JPH0790585A - Thin film deposition system - Google Patents

Abstract

PURPOSE:To form a uniform film by pressing a roller on a drum for conducting a substrate to unwrinkle the substrate. CONSTITUTION:A magnetic metal grain from a crucible 5 is conducted by a cooling can 1 and deposited on a substrate 3, and previously rollers 8a and 8b are formed in the shape of a V and provided on the can 1. The substrate 3 traveling along the can 1 is clamped by the rollers 8a and 8b which are pressed on the can 1. The rollers 8a and 8b are provided at an enantiomorphic position when the magnetic metal grain flying from the crucible is deposited on the substrate 3. Consequently, the rollers are electrostatically charged by the grain deposited on the substrate 3, a tensile force is always exerted on the traveling substrate 3, and a force is exerted to umwrinkle the substrate 3. As a result, the substrate 3 is not wrinkled around a position where the grain is deposited.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film (particularly, a metal thin film type magnetic film) forming apparatus.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 4, 21 is a cooling can, 22a
Is polyethylene terephthalate (PET) film 23
Of the PET film 23, a roll on the winding side of the PET film 23, a crucible 24, a magnetic metal 25, and a vacuum container 26. Then, after evacuating the inside of the vacuum chamber 26 to a predetermined vacuum degree, the electron gun is operated to evaporate the magnetic metal 25 in the crucible 24, and the evaporated particles of the magnetic metal 25 are deposited on the PET film 23 ( A magnetic recording medium is manufactured by vapor deposition.

However, if the magnetic film is formed by such a device, the magnetic film may not be formed well. In other words, the percentage of defective products with large output fluctuations was high, and the manufacturing yield was low.

[0005]

DISCLOSURE OF THE INVENTION As a result of intensive investigations on the above problems, it has been found that the cause of output fluctuation is that the magnetic film is not uniformly formed. And
This non-uniformity of the magnetic film means that the magnetic film is formed by depositing magnetic particles on the running support, but wrinkles are generated on the support during the running, which causes It has been clarified that the adhesion condition of the particles is slightly changed.

The present invention has been achieved based on such knowledge, and an object of the present invention is to provide a technique capable of uniformly forming a film. An object of the present invention is an apparatus for depositing particles on a support that is guided by a drum to travel to form a thin film, which is provided with a roller that is pressed against the drum, It is achieved by a thin film forming apparatus, which is configured to remove wrinkles generated on a support by a cooperative action.

The rollers in this thin film forming apparatus are
It is provided at a stage before the particle deposition position, at a stage after the particle deposition position, or at a stage before and after the particle deposition position. Then, a force is applied diagonally rearward to such a support, in particular, a support which is run by a roller in a stage before the particle deposition position, and a support run by a roll in a stage after the particle deposition position. It is preferable that a roller is provided on the body so that the force acts diagonally forward.

Here, the feature of the present invention is not only that the means for eliminating wrinkles in the support is simply provided, but also the step before / after the particles to be the deposited film are attached, that is, they are attached to the drum. This is to eliminate wrinkles in the state. That is, even if the means for eliminating wrinkles is provided at a position distant from the stage before and after the particles are attached, that is, even if it is provided at a position distant from the drum, wrinkles may also occur in the step of attaching particles. Yes, the features played were extremely low and meaningless.

Then, when a metal thin film type magnetic recording medium is produced by using the apparatus provided with the rollers as described above,
A magnetic recording medium with little output fluctuation was obtained, that is, a high-performance magnetic recording medium was obtained with a good manufacturing yield. As the support used in the present invention, non-magnetic ones can be mentioned as typical ones. For example, polyester such as PET, polyamide,
Olefinic resins such as polyimide, polysulfone, polycarbonate and polypropylene, polymer materials such as cellulose resins and vinyl chloride resins, inorganic materials such as glass and ceramics, and metal materials such as aluminum alloys are used.

When the thin film provided on the support is a magnetic film, its constituent materials are, for example, Fe,
In addition to metals such as Co and Ni, Co-Ni alloys, Co-P
t alloy, Co-Ni-Pt alloy, Fe-Co alloy, Fe
-Ni alloy, Fe-Co-Ni alloy, Fe-Co-B alloy, Co-Ni-Fe-B alloy, Co-Cr alloy, or those containing a metal such as Al is used.

A specific example will be described below.

[0012]

【Example】

[Embodiment 1] FIGS. 1 to 3 show an embodiment of a thin film forming apparatus according to the present invention. FIG.
FIG. 3 is a side view of an essential part in the vicinity of the particle deposition position before, and FIG. 3 is a side view of an essential part in the vicinity of the particle deposition position in the latter stage.

In each drawing, 1 is a cooling can, 2a is a support 3.
Is a roll on the supply side, 2b is a roll on the side of the support body 3, 4 is an adhesion preventive plate, 5 is a crucible, 6 is a magnetic metal, and 7 is a vacuum container. Reference numerals 8a and 8b are rollers made of an elastic material such as metal or rubber, preferably an elastic material. As can be seen from FIGS. 1 and 2, the rollers 8a and 8b are provided in the crucible 5
It is provided in a stage before the magnetic metal particles flying in from are adhered to the support 3 running while being guided by the cooling can 1, and in particular, so as to be pressure-bonded to the cooling can 1, and , Is provided like an inverted C shape.

Reference numerals 9a and 9b are rollers made of an elastic material such as metal or rubber, preferably an elastic material.
These rollers 9a and 9b are, as can be seen from FIGS. 1 and 3,
The magnetic metal particles coming from the crucible 5 are cooling cans 1.
It is provided at a stage after being attached to the support body 3 that is being guided and traveling, and is provided so as to be crimped to the cooling can 1 and in an inverted V shape. is there.

That is, the rollers 8a, 8b and the rollers 8a, 8b and the roller 3 sandwiching the support 3 running along the cooling can 1 from the supply side roll 2a to the winding side roll 2b with the back tension suspended. 9a and 9b are pressure-bonded to the cooling can 1, and the rollers 8a and 8b and the rollers 9a and 9b are substantially symmetrical with respect to a position where magnetic metal particles flying from the crucible 5 adhere to the support 3. The rollers 8a, 8b and the rollers 9a, 9b are provided at positions and are configured to be rotated so as to exert a force in the arrow direction on the support. Therefore, even if static electricity is charged by the particles deposited on the support and wrinkles are caused, a force in the pulling direction always acts on the running support 3, and the wrinkles are elongated and eliminated. The force is effectively acting so that there are always no wrinkles in the vicinity of the particle deposits.

In the apparatus constructed as described above, the inside of the vacuum vessel 7 is evacuated to a vacuum degree of about 10 ^-4 to 10 ^-6 Torr, and then the crucible 5 is heated by resistance heating, high frequency heating, electron beam heating or the like. The magnetic metal 6 in the inside is evaporated and PE
A metal thin film type magnetic recording medium is manufactured by depositing a magnetic metal 6 having a thickness of 0.04 to 1 μm on a support 3 such as a T film. When forming the magnetic thin film,
By supplying oxygen to the vapor deposition portion and forcibly oxidizing it, the surface layer portion of the magnetic thin film is oxidized to form a protective layer of an oxide film.

After that, the winding side roll 2b is taken out, and a back coat paint obtained by dispersing carbon black having an average particle size of 20 nm and a binder resin composed of a vinyl chloride resin and a urethane prepolymer is prepared by the direct gravure method. Is applied to the support 3 on the side opposite to the magnetic layer to provide a back coat layer having a dry thickness of 0.5 μm.
And perfluoropolyether (grade: FOM
BLIN Z DIAC Carboxyl group modified, manufactured by Nippon Montedison Co., Ltd. is a fluorine-inert liquid (Fluorinert,
FC-84, manufactured by Sumitomo 3M Co., Ltd.) was applied with a paint diluted and dispersed to 0.1% to a magnetic surface by a die coating method so that the thickness after drying would be about 20Å, and dried at 70 ° C. Let

After this, slit to a predetermined width, and
A magnetic tape for TR was obtained. By the way, in the present invention, when the magnetic particles flying from the crucible 5 are vapor-deposited on the support 3, by the running force and the cooperation of the rollers 8a, 8b, the rollers 9a, 9b and the cooling can 1, The support 3 is always tensioned so that wrinkles are not caused. Therefore, a uniform magnetic film was formed on the support 3.

[Second Embodiment] In the first embodiment, the roller 8 is used.
a, 8b and the rollers 9a, 9b were both actuated, in the present embodiment, the rollers 8a, 8b are actuated,
The rollers 9a and 9b were not operated, and a magnetic tape was obtained in the same manner as in Example 1. [Comparative Example 1] A magnetic tape was obtained in the same manner as in Example 1, except that the rollers 8a and 8b and the rollers 9a and 9b were not operated.

[Characteristics] With respect to the magnetic tapes obtained in each of the above-mentioned examples, the output fluctuation of the luminance output of 5 MHz was examined by a device modified from a commercially available 8 mm VTR, and the results are shown in Table-1. Table-1 Average output (dB) Output fluctuation (dB) Example 1 0 0 Example 2 -0.1 0.3 Comparative example 1 -0.8 2.4 * Average output is the average when running for 60 minutes. The value of Example 1 is set to 0 and displayed as a relative value. * The output fluctuation is the difference between the maximum output and the minimum output when running for 60 minutes, and Example 1 is set to 0 and displayed as a relative value. In the magnetic recording medium according to the present invention, it is understood that the magnetic film is uniformly formed, and a high-performance magnetic recording medium can be obtained with good yield.

[0021]

[Effect] A uniform film can be obtained. Therefore, it is possible to obtain a magnetic recording medium with little output fluctuation with a good manufacturing yield.

[Brief description of drawings]

FIG. 1 is a schematic front view of an entire thin film forming apparatus according to the present invention.

FIG. 2 is a side view of the main part of the thin film forming apparatus according to the present invention in the vicinity of the previous stage of the particle deposition position.

FIG. 3 is a side view of an essential part in the vicinity of the latter stage of the particle deposition position of the thin film forming apparatus according to the present invention.

FIG. 4 is a schematic view of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can (Drum) 2a Supply Side Roll 2b Winding Side Roll 3 Support 5 Crucible 6 Magnetic Metal 7 Vacuum Container 8a, 8b Roller 9a, 9b Roller

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Shiga 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.

Claims (6)

[Claims] 1. An apparatus for forming a thin film by depositing particles on a support, which is guided by a drum, and comprising a roller which is pressure-bonded to the drum, and the cooperation between the drum and the roller. An apparatus for forming a thin film, characterized in that it is configured to remove wrinkles caused on the support by means of. 2. The thin film forming apparatus according to claim 1, wherein the roller is provided at a stage before the particle deposition position. 3. The thin film forming apparatus according to claim 1, wherein the roller is provided at a stage after the particle deposition position. 4. The thin film forming apparatus according to claim 1, wherein the roller is provided at a stage before and after the particle deposition position. 5. The thin-film forming apparatus according to claim 1, wherein the support which is run by the roller in the stage before the particle deposition position is provided with a roller so that a force acts obliquely backward. 6. The thin-film forming apparatus according to claim 1, wherein the support which is run by the roller at the stage after the particle deposition position is provided with a roller so that a force acts diagonally forward.