JP5741522B2 - Long surface treatment apparatus, surface treatment method, and copper clad laminated resin film substrate manufacturing method - Google Patents

Description

  The present invention winds a long body such as a long resin film, a metal foil, and a metal strip conveyed by a roll-to-roll method around the outer peripheral surface of a cooling can roll through a front feed roll, The present invention relates to a surface treatment apparatus and a surface treatment method for a long body that is surface-treated by a surface treatment means that involves a thermal load such as sputtering, on the surface side of the long body that is not in contact with the outer peripheral surface of the can roll. The present invention relates to a surface treatment apparatus and a surface treatment method for a long body in which wrinkles are unlikely to occur in a long body such as a long resin film, and a method for producing a copper-clad laminated resin film substrate.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and denser, and it has become even more important that the heat-resistant resin film with metal film itself is smooth and free of defects. Yes.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, a method of manufacturing by attaching a metal foil to a heat-resistant resin film with an adhesive (referred to as a manufacturing method of a three-layer substrate), heat-resistant to the metal foil By coating with a conductive resin solution and drying to manufacture (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method for producing a metal film on a heat-resistant resin film (referred to as a metallizing method) has been conventionally known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  Regarding the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A flexible circuit board material (that is, a copper-clad laminated resin film substrate) is disclosed. In addition, when manufacturing a heat resistant resin film with a metal film by vacuum film-forming to heat resistant resin films, such as a polyimide film, it is common to use the sputtering web coater described below.

  And although the sputtering method mentioned above has the advantage which is excellent in the adhesive force of the metal thin film etc. which were formed into a film, it is said that the heat load given to a heat resistant resin film is large compared with the vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, wrinkles are likely to occur in the film.

  In order to prevent the generation of wrinkles, a sputtering web coater is used to heat-resistant during film formation by wrapping a long heat-resistant resin film conveyed by roll-to-roll or the like while closely contacting a cooling can roll having a cooling function. The system which cools a property resin film from the back side is adopted. For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of the sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus includes a cooling roll that functions as a cooling can roll, and further, a sub-roll (pre-feed roll) on the carry-in side (upstream side of the heat-resistant resin film) of the cooling roll. The sub-roll is used to control the heat-resistant resin film in close contact with the cooling roll.

  By the way, even when tension is applied in the length direction to a long body such as a long resin film to which no thermal load is applied, the length is long as shown in FIGS. A wrinkle occurs at the center of the scale. That is, as shown in FIG. 3A, when no tension is applied in the length direction to a long body such as a long resin film (in a tension released state), the long body has no slack. Although it is flat, when tension is applied to the long body in the length direction (tension applied state), a cooling can roll (cooling roll) as shown in FIGS. ) Even when not in contact with each other, the entire long body is stretched and wrinkles are generated in the central portion of the long body (a slackened state).

  For this reason, when tension (conveyance tension) is applied in the length direction to a long body such as a long resin film, the state is wound around a cooling can roll (cylindrical cooling roll). However, although it is very small, as shown in FIG. 4 (A), it will be in the state (medium slack state) which a wrinkle generate | occur | produces in the elongate body center part.

  Even if the above-mentioned “sagging state” is very small, a gap is generated in the “sagging part” and the heat conduction efficiency with the cooling can roll (cylindrical cooling roll) becomes insufficient, so the cooling effect is reduced accordingly. However, there has been a problem that wrinkles in the width direction are likely to occur in the above-mentioned “sagging portion” due to the thermal load of sputtering film formation. In particular, when the conveying speed of the long resin film is increased for the purpose of increasing the production efficiency of sputtering film formation, it is necessary to perform sputtering film formation with a desired film thickness in a short time. The thermal load applied to the resin film is further increased, and the above problem becomes significant. In addition, when a long resin film having a thin film thickness is applied without setting the film conveyance speed high, it is thick. Since the heat load applied to the long resin film is relatively larger than that of the film, wrinkles are prominent.

  In order to solve this problem, in Non-Patent Document 1, an inverted crown-shaped cooling can roll structure having a higher roll end side than the roll center portion is adopted, and the peripheral speed on the cooling can roll end side is higher than that of the roll center portion. An apparatus has been proposed in which wrinkles are less likely to occur in the width direction of the long resin film so as to be faster. However, the method using the inverted crown-shaped cooling can roll structure is effective when the grip force between the long resin film and the roll is weak and the film transport speed is high in the atmosphere. In a vacuum in an equal vacuum chamber (decompression chamber), it was not an effective method when the grip force between the long resin film and the roll was strong and the film transport speed was slow.

  Further, in order to solve the above problem, in Patent Document 4, a drum-type cooling canal (crown roll shape: the central part is about 2 to 3 mm higher when calculated from Patent Document 4) is higher than the roll end side. Proposing an apparatus in which wrinkles are less likely to occur in the width direction of the film by forming a roll shape. Further, in Patent Document 5, electron beam impact heating is applied to a long heat-resistant resin film before being carried into a cooling can roll. Proposed a device that is heated by additional means such as a device and expanded in the width direction of the long heat-resistant resin film stretched by thermal expansion with a “stretching roll” like an expand roll, and then carried into a cooling can roll doing.

  When the grip force between the long resin film and the roll is strong and the transport speed of the film is slow in vacuum compared to the apparatus of Non-Patent Document 1 adopting the inverted crown-shaped cooling can roll structure, FIG. As shown in (B), the apparatus (method) of Patent Document 4 that employs a drum-shaped (crown roll) cooling can roll structure wraps a long resin film around a crown roll so that the above-mentioned “slack part” is formed. It was effective because of its stretching action.

  However, the apparatus (method) of Patent Document 4 is effective when the grip force between the long resin film and the roll is strong and the film transport speed is slow in a vacuum, but when the film transport speed is increased. However, there was a problem that the generation of soot could not be sufficiently prevented.

  Also, in the apparatus described in Patent Document 5, it is necessary to provide an “elongating roll” such as an electron beam impact heating device or an expanding roll on the carry-in side of the cooling can roll. However, there is a problem that the structure in the apparatus becomes complicated.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 Japanese Patent Laid-Open No. 10-8249 JP-A-2-166280

“The Mechanics of Web Handling”, David R. Roisum, Ph. D, TAPPI PRESS, (1998) p.83-84

  The present invention has been made paying attention to such problems, and the problem is to improve the apparatus (method) of Patent Document 4 in which a cooling can roll structure having a drum-shaped (crown roll) shape is adopted. Even when the conveying speed of the long body such as the long resin film is increased, the surface treatment apparatus and the surface treatment for the long body that can avoid wrinkling of the long body due to the thermal load such as the above-mentioned sputtering film formation It is in providing the method and the manufacturing method of a copper clad laminated resin film board | substrate.

That is, the invention according to claim 1
An unwinding roll for unwinding the long body, a winding roll for winding the long body, a cooling can roll provided between the unwinding roll and the winding roll and driven to rotate, and upstream of the cooling can roll A tension sensor roll that detects tension of a long body that is provided and conveyed by a roll-to-roll system, and is provided between a tension sensor roll and a cooling can roll, and is rotated and supplied from an unwinding roll. Provided in the vacuum chamber with a surface treatment means with a heat load arranged on the side facing the cooling can roll and along the outer peripheral surface of the cooling can roll before feeding the long body into the cooling can roll,
The surface of the long body is wound around the outer peripheral surface of the cooling can roll via the front feed roll and the surface treatment of the surface of the long body that is not in contact with the outer peripheral surface of the cooling can roll by the surface treatment means. In the processing device,
The front feed roll is constituted by a heating roll, and the front feed roll is provided with a nip roll having a widening mechanism for applying a tension in the width direction to the long body to be conveyed, The outer peripheral surface of the cooling can roll is formed in a crown shape in which both axial end portions are lower than the axial central portion ,
Further, the nip roll is composed of a rubber roll, and the outer circumferential line formed by connecting the center points of the nip roll widening mechanism located approximately in the center in the axial direction on the rubber roll surface is defined as the base end side. The rubber extends so that the direction of the V-shaped tip and the rotational direction of the nip roll are the same as each other, extending parallel to or substantially parallel to each other so as to form a V-shape from the base end toward both ends in the axial direction. It is composed of a plurality of periodic grooves provided on the outer peripheral surface of the roll ,
The invention according to claim 2
In the surface treatment apparatus of the elongate body which concerns on invention of Claim 1,
The outer surface of the tension sensor roll is also provided with a widening mechanism for applying tension in the width direction to the long body to be conveyed.

Next, the invention according to claim 3 is
In the surface treatment apparatus of the elongate body which concerns on invention of Claim 2,
The tension sensor roll is composed of a rubber roll, and the tension sensor roll widening mechanism is based on an outer peripheral line formed by connecting center points located substantially in the axial direction on the rubber roll surface. The direction in which the V-shaped leading ends are parallel to or substantially parallel to each other and extend symmetrically so as to form a V shape from the base end side toward both ends in the axial direction is the same as the rotation direction of the tension sensor roll. It is constituted by a plurality of periodic grooves provided on the outer peripheral surface of the rubber roll so as to be,
The invention according to claim 4
In the surface treatment apparatus of the elongate body which concerns on the invention in any one of Claims 1-3 ,
The elongate body before the surface treatment is preliminarily heated by the front feed roll above the temperature of the elongate body during the surface treatment that is heated by the surface treatment means with thermal load. And
The invention according to claim 5
In the surface treatment apparatus of the elongate body which concerns on invention of Claim 1,
The outer peripheral surface of the cooling can roll formed in a crown shape has a shape in which the axial central portion is set 100 to 900 μm higher than both axial end portions per 800 mm in the axial direction of the cooling can roll. It is characterized by being.

The invention according to claim 6
In the surface treatment apparatus of the elongate body which concerns on the invention in any one of Claims 1-5 ,
A rubber roll having a widening mechanism for applying tension toward the width direction of the elongated body to be conveyed is incorporated between the cooling can roll on the downstream side of the front feed roll, and This widening mechanism has a V-shape with the outer peripheral line formed by connecting the central points located substantially in the center in the axial direction on the rubber roll surface as the base end side and from the base end side toward both axial end sides. A plurality of periodic grooves provided on the outer peripheral surface of the rubber roll so that the direction of the V-shaped tip and the direction of rotation of the rubber roll are the same, extending symmetrically so as to form a shape, and being parallel to each other. It is composed of the body,
The invention according to claim 7 provides:
In the surface treatment apparatus of the elongate body which concerns on the invention in any one of Claims 1-6 ,
The peripheral speed of the front feed roll that is rotationally driven is set slower than the peripheral speed of the cooling can roll that is rotationally driven,
The invention according to claim 8 provides:
In the surface treatment apparatus of the elongated body according to the invention according to any one of claims 1 to 7
The surface treatment means with thermal load is composed of film formation means by sputtering,
The invention according to claim 9 is:
In the surface treatment apparatus of the elongated body according to the invention according to any one of claims 1 to 7
The surface treatment means accompanied by a thermal load is constituted by surface activation means using corona or plasma.

Next, the invention according to claim 10 is
An unwinding roll for unwinding the long body, a winding roll for winding the long body, a cooling can roll provided between the unwinding roll and the winding roll and driven to rotate, and upstream of the cooling can roll A tension sensor roll that detects tension of a long body that is provided and conveyed by a roll-to-roll system, and is provided between a tension sensor roll and a cooling can roll, and is rotated and supplied from an unwinding roll. The vacuum chamber includes a feed roll before carrying the long body into the cooling can roll, and a surface treatment means with a thermal load arranged on the side facing the cooling can roll and along the outer peripheral surface of the cooling can roll. Using surface treatment equipment
The surface of the long body is wound around the outer peripheral surface of the cooling can roll via the front feed roll and the surface treatment of the surface of the long body that is not in contact with the outer peripheral surface of the cooling can roll by the surface treatment means. In the processing method,
The outer peripheral surface of the cooling can roll is formed in a crown shape whose axial both ends are lower than the axial center portion, and the front feed roll is constituted by a heating roll, and in the width direction with respect to the long body to be conveyed. A nip roll having a widening mechanism for applying a tension toward the front is attached to the front feed roll , and the nip roll is formed of a rubber roll, and the nip roll widening mechanism is connected to a shaft on the rubber roll surface. The outer peripheral lines formed by connecting the center points located substantially in the center in the direction are the base end sides, and extend symmetrically so as to form a V shape from the base end side toward the both axial end sides. parallel and composed of a plurality of periodic grooves body provided rubber roll outer surface so that the rotation direction of the direction and nip rolls the V-shaped tip is directed is the same, it is conveyed The long body before the surface treatment is preheated by the front feed roll, and the long body before the surface treatment is carried into the cooling can roll while applying a tension in the width direction by the nip roll widening mechanism. Features
The invention according to claim 11 is:
In the surface treatment method for a long body according to the invention of claim 10 ,
Also provided on the outer peripheral surface of the tension sensor roll is a widening mechanism for applying tension in the width direction to the conveyed long body.

The invention according to claim 12
In the surface treatment method of the elongate body which concerns on invention of Claim 11 ,
The tension sensor roll is composed of a rubber roll, and the tension sensor roll widening mechanism is connected to a central point located approximately in the center in the axial direction on the rubber roll surface. The direction in which the V-shaped leading ends are parallel to or substantially parallel to each other and extend symmetrically so as to form a V shape from the base end side toward both ends in the axial direction is the same as the rotation direction of the tension sensor roll. It is characterized by comprising a plurality of periodic grooves provided on the outer peripheral surface of the rubber roll,
The invention according to claim 13 is:
In the surface treatment method of the elongate body according to the invention described in any one of claims 10-12,
More than the temperature of the long body during the surface treatment that is heated by the surface treatment means with heat load, the long body before the surface treatment is preheated by the pre-feed roll,
The invention according to claim 14 is:
In the surface treatment method for a long body according to the invention of claim 10 ,
The crown shape of the outer peripheral surface of the cooling can roll is set so that the axial central portion is 100 to 900 μm higher than both axial end portions per 800 mm of the axial length of the cooling can roll.

Next, the invention according to claim 15 is:
In the surface treatment method of the elongate body according to the invention described in any one of claims 10-14,
Incorporating a rubber roll having a widening mechanism for applying tension in the width direction to the long body to be conveyed between the cooling can roll on the downstream side of the front feed roll and the width The spreading mechanism has a V-shape with the outer peripheral line formed by connecting the center points located substantially in the center in the axial direction on the rubber roll surface as the base end side and from the base end side toward the both ends in the axial direction. A plurality of periodic grooves provided on the outer peripheral surface of the rubber roll so that the direction of the V-shaped tip and the rotation direction of the rubber roll are the same. It is characterized by
The invention according to claim 16 provides:
In the surface treatment method of the elongate body according to the invention described in any one of claims 10-15,
The peripheral speed of the front feed roll that is rotationally driven is set slower than the peripheral speed of the cooling can roll that is rotationally driven,
The invention according to claim 17 provides:
In the surface treatment method of the elongate body which concerns on invention of Claim 16 ,
The peripheral speed of the front feed roll is set to be 0.02% to 1% slower than the peripheral speed of the cooling can roll,
The invention according to claim 18
In the surface treatment method of the elongate body according to the invention described in any one of claims 10-17,
The surface treatment means accompanied by a thermal load is a film formation means by sputtering,
The invention according to claim 19 is
In the surface treatment method of the elongate body according to the invention described in any one of claims 10-17,
The surface treatment means accompanied by a thermal load is a surface activation means using corona or plasma.

Furthermore, the invention according to claim 20 is
In the surface treatment method of an elongated body according to the invention of claim 18 ,
The long body is composed of a long heat-resistant resin film, and the film temperature is higher than the film temperature at the time of film formation of the heat-resistant resin film during film formation in which the temperature is raised by sputtering film formation means with a thermal load. In the range below the temperature obtained by adding 80 ° C. to the film temperature, the heat-resistant resin film before the surface treatment is preheated by a pre-feed roll,
The invention according to claim 21 is
Using the surface treatment method for a long body according to claim 20 , a long heat-resistant resin film substrate, a base metal layer made of nickel alloy or chromium formed on the surface of the heat-resistant resin film substrate, In a method for producing a copper-clad laminated resin film substrate composed of a copper thin film layer formed on the surface of a base metal layer,
A plurality of sputtering film forming means are provided in the vacuum chamber, and a plurality of sputtering film forming means are used to form a base metal layer made of nickel alloy or chromium on the surface of the heat-resistant resin film substrate and a copper thin film on the surface of the base metal layer. It is characterized in that the layers are continuously formed.

A surface treatment apparatus and a surface treatment method for a long body according to the present invention include:
The front feed roll arranged near the cooling can roll and on the carry-in side of the long body is constituted by a heating roll, and this front feed roll applies tension to the long body to be conveyed in the width direction. with nip rolls having a width widened mechanism for imparting is attached, the outer peripheral surface of the cooling can roll has axial end portions is formed in the lower crown shape than its axially central portion, further, the nip rolls It is composed of rubber rolls, and the nip roll widening mechanism has a base line on the outer peripheral line formed by connecting the center points located substantially in the center in the axial direction on the rubber roll surface. The direction of the V-shaped tip and the direction of rotation of the nip roll are the same in parallel or substantially parallel to each other, extending symmetrically so as to form a V shape toward both ends in the axial direction. It is characterized by being composed of a plurality of periodic grooves body provided rubber roll outer surface so.

  Then, the long body before the surface treatment is pre-heated by the front feed roll, and the long body is crowned while applying a tension in the width direction by a nip roll widening mechanism. Since it is carried into the cylindrical cooling can roll, the “slack part” of the elongated body caused by the transport tension is reduced by the heating action of the front feed roll, the widening action of the nip roll and the extending action of the crown cooling can roll. Since it is expanded in the direction, it is possible to avoid the occurrence of wrinkles on the long body due to the surface treatment with heat load.

Explanatory drawing which shows schematic structure in the surface treatment apparatus (e.g., sputtering web coater) of the elongate body which concerns on the prior art example to which the cylindrical cooling can roll was applied. Explanatory drawing which shows schematic structure in the surface treatment apparatus (e.g., sputtering web coater) of a long body according to the present invention to which a crown-shaped cooling can roll is applied and a nip roll or the like is attached. FIG. 3A is a plan view showing the surface of the long body when no tension is applied to the long body in the length direction (that is, when the tension is released), and FIG. FIG. 3C is a plan view showing a “slack part” of the elongated body that is generated when a tension is applied in the length direction (tension applied state), and FIG. 3C is an AA ′ plane of FIG. Sectional drawing. 4A is a schematic cross-sectional view showing a “slack portion” that appears when a long body is wound around a cylindrical cooling can roll surface according to a conventional example, and FIG. 4B is a crown-shaped cooling can roll. FIG. 3 is a schematic cross-sectional view showing a state where the above-mentioned “sagging portion” is expanded in the width direction when a long body is wound around a surface. An explanatory view showing a phenomenon in which wrinkles occur in a long body such as a heat-resistant resin film on the cooling can roll in a long surface treatment apparatus according to a conventional example to which a cylindrical cooling can roll is applied. In a surface treatment apparatus provided with a front feed roll (roll temperature set at room temperature 20 ° C.), a nip roll having a widening mechanism, and a crown-shaped cooling can roll (roll temperature set at 60 ° C.), on the cooling can roll Explanatory drawing which shows the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film. In a surface treatment apparatus comprising a front feed roll (roll temperature set to 110 ° C.), a nip roll having a widening mechanism, and a crown-shaped cooling can roll (roll temperature set to 60 ° C.), heat resistance on the cooling can roll Explanatory drawing which shows that the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as an adhesive resin film, is suppressed. A surface treatment apparatus comprising a front feed roll (roll temperature set to 110 ° C.), a tension sensor roll having a widening mechanism, a nip roll, and a crown-shaped cooling can roll (roll temperature set to 60 ° C.). Explanatory drawing which shows that the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film, is suppressed on a roll. In a surface treatment apparatus comprising a front feed roll (roll temperature set to 110 ° C.), a nip roll having a widening mechanism and a rubber roll, and a crown-shaped cooling can roll (roll temperature set to 60 ° C.), the cooling can Explanatory drawing which shows that the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film, is suppressed on a roll. In a surface treatment apparatus comprising a front feed roll (roll temperature set to 110 ° C.), a tension sensor roll having a widening mechanism, a nip roll, a rubber roll, and a crown-shaped cooling can roll (roll temperature set to 60 ° C.) Explanatory drawing which shows that the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film, on the said cooling can roll is suppressed. The schematic perspective view of the nip roll which has a width expansion mechanism comprised with the rubber rolls.

  Hereinafter, embodiments of the present invention will be described in detail.

  First, a schematic configuration of a surface treatment apparatus according to a conventional example having a surface treatment means in a vacuum chamber (decompression chamber) and a surface treatment apparatus according to the present invention will be described by taking a sputtering web coater as an example.

  In this sputtering web coater (surface treatment apparatus), a long heat-resistant resin film conveyed by a roll-to-roll method is cited as an example of a long body.

  Further, in the surface treatment apparatus according to the conventional example shown in FIG. 1 and the surface treatment apparatus according to the present invention shown in FIG. 2, the same components are generally indicated by the same numbers.

(1) Conventional surface treatment apparatus (sputtering web coater)
A sputtering web coater (surface treatment apparatus) 50 according to a conventional example includes an unwinding roll 51 for unwinding a long resin film 52 and a long resin film 52 in a vacuum chamber (decompression chamber) as shown in FIG. A winding roll 64 that winds up, a cylindrical cooling can roll 56 that is provided between the winding roll 51 and the winding roll 64 and in which a temperature-controlled refrigerant circulates and is rotated by a servo motor; A pre-feed roll 55 that is provided upstream of the cooling can roll 56 and is rotationally driven by a servo motor and carries the long resin film 52 supplied from the unwinding roll 51 into the cooling can roll 56, and the cooling can roll 56 A long resin film which is provided on the downstream side of the motor and is driven to rotate by a servo motor and fed from the cooling can roll 56. And a feed roll 61 is disposed after the workpiece 52 is unloaded to the winding roll 64 side, and magnetron sputtering cathodes 57, 58, 59, 60 are used as surface treatment means (dry plating means). It is provided along the outer peripheral surface of the cooling can roll 56 on the opposite side of the cooling can roll 56.

  Further, on the upstream conveyance path from the unwinding roll 51 to the cooling can roll 56, a free roll 53 for guiding the long resin film 52, a tension sensor roll 54 for measuring the tension of the long resin film 52, A front feed roll 55 that is rotationally driven by a servo motor is disposed. Then, a carry-in tension is applied to the long resin film 52 by the front feed roll 55 that is adjusted so that the peripheral speed of the cooling can roll 56 that is rotationally driven by the servomotor is reduced. The long resin film 52 that is fed out toward the cooling can roll 56 is brought into close contact with the outer peripheral surface of the cooling can roll 56 and conveyed.

  In addition, a downstream feed roll 61 that is rotationally driven by a servomotor on the downstream side conveyance path from the cooling can roll 56 to the take-up roll 64, a tension sensor roll 62 that measures the tension of the long resin film 52, Free rolls 63 for guiding the long resin film 52 are respectively disposed. Then, a carry-out tension is applied to the long resin film 52 by the rear feed roll 61 adjusted so that the circumferential speed is the same or faster with respect to the cooling can roll 56, and the cooling can roll 56 moves toward the take-up roll 64. The long resin film 52 is discharged toward it.

(2) Disadvantages of Surface Treatment Apparatus (Sputtering Web Coater) According to Conventional Example FIG. 5 is shown in FIG. 1 in order to easily understand the mechanism of wrinkles generated on a surface-treated long resin film (polyimide film). In the surface treatment equipment (sputtering web coater), the positional relationship of the “front feed roll”, “cooling can roll”, “magnetron sputtering cathode”, the direction of transport of the long resin film, wrinkles generated on the film, etc. It is displayed.

  Then, as shown in FIG. 5, the long resin film 10 that has passed through the front feed roll 11 has a “center portion” (refer to FIG. 3B) generated by the transport tension acting in the length direction (transport direction). The magnetron sputtering cathodes 13, 14, 15, 16 pass through the magnetron sputtering cathodes 13, 14, 15, 16 while being in close contact with the cooling can rolls 12. The long resin film 10 is heated to around 110 ° C. and thermally expands.

  In this case, the long resin film 10 is cooled by the cooling action of the cylindrical cooling can roll 12, but the cooling action is not sufficient due to the “slack part” present at the center of the long resin film 10 (see FIG. 4A). In addition, since the long resin film 10 is restrained by the cooling can roll 12, it cannot be stretched and wrinkles 17 are generated. In addition, the typical linear thermal expansion coefficient of the polyimide film used as an example of a long resin film is 12 ppm / K, and when the long resin film is a polyimide film, it increases by 0.12 mm with an increase of 10 ° C. per 1000 mm width. It becomes calculation.

(3) Surface treatment apparatus (sputtering web coater) according to the present invention
A surface treatment apparatus (sputtering web coater) 50 according to the present invention includes an unwinding roll 51 for unwinding a long resin film 52 and a long resin film 52 in a vacuum chamber (decompression chamber) as shown in FIG. A winding roll 64 that winds up, a crown-shaped cooling can roll 56 that is provided between the winding roll 51 and the winding roll 64 and that is circulated by a temperature-controlled refrigerant and is driven to rotate by a servo motor; A pre-feed roll 55 provided on the upstream side of the cooling can roll 56 and rotated by a servo motor and carried into the cooling can roll 56 while heating the long resin film 52 supplied from the unwinding roll 51; Provided on the downstream side of the cooling can roll 56 and driven to rotate by a servo motor, It has a structure in which a feed roll 61 is arranged to carry out the long resin film 52 to be taken out to the take-up roll 64 side, and the long resin film 52 conveyed to the front feed roll 55 has a structure. On the other hand, a nip roll 65 having a widening mechanism for applying a tension in the width direction is attached, and further, a length conveyed between the nip roll 65 and the cooling can roll 56 on the downstream side of the front feed roll 55. A rubber roll 66 having a widening mechanism for applying tension to the length resin film 52 in the width direction is incorporated, and surface treatment means (dry plating) is provided on the opposite side of the cooling can roll 56. As a means, magnetron sputtering cathodes 57, 58, 59 and 60 are provided along the outer peripheral surface of the cooling can roll 56.

  Here, in the surface treatment apparatus according to the present invention, the front feed roll 55 is constituted by a heating roll, and the cooling resin roll 56 is heated while heating the long resin film 52 supplied from the unwinding roll 51 as described above. It has a structure to carry in. The nip roll 65 is composed of a rubber roll similar to the rubber roll 66 incorporated between the front feed roll 55 and the cooling can roll 56, and the rubber roll 66 and the nip roll 65 are provided. As shown in FIG. 11, each widening mechanism has an outer peripheral line 110a formed by connecting central points located approximately in the center in the axial direction on the surface of the rubber roll 110 as the base end side, and the base end side. From the rubber so that the direction of rotation of the nip roll 65 and the like is parallel to or substantially parallel to each other so as to be V-shaped toward both ends in the axial direction. It is comprised by the several periodic groove body 110b provided in the roll 110 outer peripheral surface. The angle, depth, and pitch of the periodic groove body 110b are determined by the thickness of the long resin film (long body) 52, the adhesion, the transport tension, the holding angle, and the like. Note that the surface treatment apparatus of the present invention shown in FIG. 2 has a structure in which a rubber roll 66 is incorporated between the front feed roll 55 and the cooling can roll 56. When the widening action on the body) 52 functions sufficiently with the widening mechanism of the nip roll 65, the incorporation of the rubber roll 66 can be omitted.

  Further, on the upstream conveyance path from the unwinding roll 51 to the cooling can roll 56, a free roll 53 for guiding the long resin film 52, a tension sensor roll 54 for measuring the tension of the long resin film 52, A front feed roll 55 that is rotationally driven by a servo motor is disposed. The tension sensor roll 54 is composed of a rubber roll. Like the nip roll 65 described above, the tension sensor roll 54 has a widening mechanism composed of a plurality of periodic grooves 110b (see FIG. 11) on the outer peripheral surface of the rubber roll. Is provided. In addition, when the widening effect | action with respect to the said long resin film 52 fully functions with the widening mechanism of the nip roll 65, it is also possible to apply the normal tension sensor roll which does not comprise a widening mechanism.

  Then, a carry-in tension is applied to the long resin film 52 by the front feed roll 55 that is adjusted so that the peripheral speed of the cooling can roll 56 that is rotationally driven by a servo motor is reduced. The long resin film 52 that is fed out toward the cooling can roll 56 is brought into close contact with the outer peripheral surface of the cooling can roll 56 and conveyed. In order to make the long resin film 52 adhere to the cooling can roll 56 more completely, the peripheral speed of the front feed roll 55 is set to 0.02% to 1 with respect to the peripheral speed of the cooling can roll 56 serving as the reference speed. It is desirable to set it at% late. This is because if the content is less than 0.02%, the adhesion effect of the long resin film 52 is not sufficient, and if it exceeds 1%, the long resin film 52 may be damaged.

  In addition, a downstream feed roll 61 that is rotationally driven by a servo motor and a tension sensor roll 62 that measures the tension of the long resin film 52 are also provided on the downstream conveyance path from the cooling can roll 56 to the take-up roll 64. A free roll 63 that guides the long resin film 52 is disposed.

  Then, a carry-out tension is applied to the long resin film 52 by the rear feed roll 61 adjusted so that the circumferential speed is the same or faster with respect to the cooling can roll 56, and the cooling can roll 56 moves toward the take-up roll 64. The long resin film 52 is discharged toward it.

  Further, the unwinding roll 51 and the winding roll 64 are configured such that the tension balance of the long resin film 52 is maintained by torque control using a powder clutch or the like. Further, the long resin film 52 is unwound from the unwinding roll 51 by the rotation of the cooling can roll 56 and the servomotor-driven front feed roll 55 and the rear feed roll 61 that rotate in conjunction with the rotation of the cooling can roll 56. 64 is wound up.

  In the sputtering web coater (surface treatment apparatus) 50, as described above, the magnetron sputtering cathodes 57, 58, 59, and 60 are provided along the outer peripheral surface of the cooling can roll 56 as surface treatment means (dry plating means). ing.

In sputtering film formation, the pressure inside the reduced pressure chamber of the sputtering web coater 50 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the sputtering web coater (surface treatment apparatus) 50 are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the reduced pressure chamber of the sputtering web coater 50, the sputtering web coater 50 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  In the case of sputtering a metal film, a plate-like target (not shown) can be used. However, when a plate-like target is used, nodules (foreign material growth) are generated on the target. Sometimes. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency. Moreover, since the sputtering web coater (surface treatment apparatus) 50 shown in FIG. 2 assumes sputtering as a surface treatment means with a thermal load, magnetron sputtering cathodes 57, 58, 59, and 60 are shown. In the case where the surface treatment means accompanied by the heat load is other such as vapor deposition treatment, other surface treatment means can be provided instead of the plate target. As other surface treatment means accompanied by a thermal load, there are a film formation means by CVD (chemical vapor deposition), a surface activation means by corona or plasma, and the like.

  In the surface treatment apparatus of the present invention shown in FIG. 2, the front feed roll 55 is configured by an IH (induction heating) type heating roll, and the nip roll 65 is attached to the front feed roll 55. The tension sensor roll 54, the nip roll 65, and the rubber roll 66 are constituted by a rubber roll having a widening mechanism formed by the periodic groove 110b (see FIG. 11) on the outer peripheral surface, and a cooling can roll. The outer peripheral surface of 56 has a crown shape in which both axial end portions are lower than the axial central portion.

  The crown shape of the outer peripheral surface of the cooling can roll 56 depends on the thickness of the long resin film 52 and the conveyance tension. And when the long resin film 52 is comprised with a 10-40 micrometers thick polyimide film, the axial center part is 100-900 micrometers higher than an axial direction both ends per 800 mm of axial length in the cooling can roll 56. It is good to set so that A drum type (crown roll shape) having a height in the axial center of less than 100 μm does not have a sufficient effect, and a drum type (crown roll) having a height in the axial center of more than 900 μm and not less than 1000 μm. This is because the end of the long resin film 52 tends to float from the cooling can roll 56 in the shape), and wrinkles may occur at the center of the long resin film 52.

(4) Action of surface treatment apparatus (sputtering web coater) according to the present invention The action of the surface treatment apparatus (sputtering web coater) shown in FIG. 2 will be described below with reference to FIGS.

  FIGS. 6 to 10 illustrate the mechanism for generating wrinkles or suppressing the generation of wrinkles in the surface-treated long resin film (polyimide film). Sputtering web coater “tension sensor roll” (displayed only when equipped with a widening mechanism), “front feed roll”, “nip roll”, “cooling can roll”, “rubber roll” (front feed roll and cooling) These are displayed only when they are incorporated in between the can rolls), the positional relationship of these in the “magnetron sputtering cathode”, the transport direction of the long resin film, etc., in a two-dimensional plane.

  However, the V-shaped tips of the periodic grooves provided on the outer peripheral surfaces of the “tension sensor roll”, “nip roll”, and “rubber roll” visually indicate the widening effect of each roll on the long resin film. It is displayed in the direction of spreading along the conveyance of the long resin film so that it becomes easy. Each direction of rotation of the “tension sensor roll”, “nip roll”, and “rubber roll” (clockwise or counterclockwise) Is ignored.

  The use condition of the surface treatment apparatus (sputtering web coater) is that the difference in the peripheral speed between the cooling can roll and the front feed roll (the ratio of the peripheral speed of the front feed roll being slower than the cooling can roll) is "0.5 (% ) ”, The crown amount of the cooling can roll (the amount in which the axial central portion is higher than the axial both ends per 800 mm in the axial direction of the cooling can roll) is“ 500 μm ”, and the long resin film (polyimide film) is conveyed. The film is formed by using all the magnetron sputtering (“total input power to the magnetron sputtering is 65 kW”) at a speed of “8 m / min” where the heat load acting on the film becomes relatively large.

  In addition, the temperature of the long resin film at the time of film-forming is measured with the thermocouple stuck on this film, and the temperature has reached 110 degreeC.

(4-1) A tension sensor roll having no widening mechanism is used, and no rubber roll is incorporated between the front feed roll and the cooling can roll. 2) equipped with “a nip roll having a widening mechanism” and a “crown-shaped cooling can roll (roll temperature set to 60 ° C.)”. When Magnetron Sputtering Film Formation is Performed on a Resin Film As shown in FIG. 6, the long resin film (polyimide film) 70 passing between the front feed roll 71 and the nip roll 72 having a width expanding mechanism is an action of the nip roll 72. However, since there is no heating action of the front feed roll 71 set to 20 ° C., the width dimension is almost the same. It is carried into the crown-shaped cooling can roll 73 set at 60 ° C. without change, and is conveyed in a state of being in close contact with the cooling can roll 73 and being warmed by the cooling can roll 73. The warmed long resin film 70 tends to extend in the arrow direction of FIG. 6 (outward in the film width direction), but the surface of the cooling can roll 73 is crown-shaped and the long resin film 70 is stretched. Therefore, it is difficult to loosen.

  The long resin film 70 passes through the sputtering cathodes 74, 75, 76, 77 while being in close contact with the surface of the cooling can roll 73, and the long resin film 70 is heated by the thermal load of the sputtering cathodes 74, 75, 76, 77. Since it is heated to around 110 ° C., wrinkles 78 are generated in the film.

  In addition, the conveyance speed of the long resin film (polyimide film) is set to “4 m / min”, and the heat load acting on the long resin film becomes relatively small (the film formation time is doubled, so the heat load is 1). 2), the occurrence of wrinkles can be prevented, but there is a demerit that the production efficiency is lowered as the conveyance speed is reduced.

(4-2) A tension sensor roll having no widening mechanism is used, no rubber roll is incorporated between the front feed roll and the cooling can roll, and “front feed roll (roll temperature is 110 2) equipped with a “nip roll having a widening mechanism” and a “crown-shaped cooling can roll (roll temperature set to 60 ° C.)”. When the magnetron sputtering film formation is performed on the long resin film The long resin film 80 that has passed through the front feed roll 81 is heated by the front feed roll 81 as shown in FIG. The long resin film 80 is about 1080 ppm [(12 ppm / K) × (Δ9) toward the outside in the width direction due to thermal expansion. ℃ = 110−20)]), and is further conveyed to the cooling can roll 83 set to 60 ° C. while being expanded outward in the film width direction by the nip roll 82 widening mechanism shown in FIG. The

  Next, when the long resin film 80 heated to 110 ° C. is carried into the cooling can roll 83 set at 60 ° C., the long resin film 80 is cooled and is moved in the direction of the arrow in FIG. The inward shrinkage force acts on the long resin film 80, but the long resin film 80 is in close contact with the cooling can roll 83 (the contraction force is suppressed by the close contact and the tensile stress is received). It is conveyed to the arrangement area of the sputtering cathodes 84, 85, 86 and 87.

  In this region, the long resin film 80 is heated to around 110 ° C. by the heat load of the magnetron sputtering cathodes 84, 85, 86, and 87, and therefore shrinks in the direction of the arrow in FIG. 7 (inward in the film width direction). The force (tensile stress) is relieved, and the nip roll 82 widening mechanism amplifies the relaxation effect on the contraction force (tensile stress), and the long resin film 80 is wrinkled as shown in FIG. There is no.

  Note that the set temperature of the heating roll constituting the front feed roll 81 is equal to or higher than the film temperature during film formation of the long resin film 80 (that is, 110 ° C.) during film formation in which the temperature is raised by the sputtering film formation means accompanied by a thermal load. And it is good to set below the temperature which added 80 degreeC to the film temperature at the time of this film formation, desirably the above-mentioned film temperature at the time of film formation and below the temperature which added 30 degreeC to this film temperature at the time of film formation. The set temperature of the heating roll constituting the front feed roll 81 is a temperature obtained by adding 80 ° C. to the film temperature at the time of film formation of the long resin film 80 during film formation in which the temperature is raised by the sputtering film forming means with a thermal load. Otherwise, when the long resin film 80 is carried into the front feed roll 81, wrinkles may occur on the long resin film 80 on the front feed roll 81 due to a rapid temperature change of the long resin film 80. It is. In the surface treatment apparatus (sputtering web coater), since the long resin film 80 is conveyed in a vacuum chamber under a reduced pressure atmosphere, the heat radiation between the front feed roll 81 and the cooling can roll 83 is only radiant heat. The temperature of the long resin film 80 does not decrease between the roll 81 and the cooling can roll 83.

(4-3) A rubber roll is not incorporated between the front feed roll and the cooling can roll, and the “tension sensor roll having a widening mechanism” and the “previous feed roll (the roll temperature is 110 ° C.) Long surface resin using the surface treatment apparatus (sputtering web coater) of FIG. 2 equipped with “setting)”, “nip roll having a widening mechanism” and “crown-shaped cooling can roll (roll temperature set to 60 ° C.)” When performing magnetron sputtering film formation on the film In the surface treatment apparatus (sputtering web coater) shown in FIG. 7, instead of a normal tension sensor roll having no width expanding mechanism, a width expanding mechanism as shown in FIG. This is the case of the tension sensor roll 98 having

  Then, by applying a tensile force in the width direction to the long resin film 90 in advance by the tension sensor roll 98 having a width expanding mechanism, the front feed roll 91 is heated and the width direction of the nip roll 92 is increased by the width expanding mechanism. There is an effect that the long resin film 90 can be smoothly extended outward.

(4-4) A tension sensor roll having no widening mechanism is used, and “front feed roll (roll temperature is set to 110 ° C.)”, “nip roll with widening mechanism”, and “front feed roll and cooling” Using the surface treatment apparatus (sputtering web coater) of FIG. 2 equipped with a “rubber roll incorporated between the can roll” and a “crown-shaped cooling can roll (roll temperature set to 60 ° C.)” When magnetron sputtering film formation is performed on a resin film In place of the surface treatment apparatus (sputtering web coater) shown in FIG. 7, the width is increased between the front feed roll 101 and the cooling can roll 103 as shown in FIG. This is a case where a rubber roll 108 having a mechanism is incorporated.

  Then, immediately after the long resin film 100 is heated by the front feed roll 101 and the nip roll 102 having the widening mechanism is acted, the rubber roll 108 having the widening mechanism is acted, whereby the long resin There is an effect that the film 100 can be smoothly extended outward in the width direction.

(4-5) “Tension sensor roll with widening mechanism”, “Front feed roll (roll temperature set to 110 ° C.)”, “Nip roll with widening mechanism” and “Front feed roll and cooling can roll” Using the surface treatment device (sputtering web coater) of FIG. 2 equipped with a “rubber roll incorporated in between” and “crown-shaped cooling can roll (roll temperature set to 60 ° C.)” When performing magnetron sputtering film formation In the surface treatment apparatus (sputtering web coater) shown in FIG. 7, instead of a normal tension sensor roll having no widening mechanism, tension having a widening mechanism as shown in FIG. The sensor roll 209 has a widening mechanism between the front feed roll 201 and the cooling can roll 203. This is a case where a roll 208 made of rubber is incorporated.

  Then, a tensile force is applied to the long resin film 200 in the width direction in advance by the tension sensor roll 209 having a widening mechanism, and the long resin film 200 is heated by the front feed roll 201. Immediately after the nip roll 202 having the widening mechanism is acted, the rubber roll 208 having the widening mechanism is acted, so that the long resin film 200 can be smoothly expanded outward in the width direction. .

(5) Long body and copper clad laminated resin film substrate (5-1) Long body Examples of the long body to be surface-treated include a long resin film, metal foil, and metal strip. Examples of the resin film include a long resin film such as a polyethylene terephthalate (PET) film, a long heat resistant resin film such as a polyimide film, and the like.

(5-2) Copper-clad laminated resin film (heat-resistant resin film with metal film) substrate A copper-clad laminated resin film (heat-resistant resin film with metal film) substrate using the surface treatment method for a long body according to the present invention. Can be manufactured.

  The copper-clad laminated resin film (heat-resistant resin film with metal film) substrate includes a base metal layer made of Ni, Ni-based alloy, chromium, etc. on the surface of the heat-resistant resin film, and copper laminated on the surface of the base metal layer. A structure composed of a thin film layer is exemplified. The copper clad laminated resin film substrate having such a structure is processed into a flexible wiring substrate by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the copper thin film layer) not covered with a resist by etching.

  The layer made of Ni alloy or the like is called a seed layer (underlying metal layer), and its composition is selected depending on desired characteristics such as electrical insulation and migration resistance of the copper-clad laminated resin film substrate. The seed layer can be made of various known alloys such as Ni—Cr alloy or Inconel, Condanthan, Monel and the like. Moreover, when it is desired to further increase the thickness of the metal film (copper thin film layer) of the copper-clad laminated resin film (heat-resistant resin film with metal film) substrate, the metal film may be formed using a wet plating method. There are cases where a metal film is formed only by electroplating (ie, electroplating), and electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. is there. The wet plating process may employ various conditions of a conventional wet plating method.

  Moreover, as a heat resistant resin film used for the said copper clad laminated resin film (heat resistant resin film with a metal film), for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film A resin film selected from a film, a polyethylene naphthalate-based film or a liquid crystal polymer-based film is mentioned, which is preferable in terms of flexibility as a copper-clad laminated resin film, practically necessary strength, and electrical insulation suitable as a wiring material. .

  In addition, as the copper-clad laminated resin film (heat-resistant resin film with metal film), a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. In addition, an oxide film, a nitride film, a carbide film, or the like can be used depending on the purpose.

  Examples of the present invention will be specifically described below.

  Using a surface treatment apparatus (sputtering web coater) 50 shown in FIG. 2, a long resin film (long heat resistant resin film) 52 is manufactured by Toray DuPont Co., Ltd. having a width of 500 mm, a length of 1000 m, and a thickness of 25 μm. A heat-resistant polyimide film “Kapton (registered trademark)” was used.

  The “cooling can roll 56” has a diameter of 800 mm and a width of 800 mm, and the surface of the cooling can roll body is subjected to hard chrome plating. Moreover, the outer peripheral surface shape of the cooling can roll 56 is a drum type (crown roll shape) whose central portion in the roll axial direction is higher than both ends in the roll axial direction, and the crown amount (the axial length of the cooling can roll). The amount of the central portion in the axial direction per 800 mm higher than the axial end portions) is “200 μm” and “500 μm” (conditions of the example), and the crown amounts are “0 μm” and “1000 μm” (in the comparative example) Two types of conditions) were prepared.

  The “front feed roll 55” is an IH (induction heating) type heating roll (manufactured by Tokuden Corporation), has a diameter of 150 mm, an effective width of 500 mm, and a set temperature of the front feed roll 55. Four conditions of “20 ° C.”, “60 ° C.”, “110 ° C.” and “200 ° C.” are selected. Further, with respect to the difference in the peripheral speed between the cooling can roll 56 and the front feed roll 55 (the ratio of reducing the peripheral speed of the front feed roll 55 with respect to the cooling can roll 56), “0.5 (%)” and “1.0 (%) ”(Conditions of the embodiment) and two conditions in which the peripheral speed difference is“ 0 (%) ”and“ 2.0 (%) ”(conditions of the comparative example) are selected.

  The “nip roll 65” is composed of a rubber roll having a diameter of 70 mm and a width of 800 mm, and a periodic groove body (widening mechanism) as shown in FIG. 11 spreading in the film traveling direction is formed on the outer peripheral surface of the roll. The groove depth of the periodic groove body is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 70 °.

  The “tension sensor roll 54” is composed of a rubber roll having a diameter of 120 mm and a width of 800 mm, and a periodic groove body (widening mechanism) as shown in FIG. Yes. In addition, the groove depth of the periodic groove body is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 70 °.

  The “rubber roll 66” incorporated between the front feed roll 55 and the cooling can roll 56 is composed of a rubber roll having a diameter of 70 mm and a width of 800 mm, and is shown in FIG. Such a periodic groove body (widening mechanism) is formed. In addition, the groove depth of the periodic groove body is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 70 °.

  The metal film formed on the heat-resistant polyimide film (long heat-resistant resin film) 52 is formed by forming a Cu film on the Ni—Cr film as a seed layer, and the magnetron sputtering target 57. A Ni—Cr target was used for the magnet, a Cu target was used for the magnetron sputter targets 58, 59 and 60, and 300 sccm of argon gas was introduced. The power applied to each cathode was controlled by power control.

  Moreover, the tension | tensile_strength of the said unwinding roll 51 and the winding roll 64 was 100N. The heat-resistant polyimide film (long heat-resistant resin film) 52 was set on the unwinding roll 51, and the tip of the heat-resistant polyimide film 50 was attached to the winding roll 64 via the cooling can roll 56. .

The decompression chamber (vacuum chamber) was evacuated to 5 Pa with a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  Then, after setting the conveyance speed of the heat-resistant polyimide film (long heat-resistant resin film) 52, argon gas is introduced into each of the magnetron sputter cathodes 57, 58, 59, and 60, and electric power is applied to form a seed layer. The Ni-Cr film to be formed and the Cu film to be formed on the Ni-Cr film were started.

"Evaluation test"
A surface treatment apparatus (sputtering web coater) 50 shown in FIG. 2 is used, and a heat-resistant polyimide film (long heat-resistant resin film) 52 is wound around a cooling can roll 56 via a front feed roll 55 and cooled. Sputter film formation is performed on the surface of the heat-resistant polyimide film (long heat-resistant resin film) 52 by the magnetron sputter cathodes 57, 58, 59, 60 disposed in the vicinity of the can roll 56, and after the film formation is completed, the heat-resistant polyimide film is formed. (Long heat-resistant resin film) 52 of heat-resistant polyimide film (long heat-resistant resin film) 52 by sputtering film formation with a thermal load on the cooling can roll 56 on the near side where 52 is carried out to the rear feed roll 61 The presence or absence of wrinkles was visually observed from the observation window.

  Further, a Ni—Cr layer is formed using one Ni—Cr target constituting the magnetron sputtering cathode 57, and the film thickness is 10 nm. In addition, a Cu film is formed using three Cu targets constituting the magnetron sputtering cathodes 58, 59, 60, and the film thickness is 100 nm.

  Moreover, about the film conveyance speed, the maximum film conveyance speed | rate which does not generate | occur | produce a wrinkle was calculated | required so that the film thickness of the said Ni-Cr layer and Cu film | membrane could be maintained.

  For example, when the conveyance speed of a heat-resistant polyimide film (long heat-resistant resin film) is set to double, in order to maintain the film thickness of Ni-Cr film and Cu film, the input power of each sputtering power supply should be doubled. That's fine.

  The results are summarized in Tables 1-4.

"Confirmation"
(1) When a cooling can roll having a crown amount (the amount that the axial central portion is higher than the axial end portions per 800 mm in the axial direction of the cooling can roll) of “1000 μm” is applied, the set temperature in the front feed roll It can be confirmed from Tables 1 to 4 that “conveyance flaws” are generated on the film regardless of the peripheral speed difference between the cooling can roll and the previous feed roll.

  If the crown amount is too large, “1000 μm”, the end of the film will not be in close contact with the cooling can roll, so the film will become unstable and the film will be “conveyed” even without performing sputtering film formation with a thermal load. It can be seen that “皺” occurs.

(2) A cooling can roll having a crown amount (the amount that the axial central portion is higher than the axial end portions per 800 mm in the axial length of the cooling can roll) is “0 μm” (conventional cylindrical cooling can roll). In this case, it can be confirmed from Tables 1 to 3 that the maximum wrinkle-free film transport speed is “2.0 (m / min)” regardless of the set temperature of the previous feed roll.

(3) When the set temperature of the front feed roll is set to “200 ° C.”, the circumference of the cooling can roll and the front feed roll is set under the conditions (examples) where the crown amount is “200 μm” and “500 μm”. Table 4 confirms that “heating flaws” occur in the film even when the speed difference is set to “0.5 (%)” and “1.0 (%)” conditions (example conditions). it can.

  It can be seen that if the set temperature of the front feed roll is too high at “200 ° C.”, a “heating soot” is generated on the film without performing sputtering film formation on the front feed roll due to a rapid temperature change.

  Here, for the set temperature of the front feed roll, four conditions of “20 ° C.” (Table 1), “60 ° C.” (Table 2), “110 ° C.” (Table 3) and “200 ° C.” (Table 4) “20 ° C.” is the room temperature at which the temperature of the previous feed roll is not controlled, “110 ° C.” is the maximum film temperature (film temperature during film formation) due to the thermal load during sputtering film formation, and “60 ° C.” "Is an intermediate temperature between" 20 ° C "and" 110 ° C ", and" 200 ° C "is for the maximum temperature of a practical pre-feed roll (heating roll).

(4) When the peripheral speed difference between the cooling can roll and the front feed roll (the ratio of the peripheral speed of the front feed roll being slower than the cooling can roll) is set to “2.0 (%)”, the crown amount is It is shown in Table 1 that “scratches” are generated on the film regardless of the conditions of “200 μm” and “500 μm” and the setting temperature of the front feed roll is “20 ° C.”, “60 ° C.”, “110 ° C.” It can be confirmed from Table 3.

(5) The conditions under which the film forming speed can be improved using the surface treatment apparatus of FIG. 2 are based on the results of Table 3 “Maximum film transport speed without wrinkles 8.0 (m / min)”. “Temperature is 110 ° C.”, “Crown amount of cooling can roll is 200 μm and 500 μm” (conditions of the example), “Difference in peripheral speed between cooling can roll and front feed roll is 0.5% and 1.0%” (implemented) Example conditions).

  However, these conditions are not absolute values because they may vary depending on the surface state and thickness of the heat resistant resin film, the transport tension, the roll holding angle, and the like.

(6) In addition, when the case where the nip roll 65 is not provided with the periodic groove body (width widening mechanism) shown in FIG. 11 is compared with the case where the periodic groove body (width widening mechanism) shown in FIG. It was confirmed that the “maximum film conveyance speed” at which wrinkles do not occur is improved by about 0.5 m / min, and the tension sensor roll 54 was also compared in the same manner. ), It was confirmed that the “maximum film conveyance speed” at which no wrinkles occur was improved by about 1.0 m / min.

  Furthermore, when the case where the rubber roll 66 provided with the periodic groove body (width expanding mechanism) is incorporated between the front feed roll 55 and the cooling can roll 56 is compared with the case where it is not incorporated, the rubber roll 66 is compared. It was confirmed that the “maximum film conveyance speed” at which wrinkles do not occur is improved by about 0.5 m / min.

  From these results, the effect of improving the “maximum film conveyance speed” was confirmed by the action of each roll having a periodic groove body (width expanding mechanism) regardless of before, during and after heating of the front feed roll. However, the effect varies depending on the holding angle of the heat-resistant resin film to each roll, film tension, roll pressing pressure, and the like.

  According to the surface treatment apparatus and the surface treatment method for the long body according to the present invention, the long body before the surface treatment is preheated by the front feed roll, and the nip roll widening mechanism is applied to the heated long body. Since the long body is carried into the crown-shaped cooling can roll while applying a tension in the width direction by the above, the “sagging portion” of the long body caused by the transport tension is the heating action of the front feed roll. Since the nip roll is expanded in the width direction by the widening action of the nip roll and the extending action of the crown-shaped cooling can roll, it is possible to avoid the occurrence of wrinkles of the long body due to the surface treatment with a thermal load. Therefore, it has industrial applicability applied as a method for producing a copper-clad laminated resin film (heat-resistant resin film with a metal film) used for flexible wiring boards such as liquid crystal televisions and mobile phones.

10 Long resin film (long body)
11 Front feed roll 12 Cooling can roll 13, 14, 15, 16 Magnetron sputtering cathode 17 50 Surface treatment device (sputtering web coater)
51 Unwinding roll 52 Long resin film (long heat-resistant resin film) (long body)
53 Free Roll 54 Tension Sensor Roll 55 Front Feed Roll 56 Cooling Can Roll 57, 58, 59, 60 Magnetron Sputtering Cathode 61 Rear Feed Roll 62 Tension Sensor Roll 63 Free Roll 64 Take-up Roll 65 Nip Roll with Widening Mechanism 66 Widening Rubber roll with mechanism 70 Long resin film (long body)
71 Front feed roll 72 Nipromome with widening mechanism 73 Cooling can roll 74, 75, 76, 77 Magnetron sputtering cathode 78 皺 80 Long resin film (long body)
81 Front feed roll 82 Niplome having a widening mechanism 83 Cooling can roll 84, 85, 86, 87 Magnetron sputtering cathode 90 Long resin film (long body)
91 Front feed roll 92 Niplome having a widening mechanism 93 Cooling can roll 94, 95, 96, 97 Magnetron sputtering cathode 98 Tension sensor roll 100 having a widening mechanism Long resin film (long body)
DESCRIPTION OF SYMBOLS 101 Front feed roll 102 Niplome 103 which has a widening mechanism Cooling can roll 104, 105, 106, 107 Magnetron sputtering cathode 108 Rubber roll 200 which has a widening mechanism Long resin film (long body)
201 front feed roll 202 nip loam 203 having a widening mechanism cooling can roll 204, 205, 206, 207 magnetron sputtering cathode 208 rubber roll 209 having a widening mechanism tension sensor roll 110 having a widening mechanism rubber roll 110a outer circumferential line 110b Periodic groove

Claims (21)

An unwinding roll for unwinding the long body, a winding roll for winding the long body, a cooling can roll provided between the unwinding roll and the winding roll and driven to rotate, and upstream of the cooling can roll A tension sensor roll that detects tension of a long body that is provided and conveyed by a roll-to-roll system, and is provided between a tension sensor roll and a cooling can roll, and is rotated and supplied from an unwinding roll. Provided in the vacuum chamber with a surface treatment means with a heat load arranged on the side facing the cooling can roll and along the outer peripheral surface of the cooling can roll before feeding the long body into the cooling can roll,
The surface of the long body is wound around the outer peripheral surface of the cooling can roll via the front feed roll and the surface treatment of the surface of the long body that is not in contact with the outer peripheral surface of the cooling can roll by the surface treatment means. In the processing device,
The front feed roll is constituted by a heating roll, and the front feed roll is provided with a nip roll having a widening mechanism for applying a tension in the width direction to the long body to be conveyed, The outer peripheral surface of the cooling can roll is formed in a crown shape in which both axial end portions are lower than the axial central portion ,
Further, the nip roll is composed of a rubber roll, and the outer circumferential line formed by connecting the center points of the nip roll widening mechanism located approximately in the center in the axial direction on the rubber roll surface is defined as the base end side. The rubber extends so that the direction of the V-shaped tip and the rotational direction of the nip roll are the same as each other, extending parallel to or substantially parallel to each other so as to form a V-shape from the base end toward both ends in the axial direction. A long surface treatment apparatus comprising a plurality of periodic grooves provided on an outer peripheral surface of a roll .   2. The long length according to claim 1, wherein a widening mechanism is provided on the outer peripheral surface of the tension sensor roll to apply tension in the width direction to the long body to be conveyed. Body surface treatment equipment.   The tension sensor roll is composed of a rubber roll, and the tension sensor roll widening mechanism is based on an outer peripheral line formed by connecting center points located substantially in the axial direction on the rubber roll surface. The direction in which the V-shaped leading ends are parallel to or substantially parallel to each other and extend symmetrically so as to form a V shape from the base end side toward both ends in the axial direction is the same as the rotation direction of the tension sensor roll. The long surface treatment apparatus according to claim 2, wherein the long surface treatment apparatus comprises a plurality of periodic grooves provided on the outer peripheral surface of the rubber roll. The elongate body before the surface treatment is preliminarily heated by the front feed roll above the temperature of the elongate body during the surface treatment that is heated by the surface treatment means with thermal load. The surface treatment apparatus for a long body according to any one of claims 1 to 3 .   The outer peripheral surface of the cooling can roll formed in a crown shape has a shape in which the axial central portion is set 100 to 900 μm higher than both axial end portions per 800 mm in the axial direction of the cooling can roll. The surface treatment apparatus for a long body according to claim 1. A rubber roll having a widening mechanism for applying tension toward the width direction of the elongated body to be conveyed is incorporated between the cooling can roll on the downstream side of the front feed roll, and This widening mechanism has a V-shape with the outer peripheral line formed by connecting the central points located substantially in the center in the axial direction on the rubber roll surface as the base end side and from the base end side toward both axial end sides. A plurality of periodic grooves provided on the outer peripheral surface of the rubber roll so that the direction of the V-shaped tip and the direction of rotation of the rubber roll are the same, extending symmetrically so as to form a shape, and being parallel to each other. It is comprised by the body, The surface treatment apparatus of the elongate body in any one of Claims 1-5 characterized by the above-mentioned. The surface treatment apparatus for a long body according to any one of claims 1 to 6 , wherein the circumferential speed of the previous feed roll that is rotationally driven is set slower than the circumferential speed of the cooling can roll that is rotationally driven. . The surface treatment apparatus for a long body according to any one of claims 1 to 7 , wherein the surface treatment means accompanied by a thermal load is constituted by a film formation means by sputtering. The long-surface treatment apparatus according to any one of claims 1 to 7 , wherein the surface treatment means accompanied by a thermal load is constituted by corona or plasma surface activation means. An unwinding roll for unwinding the long body, a winding roll for winding the long body, a cooling can roll provided between the unwinding roll and the winding roll and driven to rotate, and upstream of the cooling can roll A tension sensor roll that detects tension of a long body that is provided and conveyed by a roll-to-roll system, and is provided between a tension sensor roll and a cooling can roll, and is rotated and supplied from an unwinding roll. The vacuum chamber includes a feed roll before carrying the long body into the cooling can roll, and a surface treatment means with a thermal load arranged on the side facing the cooling can roll and along the outer peripheral surface of the cooling can roll. Using surface treatment equipment
The surface of the long body is wound around the outer peripheral surface of the cooling can roll via the front feed roll and the surface treatment of the surface of the long body that is not in contact with the outer peripheral surface of the cooling can roll by the surface treatment means. In the processing method,
The outer peripheral surface of the cooling can roll is formed in a crown shape whose axial both ends are lower than the axial center portion, and the front feed roll is constituted by a heating roll, and in the width direction with respect to the long body to be conveyed. A nip roll having a widening mechanism for applying a tension toward the front is attached to the front feed roll , and the nip roll is formed of a rubber roll, and the nip roll widening mechanism is connected to a shaft on the rubber roll surface. The outer peripheral lines formed by connecting the center points located substantially in the center in the direction are the base end sides, and extend symmetrically so as to form a V shape from the base end side toward the both axial end sides. parallel and composed of a plurality of periodic grooves body provided rubber roll outer surface so that the rotation direction of the direction and nip rolls the V-shaped tip is directed is the same, it is conveyed The long body before the surface treatment is preheated by the front feed roll, and the long body before the surface treatment is carried into the cooling can roll while applying a tension in the width direction by the nip roll widening mechanism. A surface treatment method for a long body characterized by the above. The long body according to claim 10 , further comprising a width-enlarging mechanism for applying a tension in the width direction to the long body to be conveyed on the outer peripheral surface of the tension sensor roll. Surface treatment method. The tension sensor roll is composed of a rubber roll, and the tension sensor roll widening mechanism is connected to a central point located approximately in the center in the axial direction on the rubber roll surface. The direction in which the V-shaped leading ends are parallel to or substantially parallel to each other and extend symmetrically so as to form a V shape from the base end side toward both ends in the axial direction is the same as the rotation direction of the tension sensor roll. The long surface treatment method according to claim 11 , comprising a plurality of periodic grooves provided on the outer peripheral surface of the rubber roll. Above the temperature of the elongated member during surface processing heated by the surface treatment means with the heat load, claim a long body before surface treatment, characterized in that preheated by the pre-feed roll 10 to The surface treatment method for a long body according to any one of 12 . The crown shape of the outer peripheral surface of the cooling can roll is set such that the axial central portion is 100 to 900 μm higher than both axial end portions per 800 mm of the axial length of the cooling can roll. Item 11. A surface treatment method for an elongated body according to Item 10 . Incorporating a rubber roll having a widening mechanism for applying tension in the width direction to the long body to be conveyed between the cooling can roll on the downstream side of the front feed roll and the width The spreading mechanism has a V-shape with the outer peripheral line formed by connecting the center points located substantially in the center in the axial direction on the rubber roll surface as the base end side and from the base end side toward the both ends in the axial direction. A plurality of periodic grooves provided on the outer peripheral surface of the rubber roll so that the direction of the V-shaped tip and the rotation direction of the rubber roll are the same. The surface treatment method for an elongated body according to any one of claims 10 to 14 , wherein the surface treatment method is performed. The surface treatment of a long body according to any one of claims 10 to 15 , wherein a peripheral speed of the front feed roll that is rotationally driven is set slower than a peripheral speed of the cooling can roll that is rotationally driven. Method. The surface treatment method for an elongated body according to claim 16 , wherein the peripheral speed of the front feed roll is set to be 0.02% to 1% slower than the peripheral speed of the cooling can roll. The surface treatment method for a long body according to any one of claims 10 to 17 , wherein the surface treatment means accompanied by a thermal load is a film formation means by sputtering. The surface treatment method for a long body according to any one of claims 10 to 17 , wherein the surface treatment means accompanied by a thermal load is a surface activation means using corona or plasma. The long body is composed of a long heat-resistant resin film, and the film temperature is higher than the film temperature at the time of film formation of the heat-resistant resin film during film formation in which the temperature is raised by sputtering film formation means with a thermal load. 19. The surface treatment method for a long body according to claim 18 , wherein the heat-resistant resin film before the surface treatment is preheated by a pre-feed roll within a range equal to or less than a temperature obtained by adding 80 ° C. to the film temperature. . Using the surface treatment method for a long body according to claim 20 , a long heat-resistant resin film substrate, a base metal layer made of nickel alloy or chromium formed on the surface of the heat-resistant resin film substrate, In a method for producing a copper-clad laminated resin film substrate composed of a copper thin film layer formed on the surface of a base metal layer,
A plurality of sputtering film forming means are provided in the vacuum chamber, and a plurality of sputtering film forming means are used to form a base metal layer made of nickel alloy or chromium on the surface of the heat-resistant resin film substrate and a copper thin film on the surface of the base metal layer. A method for producing a copper-clad laminated resin film substrate, wherein the layers are continuously formed.

Images