JPH0836733A - Supporting body with metallic thin film and apparatus for forming metallic thin film on the supporting body - Google Patents

Abstract

PURPOSE:To improve the manufacturing yield, and obtain a magnetic recording medium, etc., at a low cost by forming holes with a predetermined pitch at both side part of a supporting body having a metallic thin film formed through the adhesion/accumulation of metallic particles. CONSTITUTION:A magnetic metal is vapor-deposited on a supporting body 3 of a polyethylene terephthalate(PET) film or the like, thereby, a magnetic recording medium of a metallic thin film type is manufactured. After the vapor deposition of the magnetic metal, the supporting body 3 is taken up around a wind roll. Holes 22a and 22b are formed with a predetermined pitch at both side parts of the supporting body 3. When pins 12a and 12b of a cooling roll 1 are meshed with the holes 22a and 22b, the supporting body 3 runs along with the rotation of the roll 1. When the supporting body 3 comes to a position immediately before separated from the roll 1, a projecting part 19 of a rotary arm 13 coupled with a strip part 11a comes to butt to a disc 20, so that the supporting body 3 is pulled in the widthwise direction. Accordingly, the medium is not wrinkled and the yield is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium, for example.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 5, 31 is a cooling can roll,
32a is a supply side roll of the polyethylene terephthalate (PET) film 33, 32b is a winding side roll of the PET film 33, 34 is a shielding plate, 35 is a crucible, 36 is a magnetic metal, and 37 is a vacuum chamber. Then, after the vacuum chamber 37 is evacuated to a predetermined vacuum degree, the electron gun 38 is operated to evaporate the magnetic metal 36 in the crucible 35 and deposit evaporation particles of the magnetic metal 36 on the PET film 33. A magnetic recording medium is manufactured by (vapor deposition).

However, wrinkles often occur in the magnetic recording medium manufactured as described above, which lowers the manufacturing yield.

[0005]

DISCLOSURE OF THE INVENTION While the research on the above problems has been earnestly promoted, it has become clear that the problem of reduction in manufacturing yield occurs when the PET film 33 is wound around the winding side roll 32b. That is, the cooling can roll 3
The PET film 33 that has traveled while being guided by No. 1 is stuck to the cooling can roll 31 and the traveling property of the PET film 33 deteriorates, which causes wrinkles on the PET film 33, and the PET film 33 remains as it is on the winding side. It has been found that when the roll 32b is wound up, the wrinkles are transferred, the wrinkles are formed over a long area, and the occurrence rate of defective products is increased.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a metal thin film body such as a magnetic recording medium with a high manufacturing yield at a low cost. An object of the present invention is a support provided with a metal thin film by adhering and depositing flying metal particles, characterized in that holes are formed at a predetermined pitch on both sides of the support. Is achieved by the support.

In addition, the metal particles that fly in are deposited on the support.
A device for providing a metal thin film by depositing,
A vacuum chamber, a means for winding the support, a means for supplying the support,
A cooling can roll arranged in the vacuum chamber for guiding the support traveling between the winding means and the supplying means of the support, and a flying source of metal particles arranged below the cooling can roll. And a projection mechanism disposed on both sides of the cooling can roll and a slide mechanism capable of sliding the projection along the axial direction of the cooling can roll. To be done.

In this film forming apparatus, it is preferable that the projections are annularly arranged on both sides of the cooling can roll at a predetermined pitch, and the projections are slid outward by a slide mechanism. . In particular, it is preferable that the protrusion located in the hole of the support at the stage before being separated from the cooling can roll is slid outward by the slide mechanism so that the support is subjected to lateral tension. . It should be noted that all the projections located in the holes of the support may be slid at the same time, but at least the projection is slid at a position on the front side where the support is separated from the cooling can roll. It is preferable to set.

With such a structure, even if wrinkles are generated on the support member guided along the cooling can roll, the wrinkles are eliminated because the wrinkles are pulled to both sides. Furthermore, even if the support is attached to the cooling can roll, the attachment to the cooling can roll can be relaxed when pulled to both sides, and therefore the support is effectively peeled from the cooling can roll. As a result, good runnability of the support is secured.

Then, the support can be wound well on the winding means, and the manufacturing yield of the metal thin film, for example, the magnetic recording medium is improved, which can be obtained at a low cost.

[0011]

1 to 3 show an embodiment of a film forming apparatus according to the present invention, for example, a magnetic recording medium manufacturing apparatus. FIG. 1 is a schematic view of the whole, and FIG. 2 is a cooling can roll. FIG. 3 is a schematic view of a part of the slide mechanism. In each drawing, 1 is a cooling can roll made of metal, 2a is a supply side roll, 2b is a winding side roll, and olefin resin such as polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate and polypropylene,
A non-magnetic support body 3 having a thickness of about 10 μm and a width of about 200 mm, which is made of a polymer material such as a cellulose resin or a vinyl chloride resin, is fed from the supply-side roll 2 a, passes through the guide roller 4, and follows the cooling can roll 1. And then wound around the winding roller 2b via the guide roller 4.

Reference numeral 5 denotes a crucible provided in the lower portion of the cooling can roll 1. Reference numeral 6 denotes a magnetic metal (for example, a metal such as Fe, Co, Ni, etc.) filled in the crucible 5, and Co--N.
i alloy, Co-Pt alloy, Co-Ni-Pt alloy, Fe
-Co alloy, Fe-Ni alloy, Fe-Co-Ni alloy,
Fe-Co-B alloy, Co-Ni-Fe-B alloy, Co
-Cr alloy, or a magnetic metal such as Al or Ta), 7 is an electron gun for irradiating the magnetic metal 6 with an electron beam, 8 is a shield plate, 9 is an oxidizing gas supply nozzle, and 10 is a vacuum chamber. is there.

Reference numerals 11a and 11b denote annular bodies provided on both sides of the cooling can roll 1, respectively.
1b is a strip-shaped portion 11a ₁ , 11a ₂ , 11 with a predetermined pitch.
_{a 3, ...... 11b 1, 11b} 2, 11b 3, are separated into ..... Then, the strip-shaped portions 11a ₁ , 11a ₂ , 11a ₃ , ...
_{11b 1, 11b 2, 11b 3} , ...... , respectively, and is configured to slide in the lateral direction independently.

Strip-shaped portions 11a ₁ , 11a ₂ , 11a ₃ , ... 1
_{1b 1, 11b 2, 11b 3} , each surface central portion of ......, pins _{12a 1, 12a 2, 12a 3} , ...... 12b 1, 12b 2, 12
b ₃ , ... are erected. 13 is a strip-shaped portion 11a ₁ , 1
Rotating arms connected to the lower surface side of 1a ₂ , 11a ₃ , ... 11b ₁ , 11b ₂ , 11b ₃ , ..., 14 are fixed arms for attaching the rotating arm 13 to the cooling can roll 1. 15 strip-like portions _{11a 1, 11a 2, 11a 3} , ...... 11
b _1, 11b _2, 11b _3, the side of the cooling can roll 1 ...,
That is, it is a spring mounted between the rotating arm 13 and the cooling can roll 1 in order to urge it inward. Reference numeral 16 is a guide plate in which a slit portion 17 is formed, and the rotating arm 13 is arranged in the slit portion 17, and guides the rotating arm 13 in the clockwise or counterclockwise direction.
Strip-shaped portions 11a ₁ , 11a ₂ , 11a ₃ , ... 11b ₁ , 11
It is configured to guide the slide of b ₂ , 11b ₃ , ... in the left-right direction. In addition, in order to make the sliding of the strip-shaped portion in the left-right direction smooth, a bearing 18 is provided on the guide plate.
Is provided.

Reference numeral 19 denotes a lower end portion of the rotating arm 13.
The convex portion 20 is a disk. 21 is a strip-shaped portion 11a₁,
11a₂, 11a₃, …… 11b₁, 11b₂, 11b₃,……of
An anti-slip material such as rubber attached to the surface. the above
In the oblique vapor deposition apparatus configured as described above, the vacuum chamber 10
Inside 10^-Four-10 ^-6Exhaust to a vacuum degree of about Torr
After that, the electron gun 7 is operated to operate the magnetic metal 6 in the crucible 5.
Is melted and evaporated, and is attached to the cooling can roll 1.
0.04 to 1 μm for support 3 such as PET film
of metal thin film type by evaporating m-thick magnetic metal
A magnetic recording medium is manufactured. For forming metal magnetic thin film
At that time, oxygen is supplied to the vapor deposition part,
The surface layer is oxidized and a protective layer made of an oxide film is formed.
At the same time, the magnetic characteristics are improved.

After that, the support 3 is taken up by the take-up roll 2b. At this time, wrinkles may be generated on the support 3. In particular, the support body 3 is charged with scattered electrons from the electron beam and is charged with static electricity, which lowers the traveling property of the support body 3 and causes wrinkles, or sticks to the cooling can roll 1. It sticks with you. However,
When the roll 2b is wound around with the wrinkles attached, the wrinkles are transferred and the defective rate is further increased.

However, the holes 2 are formed on both sides of the support 3.
2a ₁ , 22a ₂ , 22a ₃ , ... 22b ₁ , 22b ₂ , 22b ₃ ,
.. are formed at a predetermined pitch, and when the support 3 is guided by the cooling can roll 1, the holes 22a ₁ and 2 are formed.
2a ₂ , 22a ₃ , ... 22b ₁ , 22b ₂ , 22b ₃ , ... to pins 12a ₁ , 12a ₂ , 12a ₃ , ... 12b ₁ , 12b ₂ , 12
b ₃ , ... fit together. Then, the cooling can roll 1 rotates and runs. By the way, when the metal magnetic thin film is formed on the support body 3 by the oblique vapor deposition means and the support body 3 which has run along with the rotation of the cooling can roll 1 arrives at the position immediately before being separated from the cooling can roll 1, the position is reached. Since the convex portion 19 of the rotating arm 13 connected to the coming strip-shaped portions 11a _k and 11b _k comes into contact with the disc 20, the strip-shaped portion 11a _k is located on the right side (outside). 1
1b _k is slid to the left (outside). Therefore,
When the support body 3 arrives at the position immediately before being separated from the cooling can roll 1, the support body 3 is pulled in the left-right direction, and even if wrinkles are generated, they are stretched and the wrinkles are eliminated. Moreover, even if the support 3 is stuck to the cooling can roll 1 due to electrostatic charge, this sticking is weakened. Therefore, the support body 3 is smoothly separated from the cooling can roll 1, and there is no wrinkle at the separated stage, so that the support body 3 can be wound up well on the winding side roll 2b.

In this way, the roll 3b on the winding side is formed by winding the support 3 on which a good magnetic thin metal film is formed.
And a back coat paint obtained by dispersing a carbon black having an average particle diameter of 20 nm and a binder resin composed of a vinyl chloride resin and a urethane prepolymer by a direct gravure method on the support 3 on the side opposite to the magnetic layer. It is applied on the surface to provide a back coat layer having a dry thickness of 0.5 μm.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group-modified, manufactured by Nippon Montedison Co., Ltd.) was diluted with a fluorine inert liquid (Fluorinert, FC-84, Sumitomo 3M Co., Ltd.) to a concentration of 0.1%. -Apply the dispersed coating material on the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dry at 70 ° C.

After that, a magnetic tape or the like is obtained by slitting to a predetermined width. In the above embodiment, the strip-shaped portions 11a _k , 11b _k (pins 12a _k , 12b).
Although the cam mechanism is used to slide b _k ), it can be constructed without the cam mechanism. For example, if an inclined bar 23 is provided as shown by an imaginary line in FIG. 3 and the rotating arm 13 that abuts along the inclined bar is displaced counterclockwise in FIG. 3, The strip-shaped portions 11a _k , 11b _k (pins 12a _k , 12b) each time the inclined bar is passed.
_k ) slides outward and returns to its original position by the spring 15 after passing. If the inclined bar is provided long, the support 3 attached to the cooling can roll 1 can be pulled outward over a wide range.

[0021]

[Effect] A high-performance magnetic recording medium can be obtained with a high yield.

[Brief description of drawings]

FIG. 1 is an overall schematic view of a film forming apparatus (manufacturing apparatus for magnetic recording media).

FIG. 2 is a schematic view of a cooling can roll portion.

FIG. 3 is a schematic view of a portion of a slide mechanism.

FIG. 4 is a plan view of a support.

FIG. 5 is a schematic diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

1 Cooling Can Roll 2a Supply Side Roll 2b Winding Side Roll 3 Support 5 Crucible 6 Magnetic Metal 11a ₁ , 11a ₂ , 11a ₃ , 11b ₁ , 11b ₂ , 11b ₃
Strip-shaped parts 12a ₁ , 12a ₂ , 12a ₃ , 12b ₁ , 12b ₂ , 12b ₃
Pin 13 Rotating arm 15 Spring 16 Guide plate 19 Convex portion 20 Disc 21 Anti-slip material 22a ₁ , 22a ₂ , 22a ₃ , 22b ₁ , 22b ₂ , 22b ₃
Hole

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigemi Wakabayashi 2606, Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.Institute of Information Sciences (72) Inventor Akira Shiga, 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao-sha ceremony Company Information Science Laboratory

Claims (4)

[Claims] 1. A support provided with a metal thin film by adhering and depositing flying metal particles, characterized in that holes are formed at a predetermined pitch on both sides of the support. body. 2. An apparatus for providing a metal thin film by depositing and depositing flying metal particles on a support, which comprises a vacuum chamber, a support winding means, a support supply means, and a support. A cooling can roll arranged in the vacuum chamber for guiding a support running between the winding means and the supplying means,
Flying sources of metal particles arranged on the lower side of the cooling can roll, projections arranged on both sides of the cooling can roll, and a slide capable of sliding these projections along the axial direction of the cooling can roll. A film forming apparatus comprising a mechanism. 3. The projections are annularly arranged on both sides of the cooling can roll at a predetermined pitch, and the projections are slid outward by a slide mechanism. Deposition apparatus. 4. The protrusion located in the hole of the support at a stage before being separated from the cooling can roll is slid outward by a slide mechanism to apply lateral tension to the support. 2. The method according to claim 2, wherein
Alternatively, the film forming apparatus according to claim 3.