JP5794151B2 - Method for controlling conveyance of long strip and surface treatment method for long strip - Google Patents

Description

  The present invention relates to a cooling can roll provided on a conveyance path between an unwinding roll for unwinding a long band-shaped body such as a long resin film and a winding roll for winding the long band-shaped body, The present invention relates to a method for transporting a long belt-like body provided with a front feed roll provided on the upstream side of the roll and a rear feed roll provided on the downstream side, and in particular, the long belt-like body can roll through the front feed roll. The present invention relates to a method for controlling the transport of a long strip that is transported while being in close contact with the outer peripheral surface of the can roll without causing slip or slack, etc., and its surface treatment method. .

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and denser, and it has become even more important that the heat-resistant resin film with metal film itself is smooth and free of defects. Yes.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, a method of manufacturing by attaching a metal foil to a heat-resistant resin film with an adhesive (referred to as a manufacturing method of a three-layer substrate), heat-resistant to the metal foil By coating with a conductive resin solution and drying to manufacture (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method for producing a metal film on a heat-resistant resin film (referred to as a metallizing method) has been conventionally known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  As for the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A disclosed flexible circuit board material is disclosed. In addition, when manufacturing a heat resistant resin film with a metal film by vacuum film-forming to a heat resistant resin film like a polyimide film, it is common to use the sputtering web coater described below.

  By the way, although the sputtering method mentioned above has the advantage which is generally excellent in the adhesive force of the metal thin film etc. which were formed into a film, it is said that the thermal load given to a heat resistant resin film is large compared with a vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, wrinkles are likely to occur in the film. In order to prevent the occurrence of wrinkles, the sputtering web coater is wound with a long heat-resistant resin film conveyed by roll-to-roll or the like while being closely attached to a can roll having a cooling function. A method of cooling the resin film from the back side is adopted.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of the sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus includes a cooling roll that functions as a cooling can roll, and further, a sub-roll (pre-feed roll) on at least a heat-resistant resin film carry-in side (transport upstream side) of the cooling roll. ) Is provided, and the sub-roll is used to control the heat-resistant resin film in close contact with the cooling roll.

  In addition, by setting the peripheral speed of the front feed roll to be rotationally driven relatively slower than the peripheral speed of the can roll that is also rotationally driven, a tensile force is applied to the heat resistant resin film, There is also known a method of sticking to the can roll while slightly extending. This film conveyance control method is sometimes referred to as “draw control”.

  Non-Patent Document 1 introduces heat transfer of a web substrate in a vacuum, and Non-Patent Document 2 describes a design of a drum (can roll) in a vacuum.

  A schematic configuration of a sputtering web coater (deposition apparatus) 50 that has been widely used conventionally is shown in FIG.

  That is, the sputtering web coater (film forming apparatus) 50 includes an unwinding roll 51 for unwinding the long resin film 52 that is a long strip, a winding roll 64 for unwinding the long resin film 52, and unwinding A cooling can roll 56 that is provided between the roll 51 and the take-up roll 64 and in which the refrigerant circulates and is driven to rotate, and is provided on the upstream side of the can roll 56 and is rotated and driven. A feed roll 55 before the long resin film 52 supplied from the roll 51 is carried into the can roll 56, and the long resin film 52 provided on the downstream side of the can roll 56 and fed out from the can roll 56 After the feed roll 61 is carried out to the 64 side, it has a structure in which the feed roll 61 is disposed in the decompression chamber, and the sputter is a film forming means. Gukasodo 57, 58, 59, 60 is provided along the outer circumferential surface of the can roll 56. In FIG. 1, reference numeral 53 denotes a free roll for guiding the long resin film 52, reference numeral 54 denotes a tension sensor roll for measuring the tension of the long resin film 52 on the upstream side of conveyance, and reference numeral 62 denotes a long roll on the downstream side of conveyance. A tension sensor roll for measuring the tension of the resin film 52, and a reference numeral 63 denotes a free roll for guiding the long resin film 52.

  In the conventional sputtering web coater (deposition apparatus) 50, the above “draw control” is adopted in order to bring the conveyed long resin film 52 into close contact with the can roll 56. That is, the peripheral speed of the front feed roll 55 is set to be relatively slower than the peripheral speed of the can roll 56, and a tensile force is applied to the long resin film 52 between the front feed roll 55 and the can roll 56. A control method is adopted in which the long resin film 52 is brought into close contact with the outer peripheral surface. The ratio of “the peripheral speed of the front feed roll 55” to “the peripheral speed of the can roll 56”, that is, (the peripheral speed of the front feed roll 55 ÷ the peripheral speed of the can roll 56) × 100 is defined as “the front feed rate”. doing.

  By the way, in order to suppress the thermal load on the long resin film 52 at the time of sputtering film formation, it is important that the long resin film 52 is in close contact with the outer peripheral surface of the can roll 56. And in order to make the long resin film 52 adhere to the outer peripheral surface of the can roll 56, it is necessary to carry the long resin film 52 into the can roll 56 while pulling, and the tension (carrying in the long resin film 52 is carried in). Tension) is an important parameter.

  However, since the can roll 56 and the front feed roll 55 are arranged in a very close positional relationship as shown in FIG. 1, it is impossible to arrange the above-described tension sensor roll between the can roll 56 and the front feed roll 55. Have difficulty.

  For this reason, the loading condition is set such that the long resin film 52 slips due to excessive pulling and does not cause scratches. Specifically, the “peripheral speed of the front feed roll 55” relative to the “peripheral speed of the can roll 56”. This ratio is set with the “pre-feed rate” set appropriately, and this “pre-feed rate” is set by directly observing the past rule of thumb and the presence or absence of wrinkles from the sputtering web coater window. It adjusted suitably by the method of doing.

  However, since the conditions differ depending on the type, thickness, surface condition, etc. of the long resin film, it is practically difficult to set the “pre-feed rate” appropriately based on past empirical rules. There was a complication that had to set the “pre-feed rate” while directly observing the presence or absence of wrinkles from the window of the sputtering web coater.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073

"Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data," 2000 Society of Vacuum Coaters, 43rd. Annual Technical Conference Proceeding, Denver, April 15-20, 2000, p.335 "Improvementof Web Condition by the Deposition Drum Design," 2000 Society of Vacuum Coaters, 50th. Annual Technical Conference Proceeding (2007), p.749

  The present invention has been made paying attention to such problems, and the problem is that the carrying tension Ff acting on the long band-like material is suitable for preventing the long band-like body from slipping or slacking. An object of the present invention is to provide a method that can be maintained within conditions (that is, a method for controlling the conveyance of a long band) and a surface treatment method for the long band.

That is, the invention according to claim 1
An unwinding roll for unwinding the long strip, a winding roll for winding the long strip, a can roll provided between the unwinding roll and the winding roll and driven to rotate by a servo motor, A pre-feed roll that is provided on the upstream side and is rotated by a servo motor and supplied from the unwind roll to the can roll, and a feed roll that is provided on the downstream side of the can roll and fed from the can roll And a post-feed roll that unloads the long belt-like body to the take-up roll side, and carries it into the long belt-like body carried into the can roll with the peripheral speed of the front feed roll being slower than the peripheral speed of the can roll. Can tension is applied and the peripheral speed of the rear feed roll is the same as the peripheral speed of the can roll or faster than the peripheral speed of the can roll In the transport control method for conveying the grant while long strip body out tension to elongate strip fed,
(A) The peripheral speed of the front feed roll is continuously changed from a low speed to a high speed in the prior conveyance condition setting stage, and the long belt-like body carried into the can roll slips between the front feed roll and the can roll. The peripheral speed adjustment process that continuously changes the "pre-feed rate" defined below until it becomes slack in
(B) “Can Roll Motor Shaft Torque Cn” and “Front Roll Motor Shaft Torque Fn” when “Previous Feed Rate” is continuously changed in the peripheral speed adjusting step are measured respectively. A carry-in tension calculation step for obtaining the “load tension” Ff of the long belt-like body calculated from (1) each time;
(C) The relationship between the “previous feed rate” continuously changed and the “carrying tension” Ff of the long strip corresponding to each “previous feed rate” is graphed, and the “carrying tension” is obtained from the obtained graph. "Slip region" where it is confirmed that the long band between the front feed roll and the can roll slips due to Ff being too high, and the "loading tension" Ff is too low between the front feed roll and the can roll It is confirmed that the long band-shaped body is slack, and between these "slip area" and "slack area", the long band-shaped body can roll without causing slip or slack. A condition setting step for determining a “grip area” that is confirmed to be conveyed while being in close contact with the outer peripheral surface, and setting a “carrying tension” Ff from the range of the determined “grip area”;
(D) The “motor shaft torque Cn” of the servo motor in the can roll and the “motor shaft of the servo motor in the front feed roll so that the“ loading tension ”Ff set from the range of the“ grip region ”is constant. Control process for controlling each of the torques Fn
It is characterized by comprising.
“Previous feed rate” = (peripheral speed of previous feed roll ÷ peripheral speed of can roll) × 100
Loading tension Ff = Cn × Cg ÷ Cr−Fn × Fg ÷ Fr Formula (1)
(However, in Formula 1, Cg represents the gear ratio of the can roll, Cr represents the roll radius of the can roll, Fg represents the gear ratio of the front feed roll, and Fr represents the roll radius of the front feed roll.)

The invention according to claim 2
In the conveyance control method of the elongate belt-shaped body according to the invention of claim 1,
The torque control in the control step is characterized in that the “motor shaft torque Fn” of the servo motor in the previous feed roll is set to a minimum condition,
The invention according to claim 3
In the conveyance control method of the elongate strip according to the invention of claim 1 or 2,
The means for controlling the servo motor of the front feed roll includes feedback means for suppressing fluctuations in the “loading tension” Ff, and controls the “motor shaft torque Fn” of the front feed roll,
The invention according to claim 4
In the conveyance control method of the elongate strip according to any one of claims 1 to 3,
When the value of the “loading tension” Ff set from the “grip area” is H1, the minimum value of the loading tension in the “slip area” is H1, and the maximum value of the loading tension in the “slack area” is H2. It is set within the range of [H2 + 0.1 × (H1-H2)] to [H2 + 0.9 × (H1-H2)],
The invention according to claim 5
In the conveyance control method of the elongate strip according to any one of claims 1 to 4,
The above-mentioned “pre-feed rate” of the pre-feed roll is 99.7% or more and less than 100%,
The invention according to claim 6
In the conveyance control method of the elongate strip according to any one of claims 1 to 5,
(Peripheral speed of rear feed roll ÷ peripheral speed of can roll) × 100 = The above “rear feed rate” of the rear feed roll defined by “rear feed rate” is 100% to 101%. ,
The invention according to claim 7 provides:
In the conveyance control method of the elongate strip according to any one of claims 1 to 6,
The long belt-like body is a long resin film.

Next, the invention according to claim 8 is:
An unwinding roll for unwinding the long strip, a winding roll for winding the long strip, a can roll provided between the unwinding roll and the winding roll and driven to rotate by a servo motor, A pre-feed roll that is provided on the upstream side and is rotated by a servo motor and supplied from the unwind roll to the can roll, and a feed roll that is provided on the downstream side of the can roll and fed from the can roll After the long strip is carried out to the take-up roll side, the feed roll is disposed in the decompression chamber, and the surface treatment of the long strip is performed by the surface treatment means provided in the vicinity of the outer peripheral surface of the can roll In
The control means for transporting the long strip-shaped body is constituted by the transport control method for a long strip-shaped body according to any one of claims 1 to 7,
The invention according to claim 9 is:
In the surface treatment method of the long belt-like body according to the invention of claim 8,
The surface treatment means is a dry plating means,
The invention according to claim 10 is:
In the surface treatment method of the long band according to the invention of claim 9,
The dry plating means is a sputtering film forming means.

According to the transport control method for a long band according to the present invention,
An unwinding roll for unwinding the long strip, a winding roll for winding the long strip, a can roll provided between the unwinding roll and the winding roll and driven to rotate by a servo motor, A pre-feed roll that is provided on the upstream side and is rotated by a servo motor and supplied from the unwind roll to the can roll, and a feed roll that is provided on the downstream side of the can roll and fed from the can roll And a rear feed roll for carrying out the long belt-like body to the take-up roll side with respect to the long belt-like body carried into the can roll with the peripheral speed of the front feed roll lower than the peripheral speed of the can roll. The carry-in tension Ff is applied, and the peripheral speed of the rear feed roll is equal to or higher than the peripheral speed of the can roll. In the transport control method for conveying the grant while long strip body out tension to elongate strip fed from Lumpur,
The above-mentioned “loading tension” Ff set from the “grip region” obtained in the prior transport condition setting stage, that is, the “grip region” in which the long band-shaped body is transported without causing slipping or slackening is made constant. In addition, since the “motor shaft torque Cn” of the servo motor in the can roll and the “motor shaft torque Fn” of the servo motor in the front feed roll are controlled, the long belt-shaped body supplied from the unwinding roll is canceled. It is possible to carry the sheet while securely contacting the outer peripheral surface of the roll.

  Therefore, when surface treatment such as sputtering is performed on the long band-shaped body, there is an effect that generation of wrinkles due to a thermal load on the long band-shaped body can be efficiently suppressed.

Explanatory drawing which shows schematic structure of a sputtering web coater. Explanatory drawing of the principal part (The unwinding roll, the front feed roll, the can roll, the back feed roll, the winding roll) in the sputtering web coater to which the conveyance control method concerning this invention was applied, and its rotational drive system (draw control). The graph which shows the relationship between pre-feed rate (%) and film tension calculation value "carrying tension Ff" (N). Explanatory drawing of the principal part (The unwinding roll, the front feed roll, the can roll, the back feed roll, the winding roll) in the sputtering web coater to which the conveyance control method concerning this invention was applied, and its rotational drive system (torque control). The graph which shows the relationship between the film tension calculation value "import tension | tensile_strength Ff" (N) and elapsed time of the conveyance control method which concerns on an Example. The graph which shows the relationship between the film tension calculation value "import tension | tensile_strength Ff" (N) of the conveyance control method which concerns on a comparative example, and elapsed time.

  Hereinafter, embodiments of the present invention will be described in detail.

The conveyance control method of the present invention includes an unwinding roll for unwinding a long band-shaped body, a winding roll for winding the long band-shaped body, a rotation roller provided between the unwinding roll and the winding roll and driven by a servo motor. A can roll, a feed roll provided upstream of the can roll and rotated by a servo motor and fed with the long strip supplied from the unwind roll into the can roll, and downstream of the can roll And a post-feed roll that transports the long strip fed from the can roll to the take-up roll side, and is carried into the can roll by making the peripheral speed of the front feed roll slower than the peripheral speed of the can roll. The “loading tension” Ff is applied to the long belt-like body, and the peripheral speed of the rear feed roll is the same as the peripheral speed of the can roll, In the transport control method and faster than performing the conveyance of the long strip while applying unloaded tension to elongate strip fed from the can roller,
The “grip area” obtained from the prior conveying condition setting stage, that is, the “carrying tension” Ff set from the “grip area” in which the long band-shaped body is conveyed without causing slipping or slackening is constant. In addition, the “motor shaft torque Cn” of the servo motor in the can roll and the “motor shaft torque Fn” of the servo motor in the front feed roll are respectively controlled.

  First, before describing the conveyance control method of the present invention, a sputtering web coater in which the conveyance control method of the present invention is employed will be described.

  In this sputtering web coater (film forming apparatus), a long resin film conveyed by a roll-to-roll method is cited as an example of a long band-like body.

(1) Sputtering web coater A sputtering web coater (deposition device) 50 is provided in a decompression chamber, as shown in FIG. 1, an unwinding roll 51 for unwinding the long resin film 52 and a winding for winding the long resin film 52. A take-up roll 64, a cooling can roll 56 provided between the take-up roll 51 and the take-up roll 64 and having a temperature-controlled refrigerant circulated therein and driven to rotate by a servo motor; A pre-feed roll 55 provided on the upstream side and rotated by a servo motor and fed into the can roll 56 with the long resin film 52 supplied from the unwind roll 51; and provided on the downstream side of the can roll 56; The long resin film 52 that is driven to rotate by the servo motor and fed from the can roll 56 is wound up on the winding. The feed roll 61 is disposed after being transported to the roll 64 side, and the magnetron sputtering cathodes 57, 58, 59, 60 are outer peripheral surfaces of the can roll 56 as film forming means (dry plating means). It is provided along.

  Further, on the upstream conveyance path from the unwinding roll 51 to the can roll 56, a free roll 53 for guiding the long resin film 52, a tension sensor roll 54 for measuring the tension of the long resin film 52, and a servo. A front feed roll 55 that is rotationally driven by a motor is disposed. Then, the carry-in tension is applied to the long resin film 52 by the front feed roll 55 which is adjusted so that the peripheral speed of the can roll 56 which is rotationally driven by the servo motor is slow, and the can roll 56 is fed from the tension sensor roll 54. Thus, the long resin film 52 heading toward the can roll 56 is brought into close contact with the outer peripheral surface of the can roll 56 and conveyed. As described above, the ratio of “the peripheral speed of the front feed roll 55” to “the peripheral speed of the can roll 56”, that is, (the peripheral speed of the front feed roll 55 ÷ the peripheral speed of the can roll 56) × 100 Defined as “feed rate”.

  In addition, a downstream feed roll 61 that is rotationally driven by a servo motor, a tension sensor roll 62 that measures the tension of the long resin film 52, and a long length on the downstream conveyance path from the can roll 56 to the take-up roll 64, Free rolls 63 for guiding the length resin film 52 are respectively disposed. Then, a carry-out tension is applied to the long resin film 52 by the rear feed roll 61 adjusted so that the peripheral speed is the same or faster with respect to the can roll 56, and the can roll 56 is directed toward the take-up roll 64. The long resin film 52 is discharged. Further, the ratio of “the peripheral speed of the rear feed roll 61” to “the peripheral speed of the can roll 56”, that is, (the peripheral speed of the rear feed roll 61 ÷ the peripheral speed of the can roll 56) × 100 is referred to as the “rear feed rate”. Defined.

  Further, the unwinding roll 51 and the winding roll 64 are configured such that the tension balance of the long resin film 52 is maintained by torque control using a powder clutch or the like. Further, the long resin film 52 is unwound from the unwinding roll 51 by the rotation of the can roll 56 and the servomotor-driven front feed roll 55 and the rear feed roll 61 that rotate in conjunction with the rotation of the can roll 56. 64 is wound up.

  Further, in the sputtering web coater (film forming apparatus) 50, the magnetron sputtering cathodes 57, 58, 59, and 60 are provided along the outer peripheral surface of the can roll 56 as film forming means (dry plating means) as described above. Yes.

In sputtering film formation, the pressure inside the reduced pressure chamber of the sputtering web coater 50 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the sputtering web coater (film forming apparatus) 50 are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the reduced pressure chamber of the sputtering web coater 50, the sputtering web coater 50 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  In the case of sputtering a metal film, a plate-like target (not shown) can be used. However, when a plate-like target is used, nodules (foreign material growth) are generated on the target. Sometimes. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency. Further, since the sputtering web coater (film forming apparatus) 50 shown in FIG. 1 is assumed to be a sputtering process in which a thermal load is applied, magnetron sputtering cathodes 57, 58, 59, 60 are shown. In the case where the processing subject to a heavy load is another process such as vapor deposition, other film forming means (dry plating means) can be provided instead of the plate-like target. In addition, as another film forming means (dry plating means) to which a thermal load is applied, there are CVD (chemical vapor deposition), vacuum deposition and the like.

  Next, the rotational drive system (draw) of the main parts (the unwinding roll 51, the front feed roll 55, the can roll 56, the rear feed roll 61, and the winding roll 64) in the sputtering web coater (film forming apparatus) 50 shown in FIG. Control) will be described with reference to FIG.

  As shown in FIG. 2, the speed setting of the cooling can roll is used as a reference, the “feed rate” of each of the front feed roll and the rear feed roll is set, and the front feed roll, the cooling can roll and the rear feed roll are set respectively. Drive at speed. The cooling can roll and the front and rear feed rolls are each driven to rotate by a servo motor, so that feedback such as the rotational speed is applied. Since the controller connected to each servo motor exchanges information such as the number of rotations with other controllers, the “feed rate” of the front feed roll and the rear feed roll can maintain the set value.

  In FIG. 2, the sign “×” for the front feed roll and the rear feed roll means that the set speed of the cooling can roll is multiplied by the “feed rate”.

  In FIG. 2, the rear feed roll is also driven to rotate by a servo motor. However, even if the rear feed roll is constituted by a free roll without being driven by a servo motor, a sputtering web coater (film forming apparatus) is used. It is possible to exert the effect of carrying out the long resin film. When the rear feed roll is composed of a free roll, the peripheral speed of the rear feed roll is substantially the same as that of the cooling can roll, and the long resin film is unlikely to loosen between the rear feed roll and the cooling can roll. However, it is of course more desirable if the rear feed roll is rotationally driven by a servo motor instead of a free roll.

  In addition, the unwinding roll and the winding roll have the tension acting on the long resin film unwound from the unwinding roll and the tension acting on the long resin film unwound on the winding roll from the respective tension sensor rolls. Torque is controlled so that the specified tension is obtained by this signal. In the case of the sputtering web coater (film forming apparatus) 50 shown in FIG. 1, the tension sensor roll 54 measures the tension of the unwinding roll 51 and the front feed roll 55, and as a result, the torque of the unwinding roll 51 is controlled. . The same applies to the winding roll 64 side.

(2) Transport control method according to the present invention The transport control method according to the present invention includes:
(A) The peripheral speed of the front feed roll is continuously changed from a low speed to a high speed in the prior conveyance condition setting stage, and from the state where the long belt-like body carried into the can roll slips between the front feed roll and the can roll. A peripheral speed adjustment step for continuously changing the “pre-feed rate” defined below until the state becomes slack,
(B) “Can Roll Motor Shaft Torque Cn” and “Front Roll Motor Shaft Torque Fn” when “Previous Feed Rate” is continuously changed in the peripheral speed adjusting step are measured respectively. A carry-in tension calculation step for obtaining the “load tension” Ff of the long belt-like body calculated from (1) each time;
(C) The relationship between the “previous feed rate” continuously changed and the “carrying tension” Ff of the long strip corresponding to each “previous feed rate” is graphed, and the “carrying tension” is obtained from the obtained graph. "Slip region" where it is confirmed that the long band between the front feed roll and the can roll slips due to Ff being too high, and the "loading tension" Ff is too low between the front feed roll and the can roll It is confirmed that the long band-shaped body is slack, and between these "slip area" and "slack area", the long band-shaped body can roll without causing slip or slack. A condition setting step for determining a “grip area” that is confirmed to be conveyed while being in close contact with the outer peripheral surface, and setting a “carrying tension” Ff from the range of the determined “grip area”;
(D) The “motor shaft torque Cn” of the servo motor in the can roll and the “motor shaft of the servo motor in the front feed roll so that the“ loading tension ”Ff set from the range of the“ grip region ”is constant. Control process for controlling each of the torques Fn
It is characterized by comprising.
“Previous feed rate” = (peripheral speed of previous feed roll ÷ peripheral speed of can roll) × 100
Loading tension Ff = Cn × Cg ÷ Cr−Fn × Fg ÷ Fr Formula (1)
(However, in Formula 1, Cg represents the gear ratio of the can roll, Cr represents the roll radius of the can roll, Fg represents the gear ratio of the front feed roll, and Fr represents the roll radius of the front feed roll.)

  First, FIG. 3 shows the “front feed rate” (%) continuously changed and the “loading tension” Ff [of the long belt-like body (the long resin film 52 is exemplified) corresponding to each “previous feed rate”. It is a graph which shows typically a relationship with a film tension calculated value (N)].

  The “loading tension” means a tension acting on the long resin film 52 existing between the front feed roll 55 and the can roll 56, and acts when the long resin film 52 is carried into the can roll 56. Tension.

  In order to suppress the thermal load on the long resin film 52 during the sputtering film formation, it is important that the long resin film 52 is in close contact with the outer peripheral surface of the can roll 56 as described above. And in order to make the long resin film 52 adhere to the outer peripheral surface of the can roll 56, it is necessary to carry the long resin film 52 into the can roll 56 while pulling, and the tension (carrying in the long resin film 52 is carried in). Tension) is an important parameter.

  However, since the can roll 56 and the front feed roll 55 are arranged in a very close positional relationship as shown in FIG. 1, the above-described tension sensor roll is arranged between the can roll 56 and the front feed roll 55. It is difficult.

By the way, with respect to the “loading tension” Ff acting on the long resin film 52 existing between the front feed roll 55 and the can roll 56, the motor shaft torque Cn, the gear ratio Cg and the roll radius Cr of the can roll 56 are used. When the motor shaft torque Fn, the gear ratio Fg, and the roll radius Fr of the feed roll 55 are used, the following formula (1) can be used.
Loading tension Ff = Cn × Cg ÷ Cr−Fn × Fg ÷ Fr Formula (1)

  In addition, when the above “loading tension” Ff is obtained, the front feed roll 55 and the can roll 56 are driven by a servo motor, so that the tension of the long resin film 52 before and after both rolls is expressed as shown in Equation (1). There is no need to consider.

  Here, the peripheral speed of the front feed roll 55 is continuously changed from the low speed to the high speed, and the long resin film 52 carried into the can roll 56 is slackened between the front feed roll 55 and the can roll 56 from the slip state. The “front feed rate” is continuously changed until the state is reached (step A), and the motor shaft torque Cn of the can roll 56 and the front feed roll 55 when the “previous feed rate” is continuously changed. Each of the motor shaft torques Fn is measured, and the “loading tension” Ff of the long resin film 52 calculated from the above formula (1) is obtained each time (step B), and the “pre-feed rate” is continuously changed. When the relationship between (%) and “loading tension” Ff [film tension calculation value (N)] of the long resin film 52 corresponding to each “pre-feed rate” is graphed, for example, FIG. Graph as shown is obtained.

  From the graph of FIG. 3 obtained, it is confirmed that the “loading tension” Ff is too high and the long resin film 52 existing between the front feed roll 55 and the can roll 56 slips. Region "," carrying tension "Ff is too low, and it is confirmed that the long resin film 52 existing between the front feed roll 55 and the can roll 56 is loosened. ”And“ slack region ”, and the“ grip region ”in which the long resin film 52 is confirmed to be conveyed in close contact with the outer peripheral surface of the can roll 56 without causing slip or slack is obtained. (Step C).

  In addition, the “loading tension” Ff of the long resin film 52 at the “front feed rate” that becomes the “slip region” in the graph of FIG. 3 is the motor shaft torque Cn of the can roll 56 and the motor shaft of the front feed roll 55. It is the value [film tension calculated value (N)] obtained from the mathematical formula (1) based on the torque Fn, and since the long resin film 52 is slipping, it is generated by dynamic friction between each roll and the long resin film 52. Can be estimated. On the other hand, the “loading tension” Ff of the long resin film 52 at the “front feed rate” that becomes the “sagging region” is also expressed by a mathematical formula based on the motor shaft torque Cn of the can roll 56 and the motor shaft torque Fn of the front feed roll 55 ( The value obtained from 1) [calculated film tension value (N)] and the long resin film 52 is slack, so the front feed roll 55 only sends the long resin film 52 to the can roll 56. . Note that the negative “loading tension” Ff of the long resin film 52 is due to mechanical loss of the sputtering web coater (film forming apparatus) 50.

  Then, the condition of “slip region” shown in FIG. 3 is not preferable because the long resin film 52 is scratched. On the other hand, under the conditions of the “sagging region” shown in FIG. 3, the long resin film 52 is loosened and cannot be brought into close contact with the outer peripheral surface of the can roll 56. For this reason, the “front feed rate” (%) and the “loading tension” Ff [film are within the conditions of the “grip region” where the long resin film 52 is in close contact with the outer peripheral surface of the can roll 56 without causing slip or slack. It is important to set the calculated tension value (N)].

  The ranges of “slip area”, “sagging area” and “grip area” are different depending on the type of the long resin film 52, such as ease of elongation, ease of sliding, degree of drying, static electricity, and the like. The relationship between the “feed rate” and the “loading tension” Ff [calculated film tension (N)] and the “grip area” may change. However, through the confirmation test from step (A) to step (C) above, the relationship between the “pre-feed rate” and the “loading tension” Ff [film tension calculation value (N)] of the long resin film 52 is obtained and This can be dealt with by knowing the relationship between the “pre-feed rate” and the “loading tension” Ff [calculated film tension value (N)] and the “grip area”.

  As described above, the proper “pre-feed rate” and “loading tension” in the front feed roll 55 are obtained by performing the confirmation test from the step (A) to the step (C) without depending on the conventional experience value (empirical rule). The relationship between “Ff [calculated film tension value (N)]” and “grip area” can be known, and it has a remarkable effect that it can quickly cope with a new type of film, film thickness, surface condition and the like.

  Next, the “motor shaft torque Cn” of the servo motor in the can roll is adjusted so that the “loading tension” Ff [film tension calculation value (N)] set from the range of the “grip region” is constant. A control process (process D) for controlling each “motor shaft torque Fn” of the servomotor in the feed roll will be described with reference to FIG.

  FIG. 4 shows a cooling can instead of a rotation drive system (draw control) of main parts (unwinding roll, front feed roll, cooling can roll, rear feed roll, take-up roll) in the sputtering web coater shown in FIG. The structure of the rotational drive system (torque control) by the motor shaft torque control of each servomotor in a roll, a front feed roll, and a rear feed roll is shown.

  In FIG. 4, the sign “−” between the controllers in the cooling can roll, the front feed roll, and the rear feed roll means the difference in the motor shaft torque of each servo motor in the cooling can roll, the front feed roll, and the rear feed roll. This shows that the long resin film is pulled at both ends by this torque difference. The speed setting of the cooling can roll is used as a reference, and “carrying tension” and “carrying tension” of the front feed roll and the rear feed roll are respectively set.

  Then, the motor shaft torque of the servo motor that rotates the cooling can roll at the film conveyance speed is used as a reference, and the front feed roll is set to the “feed tension” and the rear feed roll is set to “feed tension”. FIG. 4 shows feedback control of the motor shaft torque of the servo motor in the rear feed roll.

  In the front feed roll, the controller calculates the “motor shaft torque Fn” based on the above formula (1) by the arithmetic circuit so that the set “carrying tension” Ff is constant, and controls the servo motor. For this control, known PID control or the like can be used. When the front feed roll is controlled by the “motor shaft torque Fn” of the servo motor, it is possible to suppress the fluctuation of the “carrying tension” Ff (that is, make Ff constant).

  Instead of “draw control” controlled by “front feed rate” in “grip area” in FIG. 3 showing the relationship between the previous feed rate (%) and the calculated film tension “loading tension Ff” (N), When “torque control” is used to control the roll with the “motor shaft torque Fn” of the servo motor, the fluctuation range of the “loading tension” Ff [calculated film tension (N)] can be reduced to about half. is there. For example, in a film forming process using a sputtering cathode provided in the vicinity of the outer peripheral surface of the can roll, the long resin film is conveyed while being in close contact with the outer peripheral surface of the can roll, and “loading tension” Ff [calculated film tension (N)] Therefore, it is considered that the adhesion of the long resin film to the can roll is improved, and as a result, generation of wrinkles can be suppressed.

  In the rotation drive system (torque control) shown in FIG. 4, the rear feed roll is also driven to rotate by the servo motor. However, the rear feed roll may be constituted by a free roll without being driven by the servo motor. As described above, the effect of carrying out the long resin film in the sputtering web coater can be exhibited. This is because when the rear feed roll is composed of a free roll, the peripheral speed of the rear feed roll is substantially the same as that of the cooling can roll, and the long resin film is unlikely to loosen between the rear feed roll and the cooling can roll. However, when the rear feed roll is rotationally driven by a servo motor instead of being a free roll and the motor shaft torque is controlled, it is of course more desirable because fluctuations in “unloading tension” are suppressed.

  Here, in the rotational drive system (torque control) shown in FIG. 4, the rolls such as the cooling can roll, the front feed roll, and the rear feed roll are rotationally driven by a servo motor. Can be varied independently. The unwinding roll and the winding roll are driven by torque control so as to obtain a designated tension based on signals from the respective tension sensor rolls as described above.

  Next, it replaces with the "draw control" system controlled by the "front feed rate" in the "grip area" of Drawing 3 showing the relation between the previous feed rate (%) and the calculated film tension "loading tension Ff" (N). The superiority when the “torque control” method for controlling the front feed roll with the “motor shaft torque Fn” of the servo motor will be described.

  For example, when the long belt-like body is composed of a “long resin film that is difficult to stretch”, as shown in FIG. 3, the allowable range for setting the “front feed rate” in the “grip area” is less than 0.1%. There is. In such a case, when the “torque control” method in which the “motor shaft torque” of the servo motor is controlled so that the “load tension” Ff is constant, the calculated film tension “load tension” in the “grip region” is adopted. The setting allowable range of “Ff” (N) is as wide as 100 N to 300 N as shown in FIG. 3, so it has an advantage that it is easier to control than the “draw control” method that controls by “pre-feed rate”. ing.

  In addition, in the “draw control” system, which controls the “previous feed rate”, if the feed roll is replaced, a slight error in the roll diameter will affect the optimum feed rate, so the “grip area” will be checked again. Although it is necessary to obtain it by a test, the “torque control” method in which the control is performed by the “motor shaft torque” of the servo motor has an advantage that it is hardly affected by the error of the roll diameter.

  Furthermore, for example, when heating / cooling control of a can roll, a front feed roll, a rear feed roll, etc., the “draw control” method in which the “pre-feed rate” is used, the optimum feed is realized by the change in roll diameter caused by thermal expansion. In order to affect the rate, it is necessary to obtain the “grip area” by performing another confirmation test. However, in the case of the “torque control” method, which is controlled by the “motor shaft torque” of the servo motor, the effect of changes in the roll diameter is required. It has the advantage that it is hardly affected.

  The method of controlling the front feed roll 55 with the “motor shaft torque Fn” of the servo motor has been described so far, but the rear feed roll 61 will be described below.

  First, in FIG. 2 and FIG. 4, the rear feed roll is configured to be driven to rotate by a servo motor. However, even if the rear feed roll is configured to be a free roll without being driven by a servo motor, a sputtering web coater (film formation). It is possible to exert the effect of carrying out the long resin film in the apparatus. This is because when the rear feed roll is composed of a free roll, the peripheral speed of the rear feed roll is substantially the same as that of the cooling can roll, and the long resin film is unlikely to loosen between the rear feed roll and the cooling can roll.

  However, it is needless to say that the rear feed roll 61 is driven to rotate by a servo motor under the “rear feed rate” (%) condition of the “grip region”. Even if the long resin film 52 is brought into close contact with the outer peripheral surface of the can roll 56 by the “loading tension” Ff of the front feed roll 55 and the can roll 56, the long resin film 52 is separated from the can roll 56. This is because the long resin film 52 may be loosened in the vicinity of the rear feed roll 61 and the long resin film 52 may need to be pulled by the rear feed roll 61. In particular, depending on the conveyance speed, the mechanical performance of the sputtering web coater (film forming apparatus), the type of the long resin film, the conveyance conditions, and the like, the rear feed roll 61 is rotated by a servo motor, and the “grip region” “ It should be noted that it is necessary to control the “post feed rate” (%) condition.

  Here, the peripheral speed of the rear feed roll 61 needs to be equal to or higher than the peripheral speed of the can roll 56. This is because when the peripheral speed of the rear feed roll 61 is slower than the peripheral speed of the can roll 56, the long resin film 52 may be loosened at a location away from the can roll 56. In addition, the “rear feed rate” (%) defined by (peripheral speed of rear feed roll ÷ peripheral speed of can roll) × 100 is not necessarily the reciprocal of “previous feed rate” (%) A feed rate that does not cause the long resin film 52 to slip between the can roll 56 and the rear feed roll 61 may be selected.

  Next, regarding the value of the “loading tension” [film tension calculation value (N)] Ff of the front feed roll 55 set from the range of the “grip area”, the length between the front feed roll 55 and the can roll 56 is set as follows. The minimum value of the carry-in tension [calculated film tension (N)] in the “slip region” where it is confirmed that the long resin film 52 slips is H1, and the long resin between the front feed roll 55 and the can roll 56 is When the maximum value of the carry-in tension [film tension calculated value (N)] in the “sag region” where it is confirmed that the film 52 is slack is H2, the above-mentioned “load tension” [film tension calculated value (N)] The value of Ff is preferably set in the range of [H2 + 0.1 × (H1−H2)] to [H2 + 0.9 × (H1−H2)]. This is because the value of the “loading tension” [film tension calculation value (N)] Ff of the front feed roll 55 enters the “slip area” or “sagging area” due to an unexpected situation such as static electricity. This is so that there is not.

  Since the peripheral speed of the front feed roll 55 is within the “grip region”, it is desirable that the “front feed rate” (%) of the front feed roll 55 is 99.7% or more and less than 100%.

  The “rear feed rate” (%) of the rear feed roll 61 is 100% or more so that the long resin film 52 between the can roll 56 and the rear feed roll 61 does not slip and become loose. It is desirable to set it to 101% or less.

  By the way, the “motor shaft torque Cn” of the servo motor in the can roll 56 and the servo motor in the front feed roll 55 are set so that the “loading tension” Ff set from the range of the “grip region” shown in FIG. When the “torque control” method for controlling the “motor shaft torque Fn” is specifically implemented, the “motor shaft torque Cn” of the servo motor in the can roll 56 should not be unnecessarily large (in other words, In order to minimize the “motor shaft torque Fn” of the servo motor in the front feed roll 55, the tension (tension sensor) of the long resin film 52 existing on the upstream side with the front feed roll 55 in the center. The tension measured by the roll 54) is the tension of the long resin film 52 existing on the downstream side (sna In other words, it may be adjusted so as to be a value (preferably a value not less than 30% and less than 100% of the “loading tension” Ff value) set within the range of the “grip region”. . For example, if the tension of the long resin film 52 existing between the front feed roll 55 and the can roll 56 (that is, “loading tension” Ff) is set to 200 N, it exists upstream of the front feed roll 55. The tension of the long resin film 52 (the tension of the long resin film 52 measured by the tension sensor roll 54) may be set to a value lower than the “loading tension” Ff (200N), for example, 100N.

(3) Surface treatment method, etc. The transport control method of the present invention can be suitably used for, for example, plasma treatment and ion beam treatment in addition to the sputtering web coater (film forming apparatus).

  That is, the plasma treatment and ion beam treatment performed on the can roll are performed in a reduced-pressure atmosphere in the vacuum chamber for the purpose of surface modification of the long resin film, but a process that places a thermal load on the long resin film. This causes wrinkles. For this reason, by applying the conveyance control method of the present invention, the can roll and the long resin film can be brought into close contact with each other, so that generation of wrinkles can be suppressed.

  Note that the plasma treatment is performed by a known plasma treatment method, for example, by performing discharge in a reduced-pressure atmosphere made of a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen, thereby generating oxygen plasma or nitrogen plasma. This is a method of treating a resin film. In addition, ion beam treatment uses a known ion beam source, generates a plasma discharge in a magnetic field gap to which a strong magnetic field is applied, and irradiates positive ions in the plasma as an ion beam by electrolysis with an anode. A method of processing a film.

  Next, in addition to the above-described long resin film, a long metal foil or the like can be used for the long belt-like body that is the object of the conveyance control method according to the present invention. By applying it, it is possible to efficiently apply a surface treatment by dry plating to the metal foil of a current collector such as a lithium ion secondary battery, or to use a copper alloy used for a three-layer substrate by sputtering a Ni alloy or the like on the surface of the copper foil. It can also be applied to the production of foil. And as a long resin film used for the heat resistant resin film with a metal film formed with a metal film, for example, a polyethylene terephthalate (PET) film, a polyimide film, a polyamide film, a polyester film, polytetrafluoroethylene Examples thereof include a system film, a polyphenylene sulfide film, a polyethylene naphthalate film, and a liquid crystal polymer film. These heat-resistant resin films are preferable because they have flexibility as a flexible substrate with a metal film, strength necessary for practical use, and electrical insulation suitable as a wiring material.

  A heat-resistant resin film with a metal film can be obtained by using a heat-resistant resin film as the long resin film and forming a metal film by sputtering or the like. Specifically, a heat-resistant resin film with a metal film free from wrinkles can be produced by a metallizing method using a sputtering web coater (film forming apparatus) for a heat-resistant resin film with a metal film.

  Examples of the heat-resistant resin film with metal film include a structure in which a film made of a Ni-based alloy and a Cu film are laminated on the surface of the heat-resistant resin film. The heat resistant resin film with a metal film having such a structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  The film made of Ni alloy or the like is called a seed layer, and Ni—Cr alloy or various known alloys such as Inconel, Constantan and Monel can be used, and the composition thereof is the electric insulation of the heat-resistant resin film with a metal film. Is selected according to desired characteristics such as stability and migration resistance. Moreover, when it is desired to further increase the thickness of the metal film of the heat-resistant resin film with a metal film, the metal film may be formed using a wet plating method. There are cases where a metal film is formed only by electroplating (ie, electroplating), and electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. is there. The wet plating process may employ various conditions of a conventional wet plating method.

  In this manner, a high-quality heat-resistant resin film with a metal film that does not generate wrinkles can be produced with a high yield, and can be applied to flexible wiring boards such as liquid crystal televisions and mobile phones.

  In addition, as the heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. It is also possible to use a film, a nitride film, a carbide film, or the like. Also in this case, the transport control method of the present invention can be used for forming an oxide film, a nitride film, a carbide film, or the like.

  Examples of the present invention will be specifically described below with reference to comparative examples.

  A Ni—Cr film as a seed layer was formed on a long resin film 52 using a sputtering web coater (deposition apparatus) 50 shown in FIG. 1, and a Cu film was formed thereon. For the long resin film 52, a heat-resistant polyimide film “Kapton (registered trademark)” manufactured by Toray Dipton Co., Ltd. having a width of 500 mm, a length of 800 m, and a thickness of 25 μm was used.

  The can roll 56 of the sputtering web coater (film forming apparatus) 50 has a diameter of 900 mm and a width of 750 mm, and the front feed roll 55 and the rear feed roll 61 have a diameter of 200 mm and a width of 750 mm, respectively. All roll surfaces were hard chrome plated.

  In order to form a Ni—Cr film and a Cu film as seed layers on the long resin film (polyimide film) 52, a Ni—Cr target is used for the magnetron sputtering cathode 57, and the magnetron sputtering cathodes 58 to 60 are used. Used a Cu target. Argon gas was introduced at 300 sccm, and the power applied to each cathode was 5 kW. Further, the tension of the unwinding roll 51 and the winding roll 64 was 80 N, and the can roll 56 was controlled to 20 ° C. by water cooling.

And the said long resin film (polyimide film) was set to the unwinding roll 51, and the front-end | tip part of the polyimide film was attached to the winding roll 64 via the can roll 56. FIG. The decompression chamber (vacuum chamber) was evacuated to 5 Pa by a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  Next, in order to obtain the “carrying tension” Ff within the “grip region” range, the rotational drive system in the sputtering web coater is configured by “draw control” shown in FIG. 2 and the conveyance speed of the heat-resistant polyimide film is set. 4 m / min.

  Then, the “pre-feed rate” was changed from 99.00% to 101.00%, and the film carrying tension to the can roll 56 was calculated by Equation (1) to obtain the graph of FIG. From this graph, it was determined that the “loading tension” Ff corresponding to the “previous feed rate” 99.95% in the middle of the “grip region” was “280 N”.

  Next, the rotational drive system in the sputtering web coater is changed to the “torque control” configuration shown in FIG. 4 and the “loading tension” Ff in the “grip region” range is set to “280 N” and the heat resistant polyimide is used. The film conveyance speed was 4 m / min. The tension sensor roll 54 indicates that the tension acting on the upstream heat-resistant polyimide film conveyed to the front feed roll 55 side is “120 N”, which is lower than the “loading tension” Ff (280 N). confirmed.

  Next, argon gas was introduced into each magnetron sputtering cathode and electric power was applied to start the formation of a Ni—Cr film and a Cu film thereon. At this time, [film tension calculated value (N)] calculated by the above formula (1) from the motor shaft torques of the front feed roll 55 and the can roll 56 is shown in FIG.

  From the graph of FIG. 5, the fluctuation range of the [calculated film tension value (N)] with respect to the elapsed time was about ± 5%.

  Then, while observing from the observation window (not shown) of the sputtering web coater (deposition apparatus) capable of observing the polyimide film surface on the can roll 56 during film formation, the applied power to each cathode is gradually increased. I went. As a result, the maximum sputtering power at which no wrinkle was generated due to the thermal load of sputtering was 40 kW, and no wrinkle was generated even when the heat-resistant polyimide film was formed to a total length of 800 m.

[Comparative example]
A Ni—Cr film as a seed layer was formed on a long resin film 52 using a sputtering web coater (deposition apparatus) 50 shown in FIG. 1, and a Cu film was formed thereon. For the long resin film 52, a heat-resistant polyimide film “Kapton (registered trademark)” manufactured by Toray Dipton Co., Ltd. having a width of 500 mm, a length of 800 m, and a thickness of 25 μm was used.

  The can roll 56 of the sputtering web coater (film forming apparatus) 50 has a diameter of 900 mm and a width of 750 mm, and the front feed roll 55 and the rear feed roll 61 have a diameter of 200 mm and a width of 750 mm, respectively. All roll surfaces were hard chrome plated.

  In order to form a Ni—Cr film and a Cu film, which are seed layers, on the long resin film (polyimide film) 52, a Ni—Cr target is used for the magnetron sputter target 57, and the magnetron sputter targets 58 to 60 are used. Used a Cu target. Argon gas was introduced at 300 sccm, and the power applied to each cathode was 5 kW. Further, the tension of the unwinding roll 51 and the winding roll 64 was 80 N, and the can roll 56 was controlled to 20 ° C. by water cooling.

  Next, in order to obtain the “pre-feed rate” within the “grip region” range, the rotational drive system in the sputtering web coater is configured with “draw control” shown in FIG. 2 and the conveyance speed of the heat-resistant polyimide film is set to 4 m / min.

  Then, the “pre-feed rate” was changed from 99.00% to 101.00%, and the film carrying tension to the can roll 56 was calculated by Equation (1) to obtain the graph of FIG. From this graph, it was determined that the “front feed rate” in the vicinity of the middle of the “grip region” was 99.95%.

  Next, the “front feed rate” of the front feed roll 55 is set to 99.95% while maintaining the configuration of the “draw control” shown in FIG. The film conveyance speed was 4 m / min.

  Next, argon gas was introduced into each magnetron sputtering cathode and electric power was applied to start the formation of a Ni—Cr film and a Cu film thereon. At this time, [film tension calculated value (N)] calculated by the above formula (1) from the motor shaft torques of the front feed roll 55 and the can roll 56 is shown in FIG.

  From the graph of FIG. 6, the fluctuation range of [calculated film tension (N)] with respect to the elapsed time was about ± 10%.

  When the sputtering power (total of four units) was 40 kW, there was a region where wrinkles of several meters were generated several times during the formation of the heat-resistant polyimide film having a total length of 800 meters. The generation of wrinkles is considered to be caused by a large variation in “carrying tension” [film tension calculation value (N)] to the can roll 56.

  However, a comparative example in which the “front feed rate” of the front feed roll 55 is set from within the “grip region” where it is confirmed that the heat-resistant polyimide film is conveyed without causing slipping or slackening based on a confirmation test. The conveyance control method according to the present invention is slightly inferior to the examples because the fluctuation range of the [film tension calculation value (N)] with respect to the elapsed time is large compared to the conveyance control method according to the examples. Therefore, it has an advantage that the generation of soot can be efficiently suppressed as compared with the conventional control method of appropriately adjusting the “pre-feed rate” of the front feed roll.

  According to the transport control method of the present invention, it is possible to transport the long strip supplied from the unwinding roll while securely adhering to the outer peripheral surface of the cooling can roll. When surface treatment such as sputtering is performed, the generation of wrinkles due to the thermal load on the long strip can be efficiently suppressed, so that it is industrially used for the transport control method of the long strip in the sputtering web coater. Have the availability of.

DESCRIPTION OF SYMBOLS 50 Film-forming apparatus 51 Unwinding roll 52 Long (heat-resistant) resin film 53 Free roll 54 Tension sensor roll 55 Front feed roll 56 Can roll 57 Magnetron sputtering cathode 58 Magnetron sputtering cathode 59 Magnetron sputtering cathode 61 Magnetron sputtering cathode 61 Post feed Roll 62 Tension sensor roll 63 Free roll 64 Winding roll

Claims (10)

An unwinding roll for unwinding the long strip, a winding roll for winding the long strip, a can roll provided between the unwinding roll and the winding roll and driven to rotate by a servo motor, A pre-feed roll that is provided on the upstream side and is rotated by a servo motor and supplied from the unwind roll to the can roll, and a feed roll that is provided on the downstream side of the can roll and fed from the can roll And a post-feed roll that unloads the long belt-like body to the take-up roll side, and carries it into the long belt-like body carried into the can roll with the peripheral speed of the front feed roll being slower than the peripheral speed of the can roll. Can tension is applied and the peripheral speed of the rear feed roll is the same as the peripheral speed of the can roll or faster than the peripheral speed of the can roll In the transport control method for conveying the grant while long strip body out tension to elongate strip fed,
(A) The peripheral speed of the front feed roll is continuously changed from a low speed to a high speed in the prior conveyance condition setting stage, and the long belt-like body carried into the can roll slips between the front feed roll and the can roll. The peripheral speed adjustment process that continuously changes the "pre-feed rate" defined below until it becomes slack in
(B) “Can Roll Motor Shaft Torque Cn” and “Front Roll Motor Shaft Torque Fn” when “Previous Feed Rate” is continuously changed in the peripheral speed adjusting step are measured respectively. A carry-in tension calculation step for obtaining the “load tension” Ff of the long belt-like body calculated from (1) each time;
(C) The relationship between the “previous feed rate” continuously changed and the “carrying tension” Ff of the long strip corresponding to each “previous feed rate” is graphed, and the “carrying tension” is obtained from the obtained graph. "Slip region" where it is confirmed that the long band between the front feed roll and the can roll slips due to Ff being too high, and the "loading tension" Ff is too low between the front feed roll and the can roll It is confirmed that the long band-shaped body is slack, and between these "slip area" and "slack area", the long band-shaped body can roll without causing slip or slack. A condition setting step for determining a “grip area” that is confirmed to be conveyed while being in close contact with the outer peripheral surface, and setting a “carrying tension” Ff from the range of the determined “grip area”;
(D) The “motor shaft torque Cn” of the servo motor in the can roll and the “motor shaft of the servo motor in the front feed roll so that the“ loading tension ”Ff set from the range of the“ grip region ”is constant. Control process for controlling each of the torques Fn
A method for controlling the conveyance of a long band-shaped body, comprising:
“Previous feed rate” = (peripheral speed of previous feed roll ÷ peripheral speed of can roll) × 100
Loading tension Ff = Cn × Cg ÷ Cr−Fn × Fg ÷ Fr Formula (1)
(However, in Formula 1, Cg represents the gear ratio of the can roll, Cr represents the roll radius of the can roll, Fg represents the gear ratio of the front feed roll, and Fr represents the roll radius of the front feed roll.)   2. The method for controlling the conveyance of a long belt according to claim 1, wherein the torque control in the control step is performed under such a condition that the “motor shaft torque Fn” of the servo motor in the front feed roll is minimized.   The means for controlling the servo motor of the front feed roll includes feedback means for suppressing fluctuations in the “loading tension” Ff, and controls the “motor shaft torque Fn” of the front feed roll. Item 3. The method for controlling the conveyance of a long band according to Item 1 or 2.   When the value of the “loading tension” Ff set from the “grip area” is H1, the minimum value of the loading tension in the “slip area” is H1, and the maximum value of the loading tension in the “slack area” is H2. It is set in the range of [H2 + 0.1 * (H1-H2)]-[H2 + 0.9 * (H1-H2)], The long strip | belt shape in any one of Claims 1-3 characterized by the above-mentioned. Body transport control method.   5. The method for controlling the transport of a long strip according to any one of claims 1 to 4, wherein the "pre-feed rate" of the front feed roll is 99.7% or more and less than 100%. (Peripheral speed of rear feed roll ÷ peripheral speed of can roll) × 100 = The above “rear feed rate” of the rear feed roll defined by “rear feed rate” is 100% to 101%. The conveyance control method of the elongate strip | belt shaped object in any one of Claims 1-5.   The said long strip-shaped body is a long resin film, The conveyance control method of the long strip-shaped body in any one of Claims 1-6 characterized by the above-mentioned. An unwinding roll for unwinding the long strip, a winding roll for winding the long strip, a can roll provided between the unwinding roll and the winding roll and driven to rotate by a servo motor, A pre-feed roll that is provided on the upstream side and is rotated by a servo motor and supplied from the unwind roll to the can roll, and a feed roll that is provided on the downstream side of the can roll and fed from the can roll After the long strip is carried out to the take-up roll side, the feed roll is disposed in the decompression chamber, and the surface treatment of the long strip is performed by the surface treatment means provided in the vicinity of the outer peripheral surface of the can roll In
8. A surface treatment method for a long band-shaped body, wherein the control means for transporting the long band-shaped body is configured by the conveyance control method for a long band-shaped body according to any one of claims 1 to 7.   9. The surface treatment method for a long belt-like body according to claim 8, wherein the surface treatment means is a dry plating means.   The surface treatment method for a long belt-like body according to claim 9, wherein the dry plating means is a sputtering film forming means.

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