JPS63214918A - Film running device in thin film forming device or the like - Google Patents

Abstract

PURPOSE:To make the rotating speed of a main and a sub rollers dissident in unit of a micron and to form a thin film without making rumples and scratches, etc., over most part of a high molecular film by constituting in order to make only roller faces near both end parts of a nip roller abut on the high molecular film. CONSTITUTION:As for the nip roller 2a made of metal such as a stainless steel or an aluminium, etc., which is flexible to race, only peripheral surfaces near both end parts in an axial direction are left as the roller faces 4 and most part of diameter near central part is made thinner than the roller faces 4 so as to leave only the axis. Therefore, the roller faces 4 abut on only western vicinity of the high molecular film 3 in the axial direction so as to hold the high molecular film 3 between a can 1 and the rollers 4 and securely and stably makes it continuously run. Thus, the occurrence of troubles such as scratch, etc., can be limited only abutting surfaces near both sides. Then, if the vicinity near both sides of the high molecular film 3 is cut down, remaining most part becomes a complete production.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is applied to a film running device in a thin film forming apparatus, etc. that continuously forms a magnetic thin film, etc. on the surface of a polymer film, etc. in the manufacturing process of magnetic tape, etc. It is something to do.

[Conventional technology]

When forming a magnetic film for magnetic recording or a non-magnetic film for packaging or the like on the surface of a polymer film or the like, means such as vacuum deposition or sputtering are often used.

In this means, when the polymer film or the like is a long roll and a thin film is continuously formed on it,
A film running device is required to run the polymer film etc. continuously and stably.

Conventionally, there have been devices of this type as shown in FIGS. 4 and 5. In the first conventional example shown in FIG. 4, numeral 1 is a can made of a metallic cylinder, and a cylinder made of a rubber material is wrapped so that a polymer film 3 is wrapped around the can 1 over half the circumference. The portion of the polymer film 3 from the start to the end of winding around the can L is brought into contact with the circumferential surface of the can L by the nip roller 2 which is driven by the nip roller 2, and the film is rolled without slipping against the circumferential surface of the can L. Enables running. 5 is a vapor deposition crucible when this apparatus is a vacuum evaporation apparatus, and is a sputter target when this apparatus is a sputtering apparatus.

Also, the 58th! In the second conventional example shown in I, an intermediate roller 6 is used in place of the nip roller 2.

The difference from the first conventional example is that the intermediate roller 6 described above is
is away from the can 1, so heat is not directly conducted from the can 1. Therefore, even if the can 1 is heated to a high temperature, the temperature of the intermediate roller 6 does not rise significantly. The rotational speed and direction of the intermediate roller 6 and the intermediate roller 6 are regulated by gears (not shown) so that their circumferential speeds and the moving directions of the abutting rollers are the same, and a motor (not shown) drives them. Can 1 mentioned above. The polymer film 3, which is wrapped around the vehicle, is made to run at a predetermined speed without slipping. However, for reasons described later, the winding circumferential speed of the can 1 and the feeding circumferential speed of the intermediate roller 6 do not precisely match.

[Problem that the invention seeks to solve]

Since the nip roller 2 of the film traveling device in a conventional thin film forming apparatus is made of a rubber material, it is necessary to limit the upper limit of the operating temperature of the nip roller 2 to a low value due to the properties of the rubber material. . However, Co-C
In perpendicular magnetic recording media such as R, it is necessary to heat the can 1 to a temperature of 100''C or more when forming a thin film.

Furthermore, even if the film is non-magnetic, the Co
- Similarly to Cr, it is also necessary to increase the temperature of the can 1.

If the upper limit of the operating temperature of the nip roller 2 made of the rubber material is ignored and the nip roller 2 is heated to 100 IC or more, the nip roller 2 will not only be deformed but also generate a special gas, which will deteriorate the characteristics of the magnetic film.

In addition, in order to increase the upper limit of the operating temperature of the nip roller 2,
When the nip roller 2 is made of a metal material with high heat resistance, the metal material has poor elasticity compared to the above-mentioned rubber-based material, so a polymer film 3 is placed between it and the metal can l. Elastic adhesion cannot be obtained when they come into contact with each other, and therefore stable and continuous film running with high precision cannot be expected.In addition, the nip roller 2 and the can 1 made of metal materials have slight dimensional errors and surface defects. The influence of poor finishing cannot be absorbed, and the can 1, the nip roller 2, and the polymer film 3 damage each other due to these irregularities.

As described above, although the nip roller 2 is required to have both elasticity and heat resistance, it has the disadvantage that it is difficult to select a material that can satisfy these requirements.

Further, the diameter DI of the above-mentioned can L is about 50 cm, and the diameter D2 of the intermediate roller 6 is about 10 cm. and the diameter DI described above,
In order to completely match the diameter ratio of D2, the DI,
It is impossible to precisely finish D2 to the micron level and maintain it because of the polishing of the peripheral surfaces of the can 1 and the intermediate roller 6, thermal expansion, etc. Therefore, in the device of the second conventional example, there is a slight difference in the film feeding speed between the above-mentioned can 1 and the intermediate roller 6, and furthermore, this speed difference is caused by the state of the circumferential surfaces of the above-mentioned can 1 and the intermediate roller 6. It can always vary slightly depending on the situation. Therefore, the polymer film 3 and the film-forming surface constantly undergo slight expansion and contraction as the film runs, thereby generating wrinkles. Especially the above polymer film 3
When a magnetic film is formed on both sides of the magnetic film, the wrinkles become noticeable.

As described above, the above-mentioned can 1 and intermediate roller 6 have the disadvantage that high-precision finishing is required in terms of diameter dimension, circumferential surface polishing, and the like.

The present invention has been made to eliminate the above-mentioned drawbacks, and by configuring the nip roller 2 so that only the roller surfaces near both ends thereof come into contact with the polymer film 3,
It is an object of the present invention to provide a film running device in a thin film forming apparatus or the like, which allows the use of a metal material with high heat resistance as the material for the nip roller 2.

[Means for solving problems]

In order to solve the above problems, the present invention has made the diameter of the secondary cola made of a heat-resistant material such as metal thinner in areas other than the vicinity of both # parts in the axial direction, and the roller surface formed only in the vicinity of both ends allows the polymer film to be The main row 8 is connected to the main row 8, and the film is run.

[Effect]

In a device in which a polymer film or the like is sandwiched between a rotating main roller and a sub-roller to run the film, when both of the rollers described above are made of a material such as a metal that has low elasticity and high rigidity, the polymer film described above Although scratches and the like occur in the portions of the film etc. that are in contact with the roller surface of the auxiliary roller, scratches and the like do not occur in the portions that are not in contact with the auxiliary roller.

〔Example〕

1 to 3 are views showing embodiments of the present invention, in which FIG. 1 is a perspective view of the first embodiment, FIG. 2 is a plan view of main parts of the second embodiment, and FIG. 3 is a perspective view of the first embodiment. FIG. 2 is a plan view of main parts of a third embodiment.

Components having the same effect are given the same reference numerals throughout each figure.

In FIG. 1, reference numeral 28 denotes a freely rotatable nip roller made of metal such as stainless steel or aluminum, and the nip roller 2a leaves only the peripheral surface near both ends in the axial direction as the roller surface 4, and most of the peripheral surface near the center. The diameter is made smaller than the roller surface 4, leaving only the shaft. For this reason, the roller surfaces 4 are brought into pressure contact with only the vicinity of both sides of the polymer film 30 in the width direction, and the polymer film 3 is held between the cans 1, allowing it to run precisely and stably continuously.

FIG. 2 shows a second embodiment, and is a plan view showing a drum-shaped nip roller 2b as an application example of the nip roller 2a. The nip roller 2b is characterized by the shape of the portion other than the roller surface 4b, and may be formed into an appropriate shape depending on the convenience of machine tools such as lathes and polishers.

FIG. 3 is a plan view of a third embodiment, showing a nip roller 2C as an application example of the nip roller 2b.

The nip roller 2C has a roller surface 4c forming a conical surface, and the roller surface 4C has a shape converging at a small angle θ from both extreme ends in the axial direction of the nip roller 2c toward the center. That is, the diameter of the roller 4C is gradually reduced from the extreme ends in the axial direction of the roller 2C toward the center.

Further, the roller surface 4 a + 4 b surface may be a conical surface formed by the minute angle θ (not shown).

Further, the nip rollers 2a, 2b, 2c mentioned above are made of metal such as stainless steel or aluminum.

By coating the roller surfaces 4a, 4b, and 4c of 2c with a heat-resistant polymer film such as polyimide (not shown)
, roller @ 4 a made of the above-mentioned metal.

In addition to preventing damage to the polymer film 3 from each other or from the metal rollers 4b and 4c, the roller surface 4 described above is
The film is made to run precisely and stably while also preventing slippage between a * 4 b + 4 c and the polymer film 3.

As described above, in the present invention, the nip roller 2a
, 2b, 2c, since only the roller surfaces near both ends in the axial direction contact near both sides of the polymer film 30 in the width direction, occurrence of troubles such as the above-mentioned scratches can be limited to only the contact surfaces near both sides. . Therefore, by cutting off the vicinity of both sides of the polymer film 3, most of the remaining part can be made into a complete product.

In addition, among the sub-rollers made of a heat-resistant material such as metal, which is the gist of the present invention, the polymer film, etc. is brought into pressure contact with the main roller only by the roller surfaces near both ends of the sub-roller in the axial direction. All such configurations are included in the present invention. Further, the number of the sub rollers is not limited to two. Furthermore, ceramic may be used as the heat-resistant material for the sub-roller.

〔Effect of the invention〕

The present invention is a film running device for a thin film forming apparatus or the like that applies a magnetic film or the like to a long-wound polymer film or the like by means such as vacuum evaporation or sputtering, and includes a main roller and a sub-roller. In a film running device for a thin film forming apparatus, etc., in which the sub roller is brought into contact with the polymer film, etc., which is passed around the main roller, and the polymer film, etc. is caused to run continuously and stably, the sub roller is The auxiliary roller is made of a heat-resistant material such as metal, and the diameter near the center in the axial direction is smaller than the diameter near both ends in the axial direction, so that the polymer film, etc. Since the rollers are brought into contact near both sides in the axial direction, the peripheral speeds of rotation of the main roller and the sub-roller are not perfectly matched in microns, and wrinkles, scratches, etc. occur over most of the polymer film. It is possible to form a thin film without any process.

[Brief explanation of the drawing]

1 to 3 are diagrams showing embodiments of the present invention, in which FIG. 1 is a perspective view of the first embodiment, FIG. 2 is a plan view of essential parts of the second embodiment, and FIG. 3 is a perspective view of the first embodiment. FIG. 2 is a plan view of main parts of a third embodiment. Figures 4 and 5 are respectively 1. FIG. 3 is a perspective view showing a second conventional example. l: Can 2.2a, 2b, 2c: Nip roller 3: Polymer film 4.4a, 4c: Roller surface 5: Vapor deposition crucible or target 6: Intermediate roller Dl: Diameter of can L D2: Diameter of intermediate roller 6

Claims (2)

[Claims] (1) A film running device in a thin film forming apparatus, etc. that applies a magnetic film, etc. to a long-wound polymer film, etc. by means such as vacuum deposition or sputtering, and is equipped with a main roller and a sub-roller, and is equipped with a main roller and a sub-roller. In a film running device for a thin film forming apparatus, etc., in which the sub-roller is brought into contact with the polymer film, etc. that is passed around a roller, and the polymer film, etc. is made to run continuously and stably, the sub-roller is made of metal, etc. The sub roller is made of a heat-resistant material, and the diameter near the axial center of the sub roller is smaller than the diameter near both ends in the axial direction, so that only the roller surface near both ends can move the polymer film, etc. in the axial direction. 1. A film running device for a thin film forming apparatus, etc., characterized in that the film is brought into contact with the vicinity of both sides of the film. (2) A film running device in a thin film forming apparatus or the like according to claim 1, characterized in that a heat-resistant polymer film is formed on the roller surface of the auxiliary roller.