JP2012132080A - Wrinkle smoothing method and wrinkle smoothing apparatus on can roll, and film deposition apparatus including the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and apparatus for smoothing wrinkles of a long substrate, formed when executing the treatment with thermal loads thereon, on an outer circumferential surface of a can roll while winding the long substrate to be conveyed by the roll-to-roll system around the outer circumferential surface of the can roll and cooling the long substrate.SOLUTION: An inclined part 21, in which the outside diameter of a can roll 56 is gradually reduced toward an end side of the can roll 56, is provided at a part, with which a part in the vicinity of an end of a long substrate F is brought into contact, in at least one end side of an outer circumferential surfaces 56a of the can roll 56. The long substrate F is expanded in the width direction by pressing an end of the long substrate F against the inclined part 21, by a wheel 31 provided on a part of the inclined part 21 which does not oppose treatment means 57-60 such as sputtering cathodes.

Description

  The present invention relates to a wrinkle-stretching method and apparatus for a long heat-resistant resin film on a can roll, and in particular, continuously forming a long heat-resistant resin film such as sputtering while conveying the long heat-resistant resin film along the outer peripheral surface of the can roll. The present invention relates to a wrinkle-stretching method and apparatus for reducing film wrinkles generated by a thermal load when performing a film treatment.

  Many types of flexible wiring boards obtained by coating a metal film on a heat-resistant resin film are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. As a material for this flexible wiring board, a heat-resistant resin film with a metal film in which a metal film is formed on one or both sides of a heat-resistant resin film is used, and photolithography or etching is applied to the heat-resistant resin film with a metal film. A flexible wiring board having a predetermined wiring pattern can be obtained by applying a thin film technology such as the above. In recent years, the wiring patterns of flexible wiring boards have been increasingly miniaturized and densified. Therefore, it has become even more important that the heat-resistant resin film with a metal film is flat and free of wrinkles.

  As a manufacturing method of this type of heat-resistant resin film with a metal film, a method of manufacturing a metal foil by attaching it to a heat-resistant resin film with an adhesive (manufacturing method of a three-layer substrate), a heat-resistant resin solution on the metal foil After coating, the method of manufacturing by drying (casting method), or by forming a metal film on a heat-resistant resin film by vacuum film forming method or a combination of vacuum film forming method and wet plating method A method (metalizing method) or the like is known. Examples of the vacuum film forming method in the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  As for the metalizing method, Patent Document 1 discloses a method in which a chromium layer is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. Further, in Patent Document 2, a first metal thin film formed by sputtering using a copper-nickel alloy as a target and a second metal thin film formed by sputtering using a copper as a target are arranged on a polyimide film in this order. The material for flexible circuit boards obtained by laminating | stacking on is disclosed. When a heat resistant resin film such as a polyimide film is used as a substrate and vacuum film formation is performed on the substrate, a sputtering web coater is generally used.

  By the way, in the vacuum film-forming method mentioned above, although sputtering method is generally excellent in adhesive force, it is said that the heat load given to a heat resistant resin film is large compared with vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled. In order to prevent the generation of wrinkles, the sputtering web coater, which is a manufacturing device for heat-resistant resin films with metal film, employs a structure that cools the heat-resistant resin film during sputtering from the back using a can roll with a cooling function. Has been.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus that is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus is equipped with a cooling roll that plays the role of the above-mentioned can roll, and the film is brought into close contact with the cooling roll by a sub-roll provided at least on the film feeding side or the feeding side of the cooling roll. Control is being performed.

  However, when high power is applied to the sputtering cathode in order to improve the film formation rate, for example, a can roll having a cooling function of water cooling alone does not sufficiently cool the heat-resistant resin film with a metal film, and film wrinkles are generated. There was a thing. Therefore, in order to reduce this wrinkle, a method of contacting (adhering) the can roll with an expanded roll or the like in a state where the film has been spread in the width direction in advance, or a pair of wheels are brought into contact with both edges of the film. A method of spreading the film in the width direction, and a method of spreading a film in the width direction by installing a wheel on the can roll have been proposed.

  As for a method of spreading the film in the width direction in advance using an expand roll, for example, Patent Document 4 describes a method of spreading the wrinkles of the film in the air (floating state). Specifically, as shown in FIG. 1, the rubber expand roll 1 made into a banana shape is brought into close contact with the long heat-resistant resin film F being conveyed in the direction of arrow A while rotating. A method for reducing wrinkles by spreading the heat-resistant resin film F in the width direction is shown.

  Further, as shown in FIG. 2, the warm roll 2 having a spiral groove 2a formed on the surface thereof is used, and the long heat-resistant resin film F being conveyed is adhered in the direction of arrow A while rotating the worm roll 2. Shows a method for reducing wrinkles by spreading the long heat-resistant resin film F in the width direction.

  Moreover, about the method of extending a film in the width direction with a pair of wheels, for example, as shown in FIG. 3, the rotation shaft 3 a is not parallel to the direction orthogonal to the conveyance arrow A of the long heat-resistant resin film F but obliquely. A pair of inclined wheels 3 are arranged on the film conveyance path so that both edges of the long heat resistant resin long heat resistant resin film F being conveyed are in contact with the pair of inclined wheels 3. A method of reducing wrinkles by spreading the long heat-resistant resin film F in the width direction is known.

  That is, in this method, the rotating shaft 3a of the pair of inclined wheels 3 rotates obliquely with respect to the direction orthogonal to the conveying direction (arrow A) of the long heat resistant resin film F, and thus the long heat resistant resin film F is expanded in the width direction to reduce the generation of wrinkles. In this method, it is more effective to perform wrinkle stretching using the two pairs of inclined wheels 3 so that the pair of inclined wheels 3 can come into contact with both sides of the long heat-resistant resin film F, respectively.

  For another method of spreading the film in the width direction with a pair of wheels, for example, as shown in FIG. 4, instead of the pair of inclined wheels 3 having the rotating shaft 3 a inclined, a spiral shape is used. A method using a pair of grooved wheels 4 in which grooves 4a are formed is known. Also in this apparatus, when the pair of grooved wheels 4 rotate, the long heat-resistant resin film F is expanded in the width direction, and the generation of wrinkles is reduced. In addition, also in this method, wrinkle elongation is performed using two pairs of grooved wheels 4 so that the pair of grooved wheels 4 can contact from both sides of the long heat-resistant resin film F in the same manner as described above. It is more effective.

  Furthermore, you may arrange | position the apparatus shown in above-mentioned FIG.3 and FIG.4 on the outer peripheral surface of a can roll. In this case, wrinkle stretching is performed while sandwiching both edges of the film between the pair of wheels and the outer peripheral surface of the can roll. For example, Patent Document 5 discloses an apparatus for extending wrinkles on a can roll. In this apparatus, as in FIG. 3, the rotation axes of a pair of wheels that contact both edges of the film are arranged obliquely rather than parallel to the direction perpendicular to the film transport direction. In addition, a drive belt is slanted on a pair of wheels contacting both edges of the film.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 JP 2005-247475 A International Publication No. 2005/001157 pamphlet

  The conventional wrinkle-stretching method as described above is a short distance in the film conveyance direction when a roll or wheel for wrinkle-stretching contacts the surface of the heat-resistant resin film before or during film formation by sputtering. Since the film is spread at once in the width direction, excessive tension is applied to the film or the back surface of the film may be scratched. Furthermore, in order to perform effective wrinkle stretching, it is necessary to bring the rolls and wheels into contact with a considerably wide area from both ends of the heat-resistant resin film. For this reason, the effective film formation width without contact with the roll or wheel, that is, the width that can be used as the wiring board cannot be made wide, and the material cost may be excessive.

  In addition, it is difficult to adjust the conventional method that expects a wrinkle stretching effect only with rolls and wheels, such as rolling a banana shape, forming a spiral groove on the wheel surface, or arranging the wheel diagonally In some cases, the film was biased or meandered when the roll or wheel position or the contact pressure with the film slightly shifted. As described above, when the metal film is formed by sputtering, the generation of wrinkles can be reduced even when a large heat load is applied to the heat-resistant resin film. In particular, the generation of wrinkles due to elongation in the width direction of the film can be reduced. There has been a desire for a method and apparatus for stretching wrinkles on a can roll.

  The present invention has been made paying attention to such conventional problems, and the problem is that sputtering film formation is performed while a long substrate such as a heat resistant resin film is brought into contact with the outer peripheral surface of the can roll. When a long thermal load is applied to the long substrate, the generation of wrinkles on the long substrate is reduced, and in particular, the can roll that reduces the generation of wrinkles due to the elongation in the width direction of the long substrate is performed. It is an object of the present invention to provide a wrinkle-stretching method and apparatus therefor.

  In order to solve the above-mentioned problems, the present inventor has conducted extensive research, and as a result, a metal film is formed by sputtering while transporting a long substrate made of a heat-resistant resin such as a polyimide film along the outer peripheral surface of the can roll. As the long heat resistant resin film is transported, the wheel is arranged so as to contact the end of the long heat resistant resin film such as a polyimide film wound around the outer peripheral surface of the can roll. By gradually expanding in the width direction, the present inventors have found that the generation of wrinkles due to the elongation in the film width direction is reduced, leading to the present invention.

  That is, the present invention provides a method for extending a wrinkle of a long substrate. A long substrate that is conveyed by a roll-to-roll method is wound around the outer peripheral surface of a can roll and cooled while the long substrate is defined on the outer peripheral surface. A method of extending wrinkles of a long substrate on a peripheral surface of a can roll, which is generated when performing a process with a thermal load by a processing means provided opposite to a transport path, wherein at least one of the peripheral surfaces of the can roll Provided with an inclined portion that gradually decreases the outer diameter of the can roll toward the end portion side of the can roll at a location where the vicinity of the end portion of the long substrate contacts on one end side, and the processing means of the inclined portion The long substrate is widened in the width direction by pressing the end of the long substrate against the inclined portion with a wheel provided at a position not facing the substrate.

  In addition, the long substrate wrinkle-stretching apparatus provided by the present invention is a long substrate that is defined on the outer peripheral surface while the long substrate conveyed by the roll-to-roll method is wound around the outer peripheral surface of the can roll and cooled. A device that stretches the wrinkles of a long substrate generated on the outer peripheral surface of the can roll on the outer peripheral surface of the can roll, which is generated when the processing means provided opposite to the transport path is subjected to a heat load. An inclined portion in which the outer diameter of the can roll gradually decreases toward the end portion side of the can roll provided at a position where the vicinity of the end portion of the long substrate contacts on one end side, and the processing among the inclined portions. It is characterized by comprising a wheel that presses the end of the long substrate against the inclined portion at a location not facing the means.

  According to the present invention, since the long substrate can be gradually expanded in the width direction, an excessive force is not applied to the long substrate, and the generation of wrinkles in the width direction without damaging the long substrate. Can be reduced. Therefore, since the generation of wrinkles on the long substrate can be effectively suppressed even in sputtering film formation, for example, where a large heat load is applied, a high-quality heat-resistant resin film with a metal film can be provided.

It is a schematic diagram which shows an example of the conventional wrinkle-stretching apparatus. It is a schematic diagram which shows the other example of the conventional wrinkle-stretching apparatus. It is a schematic diagram which shows the further another example of the conventional wrinkle-stretching apparatus. It is a schematic diagram which shows the further another example of the conventional wrinkle-stretching apparatus. It is a schematic diagram which shows one specific example of the sputtering web coater in which the wrinkle-stretching apparatus which concerns on this invention is used suitably. It is the perspective view and partial sectional view of a can roll provided with the inclination part used for the wrinkle extending method of the 1st Embodiment of this invention. It is the top view and side view of the wrinkle-stretching apparatus of the 1st Embodiment of this invention, and the schematic diagram which shows the principle which a wrinkle extends | stretches. It is the perspective view and partial sectional view of a can roll provided with the inclination part used for the wrinkle-stretching method of the 2nd Embodiment of this invention. It is the top view and side view of the wrinkle-stretching apparatus of the 2nd Embodiment of this invention, and the schematic diagram which shows the principle which a wrinkle extends | stretches.

  The long substrate wrinkle-stretching method and wrinkle-stretching device according to the present invention is a long substrate that is defined on the outer peripheral surface while the long substrate conveyed by the roll-to-roll method is wound around the outer peripheral surface of the can roll and cooled. A wrinkle of a long substrate that is generated when a process with a thermal load is performed by a processing means provided opposite to the conveyance path is extended on the outer peripheral surface of the can roll, and at least one end of the outer peripheral surface of the can roll An inclined portion is provided on the side where the vicinity of the end of the long substrate is in contact with the outer end of the can roll toward the end of the can roll. It is characterized in that the long substrate is widened in the width direction by pressing the end of the long substrate against the outer peripheral surface by a wheel provided at a position not facing the surface.

  The conventional method of extending wrinkles with a banana-shaped roll or a wheel with a slanted groove on the outer peripheral surface or a slanting wheel is a long way to adjust the position and contact pressure of the roll and wheel. Although the substrate transport was sensitively affected and the long substrate was sometimes biased or meandered, the present invention extends wrinkles with a combination of a can roll and a wheel, although it is extremely easy to adjust. The wrinkles can be effectively stretched. The wrinkle-stretching method of the present invention applies that the long substrate is pushed and spread along the inclined surface by pressing the wheel from right above the end of the long substrate contacting the inclined surface provided on the outer peripheral surface of the can roll. It is a thing.

  Hereinafter, a first embodiment of the long substrate wrinkle-stretching method and apparatus of the present invention will be described in detail with reference to the drawings, taking a long heat-resistant resin film as an example of the long substrate. First, a film forming apparatus in which the wrinkle stretching method and apparatus of the present invention are preferably used will be described with reference to FIG. The apparatus shown in FIG. 5 is a film forming apparatus (sputtering web coater) 50 that performs sputtering film formation on a long heat-resistant resin film, and a metal film is efficiently and continuously formed on one surface of the long heat-resistant resin film F. Can be formed.

  More specifically, the sputtering web coater 50 is provided in the vacuum chamber 51 and has a predetermined film formation on the long heat-resistant resin film F unwound from the unwinding roll 52 rotating in the direction of arrow A. After the treatment, the take-up roll 64 is used for winding. A motor-driven can roll 56 in which a temperature-controlled refrigerant circulates is arranged in the film conveyance path between the unwind roll 52 and the take-up roll 64.

  In the film conveyance path from the unwinding roll 52 to the can roll 56, a free roll 53 for guiding the long heat resistant resin film F, a tension sensor roll 54 for measuring the tension of the long heat resistant resin film F, A motor-driven feed roll 55 is arranged in this order for adjusting based on the peripheral speed of the can roll 56 and bringing the long heat-resistant resin film F into close contact with the outer peripheral surface of the can roll 56.

  Similarly, the film heat transfer path from the can roll 56 to the take-up roll 64 is adjusted based on the peripheral speed of the can roll 56 so that the long heat-resistant resin film F adheres to the outer peripheral surface of the can roll 56. A motor-driven feed roll 61, a tension sensor roll 62 that measures the tension of the long heat-resistant resin film F, and a free roll 63 that guides the long heat-resistant resin film F are arranged in this order.

  The unwinding roll 52 and the winding roll 64 maintain the tension balance of the long heat-resistant resin film F by a powder clutch or the like, and the motor-driven feed that rotates in conjunction with the rotation of the can roll 56. The long heat-resistant resin film F is unwound from the unwinding roll 52 by the rolls 55 and 61, and is wound around the winding roll 64.

  In the vicinity of the can roll 56, a film forming means for forming a metal film on the surface of the long heat-resistant resin film F by a dry thin film processing method such as sputtering so as to face the outer peripheral surface of the can roll 56. The magnetron sputtering cathodes 57, 58, 59 and 60 are arranged. In the sputtering web coater 50 shown in FIG. 5, a case where a plate-like target is used for sputtering film formation of a metal film is shown. However, when a plate-like target is used, nodules (foreign matter) are formed on the target. Growth) may occur.

  When this becomes a problem, a cylindrical rotary target that does not generate nodules (growth of foreign matter) and has high target use efficiency may be used. In this sputtering web coater 50, the magnetron sputtering cathode is used as the dry thin film forming means, but the present invention is not limited to this, and other film forming means such as vapor deposition may be used.

  Next, the wrinkle stretching apparatus according to the first embodiment of the present invention will be described. As shown in FIG. 6, the wrinkle stretching apparatus according to the first embodiment has a can roll at both ends of the conveyance path P defined by the outer peripheral surface 56 a of the can roll 56 among the outer peripheral surfaces 56 a of the can roll 56. Protrusions 20 having a triangular cross-section when cut along a plane including 56 central axes 56o are formed.

  As a result, the outer diameter of the can roll 56 is gradually increased toward the end of the can roll 56 at a location where the vicinity of the end of the long heat resistant resin film F contacts the outer peripheral surface 56 a of the can roll 56. It is possible to provide the inclined portion 21 that becomes thinner. The protrusion 20 is preferably formed so that the inclined portion 21 is located in an area up to 50 mm from the end of the conveyance path P defined on the outer peripheral surface 56a of the can roll 56 to the inside of the conveyance path. It is more preferable to form so as to be located within an area of 30 mm from the end of P to the inside of the conveyance path.

  The protrusion 20 is preferably in the form of a strip that is continuous at a substantially constant height and a substantially constant inclination angle over the entire circumference of the can roll 56, thereby making the long heat-resistant resin film F uniform in the width direction. It can be expanded. Specifically, the inclination angle (angle α in FIG. 6B) of the inclined portion 21 on the end side of the protrusion 20 of the can roll 56 is 5 to 30 ° with respect to the rotation axis 56 o of the can roll 56. It is desirable. If the inclination angle is less than 5 °, there is almost no effect of wrinkle stretching. On the other hand, if it exceeds 30 °, excessive stress is applied to the long heat-resistant resin film F, which may cause wrinkles.

  The height H of the protrusion 20 is desirably 0.1 to 3 mm. If this height H is less than 0.1 mm, there is almost no effect of wrinkle stretching. On the other hand, if it exceeds 3 mm, it is difficult to adhere the long heat-resistant resin film F along the outer peripheral surface 56 a of the can roll 56. It is. It is preferable that the protrusion 20 has a smooth shape so that the long heat-resistant resin film F can be stretched without being damaged. For example, although the cross section is shown in a triangular shape in FIG. 6, the cross section is preferably substantially trapezoidal (Mt. Fuji) or a dome shape extending to the outer peripheral surface side of the can roll, and the top of the cross section is particularly curved. It is more preferable that it is formed by.

  Moreover, it is preferable that the surface of the protrusion 20 has a coefficient of friction as low as possible, whereby the long heat-resistant resin film F can be easily stretched in the width direction. As a method of reducing the friction coefficient, for example, a method of applying a fluororesin (for example, a polytetrafluoroethylene resin such as Teflon (registered trademark)) to at least the inclined portion 21 of the protrusion 20 can be cited. Alternatively, a groove extending in the direction of the central axis 56 o of the can roll 56 may be formed in at least the inclined portion 21 of the protrusion 20. As a method of providing the protrusion 20 on the outer peripheral surface 56a of the can roll 56, the protrusion may be formed when the can roll is processed, or a belt-like member may be attached to the existing can roll by welding or the like. The protrusion 20 may be provided only on one end portion of the can roll 56.

  As shown in FIG. 7A, a wheel unit 30 having a rotatable wheel 31 is provided at a position facing the inclined portion 21 on the end of the can roll 56 described above. The rotation center axis 31o of the wheel 31 is parallel to the center axis 56o of the can roll 56, and is further urged toward the inclined portion 21 by the urging means 32 using a spring, rubber, air pressure, or the like.

  Thereby, when the long heat resistant resin film F conveyed on the conveyance path P defined on the outer peripheral surface 56a of the can roll 56 passes through the position where the wheel unit 30 is provided, the end portion of the long heat resistant resin film F is canned. It is sandwiched between the inclined portion 21 of the outer peripheral surface 56 a of the roll 56 and the wheel 31. At that time, the end of the long heat-resistant resin film F is pressed from above by the wheel 31.

  As a result, as shown in FIG. 7B, a force acts on the end of the long heat-resistant resin film F in the direction along the slope of the inclined portion 21 (the direction of the arrow S), and the long heat-resistant resin film F The conductive resin film F is pulled in the width direction (the direction of the arrow W). Thereby, the wrinkles which generate | occur | produce in the elongate heat resistant resin film F are extended. The wheel 31 may be provided rotatably on the wheel unit 30 as described above and may be driven by the rotation of the can roll 56, or the rotation of the can roll 56 using a rotation driving means such as a motor. It may be rotated at a speed equivalent to the speed.

  In the wheel 31, an outer peripheral portion 31a that is in direct contact with the long heat-resistant resin film F is covered with a flexible member having a high coefficient of friction such as butyl rubber, polyurethane, silicon rubber, or fluorine rubber (for example, Viton (registered trademark)). It is preferable that the outer peripheral portion 31a itself is formed by the member. The outer diameter of the wheel 31 is preferably 1 to 10 cm. Thereby, the wheel 31 can be made to contact within the range from the edge part of the elongate heat resistant resin film F to 50 mm, and it becomes possible to reduce manufacturing cost. More preferably, by contacting the wheel 31 within the range from the end of the long heat resistant resin film F to 30 mm, the area (width) in which the long heat resistant resin film F can be processed is expanded, and the yield of the product is increased. It leads to improvement.

  In other words, since the surface of the wheel 31 that is in contact with the outer peripheral portion 31a may be scratched or contaminated, it is not preferable to make it a product. It is desirable to do. For this reason, it is desirable for the wheel 31 to contact the vicinity of the end of the long heat-resistant resin film F as much as possible.

  The number of wheel units 30 to be installed may be one or a plurality, may be installed only at one end of the can roll 56, or may be installed in pairs at both ends. However, it is desirable that the installation location is in the areas 65, 66, 67, 68 and 69 shown in FIG. In other words, it is desirable that the magnetron sputtering cathodes 57, 58, 59 and 60 are installed not in the region where the magnetron sputtering cathodes 57, 58, 59 and 60 face each other but in the front part or the rear part in the film transport direction of each magnetron sputtering cathode 57, 58, 59 and 60.

  The reason for this is that if the wheel unit 30 is provided in a region where the magnetron sputtering cathodes 57, 58, 59 and 60 are opposed to each other, the wheel unit 30 may become a shielding mask during film formation and hinder sputtering. Because. Further, particularly the outer peripheral portion 31a of the wheel 31 may have a problem of heat resistance against heat generated by being exposed to sputtering plasma. Furthermore, when the wheel 31 is contaminated by sputtering, the rotation of the wheel 31 may cause foreign matter.

  Next, a wrinkle stretching apparatus according to a second embodiment of the present invention will be described. As shown in FIG. 8, the wrinkle stretching apparatus according to the second embodiment has a can roll 156 at both ends of the conveyance path P defined by the outer peripheral surface 156 a of the can roll 156 out of the outer peripheral surface 156 a of the can roll 156. An inclined portion 26 is formed so that the outer diameter of the can roll 156 gradually decreases toward the end portion side, and the outer diameter of the can roll 156 is further reduced on the end portion side. As shown in FIG. 9A, the wheel unit 30 similar to that of the first embodiment described above is provided at a position facing the inclined portion 26.

  That is, the second embodiment of the present invention is basically the same as the first embodiment described above except that the depressions 25 are formed at both ends of the can roll 156 instead of the protrusions 20 described above. . Accordingly, also in the second embodiment, the long heat-resistant resin film F conveyed on the conveyance path P defined on the outer peripheral surface 156a of the can roll 156 passes through the position where the wheel unit 30 is provided. At that time, the end portion is sandwiched between the inclined portion 26 of the outer peripheral surface 156 a of the can roll 156 and the wheel 31 and pressed from above by the wheel 31.

  As a result, as shown in FIG. 9B, a force acts on the end portion of the long heat-resistant resin film F in a direction along the slope of the inclined portion 26 (direction of arrow S), and the long heat-resistant resin film F The conductive resin film F is pulled in the width direction (the direction of the arrow W). Thereby, the wrinkles which generate | occur | produce in the elongate heat resistant resin film F are extended.

  As in the first embodiment, the inclined portion 26 obtained by forming the depression 25 is in the region from the end of the conveyance path P defined on the outer peripheral surface 156a of the can roll 156 to the inside of the conveyance path up to 50 mm. It is preferable that it is located in. In addition, the inclination angle of the inclined portion 26 (angle β in FIG. 8) is preferably 5 to 30 ° with respect to the rotation shaft 156 o of the can roll 156. Further, the depth D of the recess 25 is preferably 0.1 to 3 mm, and a fluorine resin (for example, a polytetrafluoroethylene resin such as Teflon (registered trademark)) is applied to the surface of the inclined portion 26. It is preferable to form a groove extending in the direction of the rotation axis 156o of the can roll 156 so that the friction coefficient is as low as possible.

  In the present invention, as described above, protrusions and depressions are provided on the outer peripheral surface of the can roll, but even in this case, the surface of the long heat-resistant resin film F is lifted from the outer peripheral surface of the can roll and a gap is formed therebetween. It can be along the outer peripheral surface without any problem. This is because the sputtering roll coater applies a tension to the long heat-resistant resin film F being conveyed.

  By using the sputtering web coater equipped with the above-described wrinkle-stretching device of the present invention, a heat-resistant resin film with a metal film free from wrinkle defects can be obtained by a metalizing method. As a specific example of the heat-resistant resin film with a metal film produced by the dry thin film forming means, a laminated structure in which a film made of a Ni-based alloy and the like and a Cu film are laminated on the surface of the heat-resistant resin film can be mentioned. . The heat-resistant resin film with a metal film having such a laminated structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  The film made of the Ni alloy or the like is called a seed layer, and its composition is determined by characteristics such as electrical insulation and migration resistance required for the heat-resistant resin film with a metal film. For this seed layer, for example, various known alloys such as Ni—Cr alloy, Inconel, Constantan, and Monel can be used. When it is desired to further increase the thickness of the metal film (Cu film) of the heat-resistant resin film with metal film, the metal film may be formed using a wet plating method.

  In the wet plating method, there is a case where a metal film is formed only by an electroplating process, or a wet plating method is combined with an electroless plating process as a primary plating and an electrolytic plating process as a secondary plating. . Specific conditions for the wet plating process may be various conditions of a conventionally used wet plating method.

  Examples of the heat resistant resin film used for the heat resistant resin film with a metal film include a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, or a liquid crystal polymer. Can be mentioned. Among these, an optimum material is selected in consideration of flexibility as a flexible substrate with a metal film, strength necessary for practical use, electrical insulation suitable as a wiring material, and the like.

  In the above description, as a heat-resistant resin film with a metal film, a laminated structure in which a metal film such as a Ni-Cr alloy or Cu is laminated on a long heat-resistant resin film is described as an example. However, an oxide film, a nitride film, a carbide film, or the like may be formed instead of or in addition to the metal film. In the above description, the sputtering in the sputtering web coater has been taken as an example of the process in which heat is applied to the long substrate. However, the wrinkle stretching method and the wrinkle stretching apparatus of the present invention are not limited to the sputtering process, but the plasma process and the ion process. It can also be used for surface modification such as beam treatment.

  Hereinafter, the wrinkle stretching method according to the present invention will be specifically described with reference to examples and comparative examples.

[Example 1]
A metal film was formed on the long heat-resistant resin film F using a sputtering web coater (manufacturing apparatus for heat-resistant resin film with metal film) 50 as shown in FIG. The can roll 56 was made of aluminum and had a diameter of 900 mm and a width of 750 mm. The surface of this can roll 56 was subjected to hard chrome plating. The long heat-resistant resin film F (hereinafter referred to as film F only in Examples) has a width of 500 mm, a length of 500 m, and a thickness of 25 μm manufactured by Ube Industries, Ltd. “UPILEX (registered trademark)” It was used.

  Protrusions 20 having an isosceles cross section as shown in FIG. 6 are provided on both ends of the can roll 56 on the outer peripheral surface 56a of the can roll 56, and the apex angles thereof are smoothly cut. The inclination angle α of the inclined portion 21 of the protrusion 20 is 5 ° with respect to the rotation shaft 56o of the can roll 56, and the height H thereof is 0.3 mm. The protrusion 20 has an apex angle of 10 mm from the end of the conveyance path P defined on the outer peripheral surface 56 a of the can roll 56 to the inside of the conveyance path.

  Five pairs of wheel units 30 each having a wheel 31 having an outer diameter of 20 mm and a width of 3 mm in regions 65, 66, 67, 68, and 69 before and after the magnetron sputtering targets 57, 58, 59, 60 of the sputtering web coater 50. Provided. Specifically, in each of these regions 65, 66, 67, 68, and 69, the wheels 31 abut on the slope centers of the slope portions 21 of the protrusions 20 provided at both ends of the outer peripheral surface 56 a of the can roll 56. I did it. Each wheel 31 has an outer peripheral portion 31a formed of Viton (registered trademark) and pressed against the inclined portion 21 by a spring. The spring pressure was about 5N.

  The metal film formed on the film F was formed by forming a Cu film on the Ni—Cr film as a seed layer. For this reason, a Ni—Cr target was used for the magnetron sputter target 57, and a Cu target was used for the magnetron sputter targets 58, 59 and 60. Further, 300 sccm of argon gas was introduced, and film formation was performed with power control of 10 kW applied to each cathode.

  The tension of the unwinding roll 52 and the winding roll 64 was 80N. Further, the peripheral speed of the upstream motor drive feed roll 55 is 99.9% of the peripheral speed of the can roll 56, and the peripheral speed of the downstream motor drive feed roll 61 is 100.1% of the peripheral speed of the can roll 56. It was. With this setting, the film F was gradually pulled and could be strongly adhered to the surface of the can roll 56. Further, the can roll 56 was controlled to 20 ° C. by water cooling, but if the film F did not adhere tightly to the outer peripheral surface 56 a of the can roll 56, the cooling effect due to heat conduction could not be expected.

And the said film F is set to the unwinding roll 52, and the front-end | tip part passes through the free roll 53, the tension sensor roll 54, the feed roll 55, the can roll 56, the feed roll 61, the tension sensor roll 62, and the free roll 63. And attached to the take-up roll 64. Next, the vacuum chamber 51 was evacuated to 5 Pa using a plurality of dry pumps, and then evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

  Then, after the film F is conveyed at a speed of 3 m / min, argon gas is introduced into each of the magnetron sputtering cathodes 57, 58, 59, and 60, and electric power is applied to form a Ni—Cr film seed layer and a film thereon. The formation of a Cu film to be formed was started.

  When film formation is being performed, the film F is observed from an observation window that allows observation of the surface of the film F on the outer peripheral surface 56a of the can roll 56. As a result, the magnetron sputtering cathodes 57, 58, 59, and 60 are observed. In the film F immediately after film formation that passed through the film formation zone, the film F floated from the can roll 56 that caused wrinkles in a direction parallel to the film conveyance direction. However, every time it passed through the positions of the regions 65, 66, 67, 68, 69 to which the wheel unit 30 was attached, the float disappeared.

  When a length of 290 m of the film F passed, the power to the plasma in each plasma reaction chamber and each magnetron sputter cathode 57, 58, 59, 60 was stopped, and the introduction of each gas was also stopped. Next, the conveyance of the film F was stopped and each pump was stopped. Thereafter, the atmosphere was released through a vent, and the end portion of the film F was removed from the unwinding roll 52. Finally, all the film F was wound on the winding roll 64 and then removed. When the film F wound up on the winding roll 64 was developed in the atmosphere and checked for wrinkles, no wrinkles were found.

[Example 2]
A metal film was formed on the film F in the same manner as in Example 1 except that a can roll 156 having a depression 25 as shown in FIG. 8 was used in place of the can roll 56 having the protrusions 20 in Example 1. The depression 25 has a depth D of 0.3 mm, and the inclination angle β of the inclined portion 26 is 5 ° with respect to the rotation shaft 156o of the can roll 156. In addition, the corner portion of the inclined portion 26 is smoothly shaved, and the corner 25 is recessed 25 so that the corner portion is positioned 10 mm from the end of the conveyance path P defined on the outer peripheral surface 156a of the can roll 156 to the inside of the conveyance path. Formed.

  As a result, the film F on the can roll 156 is observed from the observation window capable of observing the surface of the film F on the can roll 156 during film formation, and the film formation zones of the magnetron sputtering cathodes 57, 58, 59, 60 are observed. In the film F immediately after film formation that passed through the film F, floating of the film F from the can roll 156 causing wrinkles was observed in a direction parallel to the traveling direction, but the regions 65, 66, and 67 to which the wheel unit 30 was attached were observed. , 68, 69 every time it passed, the float disappeared. Moreover, after film formation was completed, when the film F wound up by the winding roll 64 was expand | deployed in air | atmosphere and the presence or absence of wrinkles was confirmed, wrinkles were not discovered.

[Comparative example]
For comparison, a metal film was formed on the film F in the same manner as in Example 1 except that no protrusions or depressions were provided on the outer peripheral surface 56a of the can roll 56 and the wheel unit 30 was not attached.

  As a result, when the film forming process is being performed, the film F is observed from the observation window in which the surface of the film F on the outer peripheral surface 56a of the can roll 56 can be observed. As a result, the magnetron sputtering cathodes 57, 58, and 59 are observed. The film F immediately after film formation after passing through the film formation zone of 60 shows floating of the film F from the can roll 56 that causes wrinkles in a direction parallel to the film conveyance direction, and magnetron sputtering cathodes 57, 58, The float of the film F tended to increase every time it passed 59 and 60.

  In addition, after film formation was completed, the film F wound on the take-up roll 64 was developed in the atmosphere to check for the presence of wrinkles. As a result, wrinkles thought to be caused by the thermal load of sputtering occurred. Was.

20 Protrusions 21, 26 Inclined portion 25 Depression 30 Wheel unit 31 Wheel 32 Energizing means 50 Sputtering web coater 51 Vacuum chamber 52 Unwinding roll 53, 63 Free roll 54, 62 Tension sensor roll 55, 61 Feed roll 56, 156 Can roll 57, 58, 59, 60 Magnetron sputtering cathode 64 Winding roll F Long heat-resistant resin film (long substrate)

Claims (21)

  A thermal load is applied by the processing means provided facing the long substrate conveyance path defined on the outer peripheral surface while cooling the long substrate conveyed by the roll-to-roll method around the outer peripheral surface of the can roll. A method of stretching a wrinkle of a long substrate generated during processing on an outer peripheral surface of a can roll, wherein the can roll is exposed to a portion where the vicinity of the end of the long substrate contacts at least one end of the outer peripheral surface of the can roll. An inclined portion is provided so that the outer diameter of the can roll gradually decreases toward the end portion of the roll, and the end of the long substrate is provided by a wheel provided in a portion of the inclined portion that does not face the processing means. A wrinkle extending method for a long substrate, wherein the long substrate is expanded in the width direction by pressing the portion against the inclined portion.   2. The wrinkle extension of a long substrate according to claim 1, wherein the inclined portion is formed by a belt-like protrusion that continues at a substantially constant height and a substantially constant inclination angle over the entire circumference of the can roll. Method.   2. The length on the can roll according to claim 1, wherein the inclined portion is formed by a band-shaped depression that continues at a substantially constant depth and a substantially constant inclination angle over the entire circumference of the can roll. How to stretch wrinkles on a scale board.   The wrinkle-stretching method for a long substrate according to any one of claims 1 to 3, wherein an inclination angle of the inclined portion is 5 to 30 ° with respect to a rotation axis direction of the can roll.   5. The method for extending wrinkles of a long substrate according to any one of claims 1 to 4, wherein a fluororesin film is applied to the inclined surface of the inclined portion.   6. The method for stretching wrinkles of a long substrate according to claim 1, wherein a groove extending in the direction of the rotation axis of the can roll is formed on the inclined surface of the inclined portion.   The inclined portion is provided in an area from the end of the conveyance path defined on the outer peripheral surface of the can roll to the inside of the conveyance path up to 50 mm, according to any one of claims 1 to 6. Wrinkle stretching method for long substrates.   8. The wrinkle extension of a long substrate according to claim 1, wherein a material of an outer peripheral portion in contact with the long substrate is butyl rubber, polyurethane, silicon rubber, or fluorine rubber. Method.   The wrinkle-stretching method for a long substrate according to claim 1, wherein the wheel is urged toward the inclined portion by an urging means.   10. The method for extending a wrinkle of a long substrate on a can roll according to claim 1, wherein the wheel is arranged in front of and behind a region where the processing means is opposed in the conveyance direction of the long substrate. .   A thermal load is applied by the processing means provided facing the long substrate conveyance path defined on the outer peripheral surface while cooling the long substrate conveyed by the roll-to-roll method around the outer peripheral surface of the can roll. A device for extending wrinkles of a long substrate generated during processing on the outer peripheral surface of a can roll, provided at a position where the vicinity of the end of the long substrate contacts at least one end side of the outer peripheral surface of the can roll An inclined portion where the outer diameter of the can roll gradually decreases toward the end portion side of the can roll, and an end portion of the long substrate provided at a position of the inclined portion not facing the processing means. A wrinkle-stretching device for a long substrate, comprising a wheel that presses against the inclined portion.   The wrinkle extension of a long substrate according to claim 11, wherein the inclined portion is formed by a belt-like protrusion that continues at a substantially constant height and a substantially constant inclination angle over the entire circumference of the can roll. apparatus.   12. The wrinkle extension of a long substrate according to claim 11, wherein the inclined portion is formed by a band-shaped depression that continues at a substantially constant depth and a substantially constant inclination angle over the entire circumference of the can roll. apparatus.   The wrinkle-stretching device for a long substrate according to any one of claims 11 to 13, wherein an inclination angle of the inclined portion is 5 to 30 ° with respect to a rotation axis direction of the can roll.   The wrinkle-stretching device for a long substrate according to any one of claims 11 to 14, wherein a fluororesin is applied to the inclined surface of the inclined portion.   The length according to any one of claims 11 to 15, wherein the inclined portion is provided in an area of 50 mm from the end of the conveyance path defined on the outer peripheral surface of the can roll to the inside of the conveyance path. Wrinkle stretcher for scale substrate.   17. The wrinkle extension of a long substrate according to claim 11, wherein a material of an outer peripheral portion of the wheel that contacts the long substrate is butyl rubber, polyurethane, silicon rubber, or fluorine rubber. apparatus.   The wrinkle-stretching device for a long substrate according to any one of claims 11 to 17, wherein the wheel is biased toward the inclined portion by a biasing means.   19. The wrinkle-stretching device for a long substrate according to claim 11, wherein the wheel is arranged in front of and behind a region where the processing means is opposed in the conveyance direction of the long substrate.   The wrinkle stretching apparatus according to any one of claims 11 to 19 is mounted in a vacuum chamber in which a reduced-pressure atmosphere is formed, and the filming process is a dry film-forming process. apparatus.   21. The film forming apparatus according to claim 20, wherein the processing means is a sputtering cathode.

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