JP5310486B2 - Method for forming long heat-resistant resin film and apparatus for producing heat-resistant resin film with metal film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing heat-resistant resin film with metal film and the like which can reduce the occurrence of wrinkles due to elongation in a film width direction. <P>SOLUTION: The apparatus for producing heat-resistant resin film with metal film is provided with a conveyance mechanism which conveys a long-size heat-resistant resin film while causing the film to contact with the surface of a cylindrical roller 13 and a film-forming mechanism such as sputtering for forming a metal film on the film surface which is not in contact with the cylindrical roller, wherein the cylindrical roller has a plurality of periodical grooves 30 disposed in substantially parallel to the axial direction on the roller surface. Even when a large thermal load is applied to the film upon the formation of the metal film by the use of the apparatus, the cylindrical roller hardly slides in the machine direction of the film and easily slides in the width direction of the film and, therefore, the occurrence of wrinkles of the heat-resistant resin film can be reduced without causing troubles in the conveyance of the film. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a film forming method for a long heat resistant resin film in which a film such as sputtering is continuously formed while conveying the long heat resistant resin film, and a manufacturing apparatus for a heat resistant resin film with a metal film using the method. In particular, the present invention relates to a method for forming a long heat-resistant resin film and an apparatus for manufacturing a heat-resistant resin film with a metal film that reduce the generation of film wrinkles due to a thermal load generated during film formation such as sputtering.

  Liquid crystal panels, notebook computers, digital cameras, mobile phones, etc. use many types of flexible wiring boards obtained by coating a metal film on a heat-resistant resin film. A heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides is used. And it is important for the heat resistant resin film with a metal film that the heat resistant resin film with a metal film itself is flat as the wiring pattern becomes finer and densified.

  As a method for producing this type of heat-resistant resin film with a metal film, conventionally, a method in which a metal foil is attached to a heat-resistant resin film with an adhesive (a method for producing a three-layer substrate), a heat-resistant resin solution on a metal foil Coating and drying to manufacture (casting method) and manufacturing method by forming metal film on heat-resistant resin film by vacuum film forming method or vacuum film forming method and wet plating method (metalizing method) ) Etc. are known. Further, examples of the metallizing vacuum film forming method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  As a metallizing method, Patent Document 1 discloses a method in which a chromium layer is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. A flexible circuit board material formed by laminating a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target on the film. It is disclosed. A sputtering web coater is generally used for vacuum film formation on a heat resistant resin film such as a polyimide film (substrate).

  By the way, in the vacuum film-forming method described above, it is generally said that the sputtering method is excellent in adhesion, but the heat load applied to the heat-resistant resin film is larger than the vacuum deposition method. When a large heat load is applied to the heat resistant resin film during film formation, film wrinkles are generated. In order to prevent this wrinkle, the sputtering web coater which is a manufacturing apparatus of a heat resistant resin film with a metal film has a structure in which the heat resistant resin film being sputtered is cooled from the back surface by a can roll. For example, Patent Document 3 discloses a winding-type vacuum sputtering apparatus which is an example of a sputtering web coater, and this winding-type vacuum sputtering apparatus includes a cooling roll (can roll), and a cooling roll (can roll) by a sub-roll. ) Is controlled.

  However, when high power is applied to the sputtering cathode in order to improve the film formation rate, the cooling of the heat-resistant resin film with a metal film becomes insufficient with only a cooling roll (water-cooled can roll), and film wrinkles are generated. In order to reduce this wrinkle, a method is known in which the film is brought into contact (adhered) to the can roll in a state where the film width direction is expanded in advance by an expanding roll or the like. However, since the method of expanding the film width direction by an expand roll or the like is a method that depends on friction, accurate adjustment is extremely difficult.

  Therefore, the metal film can reduce the generation of wrinkles when a large heat load is applied to the heat-resistant resin film during the sputtering of the metal film, and in particular, the generation of wrinkles due to the elongation in the film width direction. An apparatus for producing a heat-resistant resin film with an adhesive has been desired.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 Japanese Patent No. 3283265

  The present invention has been made paying attention to such problems, and the problem is that when the metal film is formed by sputtering while the heat resistant resin film is in contact with the surface of the can roll, the heat resistant resin film is formed. Film formation method for heat-resistant resin film and production of heat-resistant resin film with metal film that reduce generation of film wrinkles even when a large heat load is applied, especially reduce generation of wrinkles due to elongation in the film width direction To provide an apparatus.

  Then, in order to solve the above-mentioned problem, as a result of continuous researches by the present inventor, as for the can roll that the long heat resistant resin film such as a polyimide film contacts, the width direction is longer than the longitudinal direction of the long heat resistant resin film. When the roll surface was processed so that it was easier to slip, it was found that the generation of wrinkles due to elongation in the film width direction was reduced. The present invention has been completed by such technical discovery.

That is, the invention according to claim 1
The long heat-resistant resin film is conveyed while being in contact with the can roll surface, and a thin film is formed on the surface of the long heat-resistant resin film that is not in contact with the can roll by the film forming means arranged facing the can roll surface. A method for forming a long heat-resistant resin film, wherein the surface of the can roll is more slippery in the width direction than in the longitudinal direction with respect to the long heat-resistant resin film in contact with the surface. In the method for forming a long heat-resistant resin film formed as described above ,
The can roll has a plurality of periodic grooves provided on the roll surface in parallel or substantially parallel to the axial direction, and the pitch of the periodic grooves is 0.4 μm to 1 μm, and the width of the grooves. Is 0.2 μm to 0.5 μm, and the depth of the groove is set to a range of 0.05 μm to 0.4 μm,
The invention according to claim 2
The long heat-resistant resin film is conveyed while being in contact with the can roll surface, and a thin film is formed on the surface of the long heat-resistant resin film that is not in contact with the can roll by the film forming means arranged facing the can roll surface. A method for forming a long heat-resistant resin film, wherein the surface of the can roll is more slippery in the width direction than in the longitudinal direction with respect to the long heat-resistant resin film in contact with the surface. In the method for forming a long heat-resistant resin film formed as described above,
The can roll extends symmetrically on the surface of the roll so as to be V-shaped toward both ends in the axial direction with the outer peripheral line formed by connecting a central point located at the approximate center in the axial direction as the base end. It has a plurality of periodic grooves that are parallel or substantially parallel to each other, the direction in which the V-shaped tip is directed and the rotation direction of the can roll are the same, and the opening angle of the V-shaped tip is over 90 ° and 180 ° In addition, the pitch of the periodic grooves is set to 0.4 μm to 1 μm, the width of the grooves is set to 0.2 μm to 0.5 μm, and the depth of the grooves is set to 0.05 μm to 0.4 μm. It is characterized by
The invention according to claim 3
In the film-forming method of the elongate heat resistant resin film which concerns on invention of Claim 1 or 2 ,
An upstream motor drive feed roll, a can roll, and a downstream motor drive feed roll are arranged along the long heat-resistant resin film conveyance path, and the upstream motor drive feed roll, the can roll and the downstream motor drive feed are arranged. The peripheral speed of the roll is set so as to increase as it is positioned downstream in the transport direction.

Next, the invention according to claim 4 is:
A transport mechanism that transports the long heat-resistant resin film in contact with the surface of the can roll, and a metal film on the surface of the long heat-resistant resin film that is disposed opposite the can roll surface and is not in contact with the can roll surface. In an apparatus for producing a heat-resistant resin film with a metal film having a film forming mechanism for forming a film,
The can roll has a plurality of periodic grooves provided on the roll surface in parallel or substantially parallel to the axial direction, and the pitch of the periodic grooves is 0.4 μm to 1 μm, and the width of the grooves. Is 0.2 μm to 0.5 μm, and the depth of the groove is set to a range of 0.05 μm to 0.4 μm,
The invention according to claim 5
A transport mechanism that transports the long heat-resistant resin film in contact with the surface of the can roll, and a metal film on the surface of the long heat-resistant resin film that is disposed opposite the can roll surface and is not in contact with the can roll surface. In an apparatus for producing a heat-resistant resin film with a metal film having a film forming mechanism for forming a film,
The can roll extends symmetrically on the surface of the roll so as to be V-shaped toward both ends in the axial direction with the outer peripheral line formed by connecting a central point located at the approximate center in the axial direction as the base end. It has a plurality of periodic grooves that are parallel or substantially parallel to each other, the direction in which the V-shaped tip is directed and the rotation direction of the can roll are the same, and the opening angle of the V-shaped tip is over 90 ° and 180 ° In addition, the pitch of the periodic grooves is set to 0.4 μm to 1 μm, the width of the grooves is set to 0.2 μm to 0.5 μm, and the depth of the grooves is set to 0.05 μm to 0.4 μm. It is characterized by.

The invention according to claim 6
In the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on invention of Claim 4 or 5 ,
The periodic groove is formed on the surface of the can roll body made of stainless steel or aluminum, or a hard chromium wet plating film, a DLC (diamond-like carbon) film or a metal provided on the surface of the can roll body It is formed on the nitride film surface,
The invention according to claim 7 provides:
In the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on invention of Claim 4 or 5 ,
The periodic groove surface is covered with a hard chromium wet plating film, a DLC (diamond-like carbon) film, or a metal nitride film,
The invention according to claim 8 provides:
In the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on invention of Claim 4 or 5 ,
The transport mechanism includes an upstream motor drive feed roll, a can roll, and a downstream motor drive feed roll, which are sequentially arranged along the transport path of the long heat resistant resin film, and the upstream motor drive feed roll The peripheral speed of the can roll and the downstream motor drive feed roll is controlled so as to increase as it is positioned downstream in the transport direction.

The long heat resistant resin according to claim 1 or 2, wherein the can roll surface is formed to be more slippery in the width direction than the long heat resistant resin film in contact with the surface. The film formation method is
The can roll has a plurality of periodic grooves provided on the roll surface in parallel or substantially parallel to the axial direction, and the pitch of the periodic grooves is 0.4 μm to 1 μm, and the width of the grooves. Is 0.2 μm to 0.5 μm and the groove depth is set to a range of 0.05 μm to 0.4 μm,
The can roll extends symmetrically on the surface of the roll so as to be V-shaped toward both ends in the axial direction with the outer peripheral line formed by connecting a central point located at the approximate center in the axial direction as the base end. It has a plurality of periodic grooves that are parallel or substantially parallel to each other, the direction in which the V-shaped tip is directed and the rotation direction of the can roll are the same, and the opening angle of the V-shaped tip is over 90 ° and 180 ° In addition, the pitch of the periodic grooves is set to 0.4 μm to 1 μm, the width of the grooves is set to 0.2 μm to 0.5 μm, and the depth of the grooves is set to 0.05 μm to 0.4 μm. It is characterized by having.

  Therefore, even when a large heat load is applied to the long heat-resistant resin film when the sputtering film is formed on the surface of the long heat-resistant resin film, the surface of the can roll is in the longitudinal direction (conveying direction) of the long heat-resistant resin film. ) Is easy to slip in the width direction of the long heat-resistant resin film, reducing wrinkling of the heat-resistant resin film without hindering the transportability of the long heat-resistant resin film It becomes possible to make it.

Moreover, also in the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on this invention,
Even when a large heat load is applied to the long heat resistant resin film when sputtering a metal film on the surface of the long heat resistant resin film, the surface of the can roll is in the longitudinal direction of the long heat resistant resin film (conveyance). Direction) and is easy to slip in the width direction of the long heat-resistant resin film, so wrinkles of the heat-resistant resin film can occur without hindering the transportability of the long heat-resistant resin film. It becomes possible to reduce.

Explanatory drawing which shows schematic structure in the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on this invention. Explanatory drawing of the can roll incorporated in the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on this invention. Explanatory drawing of the can roll which concerns on a modification. Explanatory drawing which shows schematic structure in the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on a modification.

  The long heat-resistant resin film is conveyed while being in contact with the can roll surface, and a thin film is formed on the surface of the long heat-resistant resin film that is not in contact with the can roll by the film forming means arranged facing the can roll surface. In the film forming method of the long heat resistant resin film according to the present invention, the surface of the can roll slides more in the width direction than in the longitudinal direction with respect to the long heat resistant resin film in contact with the surface. It is formed so that it may become easy.

  The can roll according to the present invention has a friction directionality in which the width direction of the long heat-resistant resin film in contact with the roll surface is formed to be more slippery than the longitudinal direction. The coefficient of friction in the circumferential direction (rotational direction) is larger than that in the axial direction.

  For this reason, even if the long heat resistant resin film is subjected to a thermal load during sputtering film formation, the long heat resistant resin film can slide in the width direction on the surface of the can roll, so that generation of wrinkles is suppressed. However, when the friction coefficient of the can roll surface in the longitudinal direction of the long heat resistant resin film is almost zero, the long heat resistant resin film cannot be conveyed. Therefore, in order to suppress the occurrence of film wrinkles due to heat load and ensure the transportability of the long heat-resistant resin film, the surface of the can roll is in the longitudinal direction with respect to the long heat-resistant resin film as described above. It is formed so that it is easier to slide in the width direction.

  Hereinafter, embodiments of the present invention will be described in detail.

(1) Manufacturing apparatus for heat-resistant resin film with metal film An apparatus for manufacturing a heat-resistant resin film with metal film using the method for forming a long heat-resistant resin film according to the present invention will be described.

  The apparatus for producing a heat-resistant resin film with a metal film relates to a sputtering web coater in which a metal film is efficiently formed on the surface of a long heat-resistant resin film as shown in FIG.

  That is, in the manufacturing apparatus (sputtering web coater) for the heat-resistant resin film with metal film, the inside of the vacuum chamber 1 is partitioned into the film forming chamber 2 and the film chamber 3 by the partition plate 5. Further, the long heat resistant resin film 4 can pass from the film chamber 3 to the film forming chamber 2 through the gap 6 provided in the partition plate 5. In order to improve the airtightness of the gap 6, a slit roll in which two rolls are arranged close to each other may be attached to the gap 6. The film chamber 3 and the film formation chamber 2 are independently evacuated using separate dry pumps, mechanical booster pumps, and turbo molecular pumps.

  The long heat-resistant resin film 4 is unwound from the unwinding roll 7 provided in the film chamber 3 and is wound around the winding roll 8 in the film forming chamber 2. A can roll 13 in which a motor-driven and temperature-controlled refrigerant circulates is disposed on a conveyance path between the equal winding roll 7 and the winding roll 8. Further, magnetron sputtering cathodes 17, 18, 19, and 20 are provided in the vicinity of the can roll 13 so as to face the outer peripheral surface of the can roll 13 and are long before the metal film is formed by sputtering. A surface treatment unit 16 is provided in the film chamber 3 for enhancing the adhesion between the heat-resistant resin film 4 and the metal film. Note that the surface treatment method in vacuum in the surface treatment unit 16 includes plasma treatment, ion beam treatment, UV light treatment, and the like. In addition, on the conveyance path between the unwinding roll 7 and the winding roll 8, free rolls 9, 10, 11, 15 for guiding the long heat-resistant resin film 4 are provided, In the vicinity of both sides, motor-driven feed rolls 12 and 14 are arranged to bring the long heat-resistant resin film 4 into close contact with the outer peripheral surface of the can roll 13 by adjusting the peripheral speed of the can roll 13.

  The unwinding roll 7 and the winding roll 8 maintain the tension balance of the long heat-resistant resin film 4 by a powder clutch or the like, and a motor-driven feed roll that rotates in conjunction with the rotation of the can roll 13. 12 and 14, the long heat-resistant resin film 4 is unwound from the unwinding roll 7 and wound around the winding roll 8.

  In addition, it is preferable to use a plate-like target for sputtering the metal film. However, when a plate-like target is used, nodules (growth of foreign matter) may occur on the target. For this reason, a cylindrical rotary target that does not generate nodules (growth of foreign matter) and has high target use efficiency may be used.

(2) Can Roll Next, about the said can roll 13 incorporated in the manufacturing apparatus of the heat resistant resin film with a metal film which concerns on this invention, the roll surface is from the longitudinal direction with respect to the long heat resistant resin film 4. FIG. It is formed so that it is easier to slide in the width direction, so that the long heat-resistant resin film 4 can be freely extended in the width direction and the generation of film wrinkles is suppressed. . Specifically, as shown in FIG. 2, the roll surface has a plurality of periodic grooves 30 provided parallel or substantially parallel to the axial direction.

  And about the periodic groove | channel 30 formed in the said can roll 13 surface, in order to prevent the damage | wound and deformation | transformation of the long heat resistant resin film 4, a groove pitch, a groove width, and a groove depth are long. It is desirable that the thickness dimension of the heat resistant resin film 4 is 1/10 or less at the maximum. When the pitch and depth of the grooves are substantially the same as the thickness dimension of the long heat resistant resin film 4, the long heat resistant resin film 4 is restored when the long heat resistant resin film 4 comes into close contact with the can roll 13. It deforms to the same shape as the groove. The periodic groove 30 on the surface of the can roll 13 can be formed using an ultrashort pulse laser. The groove pitch is preferably 0.4 to 1 μm and the groove depth is preferably 0.05 to 0.4 μm. The groove width is 0.2 μm to 0 within a range in which the above-described groove pitch can be realized. It is desirable that the thickness be 5 μm. If the groove pitch is less than 0.4 μm, the direction of frictional force cannot be expected, and if the groove pitch exceeds 1 μm, the long heat-resistant resin film is likely to be damaged. Similarly, if the groove depth is less than 0.05 μm, the directionality of the frictional force cannot be expected, and if the groove depth exceeds 0.4 μm, the long heat-resistant resin film is easily damaged. .

  As a practical means for forming such periodic fine grooves 30 on the outer surface of the can roll having a large area, a recent laser processing technique can be used. For example, when a titanium sapphire laser having a pulse width on the order of femtosecond (one tenth of the 12th power) to picosecond (one tenth of the ninth power) is irradiated on the outer surface of the can roll, Scattered light interference occurs, and the position strengthened by the interference evaporates to become the groove 30. A femtosecond laser is disclosed in Patent Document 4.

  Next, the effect of the periodic grooves 30 formed on the surface of the can roll 13 will be described. First, an attempt was made to form the same periodic grooves as the can roll surface using a femtosecond laser on the surface of a stainless steel plate having a hard chromium plating thickness of 30 μm. As a result, grooves having a period of about 0.8 μm, which is almost equal to the oscillation wavelength of the femtosecond laser used, were formed on the surface of the stainless steel plate. Then, in the atmosphere, a heat-resistant resin film (polyimide film) having a thickness of 25 μm is placed on the surface, and a weight of 100 g is placed on the film, and the heat-resistant resin film is placed in a direction parallel to the grooves and perpendicular to the grooves. When pulled in the direction, the heat-resistant resin film could be moved in a direction parallel to the groove with a force of ½ or less of the direction perpendicular to the groove. From this, due to the action of the periodic grooves, it was confirmed in the atmosphere that the frictional force in the direction parallel to the grooves is small and the frictional force in the direction perpendicular to the grooves is large. It is conceivable that the same phenomenon occurs in vacuum.

  Further, the periodic grooves formed on the surface of the can roll may have the shape shown in FIG. 3 instead of the structure shown in FIG. That is, the outer peripheral lines 31p formed by connecting the center points located substantially in the center in the axial direction on the surface of the can roll 13 are symmetrically extended so as to be V-shaped toward both ends in the axial direction with the outer peripheral line 31p on the base end side. The same applies to a structure in which a plurality of periodic grooves 31 are parallel or substantially parallel, and the direction in which the V-shaped tip of the groove 31 faces and the rotation direction of the can roll 13 are set to be the same. It is. In the case of such a groove 31 structure, the surface of the can roll 13 is the surface of the long heat resistant resin film 4 that is in contact with the surface of the can roll 13 so that the tread pattern of the automobile tire discharges rainwater from the center to both ends when running in the rain. The long heat-resistant resin film 4 is expanded from substantially the center in the axial direction toward both ends in the axial direction. That is, the V-shaped groove 31 structure imparts a direction of friction to the can roll 13, and friction is large in the circumferential direction of the roll and friction is small in the axial direction of the roll. Further, as described above, since the direction in which the V-shaped tip of the groove 31 faces and the rotation direction of the can roll 13 are set to be the same, the long heat-resistant resin film 4 is in contact with the V-shaped tip of the groove 31. Therefore, the long heat resistant resin film 4 is expanded toward both ends in the width direction. And since the elongate heat resistant resin film 4 is expanded toward the both ends of the width direction, generation | occurrence | production of a wrinkle is suppressed. In addition, in order for the elongate heat-resistant resin film 4 to be expanded toward the both ends in the width direction, the opening angle of the V-shaped tip needs to be set to more than 90 ° and less than 180 °. It is necessary to lengthen the distance at which the long heat-resistant resin film 4 is in contact with the surface of the can roll 13 as the V-shaped tip becomes an acute angle. And the opening angle of the said V-shaped front-end | tip is set to less than 180 degrees exceeding 90 degrees in which the friction force of a rotating shaft direction becomes smaller than the friction force of the can roll 13 circumferential direction. Further, like the can roll shown in FIG. 2, it is desirable that the groove pitch is 0.4 to 1 μm and the groove depth is 0.05 to 0.4 μm, and the above-described groove pitch can be realized. Therefore, it is desirable that the width of the groove is 0.2 μm to 0.5 μm.

  The periodic groove structure formed on the surface of the can roll needs to have the shape shown in FIG. 2 or FIG. 3, and the periodic groove structure is arranged in the circumferential direction of the can roll. Must not be parallel or nearly parallel. When grooves that are parallel or substantially parallel to the circumferential direction of the can roll exist, the heat-resistant long resin film slides in the transport direction, making it difficult to ensure the transportability of the film. Cannot be achieved. Further, even when there are grid-like grooves parallel or substantially parallel to the circumferential direction of the can roll, the object of the present invention cannot be achieved for the same reason.

  Next, regarding the periodic groove provided using an ultrashort pulse laser (pulse width: fs to ps order), it may be directly formed on the surface of the can roll body made of stainless steel or aluminum, It may be formed on a hard chrome wet plating film provided on the surface of the can roll body, or CVD method (chemical vapor deposition method), ALD method (atomic layer deposition method) ion plating method, sputtering method It may be formed on the surface of a hard and highly wear-resistant DLC (diamond-like carbon) film or metal nitride film.

  Further, the surface of the periodic groove provided using an ultrashort pulse laser (pulse width: fs to ps order) is coated with the surface by wet plating on condition that the groove is not filled. Alternatively, a hard and highly wear-resistant DLC (diamond-like carbon) film or metal nitriding by CVD (chemical vapor deposition), ALD (atomic layer deposition) ion plating, sputtering, etc. It may be covered with a film.

(3) Feed roll Next, in order to achieve more accurate adjustment, a configuration may be adopted in which feed rolls driven by a motor are arranged before and after the can roll. And by controlling so that the peripheral speed of the feed roll and the can roll becomes faster as it is located on the downstream side in the conveyance direction, the long heat-resistant resin film is brought into contact with the surface of the can roll in the state of being stretched in the length direction ). Moreover, you may combine both a feed roll and an expand roll. The method of stretching the long heat-resistant resin film in the length direction by combining both the feed roll and the expand roll can be adjusted more accurately than the control method using the feed roll and the can roll described above without using the expand roll. Become.

  The apparatus for producing a heat-resistant resin film with a metal film (sputtering web coater) shown in FIG. 1 is long in the vicinity of both sides of the can roll 13 and on the outer peripheral surface of the can roll 13 by adjusting the peripheral speed of the can roll 13 as described above. Motor-driven feed rolls 12 and 14 are disposed to closely contact the heat-resistant resin film 4. That is, an upstream motor drive feed roll 12 that is disposed adjacent to the can roll 13 and upstream of the transport path, and a downstream motor drive feed roll 14 that is disposed adjacent to the can roll 13 and downstream of the transport path. I have.

  The peripheral speeds of the upstream motor-driven feed roll 12, the can roll 13 and the downstream motor-driven feed roll 14 are controlled so as to increase as they are positioned downstream in the transport direction, and the peripheral speed is downstream in the transport direction. By controlling so that it becomes so quick that it is located in the side, the elongate heat-resistant resin film 4 is extended in a conveyance direction as mentioned above, and it becomes possible to contact (adhere) the surface of the can roll 13. Furthermore, this can roll 13 has a direction of friction due to the action of periodic grooves formed on the roll surface, and is easy to slide in the width direction of the long heat-resistant resin film. Even if it receives load, it has the advantage that a film wrinkle does not occur easily.

(4) Heat-resistant resin film with metal film By using the above-described apparatus for producing heat-resistant resin film with metal film (sputtering web coater), a metal film-containing heat-resistant resin film free from defects of film wrinkles is obtained by a metalizing method. Can be obtained.

  Examples of the heat-resistant resin film with metal film include a structure in which a film made of a Ni-based alloy and a Cu film are laminated on the surface of the heat-resistant resin film. The heat resistant resin film with a metal film having such a structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  The film made of the Ni alloy or the like is called a seed layer, and its composition is selected according to desired characteristics such as electrical insulation and migration resistance of the heat-resistant resin film with a metal film. For the seed layer, various known alloys such as Ni—Cr alloy, Inconel, Cond Tantan, and Monel can be used. Moreover, when it is desired to further increase the thickness of the metal film (Cu film) of the heat-resistant resin film with a metal film, the metal film may be formed using a wet plating method. In some cases, a metal film is formed only by electroplating, and in some cases electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. The wet plating process may employ various conditions of a conventional wet plating method.

  Examples of the heat-resistant resin film used for the heat-resistant resin film with a metal film include, for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, and a polyethylene naphthalate film. Or the resin film chosen from a liquid crystal polymer film is mentioned, and it is preferable from the point which has the soft insulation as a flexible substrate with a metal film, the intensity | strength required practically, and the electrical insulation suitable as a wiring material.

  In addition, as the heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. The film forming method of the present invention can be used for forming a material film, a nitride film, a carbide film, or the like.

  Examples of the present invention will be specifically described below.

  Using the manufacturing apparatus (sputtering web coater) of the heat resistant resin film with a metal film shown in FIG. 1, the long heat resistant resin film 4 is made of Ube Industries, Ltd. having a width of 500 mm, a length of 500 m, and a thickness of 25 μm. A heat-resistant polyimide film “UPILEX (registered trademark)” was used.

  Moreover, the can roll 13 shown in FIG. 2 is made of stainless steel having a diameter of 900 mm and a width of 750 mm, and the surface of the roll body is subjected to hard chrome plating. A plurality of periodically fine grooves 30 extending in a direction parallel to the rotation axis were formed on the surface of the can roll using a femtosecond laser of a titanium sapphire laser. The groove pitch is about 0.8 μm, the groove width is about 0.4 μm, and the groove depth is about 0.2 μm.

  Further, the surface treatment unit 16 in the film chamber 3 employs ion beam irradiation in which oxygen gas is introduced at 30 sccm, and a DC ion beam voltage of 3 kV is applied.

  The metal film formed on the heat-resistant polyimide film (heat-resistant resin film) 4 is formed by forming a Cu film on the Ni—Cr film that is a seed layer. A Ni—Cr target was used, a Cu target was used for the magnetron sputtering targets 18, 19, and 20. Further, 300 sccm of argon gas was introduced, and power was applied to each cathode with a power control of 10 kW to form a film.

  The tension of the unwinding roll 7 and the winding roll 8 was 80N. Further, the peripheral speed of the upstream motor drive feed roll 12 is 99.9% of the peripheral speed of the can roll 13, and the peripheral speed of the downstream motor drive feed roll 14 is 100.1% of the peripheral speed of the can roll 13. It was. With this setting, the heat-resistant polyimide film (heat-resistant resin film) 4 is gradually pulled and strongly adheres to the surface of the can roll 13. Further, the can roll 13 is controlled to 20 ° C. by water cooling, and if the heat resistant polyimide film (heat resistant resin film) 4 does not adhere tightly to the surface of the can roll 13, the cooling effect due to heat conduction cannot be expected.

  And the said heat resistant polyimide film (heat resistant resin film) 4 is set to the unwinding roll 7 of the film chamber 3, and the front-end | tip part of the said heat resistant polyimide film 4 passes through the surface treatment unit 16 and the can roll 13 Was attached to the take-up roll 8.

In addition, after the film forming chamber 2 and the film chamber 3 in the vacuum chamber 1 are evacuated to 5 Pa by a plurality of dry pumps, further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. did.

  Then, after the conveyance speed of the heat-resistant polyimide film (heat-resistant resin film) 4 is set to 3 m / min, oxygen gas is introduced into the ion beam of the surface treatment unit 16 to apply a voltage, and each magnetron sputter cathode 17 18, 19, and 20, argon gas was introduced and electric power was applied, and the formation of a Ni—Cr film seed layer and a Cu film formed thereon was started.

  Then, at the time when the length of 290 m of the heat-resistant polyimide film 4 passed, the ion beam, the plasma in each plasma reaction chamber, and the power to each magnetron sputtering cathode were stopped, and the introduction of each gas was also stopped.

  Finally, the conveyance of the heat-resistant polyimide film 4 is stopped, and each pump is stopped, and then the film formation chamber 2 and the film chamber 3 are vented (open to the atmosphere), and the heat-resistant polyimide film 4 of the unwinding roll 7 The end portion was removed, and all the heat-resistant polyimide film 4 was taken up on a take-up roll 8 and then removed.

  The film surface on the can roll 13 during film formation can be observed from the film formation zone of the magnetron sputtering cathode 18 and the observation window 21 of the film formation chamber 2 in the film formation zone of the magnetron sputtering cathode 19. The heat-resistant polyimide film 4 was observed, and immediately after film formation after passing through the film formation zone of the magnetron sputtering cathode 18, the film causing wrinkles was observed in the direction parallel to the rotation direction of the can roll 13. However, the float of the film gradually disappeared immediately before entering the film formation zone of the magnetron sputtering cathode 19.

  The reason why the float of the heat-resistant polyimide film 4 gradually disappears is considered to be due to the action of the can roll 13. That is, a plurality of periodic fine grooves 30 extending in a direction parallel to the rotation axis are formed on the surface of the can roll 13 in the apparatus for manufacturing a heat resistant resin film with a metal film according to this embodiment as described above. Since the friction force on the surface of the can roll 13 in the direction parallel to the groove 30 is small and the friction force on the surface of the can roll 13 in the direction perpendicular to the groove 30 is large, the heat resistant polyimide film 4 is on the surface of the can roll 13. This is probably because the film spreads in the film width direction while being conveyed.

  And after film-forming was completed, when the heat resistant polyimide film 4 wound up by the winding roll 8 was expand | deployed in air | atmosphere and the presence or absence of wrinkles was confirmed, wrinkles were not discovered.

  A heat-resistant resin film with a metal film was produced in the same manner as in Example 1 except that the can roll shown in FIG. 3 was used instead of the can roll shown in FIG.

  That is, the can roll 13 applied in this embodiment has an outer peripheral line 31p formed by connecting a central point located substantially in the center in the axial direction on the surface of the roll, and the both ends in the axial direction. A plurality of parallel or substantially parallel periodic grooves 31 extending symmetrically so as to form a V-shape, and the direction of the V-shaped tip of the groove 31 and the rotation of the can roll 13. The direction is set to be the same.

  The can roll 13 shown in FIG. 3 is made of stainless steel having a diameter of 900 mm and a width of 750 mm, and the surface of the roll body is hard chrome plated. Then, on the surface of the can roll, using the femtosecond laser of the titanium sapphire laser, the above-described periodic groove 31, that is, on the outer peripheral line 31 p formed by connecting the center point located at the approximate center in the axial direction. A plurality of periodic grooves 31 that are symmetrically extending so as to be V-shaped toward the both ends in the axial direction on the base end side are formed in parallel or substantially parallel to each other. The pitch of the periodic grooves 31 is about 0.8 μm, the width of the grooves is about 0.4 μm, the depth of the grooves is about 0.2 μm, and the opening angle of the V-shaped tip is 120 °. .

  And the V-shaped groove 31 structure shown in FIG. 3 gives the directionality of friction to the can roll 13, and the friction is large in the circumferential direction of the roll and the friction is small in the axial direction of the roll.

  Furthermore, since the direction in which the V-shaped tip of the groove 31 faces and the rotation direction of the can roll 13 are set to be the same, the heat-resistant polyimide film (heat-resistant Since the heat-resistant polyimide film 4 is expanded toward both ends in the width direction because it is in contact with the resin film 4, the generation of wrinkles is suppressed as in Example 1.

  That is, as in Example 1, the heat-resistant polyimide film 4 on the can roll 13 was observed from the observation window 21 of the film formation chamber 2 and immediately after film formation after passing through the film formation zone of the magnetron sputtering cathode 18. Although the film floating causing wrinkles was observed in a direction parallel to the rotation direction of the roll 13, the film floating gradually disappeared immediately before entering the film formation zone of the magnetron sputtering cathode 19.

  And after film-forming was completed, when the heat resistant polyimide film 4 wound up by the winding roll 8 was expand | deployed in air | atmosphere and the presence or absence of wrinkles was confirmed, wrinkles were not discovered.

  A heat resistant resin film with a metal film was produced in the same manner as in Example 1 except that the apparatus for producing a heat resistant resin film with a metal film shown in FIG. 4 was applied.

  That is, the apparatus for manufacturing a heat resistant resin film with a metal film shown in FIG. 4 is different from the apparatus for manufacturing a heat resistant resin film with a metal film shown in FIG. Instead of the feed roll 12 and the downstream motor drive feed roll 14, expand rolls 12b and 14b that do not perform motor drive are incorporated.

  Also in the apparatus for producing a heat-resistant resin film with a metal film shown in FIG. 4, a plurality of periodic fine grooves 30 extending in a direction parallel to the rotation axis are formed on the surface of the can roll 13. Since the friction force on the surface of the can roll 13 parallel to the groove 30 is small and the friction force on the surface of the can roll 13 perpendicular to the groove 30 is large, the heat resistant polyimide film 4 is conveyed on the surface of the can roll 13. As a result of being expanded in the width direction of the film, generation of wrinkles is suppressed as in Example 1.

And after film-forming was completed, when the heat resistant polyimide film 4 wound up by the winding roll 8 was expand | deployed in air | atmosphere and the presence or absence of wrinkles was confirmed, wrinkles were not discovered.
[Comparative example]
A heat-resistant resin film with a metal film was produced in the same manner as in Example 1 except that a can roll having no periodic grooves 30 formed on the roll surface was used.

  That is, the can roll applied in this comparative example is made of stainless steel having a diameter of 900 mm and a width of 750 mm, and the surface of the roll body is hard chrome plated. Further, the surface of the can roll does not have the periodic groove of Example 1 formed by using a femtosecond laser of a titanium sapphire laser.

  Then, the film formation zone of the magnetron sputtering cathode 18 capable of observing the film surface on the can roll 13 during the film formation and the observation window 21 of the film formation chamber 2 in the film formation zone of the magnetron sputtering cathode 19 are used. The heat-resistant polyimide film 4 on the can roll was observed, and the film causing wrinkles in the direction parallel to the rotation direction of the can roll 13 immediately after film formation after passing through the film formation zone of the magnetron sputtering cathode 18 was observed. The film was lifted and the film float did not change even immediately before entering the film formation zone of the magnetron sputtering cathode 19 and entered the film formation zone of the magnetron sputtering cathode 19 as it was.

  And after film-forming was completed, when the heat resistant polyimide film 4 wound up by the winding roll 8 was expand | deployed in air | atmosphere and the presence or absence of wrinkles was confirmed, wrinkles had generate | occur | produced in several places.

  According to the apparatus for manufacturing a heat-resistant resin film with a metal film according to the present invention, even when a large heat load is applied to the heat-resistant resin film when the metal film is formed on the heat-resistant resin film by sputtering, Since generation | occurrence | production is suppressed, it has the industrial applicability which can apply the manufactured heat resistant resin film with a metal film to flexible wiring boards, such as a liquid crystal television and a mobile telephone.

DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Deposition chamber 3 Film chamber 4 Heat resistant resin film (heat resistant polyimide film)
DESCRIPTION OF SYMBOLS 5 Partition plate 6 Crevice 7 Unwinding roll 8 Winding roll 9 Free roll 10 Free roll 11 Free roll 12 Upstream motor drive feed roll 12b Expand roll 13 Can roll 14 Downstream motor drive feed roll 14b Expand roll 15 Free roll 16 Surface Processing Unit 17 Magnetron Sputtering Cathode 18 Magnetron Sputtering Cathode 19 Magnetron Sputtering Cathode 20 Magnetron Sputtering Cathode 21 Observation Window 30 Groove 31 Groove 31p Peripheral line formed by connecting center points located substantially in the center in the axial direction

Claims (8)

The long heat-resistant resin film is conveyed while being in contact with the can roll surface, and a thin film is formed on the surface of the long heat-resistant resin film that is not in contact with the can roll by the film forming means arranged facing the can roll surface. A method for forming a long heat-resistant resin film, wherein the surface of the can roll is more slippery in the width direction than in the longitudinal direction with respect to the long heat-resistant resin film in contact with the surface. In the method for forming a long heat-resistant resin film formed as described above ,
The can roll has a plurality of periodic grooves provided on the roll surface in parallel or substantially parallel to the axial direction, and the pitch of the periodic grooves is 0.4 μm to 1 μm, and the width of the grooves. Is set in the range of 0.2 μm to 0.5 μm and the depth of the groove is 0.05 μm to 0.4 μm. The long heat-resistant resin film is conveyed while being in contact with the can roll surface, and a thin film is formed on the surface of the long heat-resistant resin film that is not in contact with the can roll by the film forming means arranged facing the can roll surface. A method for forming a long heat-resistant resin film, wherein the surface of the can roll is more slippery in the width direction than in the longitudinal direction with respect to the long heat-resistant resin film in contact with the surface. In the method for forming a long heat-resistant resin film formed as described above,
The can roll extends symmetrically on the surface of the roll so as to be V-shaped toward both ends in the axial direction with the outer peripheral line formed by connecting a central point located at the approximate center in the axial direction as the base end. It has a plurality of periodic grooves that are parallel or substantially parallel to each other, the direction in which the V-shaped tip is directed and the rotation direction of the can roll are the same, and the opening angle of the V-shaped tip is over 90 ° and 180 ° In addition, the pitch of the periodic grooves is set to 0.4 μm to 1 μm, the width of the grooves is set to 0.2 μm to 0.5 μm, and the depth of the grooves is set to 0.05 μm to 0.4 μm. A method for forming a long heat-resistant resin film. An upstream motor drive feed roll, a can roll, and a downstream motor drive feed roll are arranged along the long heat-resistant resin film conveyance path, and the upstream motor drive feed roll, the can roll and the downstream motor drive feed are arranged. The film forming method for a long heat-resistant resin film according to claim 1 or 2 , wherein the circumferential speed of the roll is set so as to increase as it is positioned downstream in the transport direction. A transport mechanism that transports the long heat-resistant resin film in contact with the surface of the can roll, and a metal film on the surface of the long heat-resistant resin film that is disposed opposite the can roll surface and is not in contact with the can roll surface. In an apparatus for producing a heat-resistant resin film with a metal film having a film forming mechanism for forming a film,
The can roll has a plurality of periodic grooves provided on the roll surface in parallel or substantially parallel to the axial direction, and the pitch of the periodic grooves is 0.4 μm to 1 μm, and the width of the grooves. Is set to the range of 0.2 micrometer-0.5 micrometer, and the depth of a groove | channel is 0.05 micrometer-0.4 micrometer, The manufacturing apparatus of the heat resistant resin film with a metal film characterized by the above-mentioned. A transport mechanism that transports the long heat-resistant resin film in contact with the surface of the can roll, and a metal film on the surface of the long heat-resistant resin film that is disposed opposite the can roll surface and is not in contact with the can roll surface. In an apparatus for producing a heat-resistant resin film with a metal film having a film forming mechanism for forming a film,
The can roll extends symmetrically on the surface of the roll so as to be V-shaped toward both ends in the axial direction with the outer peripheral line formed by connecting a central point located at the approximate center in the axial direction as the base end. It has a plurality of periodic grooves that are parallel or substantially parallel to each other, the direction in which the V-shaped tip is directed and the rotation direction of the can roll are the same, and the opening angle of the V-shaped tip is over 90 ° and 180 ° In addition, the pitch of the periodic grooves is set to 0.4 μm to 1 μm, the width of the grooves is set to 0.2 μm to 0.5 μm, and the depth of the grooves is set to 0.05 μm to 0.4 μm. An apparatus for producing a heat-resistant resin film with a metal film. The periodic groove is formed on the surface of the can roll body made of stainless steel or aluminum, or a hard chromium wet plating film, a DLC (diamond-like carbon) film or a metal provided on the surface of the can roll body 6. The apparatus for producing a heat-resistant resin film with a metal film according to claim 4 or 5 , wherein the apparatus is formed on a surface of the nitride film. 6. The heat-resistant resin with a metal film according to claim 4 , wherein the surface of the periodic groove is covered with a hard chromium wet plating film, a DLC (diamond-like carbon) film, or a metal nitride film. Film production equipment. The transport mechanism includes an upstream motor drive feed roll, a can roll, and a downstream motor drive feed roll, which are sequentially arranged along the transport path of the long heat resistant resin film, and the upstream motor drive feed roll 6. The heat-resistant resin film with a metal film according to claim 4, wherein the peripheral speed of the can roll and the downstream motor-driven feed roll is controlled so as to be higher as it is positioned downstream in the transport direction. Manufacturing equipment.

Images