparatus in which wrinkles are unlikely to occur in a resin film.

  In a liquid crystal panel, a notebook computer, a digital camera, a mobile phone, and the like, a flexible wiring board in which a wiring pattern is formed on a heat resistant resin film is used. And this flexible wiring board performs the patterning process which applied thin film techniques, such as photolithography and an etching, with respect to the heat resistant resin film with a metal film in which the metal film was formed into the one or both surfaces of the heat resistant resin film It is obtained by In recent years, the wiring patterns of flexible wiring boards have become increasingly finer and denser, and it has become even more important that the heat-resistant resin film with a metal film is smooth and free from defects.

  And as a manufacturing method of the said heat resistant resin film with a metal film, the method of attaching a metal foil to a heat resistant resin film with an adhesive agent (it is called the manufacturing method of a 3 layer board | substrate), and heat-resistant to metal foil A metal film is formed on a heat-resistant resin film by coating a conductive resin solution and then drying it (called casting method), vacuum film formation method, or a combination of vacuum film formation method and wet plating method Thus, a method for manufacturing the same (referred to as metalizing method) has been conventionally known. Examples of the vacuum film forming method in the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  Regarding the metallizing method, in Patent Document 1, after sputtering a Ni—Cr alloy on a polyimide support substrate (heat-resistant resin film) and sputtering copper, copper is deposited on the surface of the copper sputtering film by electrolytic plating. A method of forming a film is disclosed. In the case of sputtering a metal film on a heat resistant resin film such as polyimide, it is common to use a sputtering film coater.

  By the way, it is said that the sputtering film forming method described above generally has an advantage of excellent adhesion of the formed metal film, but has a larger heat load applied to the heat resistant resin film than the vacuum vapor deposition method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, wrinkles are likely to occur in the film.

  In order to prevent the occurrence of this wrinkle, in the sputtering film coater, a long heat-resistant resin film conveyed by roll-to-roll is wound while closely contacting a cooling can roll having a cooling function. A method of cooling the heat resistant resin film from the back side is adopted. For example, Patent Document 2 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of the sputtering film coater. The unwinding / winding-type vacuum sputtering apparatus includes a cooling roll that functions as a cooling can roll, and a sub-roll (feed roll) at least on the carry-in side (upstream side of the heat-resistant resin film) of the cooling roll. The heat resistance resin film is controlled to be in close contact with the cooling roll by appropriately adjusting the peripheral speed of the sub-roll.

  However, it is difficult to set the peripheral speed difference between the sub roll and the cooling roll to an appropriate condition, and if the above peripheral speed difference is excessive, excessive tension is generated in the long heat-resistant resin film, and the occurrence of scratches due to slipping or The film sometimes broke. On the other hand, when the peripheral speed difference is too small, there is a problem in that the contact with the cooling roll becomes insufficient and sagging occurs.

  Therefore, instead of the above-mentioned sub-roll for controlling the peripheral speed difference with the cooling roll, a guide roll constituted by a free roll is provided on the film carry-in side and / or the film carry-out side of the cooling can roll (cooling roll). Attempts have been made to prevent film wrinkling. For example, Patent Document 3 proposes a method in which a guide roll using a tetrafluoroethylene resin material is applied to the roller surface. By using such a guide roll, the adhesive force of the film to the guide roll is reduced, so that it is possible to prevent the film from stretching and wrinkles. However, since the adhesive force of the film to the guide roll is small, there is a problem that the film slips on the guide roll and causes a scratch due to the slip.

  Patent Document 4 discloses a guide roll mechanism provided with a mechanism in which the film contacts the guide roll only at both ends of the guide roll, and at least a part of the contact portion presses the film on the guide roll. Yes. However, since the structure is such that the film is pressed only at both ends of the guide roll so as to prevent slipping, uneven pressure is applied at both ends of the guide roll, causing the film to skew or meander. was there.

Japanese Patent Laid-Open No. 06-120630 Japanese Patent Laid-Open No. 62-247073 Japanese Patent Laid-Open No. 03-294480 JP 2009-256709 A

  The present invention has been made paying attention to such problems, and the problem is that a heat load is applied to a long heat-resistant resin film (that is, a long resin film) wound around a cooling can roll. An object of the present invention is to provide a surface treatment apparatus for a long resin film in which wrinkles are unlikely to occur in the long resin film.

  Therefore, in order to solve the above-mentioned problems, the present inventor is directed to a conventional surface treatment apparatus in which a guide roll (free roll) is arranged on the film carry-in side of the cooling can roll, and the length that is conveyed on the cooling can roll. As a result of earnest analysis of the mechanism (mechanism) in which wrinkles are generated in the scale resin film, the following technical knowledge has been obtained.

  First, FIG. 4 is a plan view of the surface treatment apparatus in which the guide roll 16a is disposed on the film carry-in side of the cooling can roll 14 as viewed from above. And as shown in FIG. 4, the surface state of the long resin film F conveyed between the guide roll 16a and the cooling can roll 14 is actually not flat, and "undulation U" is generated. This is because a compressive force acts in the width direction on a film that is tensioned in the length direction. The longer the distance between the guide roll 16a and the cooling can roll 14 (that is, the longer the length of the long resin film F during conveyance existing between the guide roll 16a and the cooling can roll 14), the longer the resin film F. The smaller the thickness, the lower the Young's modulus of the long resin film F, and the greater the tension applied in the length direction of the film, the more prominent the occurrence of the “swell U”.

  In addition, since the outer peripheral surface of the cooling can roll 14 is not flat when viewed microscopically, the cooling can roll 14 and the long resin film F conveyed in close contact with the outer peripheral surface via a vacuum space. There is a gap (gap) that is spaced apart. This cap portion is considered to be larger as the “undulation U” state becomes more prominent. For this reason, it cannot be said that the heat of the film generated during sputtering or vapor deposition accompanied by a thermal load is actually efficiently transferred from the long resin film F to the cooling can roll 14. Further, the long resin film F rises in temperature due to a thermal load and tends to expand due to thermal expansion, but a frictional force, that is, compressive thermal stress, acts and is restrained on the cooling can roll 14. And if compressive thermal stress becomes more than a certain value (minimum value of critical buckling stress), it will be the conditions which a film flaw generate | occur | produces.

  Therefore, in order to cope with the “swell U” generated in the long resin film conveyed between the guide roll and the cooling can roll, the cooling can roll is placed in the vicinity of the cooling can roll into which the long resin film is carried. When a film guide means composed of a near roll provided in parallel with a pair of near roll holders is provided, it has been found that the occurrence of “swell U” can be reduced.

  The present invention has been completed by such technical knowledge and technical discovery.

That is, the first invention according to the present invention is:
The surface of the cooling can roll that is rotationally driven and the surface treatment means with a thermal load arranged along the outer peripheral surface of the cooling can roll on the side facing the cooling can roll is provided in the vacuum chamber and is transported by roll-to-roll. In the surface treatment apparatus for a long resin film, the surface treatment of the surface of the long resin film that is not in contact with the outer peripheral surface of the cooling can roll and the surface treatment of the long resin film is performed by the surface treatment means.
Near the cooling can roll into which the long resin film is carried in, a near roll provided in parallel with the cooling can roll, and provided on both ends in the axial direction of the near roll and rotatably supporting the central axis of the near roll. A film guide means comprising a pair of near roll holders having a support portion on the distal end side and a pivot shaft on the proximal end side, and the distal end side being swung. By specifying the angle of the shaft and fixing the holder, the distance L1 between the near roll and the cooling can roll and the length L2 of the long resin film interposed between the near roll and the cooling can roll are adjusted. It is characterized by being able to do it.

Next, the second invention is:
In the surface treatment apparatus for a long resin film according to the first invention,
The long resin film is composed of a heat-resistant resin film having a thickness of 50 μm or less, the inter-surface distance L1 between the near roll and the cooling can roll is 0.1 to 20 mm, and is interposed between the near roll and the cooling can roll The length L2 of the long resin film to be set is set to 8 to 100 mm,
The third invention is
In the long resin film surface treatment apparatus according to the first invention or the second invention,
A positioning support member for preventing contact between the outer peripheral surface of the near roll and the outer peripheral surface of the cooling can roll is provided by engaging both ends of the central axis of the near roll extending outward from the support portion of the near roll holder. age,
The fourth invention is:
In the surface treatment apparatus for a long resin film according to any one of the first to third inventions,
When the long resin film is set in the surface treatment apparatus, the rotation shaft of the near roll holder rotates to displace the front end side of the near roll holder away from the outer peripheral surface of the cooling can roll, and the near roll and the cooling can roll The inter-surface distance L1 is 50 mm or more.

In addition, the fifth invention,
In the surface treatment apparatus for a long resin film according to any one of the first to fourth inventions,
The surface treatment means accompanied by a thermal load is a vacuum film formation means,
The sixth invention is:
In the surface treatment apparatus for a long resin film according to the fifth invention,
The vacuum film forming means is a sputtering cathode.

In the surface treatment apparatus for a long resin film according to the first invention to the second invention,
Near the cooling can roll into which the long resin film is carried in, a near roll provided in parallel with the cooling can roll, and provided on both ends of the near roll in the axial direction and rotatably supporting the central axis of the near roll. A film guide means comprising a pair of near roll holders having a support portion on the distal end side and a pivot shaft on the proximal end side and having the pivot end swinging is disposed, and the pivot shaft in the near roll holder By specifying the angle of the holder and fixing the holder, the distance L1 between the near roll and the cooling can roll and the length L2 of the long resin film interposed between the near roll and the cooling can roll can be adjusted. Therefore, when the length L2 of the long resin film interposed between the near roll and the cooling can roll is set to an appropriate value, the occurrence of the “swell U” is generated. It becomes possible to reduce the.

In the surface treatment apparatus for a long resin film according to the third invention,
Since the both ends of the center axis of the near roll extending outward from the support part of the near roll holder are respectively locked, and positioning support members for preventing contact between the near roll outer peripheral surface and the cooling can roll outer peripheral surface are attached. Even if the surface treatment of the long resin film is repeated for a plurality of lots, the generation of film defects can be stably suppressed.

Furthermore, in the surface treatment apparatus for a long resin film according to the fourth invention,
When the long resin film is set in the surface treatment apparatus, the rotation shaft of the near roll holder rotates and the tip end side of the near roll holder is displaced in the direction away from the outer peripheral surface of the cooling can roll. Since the inter-surface distance L1 becomes 50 mm or more, it becomes possible to simplify the film passing operation from the feeding of the long resin film to the winding through the guide roll, the near roll, the cooling can roll, and the guide roll. .

Structure explanatory drawing which shows an example of the surface treatment apparatus (sputtering film coater) which concerns on embodiment. Structure explanatory drawing of the film guide means which concerns on embodiment comprised with a near roll and a near roll holder. Structure explanatory drawing of the film guide means which concerns on embodiment with which the positioning support member was attached. The top view which looked at the conventional surface treatment apparatus by which the guide roll (free roll) was arrange | positioned at the film carrying-in side of the cooling can roll from the upper side. Action explanatory drawing of the surface treatment apparatus which concerns on embodiment with which the film guide means was integrated. The top view which looked at the film guide means which concerns on embodiment comprised by the near roll and the near roll holder, and was provided with the positioning support member from the upper side.

  Hereinafter, embodiments of the present invention will be described. However, the present invention is not construed as being limited to the configuration contents according to the embodiments described below.

(1) Surface treatment apparatus (sputtering film coater) according to the embodiment
FIG. 1 is an explanatory view showing a configuration of a surface treatment apparatus (sputtering film coater) 10 according to an embodiment in which a long resin film F is conveyed by roll-to-roll in a vacuum chamber (decompression chamber) 12.

That is, the surface treatment apparatus (sputtering film coater) 10 includes a rectangular parallelepiped vacuum chamber (decompression chamber) 12 in which most of the components are accommodated. The vacuum chamber 12 may have a cylindrical shape, and the shape is not limited as long as it can maintain a reduced pressure in a range of 10 ⁻⁴ Pa to 10 Pa.

  Inside the vacuum chamber 12, a tension sensor roll 17 a, a near roll 16, a cooling can roll 14, a tension are taken along the transport path of the long resin film F that is unwound from the unwinding roll 13 and wound around the winding roll 18. The sensor roll 17b and a plurality of roll groups without reference numerals are arranged, and the near roll 16 constitutes a part of the film guiding means according to the embodiment.

  The unwinding roll 13 and the winding roll 18 are configured such that the tension balance of the long resin film F is maintained by torque control using a powder clutch or the like. Sputtering cathodes 15 a, 15 b, 15 c, and 15 d are disposed as surface treatment means with a thermal load on the side facing the cooling can roll 14 and along the outer peripheral surface of the cooling can roll 14.

  The sputtering cathodes 15a, 15b, 15c, and 15d are configured by a magnetron cathode type, and are disposed to face the cooling can roll 14 as described above. The dimension in the width direction of the long resin film F in the sputtering cathodes 15a, 15b, 15c, and 15d may be wider than the width of the long resin film F.

  The long resin film F is formed by sputtering cathodes 15a, 15b, 15c, and 15d provided on the opposite side of the cooling can roll 14 to form a film with metal film F2.

  The tension sensor rolls 17a and 17b are finished with hard chrome plating and have tension sensors. The cooling can roll 14 has an outer peripheral surface finished with hard chrome plating, and a coolant or a heating medium supplied from the outside of the housing (vacuum chamber 12) circulates in the inside thereof. The temperature is adjusted.

(2) Film Guide Means According to Embodiment FIGS. 2 and 6 are explanatory views of a film guide means according to an embodiment configured with a near roll and a near roll holder.

  As shown in FIGS. 2 and 6, the film guiding means according to the embodiment is a near roll provided in parallel with the cooling can roll 14 in the vicinity of the cooling can roll 14 into which the long resin film F is carried. 16 and a support portion 22 provided on both end sides in the axial direction of the near roll 16 and rotatably supporting the central axis of the near roll 16 and having a rotation shaft 20 on the base end side, It comprises a pair of swinging near roll holders 30.

  Further, a servo motor or a rotary actuator is connected to the rotary shaft 20 of the near roll holder 30 to control the angle θ of the rotary shaft 20, and the near roll holder 30 is fixed by specifying the angle θ of the rotary shaft 20. By doing so, the inter-surface distance L1 shown in FIG. 2 between the near roll 16 and the cooling can roll 14 and the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 can be adjusted. it can. Instead of connecting a servo motor or a rotary actuator to the rotating shaft 20 of the near roll holder 30, an air cylinder is attached to the near roll holder 30, and the near roll is driven by a drive unit that uses the straight movement of the air cylinder. The distance L1 between the surfaces 16 and the cooling can roll 14 and the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 may be adjusted.

  The film guiding means is based on factors such as the type of the long resin film F, the thickness of the long resin film F, the Young's modulus of the long resin film F, and the tension applied in the length direction of the long resin film F. By setting the distance L1 between the near roll 16 and the cooling can roll 14 and the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 to appropriate values, The occurrence of “U” can be reduced.

  Further, as shown in FIG. 3, both end sides of the central axis of the near roll 16 extending outward from the support portion 22 of the near roll holder 30 are locked, and the outer peripheral surface of the near roll 16 and the outer peripheral surface of the cooling can roll 14 are A positioning support member 21 for preventing contact may be provided.

  By providing the positioning support member 21, there is an advantage that the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 is repeatedly constant during the surface treatment. Furthermore, by providing the positioning support member 21, the difference in the inter-surface distance L1 between the both ends of the near roll 16 and the cooling can roll 14 is reduced, whereby the variation in tension in the width direction of the long resin film F is reduced. Therefore, it is possible to further suppress the occurrence of “swell U”.

  As a method for attaching the positioning support member 21, the positioning support member 21 is attached to the gantry on which the rotating shaft of the cooling can roll 14 is supported via the connecting member, and the connecting member is configured to be extendable and positioned. By allowing the stop position of the support member 21 to be displaced, a method of changing the locking position of the positioning support member 21 where both ends of the central axis of the near roll 16 are locked can be exemplified.

(3) Set values of the inter-surface distance L1 and the length L2 In the film guiding means according to the above embodiment, when the long resin film F is set on the surface treatment apparatus, the rotation shaft of the near roll holder 30 20 is rotated and the front end side of the near roll holder 30 is displaced in a direction away from the outer peripheral surface of the cooling can roll 14, and the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 is 50 mm or more. Yes.

  Further, as a method of setting the distance L1 between the near roll 16 and the cooling can roll 14 and the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 to appropriate values, Considering factors such as the type of the long resin film F, the thickness of the long resin film F, the Young's modulus of the long resin film F, the tension applied in the length direction of the long resin film F, and the preliminary test, etc. Thus, a method of finding an optimum condition in advance while changing the numerical values of the inter-surface distance L1 and the length L2 is exemplified.

  And when the long resin film F is comprised with the heat resistant resin film of 50 micrometers or less in thickness, the distance L1 between the near roll 16 and the cooling can roll 14 is 0.1-20 mm, the near roll 16 and the cooling can roll 14 When the length L2 of the long resin film F interposed therebetween is set to 8 to 100 mm, the “swell” of the long resin film F conveyed between the near roll 16 and the cooling can roll 14 as shown in FIG. The occurrence of “U” (see FIG. 4) is suppressed, which is preferable. By suppressing the occurrence of the “swell U”, the generation of film wrinkles on the cooling can roll 14 can be prevented. Here, the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 is calculated as a distance of a common inscribed line in contact with two circles (the circles of the near roll 16 and the cooling can roll 14). Yes.

  In addition, when the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 is less than 0.1 mm (less than the thickness of the long resin film F), and the long resin film interposed between the near roll 16 and the cooling can roll 14 When the length L2 of F is less than 8 mm, the near roll 16 is not uniform on the cooling can roll 14 and the long resin film F due to the cylindricity of the near roll 16, runout, thermal expansion of the roll, uneven thickness of the film, etc. The long resin film F may be skewed and meandered. Further, when the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 exceeds 20 mm, and when the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 exceeds 100 mm, the near roll Waviness may occur in the long resin film F interposed between the roll 16 and the cooling can roll 14 and conveyed between these rolls.

  The present invention has been described by taking a sputtering film coater as an example of a surface treatment with a thermal load. However, the surface treatment with a thermal load may be applied to a vacuum deposition method other than the above sputtering or a film forming means such as plasma or ion beam. However, it is included in the surface treatment apparatus according to the present invention.

  Hereinafter, examples of the present invention will be specifically described with reference to comparative examples, but the present invention is not limited to the contents of the examples shown below.

[Example 1]
Sputtering film formation was performed using the sputtering film coater 10 shown in FIG. 1 provided with the near roll 16 and the cooling can roll 14.

  The cooling can roll 14 is formed of a stainless steel cylindrical portion having a diameter of 600 mm and a width of 800 mm, and has a roll shape. A cooling water path is provided inside the cylindrical portion so that the temperature can be controlled. Yes.

  Moreover, the near roll 16 arrange | positioned in the vicinity of the cooling can roll 14 in which the long resin film F is carried in is comprised by the stainless steel cylindrical part of diameter 100mm and width 720mm, and has a roll shape, this near roll 16 And a pair of near-roll holders 30 constitute a film guiding means. That is, the film guiding means is provided in the vicinity of the cooling can roll 14 as shown in FIGS. 2 and 6, the near roll 16 provided in parallel with the cooling can roll 14, and the both ends in the axial direction of the near roll 16. And a pair of near-roll holders 30 having a support portion 22 rotatably supporting the central axis of the near-roll 16 on the distal end side and a pivot shaft 20 on the proximal end side and swinging the distal end side. ing. Also, an air cylinder is attached to the near roll holder 30 and a distance L1 between the near roll 16 and the cooling can roll 14 and between the near roll 16 and the cooling can roll 14 by a drive unit that uses the linear movement of the air cylinder. The length L2 of the long resin film F interposed between them can be set to an appropriate value.

  In addition, a polyimide film having a thickness of 12.5 μm and a width of 50 cm was used as a long resin film to be surface-treated.

  When the long resin film F is set on the sputtering film coater 10, the air cylinder (drive unit) of the film guiding means is operated to rotate around the rotation shaft 20 of the near roll holder 30, and the near roll holder The front end side of 30 is displaced in a direction away from the surface of the cooling can roll 14, and thus the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 is set to 50 mm or more. Unwinding from the unwinding roll 13 and attaching to the winding roll 18 through the tension sensor roll 17a, the near roll 16, the cooling can roll 14, the tension sensor roll 17b, another group of rolls, and the like.

  When passing the long resin film F, the sheet passing operation could be completed in a short time by moving the distance L1 between the near roll 16 and the cooling can roll 14 to a predetermined position of 50 mm or more.

  The tension of the unwinding roll 13 and the winding roll 18 was 80N.

  The metal film is formed on the long resin film F by forming a copper film on the nickel chromium alloy film as a seed layer, and a 20 wt% chromium nickel chromium alloy target is mounted on the sputtering cathode 15a. In addition, copper targets were mounted on the sputtering cathodes 15b, 15c, and 15d.

  Next, the air cylinder (driving unit) is operated to rotate around the rotation shaft 20 of the near roll holder 30 to displace the front end side of the near roll holder 30 in a direction approaching the surface of the cooling can roll 14. The distance L1 between the near roll 16 and the cooling can roll 14 is set to 12 mm by engaging the positioning support member 21 at both ends of the central axis of the near roll 16 extending outward from the support portion 22 of the near roll holder 30. And length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 was set to 92 mm.

The air in the vacuum chamber 12 was exhausted to 5 Pa using a plurality of dry pumps, and further exhausted to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  Next, the film conveying means is activated, argon gas is introduced at 300 sccm while conveying the long resin film F at a conveying speed of 3 m / min, and a power of 2 kW is applied to the sputtering cathode of the nickel chromium alloy target, Power control was performed by applying a power of 8 kW to each sputtering cathode of the copper target.

  And the surface treatment which forms continuously the seed layer and copper film which consist of a nickel chromium alloy film | membrane with respect to the single side | surface of the elongate resin film (polyimide film) F conveyed by roll to roll was started.

  Moreover, the long resin film F was observed from the observation window in which surface observation was possible about the surface of the long resin film (polyimide film) F on the cooling can roll 14 in the case of surface treatment.

  And under the said conditions, the continuous surface treatment of the long resin film (polyimide film) 50m was repeated 3 times.

  Table 1 shows the occurrence of “swells” and “wrinkles” during the surface treatment.

[Example 2]
Example except that the distance L1 between the near roll 16 and the cooling can roll 14 is set to 1 mm, and the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 is set to 8 mm. The continuous surface treatment of 50 m long resin film (polyimide film) was repeated 3 times under the same conditions as in 1.

  Table 1 shows the occurrence of “swells” and “wrinkles” during the surface treatment.

[Comparative Example 1 and Comparative Example 2]
Example 1 except that the distance L1 between the near roll 16 and the cooling can roll 14 and the length L2 of the long resin film F interposed between the near roll 16 and the cooling can roll 14 were set to the conditions shown in Table 1. The continuous surface treatment of a long resin film (polyimide film) 50 m was repeated 3 times each.

  Table 1 shows the occurrence of “swells” and “wrinkles” during the surface treatment.

[Evaluation]
(1) In Examples 1 and 2, 50 m continuous surface treatment was repeated 3 times for each 12.5 μm long resin film, but the occurrence of “swell” was suppressed as shown in Table 1. In addition, the occurrence of “皺” was not confirmed.

(2) On the other hand, in Comparative Example 1, when a continuous surface treatment of 50 m was repeated three times on a long resin film having a thickness of 12.5 μm, a long resin interposed between the near roll 16 and the cooling can roll 14 was obtained. The occurrence of “swell” in the center of the film F was confirmed. In addition, among the surface treatments repeated three times, “wrinkles” were generated between 10 m and 20 m in two times.

(3) Moreover, in the comparative example 2, since the near roll 16 was brought into contact with the cooling can roll 14 in a state in which the long resin film having a thickness of 12.5 μm was sandwiched, when the long resin film F was conveyed, the near roll 16 As soon as the oscillates, a “wax” occurs.

(4) From these results, a near roll 16 provided in parallel with the cooling can roll 14 and a shaft of the near roll 16 at a position near the cooling can roll 14 into which the long resin film F having a thickness of 12.5 μm is carried. A pair of near-roll holders 30 provided at both ends in the direction and supporting the central axis of the near roll 16 so as to be rotatable at the distal end side and having a rotation shaft 20 at the proximal end side and swinging at the distal end side. And a long resin film F interposed between the near roll 16 and the cooling can roll 14 with a surface distance L1 between the near roll 16 and the cooling can roll 14 of 0.1 to 20 mm. When the length L2 is set to 8 to 100 mm, “swell” that tends to occur in the long resin film F conveyed between the near roll 16 and the cooling can roll 14 is reduced. As a result, it is confirmed that can prevent the occurrence of film "wrinkles".

(5) In Example 1 and Example 2, the distance L1 between the near roll 16 and the cooling can roll 14 is “12 mm and 1 mm”, and the long resin film F interposed between the near roll 16 and the cooling can roll 14 is used. However, the distance L1 between the near roll 16 and the cooling can roll 14 is set within a range of 0.1 to 20 mm, and the near roll 16 and the cooling can roll 14 have a length L2 of “92 mm and 8 mm”. It has also been confirmed that by setting the length L2 of the long resin film F interposed therebetween in the range of 8 to 100 mm, the occurrence of the “swell” is reduced and the film “wrinkle” is prevented.

[Example 3, Example 4]
A polyimide film having a thickness of 25.0 μm and a width of 50 cm is used as the long resin film subjected to the surface treatment, and the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 and the near roll 16 and the cooling are used. The length L2 of the long resin film F interposed between the can rolls 14 is the same as in Example 1 except that the conditions shown in Table 2 are set, and a continuous surface treatment of a long resin film (polyimide film) 50 m is performed. Each was repeated three times.

  Table 2 shows the occurrence of “swells” and “wrinkles” during the surface treatment.

[Comparative Example 3, Comparative Example 4]
A polyimide film having a thickness of 25.0 μm and a width of 50 cm is used as the long resin film subjected to the surface treatment, and the inter-surface distance L1 between the near roll 16 and the cooling can roll 14 and the near roll 16 and the cooling are used. The length L2 of the long resin film F interposed between the can rolls 14 is the same as in Example 1 except that the conditions shown in Table 2 are set, and a continuous surface treatment of a long resin film (polyimide film) 50 m is performed. Each was repeated three times.

  Table 2 shows the occurrence of “swells” and “wrinkles” during the surface treatment.

[Evaluation]
(1) In Examples 3 and 4, 50 m continuous surface treatment was repeated three times for each 25.0 μm-thick long resin film, but the occurrence of “swell” was suppressed as shown in Table 2. In addition, the occurrence of “皺” was not confirmed.

(2) On the other hand, in Comparative Example 3, when a continuous surface treatment of 50 m was repeated 3 times on a long resin film having a thickness of 25.0 μm, a long resin interposed between the near roll 16 and the cooling can roll 14 was obtained. The occurrence of “swell” in the center of the film F was confirmed. In addition, among the surface treatments repeated three times, “wrinkles” were generated between 10 m and 20 m in two times.

(3) Moreover, in the comparative example 4, since the near roll 16 was made to contact the cooling can roll 14 in the state in which the long resin film of thickness 25.0 micrometers was pinched | interposed, when the long resin film F was conveyed, the near roll 16 As soon as the oscillates, a “wax” occurs.

(4) From these results, a near roll 16 provided in parallel with the cooling can roll 14 and a shaft of the near roll 16 at a position near the cooling can roll 14 into which the long resin film F having a thickness of 25.0 μm is carried. A pair of near-roll holders 30 provided at both ends in the direction and supporting the central axis of the near roll 16 so as to be rotatable at the distal end side and having a rotation shaft 20 at the proximal end side and swinging at the distal end side. And a long resin film F interposed between the near roll 16 and the cooling can roll 14 with a surface distance L1 between the near roll 16 and the cooling can roll 14 of 0.1 to 20 mm. When the length L2 is set to 8 to 100 mm, “swell” that tends to occur in the long resin film F conveyed between the near roll 16 and the cooling can roll 14 is reduced. As a result, it is confirmed that can prevent the occurrence of film "wrinkles".

(5) In Example 3 and Example 4, the distance L1 between the near roll 16 and the cooling can roll 14 is “13 mm and 5 mm”, and the long resin film is interposed between the near roll 16 and the cooling can roll 14. Although the length L2 of F is implemented for two examples of “97 mm and 59 mm”, the distance L1 between the near roll 16 and the cooling can roll 14 is in the range of 0.1 to 20 mm, and the near roll 16 and the cooling can roll It has also been confirmed that by setting the length L2 of the long resin film F interposed between 14 in the range of 8 to 100 mm, the occurrence of the “swell” is reduced and the film “wrinkle” is prevented. .

  According to the surface treatment apparatus for a long resin film according to the present invention, it becomes possible to avoid the generation of wrinkles related to the long resin film due to the surface treatment accompanied by a thermal load, so that a liquid crystal television, a mobile phone, etc. The present invention has industrial applicability applied as a manufacturing apparatus for heat-resistant resin films with metal films used in flexible wiring boards.

10 Surface treatment equipment (Sputtering film coater)
12 Vacuum chamber (decompression chamber)
13 Unwinding roll 14 Cooling can roll 15a, 15b, 15c, 15d Sputtering cathode 16 Near roll 16a Guide roll (free roll)
17a, 17b Tension sensor roll 18 Winding roll 20 Rotating shaft 21 Positioning support member 22 Support part 30 Near roll holder F Long resin film F2 Film with metal film L1 Inter-surface distance L2 between near roll and cooling can roll Near roll and cooling Length of long resin film interposed between can rolls

Claims (6)

The surface of the cooling can roll that is rotationally driven and the surface treatment means with a thermal load arranged along the outer peripheral surface of the cooling can roll on the side facing the cooling can roll is provided in the vacuum chamber and is transported by roll-to-roll. In the surface treatment apparatus for a long resin film, the surface treatment of the surface of the long resin film that is not in contact with the outer peripheral surface of the cooling can roll and the surface treatment of the long resin film is performed by the surface treatment means.
Near the cooling can roll into which the long resin film is carried in, a near roll provided in parallel with the cooling can roll, and provided on both ends in the axial direction of the near roll and rotatably supporting the central axis of the near roll. A film guide means comprising a pair of near roll holders having a support portion on the distal end side and a pivot shaft on the proximal end side, and the distal end side being swung. By specifying the angle of the shaft and fixing the holder, the distance L1 between the near roll and the cooling can roll and the length L2 of the long resin film interposed between the near roll and the cooling can roll are adjusted. A surface treatment apparatus for a long resin film, wherein the surface treatment apparatus is capable of being made.   The long resin film is composed of a heat-resistant resin film having a thickness of 50 μm or less, the inter-surface distance L1 between the near roll and the cooling can roll is 0.1 to 20 mm, and is interposed between the near roll and the cooling can roll The length L2 of the long resin film to set is set to 8-100 mm, The surface treatment apparatus of the long resin film of Claim 1 characterized by the above-mentioned.   A positioning support member for preventing contact between the outer peripheral surface of the near roll and the outer peripheral surface of the cooling can roll is provided by engaging both ends of the central axis of the near roll extending outward from the support portion of the near roll holder. The surface treatment apparatus for a long resin film according to claim 1 or 2.   When the long resin film is set in the surface treatment apparatus, the rotation shaft of the near roll holder rotates to displace the front end side of the near roll holder away from the outer peripheral surface of the cooling can roll, and the near roll and the cooling can roll The surface treatment apparatus for a long resin film according to any one of claims 1 to 3, wherein the inter-surface distance L1 is 50 mm or more.   The surface treatment apparatus for a long resin film according to any one of claims 1 to 4, wherein the surface treatment means accompanied by a thermal load is a vacuum film formation means.   6. The surface treatment apparatus for a long resin film according to claim 5, wherein the vacuum film forming means is a sputtering cathode.

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