JP6069979B2 - Can roll with gas release mechanism, long substrate processing apparatus equipped with the same, and long substrate processing method using the same - Google Patents

Description

  The present invention relates to a can roll that winds and cools a long substrate conveyed by roll-to-roll in a vacuum chamber, a long substrate processing apparatus equipped with the can roll, and a long substrate processing method using the same. When the surface treatment is applied by the surface treatment means, the long substrate is wound around the outer peripheral surface and cooled, and the gas is discharged from the gas discharge hole provided in the outer peripheral surface to the gap between the outer peripheral surface and the long substrate. The present invention relates to a can roll with a gas release mechanism that performs discharge, a long substrate processing apparatus equipped with the can roll, and a long substrate processing method using the same.

  In a liquid crystal panel, a notebook computer, a digital camera, a mobile phone, and the like, a flexible wiring board in which a wiring pattern is formed on a heat resistant resin film is used. This flexible wiring board is obtained by subjecting a heat-resistant resin film with a metal film to which a metal film is formed on one side or both sides of a heat-resistant resin film, by performing a patterning process using a thin film technique such as photolithography or etching. In recent years, the wiring patterns of flexible wiring boards tend to be more delicate and denser, and accordingly, heat-resistant resin films with metal films are required to be flat and free from wrinkles.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, conventionally, a method in which a metal foil is attached to a heat-resistant resin film with an adhesive (manufacturing method of a three-layer substrate), a heat-resistant resin on the metal foil After coating the solution, dry and manufacture (casting method), heat-resistant resin film by vacuum film formation method alone or in combination with vacuum film formation method and wet plating method. A method (metalizing method) or the like is known.

  In the metalizing method, a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method or the like is used as the vacuum film forming method. For example, Patent Literature 1 discloses a technique in which a Ni—Cr alloy is sputtered onto a polyimide support base, copper is sputtered, and copper is formed on the surface of the obtained copper sputtering film by electrolytic plating. When performing a dry plating process such as sputtering film formation on a support base made of a long film such as polyimide, a sputtering film coater is generally used.

  By the way, although the said sputtering method is generally excellent in adhesive force, it is said that the heat load given to a heat resistant resin film is large compared with the vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled. In order to prevent the generation of wrinkles, a sputtering film coater, which is a manufacturing apparatus for heat-resistant resin films with a metal film, uses a roll-to-roll heat-resistant resin conveyed to the outer peripheral surface of a rotationally driven can roll having a cooling function. Cooling the heat-resistant resin film during the sputtering process from its back side by winding the film.

  For example, Patent Document 2 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. The unwinding / winding-type vacuum sputtering apparatus includes a cooling roll that plays the role of the can roll. Further, a sub-roll is provided on at least the film feeding side or the feeding side of the cooling roll, thereby controlling the heat-resistant long resin film in close contact with the cooling roll.

  However, since the outer peripheral surface of the can roll is not flat when viewed microscopically, a gap portion (via a vacuum space) is separated between the outer peripheral surface of the can roll and the long resin film that is wound around the outer peripheral surface of the can roll. Gap) exists. Because of this gap portion, the heat applied to the long resin film during sputtering and vapor deposition cannot actually be efficiently transferred from the long resin film to the can roll. It was the cause of wrinkles.

  In order to solve this problem, there is a technique for introducing a gas from the can roll side into the gap portion between the outer peripheral surface of the can roll and the long resin film so that the thermal conductivity of the gap portion is higher than that of the vacuum. Proposed. For example, Patent Document 3 discloses a technique for improving heat conduction by introducing a gas from one gas introduction nozzle between a film and the outer peripheral surface of a can roll as a support means. However, it is difficult to supply the gas to the gap between the support means and the film wound around the gas introducing nozzle provided only in one place, and there is a concern that the control becomes difficult.

  Therefore, Patent Document 4 introduces gas from the can roll side into the gap portion by providing a large number of fine holes (gas discharge holes) for supplying gas over the entire circumference on the outer peripheral surface of the can roll. Technology is disclosed. However, in this case, the resistance of the gas discharge hole is lower in the outer surface of the can roll where the film is not wound than in the region where the film is wound. Most of the gas is discharged into the space of the vacuum chamber through the gas discharge holes in the area where the film is not wound. As a result, an amount of gas that should be originally introduced into the gap between the outer peripheral surface of the can roll and the film wound around the can roll is not supplied, and the effect of increasing the thermal conductivity may not be obtained. It was.

  For the problem of outgassing from the unwrapped area of the film, a cover is attached to the unwrapped area of the film to prevent gas from being released into the chamber from this area, thereby There has been proposed a method (Patent Document 5) or the like in which gas is favorably introduced into a gap portion between an outer peripheral surface of a roll and a film wound around the roll.

JP-A-6-120630 Japanese Patent Laid-Open No. 62-247073 JP-A-1-152262 International Publication No. WO2005 / 001157 pamphlet International Publication No. WO2002 / 070778 Pamphlet

  In a device that applies a heat load to the surface of a long substrate that is transported roll-to-roll in a reduced pressure atmosphere around the outer surface of the can roll and cools it, When gas is introduced from the outer peripheral surface of the can roll into the gap between the outer peripheral surface and the long substrate wound therearound, the long substrate is transported in a state of floating from the outer peripheral surface.

  The inventor has confirmed that the distance at which the long substrate is separated from the outer peripheral surface of the can roll may not be substantially constant in the circumferential direction of the outer peripheral surface during conveyance in the floating state. That is, out of the outer peripheral surface of the can roll around which the long substrate is wound, the long substrate is locally raised in a certain angular range in the circumferential direction, or conversely, does not float locally and adheres to the outer peripheral surface. was there.

  When the distance of the long substrate that is separated from the outer peripheral surface of the can roll is not substantially constant in the circumferential direction of the outer peripheral surface, a problem in transporting the long substrate may occur or the surface of the long substrate may be constant. There is a possibility that it may lead to a problem that processing cannot be performed with quality. In addition, the position where the long substrate locally rises and adheres from the outer peripheral surface of the can roll differs every time the long substrate is mounted, so the can roll cannot be adjusted in advance. It was.

  The present invention has been made in view of the above situation, and the problem is that the gas is discharged from the outer peripheral surface of the can roll so as to perform efficient cooling, and the outer peripheral surface is wound around the long peripheral surface. When a long substrate is lifted and transported from the outer peripheral surface of the can roll by introducing gas into the gap with the substrate, the distance that the long substrate is separated from the outer peripheral surface of the can roll in the circumferential direction of the outer peripheral surface. The purpose is to propose a technique that makes it possible to maintain a substantially constant value.

The can roll provided by the present invention is a can roll that winds and cools a long substrate conveyed by roll-to-roll in a vacuum chamber around the outer peripheral surface, and the long substrate is wound around the outer peripheral surface of the can roll. A surface treatment means for applying a surface treatment to which a heat load is applied, which is arranged opposite to the region, and a long substrate wound around the outer peripheral surface of the can roll are locally expanded or adhered in the circumferential direction. An apparatus for processing a long substrate comprising a non-contact type displacement measuring means capable of determining an angle range , wherein the can roll has a plurality of gas discharge holes each opening on the outer peripheral surface side. Gas introduction passages are provided over the entire circumference at substantially equal intervals in the circumferential direction, and two gases that are in parallel with each other and have valves are provided at both ends of each gas introduction passage. Supply line in communication with each gas to each gas inlet passage by the supply of gas by the operation of the valve of the two gas supply lines from the outside of the vacuum chamber to the individual gas introduction passage is adjustable It is characterized in that it can change the amount of release .

  According to the present invention, the distance at which the long substrate is separated from the outer peripheral surface of the can roll can be made substantially constant in the circumferential direction of the outer peripheral surface, whereby a high-quality heat-resistant resin film with a metal film can be obtained. It can be manufactured with a high yield.

It is a front view showing typically a specific example of a roll-to-roll type long substrate processing apparatus in which a can roll concerning the present invention is used suitably. It is a cutting figure when the can roll of one specific example of this invention is cut | disconnected by the surface parallel to the rotation center axis | shaft. It is a perspective view of the cylindrical member shown in FIG. It is sectional drawing which shows the opening-and-closing state of the valve | bulb which the can roll of FIG. 2 comprises. It is a schematic diagram when the state of the long resin film on the outer peripheral surface of the can roll under the conditions of Example 1 is viewed from the direction of the rotation center axis. It is a schematic diagram when the state of the elongate resin film on the outer peripheral surface of the can roll on the conditions of Example 2 is seen from the rotation center axis direction. It is a schematic diagram when the state of the elongate resin film on the outer peripheral surface of the can roll on the conditions of Example 3 is seen from the rotation center axis direction.

  First, a roll-to-roll sputtering apparatus that is a processing apparatus for a long substrate on which a can roll according to the present invention is preferably mounted will be described. This sputtering apparatus was provided to face the outer peripheral surface of the can roll while transporting a long resin film, which is a long substrate, by roll-to-roll, wrapping around the outer peripheral surface of the can roll as a transport path and cooling. This is an apparatus for performing a sputtering film forming process, which is a surface process that applies a thermal load to a long resin film with a sputtering cathode.

  Specifically, referring to FIG. 1, this roll-to-roll sputtering apparatus 10 includes an unwinding roll 13 from which a long resin film F wound in a roll shape is unwound, and a long resin film F. A can roll 14 having an outer peripheral surface to be wound and cooled, a front feed roll 16a and a rear feed roll 16b provided immediately before and immediately after the can roll 14 with respect to the transport path of the long resin film F, and upstream of the can roll 14 Tension rolls 17a and 17b having tension sensors for measuring the tension of the long resin film F traveling on the side and the tension of the film-treated long resin film S traveling on the downstream side of the can roll 14, respectively. And a winding roll 18 for winding the long resin film S subjected to the film treatment.

  The unwinding roll 13, the can roll 14, the front feed roll 16a and the rear feed roll 16b, the tension rolls 17a and 17b, and the take-up roll 18 constitute a conveying means. Among these, the unwinding roll 13, the can roll 14, and the front roll The feed roll 16a and the take-up roll 18 are each rotated by rotation driving means such as a servo motor. Furthermore, the unwinding roll 13 and the winding roll 18 are provided with torque control means such as a powder clutch, whereby the tension balance of the long resin films F and S being conveyed is maintained. The tension rolls 17a and 17b and the can roll 14 have outer peripheral surfaces finished with hard chrome plating.

  In the sputtering apparatus 10, four sputtering cathodes 15 a to 15 d for forming a long resin film S by performing a sputtering film forming process on the long resin film F wound around the outer peripheral surface of the can roll 14. Is provided. These sputtering cathodes 15 a to 15 d are of, for example, a magnetron cathode type, and are disposed so as to face the outer peripheral surface along the conveyance path of the outer peripheral surface of the can roll 14. In the sputtering cathodes 15a to 15d, the dimension in the direction orthogonal to the conveying direction of the long resin film F only needs to be wider than the width of the long resin film F.

The above-described components of the sputtering apparatus 10 are accommodated in a substantially rectangular parallelepiped vacuum chamber 12 as a casing, thereby enabling continuous surface treatment while transporting the long resin film F in a reduced-pressure atmosphere. It becomes possible. Thus, when forming into a film by sputtering method, the inside of the vacuum chamber 12 is pressure-reduced to the pressure in the range of 10 < ^-4 > Pa-10 < ^-3 > Pa (the minimum pressure achieved by this pressure reduction is called ultimate pressure).

After the pressure is reduced to the ultimate pressure, sputtering gas (argon) is introduced into the vacuum chamber 12 and maintained at a pressure in the range of 10 ⁻¹ Pa to about 1 Pa. Sputtering is performed in this state. In FIG. 1, the vacuum chamber 12 is shown in a rectangular parallelepiped shape, but the shape is not limited to this shape as long as the inside of the vacuum chamber 12 can be maintained in a reduced pressure of about 10 ⁻⁴ Pa to 10 Pa. Other shapes such as a shape may be used.

  Next, the can roll 14 will be described in more detail with reference to FIG. The can roll 14 includes a cylindrical member 20 and a rotation shaft 21 provided at the rotation center axis O portion. The rotating shaft 21 is rotatably supported by rotating bearings 22 provided at both ends of the rotating shaft 21, and is rotated around the rotation center axis O by a driving device (not shown). The long resin film F conveyed by roll-to-roll is wound around the outer peripheral surface 20a of the cylindrical member 20.

  On the inner surface side of the cylindrical member 20, there is provided, for example, a jacket-structured refrigerant circulation portion 23 through which a refrigerant such as cooling water circulates, and the rotary shaft 21 has a double pipe structure so that the refrigerant enters and exits. Two flow paths are formed. Accordingly, the refrigerant can be circulated between the refrigerant cooling device (not shown) provided outside the vacuum chamber 12 and the refrigerant circulation portion 23 through these flow paths, and the outer peripheral surface of the can roll 14 (that is, the cylinder) It becomes possible to adjust the temperature of the outer peripheral surface 20a) of the member 20 to be substantially constant.

  As shown in FIG. 3, a plurality of gas introduction passages 24 are formed in the outer peripheral portion of the cylindrical member 20 over the entire circumference at substantially equal intervals in the circumferential direction. Each gas introduction path 24 extends in parallel with the direction of the rotation center line O of the cylindrical member 20, and penetrates the thick portion of the outer peripheral portion of the cylindrical member 20 and both ends are open. The inner diameter of the gas introduction path 24 and the pitch with the adjacent gas introduction path 24 are appropriately selected in consideration of the number of the gas introduction paths 24 and the heat transfer property of the can roll 14. For example, deep hole machining can be easily performed.

  Each gas introduction path 24 further has a plurality of gas discharge holes 25 that open to the outer peripheral surface 20 a of the cylindrical member 20. As shown in FIG. 3, the plurality of gas discharge holes 25 are formed at substantially equal intervals along the rotation center line O direction of the cylindrical member 20. The inner diameter of each gas discharge hole 25 is preferably 100 μm or more and 400 μm. If the inner diameter is less than 100 μm, it is difficult to process the gas discharge hole 25. On the other hand, if the inner diameter exceeds 400 μm, heat transfer between the long substrate and the can roll may be difficult. Drilling of the gas discharge hole 25 can be performed by drilling or laser processing.

Gases such as H ₂ , He, and Ar are supplied to the plurality of gas introduction paths 24 from the outside of the vacuum chamber 12 through a rotary joint described later. Thereby, the gas discharge | released from the several gas discharge hole 25 which each gas introduction path 24 has is introduce | transduced between the outer peripheral surface of the can roll 14, and the elongate resin film F wound around there, and thermal conductivity improves. Thus, the long resin film F can be cooled satisfactorily.

  By the way, since the outer peripheral surface of the can roll 14 has been subjected to the hard chrome plating process as described above, the unevenness cannot be visually confirmed, but there are innumerable fine unevenness in the order of sub μm to μm. Even if the long resin film F is wound around the outer peripheral surface of the can roll 14 due to these irregularities, a fine gap exists between the outer peripheral surface and the long resin film F.

A gas such as H ₂ discharged from the gas discharge hole 25 flows into the gap between the outer peripheral surface of the can roll 14 and the long resin film F wound around the outer surface. Then, the gap is expanded and the long resin film F is floated from the outer peripheral surface of the can roll 14. Such floating of the long resin film F from the outer peripheral surface of the can roll 14 is mainly influenced by the pressure of the atmosphere of the can roll 14, the radius of the can roll 14, and the tension and width of the long resin film F. receive.

  Specifically, the gas is introduced into the gap at a pressure higher than the sum of the pressure in the atmosphere of the can roll 14 and the force N at which the long resin film F tends to adhere to the outer peripheral surface of the can roll 14 by its tension. Then, the long resin film F floats from the outer peripheral surface of the can roll 14. Here, the force N that the long resin film F tries to adhere to the outer peripheral surface of the can roll 14 by its tension is expressed as follows: the radius of the can roll 14 is R, the tension of the long resin film F is T, and the width is W. Then, it can obtain | require from the following relational expression.

  N = T / (R × W)

  In addition, since the refrigerant circulation part 23 is provided inside the can roll 14 as described above, a gas is formed in a gap formed between the can roll 14 and the long resin film F wound around the outer peripheral surface thereof. It is considered that heat transfer from the long resin film F to the can roll 14 is hindered. However, in a reduced pressure atmosphere of 10 Pa or less, heat transfer between objects is only radiant heat, whereas in the can roll 14 according to the present invention, convection heat transfer by the gas is added by introducing the gas into the gap. Therefore, it becomes possible to transmit heat from the long resin film F to the can roll 14 more efficiently.

  Furthermore, when gas is introduced into the gap and the gap is expanded, friction between the outer peripheral surface of the can roll 14 and the long resin film F is reduced. As a result, even if a thermal load is applied to the long resin film F and it expands, it is not restrained by the outer peripheral surface, so that generation of wrinkles can be prevented.

  As described above, when gas is introduced into the gap between the outer peripheral surface of the can roll 14 and the long resin film F and the long resin film F is conveyed while floating from the outer peripheral surface, the long resin film F is transferred to the can roll 14. It is desirable that the height rising from the outer peripheral surface is substantially constant in the circumferential direction. However, in actuality, the flying height may vary in the circumferential direction.

  That is, the long resin film F may be in a state where it has been locally levitated and swollen locally from the outer peripheral surface of the can roll 14, or conversely, it may be in close contact with the outer peripheral surface of the can roll 14. In addition, the position where such local bulge or adhesion occurs is not always generated in the same angular range in the circumferential direction of the outer peripheral surface of the can roll 14, and the difference between the lots of the long resin film F and the conveyance Occurrence and location of occurrence may differ depending on various conditions such as speed.

  The inventor of the present invention, as a result of earnest research to correct local swelling and adhesion in the circumferential direction of the long resin film F wound around the outer peripheral surface of such a can roll 14, The gas discharged from the outer peripheral surface through the gas discharge hole 25 is not discharged uniformly over the entire circumference of the can roll 14, but the gas discharge amount is changed for each gas introduction path 24 arranged in the circumferential direction. It has been found that the above-mentioned local swelling and adhesion can be suppressed by obtaining.

  That is, in the sputtering apparatus 10 of one specific example of the present invention, each of the plurality of gas introduction paths 24 is configured to supply gas from the outside of the vacuum chamber 12 via two gas supply lines that are in parallel with each other. It has become. Each of these two gas supply lines has a valve, and by appropriately operating the valve, gas from the outside of the vacuum chamber 12 is supplied from both or only one of these two gas supply lines. Or the supply of the gas can be stopped, so that the height at which the long resin film F floats from the outer peripheral surface of the can roll 14 can be made substantially constant in the circumferential direction.

  More specifically, as shown in FIG. 2, the can roll 14 is provided with a first rotary joint 30 and a second rotary joint 40 on both side surfaces of the tubular member 20, respectively. Since these first and second rotary joints 30 and 40 have substantially the same configuration and the same functions, the first rotary joint 30 will be described below. Note that the constituent elements indicated by reference numerals 31 to 37 of the first rotary joint 30 shown below correspond to the constituent elements indicated by reference numerals 41 to 47 of the second rotary joint 40, respectively.

  The first rotary joint 30 includes a pair of rotating ring units 31 and a fixed ring unit 32. The rotating ring unit 31 is concentrically attached to the side portion of the cylindrical member 20, and rotates with the cylindrical member 20 about the rotation center axis O. On the other hand, the fixed ring unit 32 is fixed so as not to move by a support member (not shown). The rotating ring unit 31 and the fixed ring unit 32 have sliding contact surfaces at portions facing each other. When the rotating ring unit 31 rotates, the sliding contact surfaces come into sliding contact with each other.

  In the rotating ring unit 31, the same number of gas supply lines 33 as the number of the gas introduction paths 24 are provided radially. One end of each gas supply line 33 communicates with one opening of the gas introduction path 24 at the same angular position via an individual valve 35, and the other end is a slidable contact surface of the rotary ring unit 31. It is open at. A gas supply line 43 on the second rotary joint 40 side communicates with the other opening of the gas introduction path 24 via an individual valve 45.

  In the fixed ring unit 32, one gas distribution path 36 communicating with a gas supply source (not shown) outside the vacuum chamber 12 through a connection portion 36a is formed. The plurality of gas supply lines 33 that open at the sliding contact surfaces are annularly opened at the sliding contact surfaces such that the openings of the gas supply lines 33 face the annular region formed by rotation. As a result, the gas supplied from the outside of the vacuum chamber 12 can be distributed and supplied to each gas introduction path 24.

  Next, the valve 35 will be described with reference to FIGS. 4 (a) and 4 (b). As shown in FIG. 4A, the valve 35 includes a valve body 50, a shaft 51 provided at an end thereof, a magnet portion 52 provided on the opposite side of the valve body 50 from the shaft 51, and a shaft. And a spring 53 wound around 51. The valve body 50 can reciprocate between an open position (FIG. 4A) for opening the gas supply line 33 and a closed position (FIG. 4B) for closing the gas supply line 33. The spring 53 is biased toward the open position.

  Since the gas supply line 33 provided with the valve 35 rotates as the cylindrical member 20 rotates, when the gas introduction path 24 reaches a predetermined angular position, the valve 35 at the same angular position operates. Thus, the gas supply to the gas introduction unit 24 can be shut off. Specifically, as shown in FIG. 4B, magnetic force applying means for generating a repulsive force between the magnet portion 52 and the magnet portion 52 at a position facing the magnet portion 52 of the valve 35 at the predetermined angular position. 37 can be installed.

  As a result, when the valve 35 comes to the predetermined angular position, a repulsive force from the magnetic force applying means 37 works, and the valve body 50 moves from the open position to the closed position against the urging force of the spring 53 to supply gas. The supply of gas from the line 33 to the gas introduction path 24 is shut off. Thus, by appropriately determining the position where the magnetic force applying means 37 is installed, it is possible to adjust the supply and stop of the gas from the first rotary joint side to the gas introduction path 24 for each gas introduction path 24. Become. In addition, it is possible to supply and stop the gas from the second rotary joint side to the gas introduction path 24 for each gas introduction path 24 by performing the same on the second rotary joint side.

  That is, by appropriately adjusting the angular position at which the magnetic force applying means 37 and 47 are arranged, either or both of the two gas supply lines 33 and 43 with respect to the gas introduction path 24 located within a predetermined angular range. It is possible to supply gas from only one side or to stop the supply of gas from both gas supply lines. For example, by disposing both the magnetic force applying means 37 and 47 in the angle range where the long resin film F is not wound, it is possible to prevent the gas from being released from the gas introduction hole 25 located in this angle range. . Thereby, the adverse effect on the pressure control in the vacuum chamber 12 can be suppressed, and the gas pressure of the gas supplied to the gas introduction path 24 located in the angle range around which the long resin film F is wound is stabilized at a predetermined pressure. Can be maintained.

  Further, in the circumferential direction of the can roll 14, either one or both of the magnetic force applying means 37 and 47 are arranged in a certain angular range, or both are not installed, so that the desired angular range is obtained. It becomes possible to make the gas supply amount to the gas introduction path 24 located different from the gas introduction path 24 located in other angle ranges. This makes it possible to change the amount of gas discharged from the gas discharge hole 25 for each angle range where the gas introduction path 24 communicating therewith exists, and thus the long resin film F is separated from the outer peripheral surface of the can roll 14. It becomes possible to correct the variation in the circumferential direction of the distance.

  In addition, the pressure and flow rate of the gas supply source connected to the first rotary joint side may be different from those connected to the second rotary joint side. It can be determined appropriately in consideration of the situation such as the variation in the circumferential direction of the distance away from the center. For example, the pressure of the gas supplied to the gas introduction path 24 can be changed in multiple stages by making the supply pressure from the gas supply source different on the first rotary joint side and the second rotary joint side. Therefore, the distance at which the long resin film F is separated from the outer peripheral surface of the can roll 14 can be kept more uniform in the circumferential direction.

  When starting the operation of the sputtering apparatus 10, the valves of both the gas supply lines 33 and 43 are connected to all the gas introduction paths 24 located in an angle range where the long resin film F is wound around the can roll 14. What is necessary is just to install magnetic force provision means 37 and 47 suitably, confirming the conveyance state of the long resin film F on the outer peripheral surface of the can roll 14, set to open.

  As a method for confirming the conveyance state of the long resin film F, for example, the distance at which the long resin film F is separated from the outer peripheral surface of the can roll 14 is measured in the circumferential direction of the can roll 14 to be locally swelled or adhered. It is only necessary to determine the angle range in which the gas is discharged and change the installation of the magnetic force applying means 37 and 47 within the angle range to change the gas emission amount. That is, the distance at which the long resin film F is separated from the outer peripheral surface of the can roll 14 can be feedback controlled by opening and closing the valves 35 and 45.

  If the magnetic force applying means is an electromagnet, the magnetic pole can be easily changed by electrical control. Further, the opening / closing control may be performed by an electric signal by using a valve of the gas supply line as an electromagnetic valve without using the magnetic force applying means. Furthermore, the number of gas supply lines connected to each gas introduction path and the number of valves provided in each gas supply line are not limited to the above example, and gas supply lines and valves may be added. By increasing the number of gas supply lines connected to each gas introduction path, the pressure of the gas supplied to the gas introduction path can be controlled more finely.

  As described above, the roll-to-roll type sputtering apparatus 10 has been taken as a specific example, and the can roll according to the present invention and the processing apparatus for a long substrate equipped with the same have been described. However, the present invention is limited to this specific example. Instead, the present invention can be implemented in various modes without departing from the gist of the present invention. For example, the surface treatment with heat load may be other dry plating treatment such as vapor deposition in addition to sputtering film formation, or may be surface treatment such as plasma or ion beam in addition to the film formation treatment by dry plating.

[Example 1]
The can roll 14 as shown in FIG. 2 was mounted on the sputtering apparatus 10 as shown in FIG. 1, and sputtering film formation was performed while the long resin film F was conveyed by roll-to-roll. More specifically, a cylindrical member 20 made of stainless steel having a roll shape with a diameter of about 400 mm and a width of 600 mm was used for the can roll 14. Inside the cylindrical member 20, there is provided a refrigerant circulation section 23 that serves as a cooling water circulation path so that the temperature can be controlled.

  A through-hole having an inner diameter of 5 mm, which is substantially parallel to the direction of the rotation center axis O, is formed in the outer peripheral portion of the cylindrical member 20 over the entire circumference, and these are used as a gas introduction path 24. Each gas introduction path 24 was provided with a plurality of gas discharge holes 25 having an inner diameter of 0.2 mm that opened in the normal direction on the outer peripheral surface of the can roll 14. In addition, the space | interval of adjacent gas discharge holes 25 was about 10 mm pitch in the circumferential direction of the cylindrical member 20, and 10 mm pitch in the axial direction.

  A polyimide film having a thickness of 25 μm and a width of 50 cm was used for the long resin film F and conveyed at a speed of 2 m / min. Conveying means for demarcating the conveying path of the long resin film F so that the angle at which the long resin film F made of the polyimide film is wound around the outer peripheral surface of the can roll 14 (hereinafter also referred to as a holding angle) is 270 °. It was adjusted. Further, a 20 wt% chromium nickel chromium alloy target was mounted on the sputtering cathode 15a, and a copper target was mounted on the sputtering cathodes 15b, 15c, and 15d. The input power to each sputtering cathode was 20 kW.

  The gas supply line 33 on the first rotary joint side is supplied with argon gas at a pressure of 1020 Pa from the outside of the vacuum chamber 12, and the gas supply line 43 on the second rotary joint side is supplied with a pressure of 850 Pa from the outside of the vacuum chamber 12. Argon gas was supplied. The distance that the long resin film F wound around the outer peripheral surface of the can roll 14 is separated from the outer peripheral surface (that is, the gap between the outer peripheral surface of the can roll 14 and the long resin film F within the angle range of the holding angle) is The measurement was made with a laser displacement meter. Cooling water having a temperature of 20 ° C. was circulated through the can roll 14. The atmosphere in the vacuum chamber 12 during sputtering was argon with a pressure of 0.3 Pa.

  Next, within the angle range where the gas introduction path 24 shown by the black circle in FIG. 5A corresponding to the region where the long resin film F is not wrapped around the outer peripheral surface of the can roll 14, the first rotary joint side The magnetic force application means 37 and 47 were installed so that the gas supply from the gas supply line 33 and the gas supply line 43 on the second rotary joint side could all be shut off. Further, for the gas introduction path 24 indicated by the white circle located at the holding angle, all the valves of the gas supply line 33 on the first rotary joint side are opened, and all the valves of the gas supply line 43 on the second rotary joint side are closed. The magnetic force applying means 47 is installed only on the second rotary joint side.

  When the long resin film F was conveyed in this state, as shown in FIG. 5A, the gap swelled as large as 100 μm at the lower center portion of the can roll 14. Accordingly, as shown in FIG. 5B, the gas supply line 33 on the first rotary joint side is connected to the gas supply line 33 on the first rotary joint side within the angle range where the three gas introduction paths 24 indicated by the oblique lines located in the lower central portion of the can roll 14 exist. Instead, the magnetic force applying means 47 was removed and the magnetic force applying means 37 was installed in the angular range so that the gas was supplied from the gas supply line 43 on the second rotary joint side. As a result, the distance (gap) at which the long resin film F was separated from the outer peripheral surface of the can roll 14 within the range of the holding angle could be suppressed within the range of 10 μm to 20 μm.

[Example 2]
First, magnetic force applying means 37 and 47 are installed at the same position as in FIG. 5A except that a long resin film F made of a polyimide film of a lot different from that in Example 1 is used. When the long resin film F was conveyed, as shown in FIG. 6A, the gap swelled as large as 100 μm in the angular range located on the downstream side of the can roll 14 within the angular range of the holding angle.

  Therefore, as shown in FIG. 6B, within the angle range where the two gas introduction paths 24 indicated by the oblique lines located on the downstream side of the can roll 14 exist, the gas supply line 33 on the first rotary joint side is replaced with the first gas supply line 33. In order to supply gas from the gas supply line 43 on the 2 rotary joint side, the magnetic force applying means 47 was removed and the magnetic force applying means 37 was installed in the angular range. As a result, the distance (gap) at which the long resin film F was separated from the outer peripheral surface of the can roll 14 within the range of the holding angle could be suppressed within the range of 10 μm to 20 μm.

[Example 3]
A magnetic force is first applied at the same position as in FIGS. 5 (a) and 6 (a) in the same manner as in Examples 1 and 2, except that a long resin film F made of a polyimide film of a different lot from Examples 1 and 2 is used. When the providing means 37 and 47 are installed and the long resin film F is conveyed, as shown in FIG. 7A, a gap is formed in the angular range located upstream of the can roll 14 in the angular range of the holding angle. It was 0 μm and was in close contact.

  Accordingly, in addition to the gas supply line 33 on the first rotary joint side, an angle range in which three gas introduction paths 24 indicated by vertical lines located upstream of the can roll 14 exist as shown in FIG. The magnetic force application means 47 was removed in the angular range so that the gas was supplied also from the gas supply line 43 on the second rotary joint side. As a result, the distance (gap) at which the long resin film F was separated from the outer peripheral surface of the can roll 14 within the range of the holding angle could be suppressed within the range of 10 μm to 20 μm. In this state, when the sputter film formation was carried out while conveying the long resin film F by 500 m, no wrinkles were generated. In addition, when the temperature of the long resin film F at the time of this sputtering film-forming was measured with the thermocouple, the maximum temperature was 50 degreeC.

[Comparative Example 1]
Sputter deposition was performed in the same manner as in Example 3 except that no gas was introduced between the outer peripheral surface of the can roll 14 and the long resin film F wound around the can roll 14. As a result, the distance (gap) of the long resin film F separated from the outer peripheral surface of the can roll 14 could not be measured, and the maximum temperature of the long resin film F was 120 ° C. In addition, wrinkles occurred immediately after the start of sputtering film formation.

[Comparative Example 2]
When the sputtering film formation was performed in the state of FIG. 7A without performing the operation of FIG. 7B in Example 3, wrinkles were generated when the long resin film F was conveyed 200 m.

DESCRIPTION OF SYMBOLS 10 Sputtering apparatus 12 Vacuum chamber 13 Unwinding roll 14 Can roll 15a-15d Sputtering cathode 16a Front feed roll 16b Front feed roll 17a, 17b Tension roll 18 Winding roll 20 Cylindrical member 21 Rotating shaft 22 Rotating bearing 23 Refrigerant circulation part 24 Gas Introduction path 25 Gas discharge hole 30, 40 Gas rotary joint 31, 41 Rotating ring unit 32, 42 Fixed ring unit 22
33, 43 Gas supply line 35, 45 Valve 36, 46 Gas distribution path 37, 47 Magnetic force applying means F Long resin film O Rotation center axis

Claims (7)

A can roll that wraps and cools a long substrate conveyed by roll-to-roll in a vacuum chamber around the outer peripheral surface , and heat that is arranged to face a region of the outer peripheral surface of the can roll where the long substrate is wound. It is possible to define a surface treatment means for applying a surface treatment to which a load is applied and an angular range in which a long substrate wound around the outer peripheral surface of the can roll is locally swollen or closely adhered in the circumferential direction. A long substrate processing apparatus comprising a contact-type displacement measuring means ,
In the can roll, a plurality of gas introduction paths each having a plurality of gas discharge holes opened on the outer peripheral surface side are provided over the entire circumference at substantially equal intervals in the circumferential direction. The two gas supply lines that are in parallel with each other and each provided with a valve communicate with each other at both ends of each of the two, and each of the two gas supply lines is operated from the outside of the vacuum chamber by operating the valves of the two gas supply lines. An apparatus for processing a long substrate, characterized in that the gas supply amount to the gas introduction path can be adjusted to change the gas discharge amount for each gas introduction path . The gas communication path that communicates with the gas introduction path located in the angular range defined by the displacement measuring means so as to keep the distance that the long substrate is separated from the outer peripheral surface of the can roll substantially constant in the circumferential direction of the can roll. 2. The apparatus for processing a long substrate according to claim 1, wherein the operation of the valves of the two gas supply lines is feedback-controlled. Characterized in that said surface treatment unit is a dry film forming means, the processing unit of the long substrate according to claim 1 or 2. The long substrate processing apparatus according to claim 3 , wherein the dry film forming means is a sputtering cathode. A plurality of gas introduction paths each having a plurality of gas discharge holes opened on the outer peripheral surface side are provided when a long substrate subjected to a heat load is applied to a long substrate transported by roll-to-roll in a vacuum chamber. The refrigerant is wound around the outer peripheral surface of a can roll disposed over the entire circumference at substantially equal intervals in the direction and introduces gas from the plurality of gas discharge holes between the outer peripheral surface and the long substrate. A method for treating a long substrate cooled in
Two gas supply lines, which are in parallel with each other and each provided with a valve, communicate with both ends of each of the plurality of gas introduction paths, and the valves of these two gas supply lines are operated. By adjusting the gas supply from the outside of the vacuum chamber to the individual gas introduction passages, the gas discharge amount can be changed for each gas introduction passage, and is located in an angular range where the long substrate is not wound. The gas located in the angular range is determined by stopping the gas supply to the gas introduction path and defining an angular range in which the long substrate is locally expanded or adhered in the circumferential direction from the outer peripheral surface. A method for treating a long substrate, characterized in that a distance at which the long substrate is separated from the outer peripheral surface is maintained substantially constant in a circumferential direction of the can roll by adjusting a gas discharge amount to the introduction path . The long substrate processing method according to claim 5 , wherein the surface treatment to which the thermal load is applied is dry film formation. The long substrate processing method according to claim 6 , wherein the dry film formation is a sputtering film formation.

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