JPH07243042A - Film forming device - Google Patents

Abstract

PURPOSE:To form a beautiful magnetic film on a base by temporarily stopping film formation on this base and eliminating wrinkles when the generation of the wrinkles on the base formed with the film is detected. CONSTITUTION:A prescribed vacuum degree is maintained in a vacuum vessel 11 and the nonmagnetic base 3 is fed from a feed side roll 2a to a cooling can roll 1. The magnetic metal 9 in a crucible 8 is then evaporated and the magnetic thin film is formed on the base 3; thereafter, the base 3 is taken up on a take-up side roll 2b. At this time, the thin film formed on the base 3 is inspected by a wrinkle detecting sensor 7, which inputs a signal to a control mechanism 12 when the sensor detects the generation of the wrinkles. A deposition preventive plate 10 is thereby actuated to temporarily stop the adhesion and deposition of the evaporated particles on the base 3. The base 3 keeps traveling during this time and a wrinkle stretching roll 5 is pressed to the base 3 by a control mechanism 12, by which the wrinkles are stretched and further, the base 3 is heated and pressurized by heating and pressurizing rolls 6a, 6b to completely eliminate the wrinkles. The deposition preventive plate 10 is actuated and the adhesion and deposition of the evaporated particles on the base 3 are executed again when the wrinkles are eliminated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for manufacturing a film such as a magnetic metal thin film.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 2, 31 is a cooling can roll,
32a is a supply side roll of the polyethylene terephthalate (PET) film 33, 32b is a winding side roll of the PET film 33, 34 is a shield plate, 35 is a crucible, 36 is a magnetic metal, and 37 is a vacuum container. And the vacuum container 37
After the inside is evacuated to a predetermined vacuum degree, the electron gun 38 is operated to evaporate the magnetic metal 36 in the crucible 35,
A magnetic recording medium is manufactured by depositing (evaporating) evaporated particles of the magnetic metal 36 on the T film 33.

However, it has been found that there is a problem such as deposition unevenness when forming a magnetic film using such a deposition apparatus.

[0005]

DISCLOSURE OF THE INVENTION While the research on the above problems has been earnestly promoted, it has become clear that the problem of vapor deposition unevenness lies in the PET film 33. That is, the PET film 33 guided by the can roll 31 is 1 to 5 kg.
Although the tension of about / width is applied to the roll 32a from the supply side roll 32a to the winding side roll 32b, it is noticed that wrinkles are formed when the roll is in contact with the can roll 31. Then, the evaporated particles of the magnetic metal 36 fly to the place where the wrinkles are formed, and are deposited (vapor deposition).
Then, it was presumed that the wrinkles would be formed so that the wrinkles would be transferred as they were, and vapor deposition unevenness would occur.

When wrinkles are generated, the wrinkles continue as if they are transmitted, and accordingly, there is much waste. The present invention has been made in view of the above points, and an object of the present invention is to provide a manufacturing technique of a magnetic recording medium or the like with less waste and high product yield. An object of the present invention is a film forming apparatus that forms a film by depositing flying particles on a support, and wrinkle detection means for detecting wrinkles generated on the support, and wrinkles by the wrinkle detection means. When the occurrence of is detected, it is achieved by the film forming apparatus, which comprises a stopping means for temporarily stopping the film forming operation.

In particular, in a film forming apparatus for forming a film by depositing flying particles on a support, wrinkle detection means for detecting wrinkles generated on the support, and wrinkle generation by the wrinkle detection means. When the wrinkle is removed, the wrinkle eliminating means operates in response to a signal from the wrinkle eliminating means, the wrinkle eliminating means, and the wrinkle eliminating means to temporarily stop the film forming operation. This is achieved by a film forming apparatus including a control means for restarting.

That is, if it is possible to detect the occurrence of wrinkles, and if the wrinkles occur, the film-forming work is temporarily stopped by a signal from the wrinkle detecting means. Thus, the film forming work can be stopped, so that no waste occurs. Then, after that, the wrinkle eliminating means is activated, and after the wrinkles are eliminated by this, if the film forming work is restarted, the subsequent wrinkles disappear, the vapor deposition unevenness is only temporary, and only that portion is removed. By excluding it, the product is not wasted that much, and an excellent magnetic recording medium can be efficiently obtained.

The wrinkle detecting means may be composed of a sensor such as a height sensor. That is, most of the positions where wrinkles occur are near the film forming position where the flying particles are deposited on the support (specifically, the position of the cooling can roll where the support is attached). Therefore, if a height sensor is installed at a position in the vicinity where the traveling support is separated from the cooling can roll, when wrinkles occur, the heightened portion due to the unevenness is detected, and thereby the occurrence of wrinkles is known. You can

The wrinkle eliminating means may be composed of a wrinkle-rolling roll and a heating / pressurizing roller. That is, a wrinkle-rolling roll exerts a lateral force on a wrinkled support to stretch the wrinkle as if pulling it, and then heating / pressurizing the wrinkles to eliminate the wrinkles. . In the process of eliminating wrinkles after they are detected, the support is still running. Therefore, the film forming operation may be temporarily stopped by allowing the flying particles to be deposited on the way and not being deposited on the support. That is, an adhesion-preventing plate is provided at a position between the running support and a signal from the wrinkle detecting means moves the adhesion-preventing plate to a path along which the adhesion-preventing plate is flying, and the support is configured so that particles are not deposited. You can leave it.

Then, the film-forming operation may be restarted by receiving a signal from the wrinkle removing means to open the deposition preventing plate and depositing particles on the support. If a counter that receives signals from the wrinkle detecting means and the wrinkle removing means and stores the fact is provided, it is easy to know which part of the support is not formed, and the film is formed after the film forming operation. The work of excluding parts that have not been performed becomes easy.

[0012]

1 is a schematic view showing an embodiment of a film forming apparatus, for example, a magnetic recording medium manufacturing apparatus according to the present invention. In the figure, 1 is a metal cooling can roll, 2a is a supply side roll, 2b is a winding side roll, and olefin resin such as polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, polypropylene, Non-magnetic thickness 10μm, width 200m made of polymer material such as cellulose resin and vinyl chloride resin
m of the support 3 is paid out from the supply side roll 2a,
It is wound around the cooling can roll 1 via the guide roller 4a, and then wound around the winding side roll 2b via the guide roller 4b.

In the cooling can roll 1, the radius r _{1 at the} center of the can roll is about 100 to 1000 mm, the radius r _{2 at} a position 10 cm away from the center of the can roll is about 98 to 998 mm, and r ₁ -r ₂ are It is configured to be on the order of 1-2 mm. Further, the wrinkle-rolling roll 5 is provided along the traveling route of the support 3 between the guide roller 4b and the winding-side roll 2b, and the wrinkle-rolling roll 5 is provided on the traveling route of the support 3 between the wrinkle-rolling roll 5 and the winding-side roll 2b. Heating / pressurizing rollers 6a and 6b are provided along the above.

The wrinkle-rolling roll 5 has a radius r at the center.
₃ is about 30 to 60 mm, the radius r _{4 at} a position 10 cm away from the center is about 27 to 58 mm, and the difference r ₃ −r
_It has a drum shape so that ₄ is about 2 to 3 mm. That is, since the center portion is formed in a drum shape with a little bulge, when the wrinkle-rolling roll 5 is pressed by the support body 3, the support body 3 is laterally moved (orthogonally to the traveling direction of the support body). , The direction toward the outer side) is applied, and it is stretched. Therefore, if wrinkles are generated on the support body 3, the wrinkles are temporarily eliminated. The wrinkle-smoothing roll 5 is normally separated from the support 3 because it is not necessary to press the support 3 when no wrinkles are generated. That is, when a signal from a wrinkle detecting means described later is received, the wrinkle-rolling roll 5 moves to press the support 3, and after a predetermined time, it is separated.

The heating / pressurizing rollers 6a and 6b are the support 3
To about 75 to 85 ° C., and a force of about 70 to 100 kg / cm is applied at this time. Then, by this, the wrinkles that have been temporarily resolved by the wrinkle-rolling roll 5 are to be permanently resolved. This heating / pressurizing roller 6
The action of the a and 6b on the support 3 is also unnecessary when it is not necessary to eliminate the wrinkles. Therefore, the wrinkle-rolling roll 5
When the signal from the wrinkle detecting means, which will be described later, is received, the heating / pressurizing rollers 6a and 6b move to heat / pressurize the support body 3 and separate from each other after a predetermined time. It is configured.

Reference numeral 7 is a wrinkle detecting means (wrinkle detecting sensor).
In this wrinkle detection sensor 7, the support 3 has a cooling can roll 1.
It is provided at a position immediately before being separated from. When wrinkles are generated on the support 3, the wrinkles cause unevenness, so that the height of the protrusion is detected, and the wrinkles can be detected. Reference numeral 8 denotes a crucible. In the crucible 8, for example, Fe, Co, N
In addition to metals such as i, Co-Ni alloys, Co-Pt alloys,
Co-Ni-Pt alloy, Fe-Co alloy, Fe-Ni alloy, Fe-Co-Ni alloy, Fe-Co-B alloy, Co
-Ni-Fe-B alloy, Co-Cr alloy, or these are filled with magnetic metal 9 such as Al or Ta.

Reference numeral 10 is a deposition preventive plate, and 11 is a vacuum container. 1
Reference numeral 2 denotes a control mechanism that receives a signal from the wrinkle detection sensor 7 and operates the wrinkle-rolling roll 5, the heating / pressurizing rollers 6a and 6b, and the deposition preventive plate 10. A counter 13 receives a signal from the wrinkle detection sensor 7 and receives a signal from the time when the wrinkle occurs to the time when the wrinkle disappears. The counter 13 outputs an output signal from the counter 13 to which portion of the support body. It is configured so that it can be easily known whether or not the film is not formed, and the work of excluding the portion not formed after the film forming operation can be easily performed.

In the vapor deposition apparatus configured as described above, the inside of the vacuum vessel 11 is evacuated to a vacuum degree of about 10 ^-4 to 10 ^-6 Torr, and then the crucible is heated by resistance heating, high frequency heating, electron beam heating or the like. Melt the magnetic metal 9 in 8,
PET evaporated and attached to the cooling can roll 1
A metal thin film type magnetic recording medium is manufactured by vapor-depositing a magnetic metal having a thickness of 0.04 to 1 μm on a support 3 such as a film. At the time of forming the magnetic thin film, it is preferable to supply oxygen to the vapor deposition portion and forcibly oxidize it to oxidize the surface layer portion of the magnetic thin film to form a protective layer of an oxide film. However, the thickness of the protective layer composed of this oxide film is about several tens of liters, and an oxide film of this thickness may be composed of natural oxidation. In some cases, no action is required.

By the way, wrinkles may occur on the support when the magnetic thin film is formed. When wrinkles occur, this is detected by the wrinkle detection sensor 7, and a signal from the wrinkle detection sensor 7 is input to the control mechanism 12, whereby the deposition-preventing plate 10 operates and the particles that evaporate Prevents adhesion and deposition on 3. It should be noted that the support 3 is running even while the deposition / accumulation of the evaporated particles on the support 3 is stopped.

The signal from the wrinkle detecting sensor 7 not only causes the deposition preventing plate 10 to move in the closing direction, but also causes the control mechanism 12 to move the wrinkle-rolling roll 5 so as to press the support 3. Further, the heating / pressurizing rollers 6a and 6b move so as to heat / pressurize the support 3. by this,
That is, tension is applied to the support 3 by the wrinkle-rolling roll 5 in the wrinkle-removing direction, the wrinkles are stretched and eliminated, and the wrinkles are eliminated by subsequent heating and pressurization.

When the wrinkle detection sensor 7 confirms that the running support 3 is free of wrinkles, a signal to that effect is output from the wrinkle detection sensor 7 and the control mechanism 12 opens the deposition preventive plate 10. And the evaporated particles adhere to and deposit on the support 3 again. Further, the wrinkle-rolling roll 5 and the heating / pressurizing rollers 6a and 6b are separated from the support 3, and the same work as before the wrinkle is generated is continued.

In this way, the take-up roll 2b, on which the support 3 having a magnetic thin film having no vapor deposition unevenness is wound, is taken out, and carbon black having a mean particle size of 20 nm, vinyl chloride resin and urethane are taken out. A coating material for a back coat, in which a binder resin composed of a prepolymer is dispersed, is applied on the surface of the support 3 opposite to the magnetic layer by a direct gravure method to form a back coat layer having a dry thickness of 0.5 μm. Set up.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) was diluted with a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Co., Ltd.) to a concentration of 0.1%. -Apply the dispersed coating material on the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dry at 70 ° C.

After that, a magnetic tape or the like is obtained by slitting to a predetermined width.

[0025]

[Effect] The magnetic film is formed neatly, a high-performance magnetic recording medium can be obtained with a high yield, and defective portions can be easily excluded.

[Brief description of drawings]

FIG. 1 is an overall schematic view of a film forming apparatus (manufacturing apparatus for magnetic recording media).

FIG. 2 is a schematic view of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can Roll 2a Supply Side Roll 2b Winding Side Roll 3 Support 5 Wrinkle Rolling Roll 6a, 6b Heating / Pressing Roller 7 Wrinkle Detection Sensor 8 Crucible 9 Magnetic Metal 10 Adhesion Plate 11 Vacuum Container 12 Control Mechanism 13 Counter

Front Page Continuation (72) Inventor Shigemi Wakabayashi 2606, Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.Institute of Information Science Research (72) Inventor Akira Shiga 2606 Akabane, Kai-cho, Haga-gun, Tochigi Kao Co., Ltd. Information Science In the laboratory

Claims (2)

[Claims] 1. A film forming apparatus for forming a film by depositing flying particles on a support, wherein wrinkle detection means for detecting wrinkles generated on the support and wrinkle generation by the wrinkle detection means. And a stop means for temporarily stopping the film-forming operation when is detected. 2. A wrinkle eliminating means is provided, and the wrinkle eliminating means is actuated in response to a signal from the wrinkle detecting means to further provide a control means for restarting the film forming operation after the wrinkle is eliminated. The film forming apparatus according to claim 1, wherein