JP3871735B2 - Film forming device for metal foil substrate - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for forming a film on a metal foil substrate.
[0002]
[Prior art]
A film forming apparatus such as a vacuum evaporation apparatus or a sputtering apparatus is used as an apparatus for coating a thin film on the surface of a thin film substrate such as a metal foil, a resin film, paper, or cloth. In such an apparatus, for example, as shown in FIG. 2 which is an explanatory diagram of the present invention, a water-cooled coating roll 8 is provided in the scattering direction of the evaporated substance 4a from the evaporation source 4 in the vacuum chamber 1. . While the film-like base material 5 is wound around the coating roll 8 and traveled, the evaporation substance 4a is attached to the surface of the base material 5 where the coating roll 8 is wound, thereby forming a film on the surface of the base material 5. Formation is to be performed.
[0003]
When such a film is formed, the temperature of the base material 5 rises due to radiation heat from the evaporation source 4, heat brought in by the evaporation material 4 a, and the like. Therefore, the coating roll 8 is cooled by circulating a cooling medium such as water inside so that the substrate 5 is not damaged due to an excessive temperature rise.
Conventionally, the coating roll is cylindrical so that the above-described cooling effect is sufficiently imparted to the substrate, that is, a shape in which the generatrix parallel to the axis on the outer peripheral surface thereof is straight (hereinafter also referred to as a flat shape). Thus, the base material is configured to travel in close contact with the coating roll uniformly over the entire width direction thereof.
[0004]
[Problems to be solved by the invention]
However, when a coating roll having a flat outer peripheral surface as described above is used, for example, a metal foil having a thickness of 10 to 100 μm is coated with a thickness of 0.02 μm or more by arc discharge vacuum deposition, etc. As shown in FIG. 5, there is a problem that wrinkles 10...
That is, in the case of a thin metal foil or the like, since the heat capacity is small, the temperature of the region facing the evaporation source 4 ′ partially rises rapidly, and thermally expands as this temperature rises. The dimensional change of the base material 5 ′ due to the thermal expansion is absorbed by sliding the outer peripheral surface of the coating roll 8 ′ in the circumferential direction by the tension applied to the base material 5 ′ in the running direction. However, no tension is applied in the width direction, and the base material 5 ′ is in close contact with the flat coating roll 8 ′ uniformly in the width direction. The displacement in the direction is constrained throughout by the frictional force Ft. As a result, the wrinkles 10 are formed on the surface of the coating roll 8 ′.
[0005]
The present invention has been made in view of the above-described conventional problems, and its purpose is to provide a film-like substrate capable of obtaining a coated product excellent in quality by suppressing generation of wrinkles on a coating roll. It is to provide a film forming apparatus.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, a film forming apparatus for a metal foil substrate of the present invention is provided with a coating roll having a cooling means in a vacuum chamber, and a film-like metal foil base is provided on the outer peripheral surface of the coating roll. while winding travel wood, the film forming apparatus to the metal foil base to perform deposited was film formed evaporation material from the evaporation source to the metal foil substrate surface in the wrapping area, the coating roll, hooking can wound What crowned der whose outer diameter is generatrix shape along the axial direction of the small and the outer peripheral surface thereof than in the center and a particular radius of the arc-shaped at positions corresponding to the widthwise end portion side of the metal foil substrate for The metal foil base material to be wound and run is formed so as to form a film in a state where the metal foil base material is in close contact with the axially central portion of the outer peripheral surface and is lifted at the end portion .
[0007]
In this way, by using a coating roll whose outer diameter on the end side is smaller than the center, the metal foil base material that runs around this roll travels, the degree of adhesion with the roll becomes smaller on the end side, The frictional force with respect to the displacement in the width direction is reduced and the binding force is weakened. As a result, when the dimensional change accompanying thermal expansion occurs, the end portion side of the base material is easily displaced in the width direction, thereby preventing the generation of wrinkles and obtaining a coated product with excellent quality.
In another film forming apparatus for a metal foil substrate according to the present invention, a coating roll having a cooling means is provided in a vacuum chamber, and a film-like metal foil substrate is wound around the outer peripheral surface of the coating roll to run. However, in the film forming apparatus on the metal foil base material that forms the film by attaching the evaporation substance from the evaporation source to the surface of the metal foil base material in the winding region, the outer peripheral surface of the coating roll is the metal to be wound around this The outer diameter at the position corresponding to the width direction end portion side of the foil base material is formed smaller than the center, and the large diameter portion that projects locally in the axial direction at the axially central portion of the outer peripheral surface. Is provided.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 2 schematically shows a configuration of a main part in a vacuum chamber 1 in an arc discharge type vacuum vapor deposition apparatus as a film forming apparatus, and the inside of the vacuum chamber 1 travels between the vapor deposition chamber 2 and a substrate by a partition 1a. It is partitioned into a drive chamber 3. The vapor deposition chamber 2 is provided with an evaporation source 4 made of a material corresponding to the formed film and an arc discharge generation mechanism (not shown) for generating a vacuum arc discharge on the surface of the evaporation source 4. ing.
[0009]
On the other hand, a base material supply roll 6 around which a film-like base material 5 is wound, a take-up roll 7 for winding up the base material 5, and a coating roll 8 are disposed in the base material travel drive chamber 3. ing.
The coating roll 8 is disposed so that a part of the outer peripheral surface protrudes toward the vapor deposition chamber 2 through an opening formed in the partition wall 1a. The base material 5 supplied from the base material supply roll 6 is wound around the coating roll 8 and traveled, and the base material 5 is wound up by the take-up roll 7. An automatic tension adjusting device (not shown) is further provided on the travel path of the base material 5 so that the tension Fp acting on the base material 4 in the travel state is maintained within a predetermined range.
[0010]
Coating roll 8 described above, as shown in FIG. 1, the outer peripheral surface crowned, i.e., in the shape of a generating line Lm along the axial direction of the outer peripheral surface in an arc shape having a radius R _1, the outer axial end side It is formed in a shape whose diameter is smaller than the center. The coating roll 8 is provided with a cooling pipe (not shown) as a cooling means. By circulating cooling water through the cooling pipe, the coating roll 8 can be driven to rotate while being cooled with water.
An operation procedure when, for example, an aluminum metal foil is used as the base material 5 and a titanium film is coated on the base material 5 will be described.
[0011]
First, the front end portion of the base material 5 wound around the base material supply roll 6 is wound around the coating roll 8 and then locked to the take-up roll 7, so that the inside of the base material traveling drive chamber 3 of the vacuum chamber 1. 2 is set to the state shown in FIG. In addition, a titanium target is mounted as the evaporation source 4 in the vapor deposition chamber 2. Thereafter, a vacuum pump (not shown) is driven to evacuate the vacuum chamber 1, and after reaching a predetermined degree of vacuum, the arc discharge generation mechanism is operated, and the evaporation source 4 as a cathode and the anode in the arc discharge generation mechanism are operated. An arc discharge is generated on the surface of the evaporation source 4 by applying a predetermined voltage between the electrodes. At the same time, the circulation of the cooling water to the coating roll 8 is started, and the base material supply roll 6, the coating roll 8 and the take-up roll 7 are rotated in synchronization with each other so that the base material 5 travels at a predetermined speed. Let it begin.
[0012]
As described above, by causing arc discharge in the surface of the evaporation source 4 in a vacuum, a minute region on the surface of the evaporation source 4 is vaporized by the arc spot where the discharge current is concentrated. The vapor is further ionized to form a plasma flow. From this plasma flow, a negative bias voltage is applied, or positive ions are extracted as an evaporating substance 4a in the direction of the coating roll 8 that is grounded. This adheres to the substrate 5 that is wound around the coating roll 8 and travels, and the surface of the substrate 5 is coated with the same material as the evaporation source 4, that is, a film made of titanium. The film formation is continued while adjusting the traveling speed of the base material 5 and the arc discharge current so that the film thickness becomes a predetermined thickness.
[0013]
When the atmosphere in the vacuum chamber 1 is vacuum as described above, a film of the same material as that of the evaporation source 4 is coated on the surface of the base material 5, but a reactive gas such as nitrogen gas is coated in the vacuum chamber 1. Is introduced, a reaction product of the evaporating substance 4a and the gas, for example, a film of TiN is coated.
By the way, at the time of film formation as described above, the temperature of the base material 5 that runs while being wound around the coating roll 8 rises due to the radiation heat from the evaporation source 4, the heat brought by the vapor deposition material 4a, and the like. If the temperature rises excessively, the base material 5 is damaged. Therefore, the coating roll 8 is cooled by circulating water therein, thereby preventing the base material 5 from being overheated.
[0014]
On the other hand, in particular, when the base material 5 is a metal foil, the degree of local temperature increase is large because the heat capacity is small, and this temperature increase has caused wrinkles due to thermal expansion as described above. It was. That is, the dimensional change due to thermal expansion accompanying the temperature rise is caused by the outer circumferential surface of the coating roll 8 as indicated by the arrows u · u in FIG. Is absorbed by the base material 5 sliding in the circumferential direction. However, no tension is applied in the width direction. In this state, since the base material is conventionally in close contact with the coating roll in the width direction, the displacement in the width direction of the base material is entirely caused by frictional force. As a result, the substrate was wrinkled.
[0015]
On the other hand, in this embodiment, the outer peripheral surface of the coating roll 8 having a crown shape is used. In this case, as schematically shown in FIG. 1, the base material 5 is in close contact with the roll 8 in the central portion in the axial direction of the coating roll 8, but the close contact degree gradually increases toward the end side. It becomes weak and is in a state of being lifted up at the edge. Therefore, on the end side, even when the base material 5 displaces the surface of the coating roll 8 in the axial direction as indicated by an arrow s in the figure, the binding force due to friction becomes weak.
[0016]
As a result, even when a dimensional change in the width direction occurs in the base material 5 due to thermal expansion, the base material 5 slides on the outer peripheral surface of the coating roll 8 to both sides in the axial direction according to the change. As a result, the generation of wrinkles that has conventionally occurred can be eliminated, and a coated product with excellent quality can be stably produced.
As an example of a specific production result, for example, a crown-shaped coating roll 8 having a radius R1 of 150 m is used, and a 0.1 μm titanium film is formed on an aluminum metal foil having a thickness of 50 μm and a width of 500 mm. Although coating was performed, it was possible to stably produce a high-quality coating product having no wrinkles and excellent adhesion strength of the coating film.
[0017]
In addition, said embodiment does not limit this invention, A various change is possible within the scope of the present invention. For example, as shown in FIG. 3, the axially central portion 8a and the radius R ₂ of a relatively small cross section curved, by the opposite ends 8b · 8b is to be tapered, narrower than the middle diameter of the end portion It is also possible to have a shape. Further, as shown in FIG. 4, locally and large diameter section curved convex portion of the radius R ₃ a (large diameter portion) 8c is provided in the central portion until the both side 8d · 8d reaches the end It is possible to form a cylindrical surface parallel to the axis, and even if a coating roll having these shapes is used, substantially the same effect as in the above embodiment can be obtained.
[0018]
【The invention's effect】
As described above, in the apparatus for forming a film on the metal foil base material of the present invention, the coating roll that runs while the base material is wound so that the adhesion degree of the base material is weakened at the end in the width direction. In addition, the end side is formed with a smaller diameter than the central part. As a result, even when thermal expansion occurs due to a local temperature rise in the base material, the restraint by the frictional force on the end side is weak with respect to the dimensional change in the width direction. Is suppressed. As a result, the occurrence of product defects is reduced, and a coated product with excellent quality can be manufactured.
[Brief description of the drawings]
FIG. 1 is a partially cutaway cross-sectional view schematically showing a relationship between a shape of a coating roll and a substrate in an embodiment of the present invention.
FIG. 2 is a front view showing a main configuration of a film forming apparatus in which the coating roll is incorporated.
FIG. 3 is a partially cutaway cross-sectional view schematically showing a relationship between a modified example of a coating roll and a substrate.
FIG. 4 is a partially cutaway cross-sectional view schematically showing the relationship between still another modification of the coating roll and the substrate.
FIG. 5 is a partially cutaway cross-sectional view schematically showing the generation of wrinkles in a substrate when film formation is performed using a conventional coating roll.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Vacuum chamber 1a Bulkhead 2 Deposition chamber 3 Base material drive drive room 4 Evaporation source 4a Evaporation substance 5 Metal foil base material (base material)
6 Base material supply roll 7 Winding roll 8 Coating roll 8c Convex part (large diameter part)

Claims (2)

A coating roll equipped with a cooling means is provided in the vacuum chamber, and the film-shaped metal foil base material is wound around the outer periphery of the coating roll while running, and the metal foil base material surface in the winding region is evaporated from the evaporation source. In a film forming apparatus on a metal foil base material that forms a film by attaching a substance,
The coating roll is
Crown shaped having an outer diameter that generatrix shape along the axial direction of the small and the outer peripheral surface thereof than in the center and a particular radius of the arc-shaped at a position corresponding to the widthwise end portion side of the metal foil base exerted-out winding I Oh, metal, wherein the metal foil base to travel the winding is configured to form the layer lifted state at the portion of contact with end in the axial center portion of the outer peripheral surface foil Film forming device for base material. A coating roll equipped with a cooling means is provided in the vacuum chamber, and the film-shaped metal foil base material is wound around the outer periphery of the coating roll while running, and the metal foil base material surface in the winding region is evaporated from the evaporation source. In a film forming apparatus on a metal foil base material that forms a film by attaching a substance,
The outer peripheral surface of the coating roll is formed with an outer diameter smaller than the center at a position corresponding to the width direction end of the metal foil base material wound around the coating roll, and the axial center of the outer peripheral surface An apparatus for forming a film on a metal foil base material is provided with a large-diameter portion protruding locally in the radial direction.

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