JP6508080B2 - Can roll and long body processing apparatus and method - Google Patents

Description

  The present invention is a process comprising a can roll applied to an apparatus for performing a process of applying a thermal load such as sputtering continuously while conveying a long body of a long heat resistant resin film or the like in a vacuum chamber, and a process comprising a can roll. It relates to the improvement of the apparatus and the processing method.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones and the like. The flexible wiring board is manufactured from a heat resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat resistant resin film. In recent years, the wiring patterns formed on flexible wiring boards are becoming increasingly finer and higher in density, and it has become even more important that the heat resistant resin film with metal film itself be smooth without wrinkles and the like. There is.

  As a method of producing a heat resistant resin film with a metal film of this type, a method of producing by sticking a metal foil to a heat resistant resin film with an adhesive (referred to as a method of producing a three-layer substrate), heat resistance to metal foil By coating with a reactive resin solution and drying it (called casting method), dry plating method (vacuum film forming method) or combination of dry plating method (vacuum film forming method) and wet plating method A method (referred to as a metallizing method) and the like of forming a metal film on a heat-resistant resin film and manufacturing it is conventionally known. Further, as the above-mentioned dry plating method (vacuum film forming method) in the metallizing method, there are a vacuum evaporation method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  As a metallizing method, Patent Document 1 discloses a method of sputtering chromium on a polyimide insulating layer and sputtering copper to form a conductor layer on the polyimide insulating layer. Further, in Patent Document 2, a first metal thin film formed by sputtering using a copper-nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are sequentially laminated on a polyimide film. Disclosed is a formed flexible circuit board material. When vacuum film formation is performed on a heat resistant resin film such as a polyimide film, it is general to use a sputtering web coater.

  By the way, in the vacuum film-forming method mentioned above, although the sputtering method generally has excellent adhesion, it is said that the heat load given to the heat resistant resin film is large as compared with the vacuum evaporation method. It is also known that wrinkles are easily generated in the film when a large heat load is applied to the heat resistant resin film during film formation. In order to prevent the occurrence of wrinkles, in a sputtering web coater which is a manufacturing apparatus of a heat resistant resin film with a metal film, heat resistance during film formation is achieved by winding the transported heat resistant resin film around a can roll by roll-to-roll. A system in which the resin film is cooled from the back side is employed.

  Patent Document 3 discloses an unwinding and winding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding and winding type vacuum sputtering apparatus is equipped with a cooling roll which plays the role of the above-mentioned can roll, and further, a film is closely attached to the cooling roll by a sub-roll provided at least on the film loading side or unloading side of the cooling roll. Control is being performed.

  However, as described in Non-Patent Document 1, the outer peripheral surface of the can roll is not flat when seen microscopically, and therefore, between the can roll and the heat resistant resin film conveyed in contact with the outer peripheral surface. There is a gap (gap portion) spaced apart through the vacuum space. For this reason, it can not be said that the heat of the heat resistant resin film generated at the time of film-forming such as sputtering is efficiently transferred to the can roll, which causes the generation of wrinkles in the film.

  Therefore, a technique has been proposed in which a gas is introduced from the side of the can roll into the gap portion between the outer peripheral surface of the can roll and the film to increase the thermal conductivity of the gap portion compared to a vacuum.

According to Non-Patent Document 2, when the gas introduced into the gap is argon gas and the gas pressure introduced is 500 Pa, the distance between the outer peripheral surface of the can roll and the gap between the heat resistant resin film is about 40 μm or less The thermal conductance of the gap portion is considered to be 250 (W / m ² · K) in the molecular flow region of

  Then, as a specific method of introducing gas into the gap portion from the can roll side, Patent Document 4 discloses a technique of providing a large number of fine holes serving as a gas discharge port on the outer peripheral surface of the can roll, and There is also known a method in which the can roll itself is formed of a porous body and the fine pores of the porous body itself are used as gas discharge ports.

  In the above method of providing fine holes as gas discharge ports on the outer peripheral surface of the can roll, the area where the film is not wound on the outer peripheral surface of the can roll has lower resistance at the gas discharge port than the area where the film is wound. As a result, most of the gas supplied to the can roll is released from the gas outlet of the unwound area of the film to the vacuum chamber space. As a result, the amount of gas to be originally introduced is not supplied to the gap between the outer peripheral surface of the can roll and the film wound there, and the above-described effect of improving the thermal conductivity can not be obtained. There was a thing.

  In order to solve this problem, a valve is provided at the gas discharge port that protrudes and retracts from the outer peripheral surface of the can roll, and the gas discharge port is opened by pressing the valve against the film surface (see Patent Document 5). The cover is attached to the area where the film is not wound starting from the unloading part where the film is carried out and ending at the carrying part where the film is carried in (that is, the non-contact area where the film is not in contact with the outer peripheral surface of the can roll). There has been proposed a method of preventing gas from being released from the non-contact area into the vacuum chamber space and introducing the gas well into the gap between the outer surface of the can roll and the film surface (see Patent Document 6). .

  However, according to the method of Patent Document 5 in which the valve emerging from the outer peripheral surface of the can roll is pressed against the film surface to open the gas discharge port, there is a risk of causing slight scratches or dents on the film surface due to valve contact. It has been difficult to adopt it in the manufacture of flexible wiring boards for electronic devices that are required to be used. Further, according to the method of Patent Document 6 in which the cover is attached to the non-contact area where the film does not contact in the outer peripheral surface of the can roll, gas is generated from the gap between the cover and the outer peripheral surface of the can roll It was easy to leak and it was difficult to adopt as in the method of Patent Document 5.

  Therefore, in order to cope with this problem, Patent Document 7 does not supply gas to the outer peripheral surface of the can roll where the film is not wound (that is, the outer peripheral surface of the can roll outside the angle range where the film contacts the outer peripheral surface of the can roll). The can roll structure which prevented the gas discharge from the said non-contact area | region is disclosed by providing the gas introduction mechanism (gas supply control means).

  On the other hand, with regard to the cause of wrinkles in the film, wrinkles also occur at the center of the film even when tension is applied to the film in the length direction, in addition to the cause due to the above-mentioned flat state of the canroll outer peripheral surface. . That is, as shown in FIG. 5A, when no tension is applied to the film in the length direction (tension release state), the film has no slack and is flat. When tension is applied in the length direction (tension applied state), the entire film is stretched as shown in FIGS. 5 (B) to (C), and wrinkles are generated at the center of the film. Become.

  For this reason, when tension (conveyance tension) is applied to the film in the length direction, as shown in FIG. 6, "trough wrinkles" are generated between the rolls, and in this state, the outer peripheral surface of the can roll When the film is wound, the tension at the center of the film is lower than at both ends, and the drag at the center of the film (= film tension / canroll radius) decreases. When gas is introduced into the gap between the central portion of the film and the outer peripheral surface of the can roll, the drag of the central portion of the film decreases, and the distance between the central portion of the film and the outer peripheral surface of the can roll increases, thus causing the molecular flow described above. The thermal conductivity is lowered by exceeding the distance between gaps in the region, and the gas is easily released from the gap to further reduce the thermal conductivity, and as shown in FIG. did.

  Under such technical background, Patent Document 8 improves the can roll described in Patent Document 7 provided with the above-mentioned gas introduction mechanism (gas supply control means), and the outer peripheral surface of the roll has a crown shape (roll Discloses a can roll in which the outer diameter of the film is processed to be the longest at the central portion in the rotational axis direction and gradually shortened from the central portion toward both ends) so that no wrinkles are generated at the central portion of the film.

  The can roll having a crown shape (the shape in which the outer diameter of the roll is the longest at the central portion in the rotational axis direction and gradually shortens from the central portion toward both ends) is the gripping force of the heat resistant resin film and the roll in vacuum. When the film transport speed is slow, the film has an effect of stretching the film in the width direction of the film, so that the distance between the central portion of the film and the outer peripheral surface of the can roll is difficult to expand. The film is uniformly controlled in the entire gap between the outer peripheral surface of the can roll and the heat resistant resin film under substantially constant control, the temperature of the heat resistant resin film is uniformly maintained, and the film is generated on the heat resistant resin film etc. Was supposed to be prevented.

Unexamined-Japanese-Patent No. 02-098994 Japanese Patent Application Publication No. 06-097616 JP-A-62-247073 WO 2005/001157 pamphlet U.S. Pat. No. 3,414,048 WO 2002/070778 pamphlet JP 2012-132081 A JP 2012-144798 A Japanese Patent Application Laid-Open No. 06-017250

“Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data”, 2000 Society of Vacuum Coaters, 43rd Annual Technical Conference Proceeding, Denver, April 15-20, 2000, p. 335 “Improvement of Web Condition by the Deposition Drum Design”, 2000 Society of Vacuum Coaters, 50th Annual Technical Conference Proceeding (2007), p. 749 “The Mechanics of Web Handling”, David R. Roisum, Ph. D, TAPPI PRESS, (1998) p. 83-84

  By the way, the stretching action on the above-mentioned film in the crown type can roll is surely effective when the grip of the heat resistant resin film and the roll is strong and the transport speed of the film is slow in vacuum.

  However, in a crown type can roll in which a gas is introduced into the gap between the outer peripheral surface of the can roll and the heat resistant resin film, the atmosphere around the heat resistant resin film and the can roll is necessarily vacuum due to the introduced gas. If the film transport speed is increased to increase the film forming efficiency such as sputtering, the above-mentioned stretching action of the crown can roll on the film is not always sufficient.

  The present invention has been made focusing on such problems, and the object of the present invention is to provide a can roll capable of sufficiently preventing the occurrence of film wrinkles even when the film transport speed is increased. It is providing a processing apparatus and a processing method provided with the can roll.

  In order to solve this problem, the inventor of the present invention has a reverse crown shape that effectively exerts a stretching action on the film when the grip between the heat resistant resin film and the roll is weak and the film transport speed is high in the atmosphere. An attempt was made to apply a can roll whose outer diameter is the shortest at the central portion in the rotational axis direction and gradually increases from the central portion toward both ends.

  That is, as shown in FIG. 1, when the reverse crown-shaped canroll described in Patent Document 9 and Non-Patent Document 3 is applied in place of the crown-shaped can roll exhibiting the stretching action in vacuum. The speed of the heat resistant resin film 2 becomes high (fast) at the end of the long (large) outer diameter of the can roll 1 so that the heat resistant resin film 2 is stretched to both ends of the can roll 1 and the heat resistant resin film is stretched. Since the drag force in the above-mentioned gap part of 2 and the can roll 1 can be controlled substantially constant and the gas pressure between the gap parts can also be controlled substantially constant, the effect that uniform thermal conductance can be uniformed over the entire gap part is predicted It is from.

  Therefore, when a reverse crown type can roll is applied instead of the crown type can roll and its effect is examined, generation of film wrinkles can be more reliably prevented compared to the case where a crown type can roll is applied. It came to be confirmed. The present invention has been completed by such technical analysis and technical discovery.

That is, the first invention according to the present invention is
A can roll comprising a refrigerant circulation path through which a refrigerant circulates, and winding and cooling an elongated body conveyed by roll-to-roll in a vacuum chamber around an outer peripheral surface,
The roll has a plurality of gas introduction paths which are substantially equally spaced along the circumferential direction of the roll and disposed along the rotational axis direction over the entire circumference, each of the gas introduction paths being in the rotational axis direction of the roll Inverse crown shape having a plurality of gas discharge holes that open to the outer peripheral surface side at substantially uniform intervals along the roll, and the outer diameter of the roll is shortest at the central portion in the rotation axis direction and gradually increases from the central portion to both ends And the difference Y between the outer diameter of the central portion and the outer diameter of the both ends is in the range represented by Expression 1 with respect to the distance X mm between the central portion and the both ends. ,
0.05 × X / 375 ≦ Y ≦ 1.0 × X / 375 (Expression 1)
The second invention is
In the can roll according to the first invention,
The gas supply side of the gas introduction passage is characterized by including gas supply control means for interrupting the gas supply to the gas introduction passage located outside the angle range where the elongated body contacts the outer peripheral surface of the can roll. age,
The third invention is
In the can roll according to the first invention or the second invention,
The outer circumferential surface of the above-mentioned inverse crown shape is characterized in that the outer diameter changes with a substantially uniform curvature.

Next, a fourth invention according to the present invention is
A vacuum chamber, a transport mechanism for transporting the long body by roll-to-roll in the vacuum chamber, a can roll for winding and cooling the long body around the outer peripheral surface, and a long body wound around the outer peripheral surface of the can roll A processing apparatus for processing an elongated body comprising processing means for performing a process of applying a heat load to the
The above-mentioned can roll is constituted by the can roll according to any one of the first to third inventions,
The fifth invention is
In the processing apparatus for an elongated object according to the fourth invention,
It is characterized in that the heat load is applied to at least one of plasma treatment, ion beam treatment and vacuum film formation treatment.

In addition, the sixth invention according to the present invention is
In a method of processing an elongated body, the elongated body conveyed by roll-to-roll in the vacuum chamber is wound around the outer peripheral surface of the can roll, and the elongated body wound around the can roll is subjected to a process of applying a heat load.
The above-mentioned can roll is constituted by the can roll according to any one of the first to third inventions,
The seventh invention is
In the method of processing an elongated body according to the sixth invention,
It is characterized in that the heat load is applied to at least one of plasma treatment, ion beam treatment and vacuum film formation treatment.

  According to the present invention, since the gas can be introduced between the outer peripheral surface of the can roll and the long body such as the heat resistant resin film and the gap between the both can be maintained substantially constant, the outer peripheral surface of the can roll and the long side The thermal conductance becomes uniform over the entire gap with the body, and the temperature of the long body of the heat resistant resin film and the like can be uniformly maintained when the heat load is applied, and the occurrence of film wrinkles can be prevented. .

  Therefore, when the metal film is formed by sputtering or the like by using the can roll, the processing apparatus and the processing method of the long body according to the present invention, the heat applied to the long body is efficiently conducted to the can roll. Therefore, a high-quality heat-resistant resin film with a metal film free from film defects can be produced with high yield, and can be applied to flexible wiring substrates for liquid crystal televisions, mobile phones, and the like.

Explanatory drawing which shows the extending | stretching effect | action with respect to the elongate body (heat resistant resin film) of the can roll which concerns on this invention. BRIEF DESCRIPTION OF THE DRAWINGS Schematic structure sectional drawing of the can roll which concerns on this invention. The schematic disassembled perspective view of the rotary joint which the can roll concerning this invention comprises. Explanatory drawing which shows schematic structure of the vacuum film-forming apparatus (process apparatus) of the elongate body which concerns on this invention. FIG. 5 (A) is a plan view showing the surface of an elongated body (heat-resistant resin film) in the case where tension is not applied in the length direction (tension release state), FIG. 5 (B) 5C is a plan view showing the “film film” of the elongated body produced when tension is applied to the elongated body in the longitudinal direction (tension applied state), and FIG. AA 'plane sectional view of). Explanatory drawing which shows the bad effect which a wrinkles generate | occur | produces in a film center part, when the can roll concerning a prior art example is applied.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

(1) Long body processing equipment (sputtering web coater)
First, a vacuum deposition apparatus for a long body, which is an example of a processing apparatus, will be described.

  In addition, the case where a long heat-resistant resin film is used for an elongate body as an example is demonstrated.

  In addition, sputtering processing will be described as an example of processing to which a thermal load is applied to a long body.

  The vacuum film forming apparatus (processing apparatus) for a long body shown in FIG. 4 is an apparatus called a sputtering web coater, and is a long heat-resistant resin film (hereinafter referred to as a long resin film) conveyed by roll-to-roll. 2.) It is used when carrying out the film-forming process continuously and efficiently on the surface.

  Specifically, the film forming apparatus (sputtering web coater) 50 for the long resin film conveyed by roll-to-roll is a motor for the long resin film F unwound from the unwinding roll 52 in the vacuum chamber 51. After performing predetermined film formation processing while winding around and conveying the can roll 56, the winding roll 64 winds up. The can roll 56 disposed in the middle of the conveyance path from the unwinding roll 52 to the winding roll 64 is rotationally driven by a motor, and the temperature-controlled refrigerant circulates inside the can roll 56.

In the film formation apparatus 50, the pressure in the vacuum chamber 51 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa in the sputtering film formation, and then, the pressure adjustment of about 0.1 to 10 Pa is performed by the introduction of the sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added according to the purpose. The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the vacuum chamber 51, the vacuum chamber 51 is equipped with various devices such as a dry pump, a turbo molecular pump, and a cryo coil which are not shown.

  In the conveyance path from the unwinding roll 52 to the can roll 56, a free roll 53 for guiding the long resin film F and a tension sensor roll 54 for measuring the tension of the long resin film F are disposed. Further, the long resin film F fed from the tension sensor roll 54 and directed to the can roll 56 is subjected to tension adjustment of the can roll 56 by the motor driven feed roll 55 provided in the vicinity of the can roll 56. The long resin film F can be in close contact with the outer peripheral surface of the can roll 56 and can be conveyed.

  Similarly to the above, the motor-driven feed roll 61 for adjusting the circumferential speed of the can roll 56 and the tension sensor roll 62 for measuring the tension of the long resin film F also in the conveyance path from the can roll 56 to the winding roll 64. And the free roll 63 which guides the long resin film F is arrange | positioned in this order.

  In the unwinding roll 52 and the winding roll 64, the tension balance of the long resin film F is maintained by torque control using a powder clutch or the like. In addition, the long resin film F is unwound from the unwinding roll 52 by the rotation of the can roll 56 and the motor-driven feed rolls 55 and 61 that rotates in conjunction with the rotation of the can roll 56 so as to be wound around the winding roll 64. It has become.

  In the vicinity of the can roll 56, a transport path along which the long resin film F is wound on the outer peripheral surface of the can roll 56 (that is, the long resin film F among the outer peripheral surfaces of the angle range A in FIG. Magnetron sputtering cathodes 57, 58, 59, 60 as film forming means are provided at positions facing the contacting region).

  In the case of sputtering deposition of a metal film, a plate-like target can be used as shown in FIG. 4, but when a plate-like target is used, nodules (growth of foreign matter) occur on the target There is. If this is a problem, it is preferable to use a cylindrical rotary target which has no generation of nodules and high target usage efficiency.

  Further, since the film forming apparatus 50 of the long resin film F in FIG. 4 assumes sputtering processing as processing to which heat load is applied, the magnetron sputtering cathodes 57, 58, 59, 60 are illustrated, When the process to which the heat load is applied is another process such as a deposition process, other vacuum film forming means may be provided instead of the plate-like target. In addition, CVD (chemical vapor deposition), a vacuum evaporation etc. can be used as another vacuum film-forming process which the thermal load applies.

(2) Reverse crown type can roll having a gas discharge mechanism The can roll according to the present invention used in a processing apparatus for a long resin film such as the above-mentioned film forming apparatus is, as shown in FIG. A plurality of gas introduction paths 113 are provided along the direction of the rotating shafts 112 and 117 at substantially equal intervals and along the entire circumference, and each of the gas introduction paths 113 is a rotating shaft 112 of the can roll. , 117, and has a plurality of gas discharge holes 114 opened at the outer peripheral surface side at substantially equal intervals.

  Furthermore, in the can roll according to the present invention, the shape of the can roll outer peripheral surface 118 is a reverse crown shape. That is, the outer diameter of the can roll is shortest (thin) at the central portion in the direction of the rotation shafts 112 and 117, and gradually increases (thickens) from the central portion to both ends. Such a reverse crown-shaped can roll can be produced by known cutting and polishing. Moreover, the processing which makes a can roll into a reverse crown type shape can be suitably selected also before drilling of a gas discharge hole, and after drilling.

  The reverse crown-shaped can roll outer peripheral surface 118 serves as a transport path on which the long resin film F is wound. On the inner surface side of the outer peripheral surface 118, a cooling circulation portion 110 through which a refrigerant such as cooling water flows is formed. The refrigerant can be circulated between a refrigerant cooling device (not shown) provided outside the apparatus and the cooling water circulation unit 110, which enables temperature control of the can roll. Such a structure is referred to as a jacket roll structure. Further, the rotating shaft 112 of the can roll has a double cooling piping structure of the cooling and circulating unit 110, and the inner piping thereof is the introduction pipe of the refrigerant and the outer piping thereof is the discharge pipe, and the refrigerant such as cooling water circulates. ing.

  Further, on the can roll outer peripheral surface 118 of the reverse crown shape, a plurality of gas introduction paths 113 are provided along the direction of the rotary shafts 112 and 117 over the entire circumference with a substantially equal interval along the circumferential direction of the roll. It is arranged. In these gas introduction paths 113, a plurality of gas discharge holes 114 opened on the side of the outer peripheral surface 118 having a reverse crown shape are formed at substantially equal intervals along the rotational axes 112 and 117 of the can roll, respectively. ing. Gas can be introduced into the gap (gap) between the long resin film F wound around the outer peripheral surface 118 of the can roll by the gas introduction passage 113 and the gas release hole 114.

  The number of the gas introduction paths 113 and the number of the gas discharge holes 114 included in each of the gas introduction paths 113 are the area of the area around which the long resin film F is wound in the outer peripheral surface 118 of the can roll. It can be appropriately determined according to the tension, the amount of gas released, and the like. The diameter of each of the gas release holes 114 is not particularly limited as long as the gas can be favorably introduced into the gap (gap) formed between the can roll outer peripheral surface 118 and the long resin film F. However, if the diameter of the gas discharge holes 114 exceeds 1000 μm, the cooling efficiency in the vicinity will be reduced, so a diameter of about 30 to 1000 μm is generally preferable.

  Further, with respect to the plurality of gas discharge holes 114 provided in each gas introduction path 113 so as to open on the side of the reverse crown-shaped can roll outer peripheral surface 118, the gas discharge holes 114 having small diameters are arranged at narrow pitches. This is preferable in that the heat conductivity can be made uniform over the entire surface of the can roll outer peripheral surface 118. However, since processing techniques for providing many small diameter gas discharge holes 114 at a narrow pitch are difficult, it is more practical to arrange the gas discharge holes 12 with a diameter of about 150 to 500 μm at a pitch of 5 to 10 mm. preferable.

  By the way, about the reverse crown shape of the can roll outer peripheral surface, if the central part becomes thinner than both ends of the roll (the difference between the central part and the end part of the roll outer diameter becomes too large) Unreasonable force acts on the end to cause scratches, or causes film running to meander. On the contrary, when the thickness of both ends and the center of the roll is too close (the difference between the center and the end of the roll outer diameter becomes too small), it becomes close to the outer peripheral surface shape of the conventional cylindrical can roll. Therefore, the effects of the present invention can hardly be obtained.

Therefore, in the reverse crown type can roll according to the present invention, the difference Y between the outer diameter of the central portion of the can roll and the outer diameter of the both ends It is necessary to be in the range shown by.
0.05 × X / 375 ≦ Y ≦ 1.0 × X / 375 (Expression 1)

  For example, if the length from one end of the can roll to the other end, that is, the length in the rotational axis direction is 750 mm, the distance from the center to each end is 375 mm. Thus, the difference Y between the outer diameters of the can roll end portion and the central portion is in the range of 0.05 to 1 mm.

  If the curvature is such that the central portion is thinner than both ends due to the difference in outer diameter Y, the gap distance between the long resin film and the outer peripheral surface of the can roll becomes substantially uniform.

  In addition, it is not easy to manufacture a reverse crown-type can roll in order to verify the stretching effect of the reverse crown-type can roll on a film. Therefore, a heat resistant resin film, metal foil or the like can be wound or stuck on the surface of the can roll with which the end of the film is in contact, and it is generally called "tape color roll".

  In FIG. 2, reference numeral 111 and reference numeral 116 denote bearings, reference numeral 120 denotes an inner cylindrical portion, reference numeral 121 denotes a gas introducing groove, and reference numeral 123 denotes a side plate.

(3) Gas Supply Control Means The gas supplied to the plurality of gas introduction paths 113 is supplied from the gas supply source (not shown) to the respective gas introduction paths 113 through the plurality of gas distribution pipes 122 through pipes and the like.

  An angle range other than the angle range A (see FIG. 4) in which the long resin film F contacts the outer peripheral surface of the rotating can roll 56 (see FIG. 4) on the gas supply side of each gas introduction passage 113 It is preferable to provide a gas supply control means for interrupting the supply of gas to the gas introduction passage 113 located inside B (see FIG. 4).

  As a gas supply control means for interrupting the gas supply to the gas introduction path 113 in such an angle range B, in addition to means for mechanically closing the gas introduction path 113 such as a baffle plate, electrical or electromagnetic. In addition, there are means etc. for closing the gas introduction path 113 with a valve or the like.

  A gas rotary joint 115 shown in FIGS. 2 to 3 will be described as a preferable gas supply control means. The gas rotary joint 115 is composed of a fixed ring unit 115a on the gas introduction side and a rotating ring unit 115b on the gas discharge side, and is held with the can roll rotation shaft 117 inserted in its central opening. Specifically, the fixed ring unit 115a is fixed to the bottom of the vacuum chamber or the like, and the rotating ring unit 115b is fixed to the side surface of the can roll so as to rotate with the can roll.

  As described above, the fixed ring unit 115a and the rotating ring unit 115b are disposed to face each other, and are configured to slide in contact with each other. Therefore, in order to prevent the leak of the gas from the gas rotary joint 115, it is preferable to dispose a known gas sealing means on the sliding interface between the fixed ring unit 115a and the rotating ring unit 115b.

  The fixed ring unit 115 a on the gas introduction side includes a gas introduction port 119 of the gas sent from the gas supply source, and a gas distribution groove 124 connected to the gas introduction port 119. The gas distribution groove 124 is not ring-shaped, and has a substantially C-like shape with an upper portion lacking as shown in FIG. In addition, Teflon (registered trademark) packing is used in the film non-wrap portion (corresponding to the angular range B in FIG. 4) of the gas distribution groove 124 on the fixed ring unit 115a side so as not to flow the stabilized gas of gas pressure control. It has inserted.

  On the other hand, the rotary ring unit 115b is provided with a plurality of gas distribution pipes 122 radially extending, and the end portion on the gas introduction side of each gas distribution pipe 122 is of the fixed ring unit 115a with the rotation of the can roll outer peripheral surface 118. The gas distribution groove 124 is opened, and the other end on the gas discharge side is in communication with a plurality of gas introduction paths 113 provided in the can roll.

  The gas rotary joint is not limited to the structure in which the fixed ring unit 115a and the rotating ring unit 115b slide in opposition to each other. For example, a rotating ring unit may be provided on the outer periphery of the fixed ring unit. Moreover, when the number of gas introduction paths is very large and it is difficult to connect to the gas rotary joint through the gas distribution pipes, several adjacent gas introduction paths are put together, and then several gasses are put together. The gas distribution pipes connected to the introduction path may be connected to the gas rotary joints, respectively. In addition, it is desirable to mount the gas rotary joint not only on one side but also on both sides.

(4) Operation of Reverse Crown Type Can Roll Having Gas Release Mechanism The can roll according to the present invention is most characterized in that the outer peripheral surface has a reverse crown shape. About the widening effect in the width direction of the long object (film) by reverse crown type can roll, it can express with following formula 2 (refer to paragraph 0021 of patent documents 9).
Widening length ΔX = (πθ / 180) × [√ (σ ² +2 rσ)] (Expression 2)

  Is the film wrap angle (corresponding to the angular range A in FIG. 4), and .sigma. Is the difference between the radius of the center of the inverse crown can roll and the radius of the inverse crown can roll at the position where the film end contacts. , R is the radius at the center of the inverted crown-type can roll.

  Assuming that θ is 270 °, σ is (800.05 mm-800 mm = 0.05 mm) = 50 μm, and r is 400 mm, the calculated value of the widening length ΔX is 30 mm.

  However, since the film is not in intimate contact with the outer peripheral surface of the can roll, in fact, one side of the film is not 30 mm wide.

  By the way, as described above, when tension is applied to the film in the length direction, "trough wrinkles" are generated between the rolls as shown in FIG. When the film is wound, the tension at the center of the film is lower than at both ends, and the drag at the center of the film (= film tension / canroll radius) decreases. When gas is introduced into the gap between the central portion of the film and the outer peripheral surface of the can roll, the drag of the central portion of the film decreases, and the distance between the central portion of the film and the outer peripheral surface of the can roll increases, thus causing the molecular flow described above. The thermal conductivity is lowered by exceeding the gap distance of the region, and the gas is easily released from the gap portion to further reduce the thermal conductivity, and as shown in FIG. Were present.

On the other hand, when a reverse crown-shaped can roll is employed as shown in FIGS. 1 and 2, the tension in the width direction of the film at the film center does not become lower than that at both ends, and the resistance at the film center (= film tension / Canroll radius does not decrease. For this reason, when gas is introduced from the gas release holes into the gap between the outer peripheral surface of the can roll and the film, the distance between the gaps at the central portion in the width direction of the film does not widen and exceeds the distance between the gaps in the molecular flow region described above. As a result, the heat transfer efficiency does not decrease, and furthermore, the pressure between the gaps does not decrease because the gas hardly escapes from the gap. Therefore, the heat transfer efficiency does not decrease further,
The generation of film wrinkles due to the thermal load of sputtering is to be prevented.

  Furthermore, according to the can roll having the gas rotary joint, the can of the film wrap portion area (area corresponding to the angular range A in FIG. 4) where the long resin film contacts the outer peripheral surface of the can roll by the gas rotary joint. Gas is released into the gap (gap portion) formed by the roll outer peripheral surface and the long resin film, and the can roll outer peripheral surface and the long resin film in the film non-lapping portion region (region corresponding to the angle range B in FIG. 4) No gas is released into the gap (gap portion) formed by the Therefore, the drag force can be uniformly controlled over the film width direction by the effect caused by the inverse crown shape, and the outer peripheral surface of the can roll and the long resin film do not cause gas leakage due to the effect caused by the uniform drag force. Since it is possible to release most of the gas introduced into the gap between the two, it is easy to maintain the gap interval substantially constant, and the heat transfer efficiency in the entire gap between the outer peripheral surface of the can roll and the long resin film is made uniform. It is possible to

  The gas released into the gap can be exhausted by a vacuum pump provided in a vacuum film forming apparatus. Therefore, if the gas introduced into the gap portion is the same as the gas of the sputtering atmosphere, the sputtering atmosphere is not contaminated.

(5) Processing apparatus equipped with can roll The can roll according to the present invention can be suitably used for plasma processing and ion beam processing other than the film forming apparatus (sputtering web coater) described above.

  That is, although the plasma treatment and the ion beam treatment are performed under a reduced pressure atmosphere in a vacuum chamber for the purpose of surface modification of the long resin film, the heat load is applied to the long resin film, so that film wrinkles It becomes a cause.

  Therefore, when the can roll according to the present invention is used, the gap distance between the outer surface of the can roll and the resin film can be maintained substantially constant, and the thermal conductance can be easily made uniform. It becomes possible to eliminate the occurrence of wrinkles.

  In addition, with plasma processing, an oxygen plasma or nitrogen plasma is generated by performing discharge in a reduced pressure atmosphere consisting of, for example, a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen by a known plasma processing method. It is a method of processing a size resin film. In the ion beam treatment, a long ion beam is generated by using a known ion beam source to generate a plasma discharge at a magnetic field gap to which a strong magnetic field is applied, and irradiating positive ions in the plasma as an ion beam by electrolysis with an anode. It is a method of processing film.

(6) Long body In addition to the long resin film mentioned above, a long metal foil and a metal strip are contained in object as a long body concerning the present invention.

  Examples of the long resin film include a resin film such as a polyethylene terephthalate (PET) film and a heat resistant resin film such as a polyimide film. By using a heat resistant resin film as the long resin film and forming a metal film by sputtering or the like, a heat resistant resin film with a metal film can be obtained. Specifically, a metal film-attached long heat-resistant resin film without a film wrinkle can be manufactured by a metallizing method using a film forming apparatus (sputtering web coater) of a metal film-attached long heat-resistant resin film.

  Examples of the metal film-attached long heat-resistant resin film include a structure in which a film made of a Ni-based alloy or the like and a Cu film are laminated on the surface of a heat-resistant resin film. The heat-resistant resin film with a metal film having such a structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the above-mentioned Cu film) which is not covered with a resist by etching.

  The film made of the above Ni alloy or the like is called a seed layer, and a Ni-Cr alloy or various known alloys such as inconel, konztan, monel etc. can be used, but the composition is a heat resistant resin film with a metal film. It is selected according to desired properties such as insulation and migration resistance. When it is desired to make the metal film of the long heat resistant resin film with metal film thicker, the metal film may be formed using a wet plating method. The metal film may be formed only by electroplating, or electroless plating may be performed as primary plating, and wet plating such as electrolytic plating may be combined as secondary plating. The wet plating process may employ various conditions of the wet plating method according to a conventional method.

  Moreover, as a heat resistant resin film used for the heat resistant resin film with a metal film, for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, Examples include liquid crystal polymer films. These heat resistant resin films are preferable from the viewpoint of flexibility as a flexible substrate with a metal film, strength required for practical use, and electrical insulation suitable as a wiring material.

  In addition, although the structure which laminated metal films, such as a Ni-Cr alloy and Cu, on the elongate heat resistant resin film was illustrated as said heat resistant resin film with a metal film, the oxide according to the objective besides the said metal film It is also possible to use a film, a nitride film, a carbide film or the like. Also in that case, the can roll, the film forming apparatus and the film forming method according to the present invention can be used for forming an oxide film, a nitride film, a carbide film and the like.

  Examples of the present invention will be specifically described below by way of comparative examples, but the technical matters of the present invention are not limited to the configurations described in the following examples.

  A Ni-Cr film, which is a seed layer, is formed on the long resin film using the film forming apparatus (sputtering web coater) of the long heat resistant resin film with metal film shown in FIG. 4 and a Cu film is formed thereon. The film was formed. As the long resin film, a heat-resistant polyimide film "UPILEX (registered trademark)" manufactured by Ube Industries, Ltd. with a width of 600 mm, a length of 800 m and a thickness of 25 μm was used.

Example 1
As the can roll shown in FIG. 2, a reverse crown type can roll having a height of 0.05 mm (= 50 μm) smaller than that of both ends of the roll central portion is applied, and a Ni-Cr film is formed on the above long resin film. A Cu film was stacked to form a film.

  This can roll is made of stainless steel having a diameter of 800 mm and a width of 750 mm, and hard chrome plating is applied to the outer circumferential surface of the roll main body in the reverse crown shape. 360 gas introduction passages 113 having a diameter of 4 mm were formed on the inner peripheral surface side of the can roll having a jacket roll structure, and 47 gas discharge holes 114 having a diameter of 0.2 mm were provided in each gas introduction passage 113 at 10 mm intervals. However, no gas release holes exist near the both ends 20 mm of the resin film.

  When the long resin film is wound and transported around the can roll of the film forming apparatus, the film non-wrap area (the area corresponding to the angular range B in FIG. 4) where the long resin film does not contact the can roll is about 90 °. There are 90 gas introduction passages 113 present in the film non-wrap area corresponding to this angular range B. Accordingly, the gas distribution groove 124 of the fixed ring unit 115a at the gas rotary joint 115 is a film wrap area of about 270 ° except for about 90 ° of the film non-wrap area (area corresponding to the angular range A in FIG. 4) Only formed on Since it is difficult to directly connect the 360 gas introduction paths 113 to the gas rotary joint 115, after connecting every ten gas introduction pipes 113 to the gas collecting pipe, the 36 gas collecting pipes are connected to the gas rotary It was connected to the fixed ring unit 115 a at the joint 115.

  In order to form a film by laminating a Ni-Cr film and a Cu film as a seed layer on the above heat resistant polyimide film (long resin film), a Ni-Cr target is used as a magnetron sputtering target and Cu is used as a magnetron sputtering target. I used a target.

  Further, argon gas was introduced at 300 sccm, and the power applied to each cathode was 5 kW. Furthermore, the tension of the unwinding roll and the winding roll was controlled to 0 ° C. by water cooling of the parameter [refer to “600 mm width film tension (N)” column in Table 1: 200 N in Example 1].

Then, the heat resistant polyimide film (long resin film) was set on the unwinding roll, and the leading end of the heat resistant polyimide film was attached to the winding roll via the can roll. Further, after evacuating the vacuum chamber to 5 Pa with a plurality of dry pumps, the vacuum chamber was further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

  Next, after setting the transport speed of the heat resistant polyimide film to 3 m / min, introduce argon gas to each magnetron sputtering cathode to apply power, introduce argon gas to the can roll at 1000 sccm, and make the Ni-Cr film And the film formation of Cu film was started on it.

  Then, during the film formation according to the example and after the film formation was completed, the "presence or absence of occurrence of film wrinkle due to heat load" and "presence or absence of film meander or film scratch" were examined. It was not confirmed.

  The results are shown in Table 1 below, and “Canroll central portion diameter (mm)” “Canroll diameter at position where film end contacts” “width effect based on Equation 2” (stretching effect of film Table 1 also shows calculated values (mm) for "widening effect", "600 mm width film tension (N)", "resistance (Pa) obtained from film tension" and "inter-gap pressure (Pa)".

  The "inter-gap pressure (Pa)" was measured by attaching a vacuum gauge to the gas introduction groove in the gas rotary joint.

Example 2
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Example 1 except that the tensions of the unwinding roll and the winding roll, which are the above parameters, were changed from 200N to 300N.
The results are also shown in Table 1 below.

[Example 3]
The sputtering deposition of the Ni-Cr film and the Cu film was carried out in the same manner as in Example 1 except that a reverse crown type can roll having a height of 0.10 mm (= 100 μm) smaller than that of both ends was applied. went.
The results are also shown in Table 1 below.

Example 4
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Example 3 except that the tension of the unwinding roll and the winding roll, which are the above parameters, was changed from 200N to 300N.
The results are also shown in Table 1 below.

[Example 5]
The sputtering deposition of the Ni-Cr film and the Cu film was carried out in the same manner as in Example 1 except that a reverse crown type can roll having a height of 0.20 mm (= 200 μm) smaller than that of both ends was applied. went.
The results are also shown in Table 1 below.

[Example 6]
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Example 5 except that the tensions of the unwinding roll and the winding roll, which are the above parameters, were changed from 200N to 300N.
The results are also shown in Table 1 below.

[Example 7]
The sputtering deposition of the Ni-Cr film and the Cu film was carried out in the same manner as in Example 1 except that a reverse crown-shaped can roll having a height of 0.50 mm (= 500 μm) smaller than that of both ends was applied. went.
The results are also shown in Table 1 below.

[Example 8]
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Example 7 except that the tension of the unwinding roll and the winding roll, which are the above parameters, was changed from 200N to 300N.
The results are also shown in Table 1 below.

[Example 9]
The sputtering deposition of the Ni-Cr film and the Cu film was carried out in the same manner as in Example 1 except that a reverse crown type can roll having a height of the center of the roll of 1.00 mm (= 1000 μm) smaller than both ends was applied. went.
The results are also shown in Table 1 below.

[Example 10]
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Example 9 except that the tensions of the unwinding roll and the winding roll which were the above parameters were changed from 200 N to 300 N.
The results are also shown in Table 1 below.

Comparative Example 1
The sputtering deposition of the Ni—Cr film and the Cu film was performed in the same manner as in Example 1 except that a cylindrical can roll having the same height at the center of the roll and the height at both ends was applied.

Then, during film formation and after film formation was completed, the "presence or absence of film wrinkling caused by heat load" was examined, and the result of "Yes" was also examined "the presence or absence of film meander or film scratch". The results of "none" were confirmed.
The results are also shown in Table 1 below.

Comparative Example 2
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Comparative Example 1 except that the tensions of the unwinding roll and the winding roll, which are the above parameters, were changed from 200N to 300N.
The results are also shown in Table 1 below.

Comparative Example 3
The sputtering deposition of the Ni-Cr film and the Cu film was carried out in the same manner as in Example 1 except that a reverse crown type can roll having a height of 2.00 mm (= 2000 μm) smaller than that of both ends was applied. went.

Then, during film formation and after film formation was completed, the "presence or absence of film wrinkling caused by heat load" was examined, and the result of "none" was also examined "presence or absence of film meander or film scratch". The results of "Yes" were confirmed.
The results are also shown in Table 1 below.

Comparative Example 4
Sputtering film formation of a Ni-Cr film and a Cu film was performed in the same manner as in Comparative Example 3 except that the tensions of the unwinding roll and the winding roll, which are the above parameters, were changed from 200N to 300N.
The results are also shown in Table 1 below.

[Confirmation]
From the results shown in Table 1, when a reverse crown-type can roll having a diameter of about 800 mm is applied, the diameter difference between the roll center and the roll end at the position where the film end contacts (that is, the can roll diameter It was confirmed that the difference needs to be set in the range of 0.05 mm (= 50 μm) to 1.00 mm (= 1000 μm).

  And, by applying the reverse crown type can roll according to the embodiment having the gas release mechanism, it is confirmed that generation of film wrinkles due to heat load can be prevented and meandering of film or scratch of film can be avoided. The

  When the reverse crown-type can roll according to the present invention having a gas release mechanism is applied, generation of film wrinkles due to thermal load such as sputtering film formation can be prevented, so that flexible wiring substrates for liquid crystal televisions, mobile phones, etc. It has industrial applicability applied as a manufacturing apparatus and manufacturing method of the copper-clad laminated resin film (heat-resistant resin film with a metal film) to be used.

1 Can roll 2 Heat resistant resin film F Long heat resistant resin film (long resin film)
50 Deposition equipment (sputtering web coater)
Reference Signs List 51 vacuum chamber 52 unwinding roll 53 free roll 54 feed roll 55 tension sensor roll 56 can roll 57 magnetron sputtering cathode 58 magnetron sputtering cathode 59 magnetron sputtering cathode 60 magnetron sputtering cathode 61 feed roll 62 tension sensor roll 63 free roll 64 winding roll DESCRIPTION OF SYMBOLS 110 Cooling circulation part 111 Bearing 112 Rotor shaft 113 Gas introduction path 114 Gas discharge hole 115 Gas rotary joint 115a Fixing ring unit 115b Rotor ring unit 116 Bearing 117 Rotor shaft 118 Outer peripheral surface 119 Gas introduction port 120 Inner cylinder part 121 Gas introduction groove 122 Gas distribution pipe 123 Side plate 124 Gas distribution groove

Claims (7)

A can roll comprising a refrigerant circulation path through which a refrigerant circulates, and winding and cooling an elongated body conveyed by roll-to-roll in a vacuum chamber around an outer peripheral surface,
The roll has a plurality of gas introduction paths which are substantially equally spaced along the circumferential direction of the roll and disposed along the rotational axis direction over the entire circumference, each of the gas introduction paths being in the rotational axis direction of the roll Inverse crown shape having a plurality of gas discharge holes that open to the outer peripheral surface side at substantially uniform intervals along the roll, and the outer diameter of the roll is shortest at the central portion in the rotation axis direction and gradually increases from the central portion to both ends And the difference Y between the outer diameter of the central portion and the outer diameter of the both ends is in the range represented by Expression 1 with respect to the distance X mm between the central portion and the both ends. Can roll.
0.05 × X / 375 ≦ Y ≦ 1.0 × X / 375 (Expression 1)   The gas supply side of the gas introduction passage is characterized by including gas supply control means for interrupting the gas supply to the gas introduction passage located outside the angle range where the elongated body contacts the outer peripheral surface of the can roll. The can roll according to claim 1.   The can roll according to claim 1 or 2, wherein the outer peripheral surface of said reverse crown shape changes in the outer diameter with a substantially uniform curvature. A vacuum chamber, a transport mechanism for transporting the long body by roll-to-roll in the vacuum chamber, a can roll for winding and cooling the long body around the outer peripheral surface, and a long body wound around the outer peripheral surface of the can roll A processing apparatus for processing an elongated body comprising processing means for performing a process of applying a heat load to the
The said can roll is comprised by the can roll in any one of Claims 1-3, The processing apparatus of the elongate body characterized by the above-mentioned.   5. The apparatus for processing a long body according to claim 4, wherein the processing to which a heat load is applied is at least one of plasma processing, ion beam processing and vacuum film formation processing. In a method of processing an elongated body, the elongated body conveyed by roll-to-roll in the vacuum chamber is wound around the outer peripheral surface of the can roll, and the elongated body wound around the can roll is subjected to a process of applying a heat load.
The method for processing an elongated body, wherein the can roll is constituted by the can roll according to any one of claims 1 to 3.   The method according to claim 6, wherein the heat load is applied to at least one of plasma treatment, ion beam treatment, and vacuum film formation treatment.