JPH0841642A - Film forming device - Google Patents

Abstract

PURPOSE:To ameliorate the traveling defect of a base and to execute film formation at a good yield by roughening the surface on the end side of a cooling can roll for guiding this base to a surface rougher than the surface on its central side. CONSTITUTION:The base 3, such as PET film, traveling from a supply side roll 2a to a take-up side roll 2b in a vacuum chamber 10 is guided by the cooling can roll 1. On the other hand, the magnetic metal 6 in a crucible 5 is melted and evaporated by an electron gun 7. As a result, the generated and incoming metallic particles are adhered and deposited on the base 3, by which the base is provided with the magnetic metallic thin films. The end 1b side surface of the cooling can roll 1 is made rougher than the surface on the central part 1a side in this film forming device. The surface roughening is so executed that the surface roughness (center line average roughness) on, for example, the central part side is made 3 to 20nm and the surface roughness on the end side is made >=150nm. As a result, the base 3 travels smoothly without sticking to the cooling can roll l even if the base is electrified by the scattering electrons from an electron beam. The thin films are thus cleanly formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus, for example.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 4, 31 is a cooling can roll,
32a is a supply side roll of the polyethylene terephthalate (PET) film 33, 32b is a winding side roll of the PET film 33, 34 is a shielding plate, 35 is a crucible, 36 is a magnetic metal, and 37 is a vacuum chamber. Then, after the vacuum chamber 37 is evacuated to a predetermined vacuum degree, the electron gun 38 is operated to evaporate the magnetic metal 36 in the crucible 35 and deposit evaporation particles of the magnetic metal 36 on the PET film 33. A magnetic recording medium is manufactured by (vapor deposition).

By the way, scattered electrons generated from the beam emitted from the electron gun 38 adhere to the PET film 33,
The traveling property of the PET film 33 is deteriorated (disturbed) by the electrification of electrons, and in a severe case, the PET film 33 may stick to the cooling can roll 31 and may not be able to travel.

[0005]

DISCLOSURE OF THE INVENTION It is an object of the present invention to provide a technique for improving the running failure of a support and forming a film with a high yield. An object of the present invention is a film forming apparatus for providing a metal thin film by depositing and depositing flying metal particles on a support, which comprises a vacuum tank, a support winding means, and a support supply means. And a cooling can roll that guides the support running between the winding means and the supplying means of the support, and the surface of the cooling can roll on the end side is rougher than the surface on the central side. This is achieved by a film forming apparatus characterized by being planarized.

The surface roughness (center line average roughness Ra) of the cooling can roll in the film forming apparatus is 3 to.
20 nm, preferably 5 to 10 nm is preferable, while the surface roughness on the end side (center line average roughness Ra)
Is preferably 150 nm or more. The surface roughness on the end side may be microscopically roughened with an abrasive or macroscopically roughened by forming grooves.
Of course, both may be used together.

According to the thin film forming apparatus configured as described above, during the thin film forming work, scattered electrons from the electron beam irradiated toward the target position adhere to the support, and Even in a situation where the cooling can roll is easily attached to the cooling can roll, there is a gap between the support and the cooling can roll at the end portion, which makes it difficult to attach the support, and thus the support runs smoothly. Therefore, the thin film can be formed neatly on the traveling support.

[0008]

1 and 2 show an embodiment of the film forming apparatus of the present invention. FIG. 1 is a schematic view of the whole, and FIG. 2 is a front view of an essential part. In each figure, 1 is a metal cooling can roll, 2
a is a supply side roll, 2b is a winding side roll, and PET
Non-magnetic thickness 10 μm made of a polymer material such as polyester, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose resin, vinyl chloride resin, etc.
A support body 3 having a width of about 200 mm is fed from the supply side roll 2a, wound around the cooling can roll 1 via the guide roller 4, and then wound around the winding side roll 2b via the guide roller 4. It is like this.

Reference numeral 5 is a crucible provided in the lower portion of the cooling can roll 1. Reference numeral 6 is a magnetic metal (for example, a metal such as Fe, Co, or Ni) filled in the crucible 5, or Co--N.
i alloy, Co-Pt alloy, Co-Ni-Pt alloy, Fe
-Co alloy, Fe-Ni alloy, Fe-Co-Ni alloy,
Fe-Co-B alloy, Co-Ni-Fe-B alloy, Co
-Cr alloy, or a magnetic metal such as Al or Ta), 7 is an electron gun for irradiating the magnetic metal 6 with an electron beam, 8 is a shield plate, 9 is an oxidizing gas supply nozzle, and 10 is a vacuum chamber. is there.

1a is the central portion of the cooling can roll 1, 1
Reference numerals b and 1b are end portions of the cooling can roll 1. And
When the support body 3 travels, as shown in FIG. 2, the support body 3 overlaps the central portion 1a and both end portions 1b of the cooling can roll 1. By the way, the central portion 1a of the cooling can roll 1
Has a surface roughness (centerline average roughness Ra) of 3 to 20 n.
m, for example, 10 nm, which is extremely smooth. On the other hand, the both ends 1b of the cooling can roll 1 have a surface roughness (center line average roughness Ra) of 150.
It is made extremely rough as mentioned above, for example, 200 nm or more. That is, when the support 3 travels along the cooling can roll 1, the ends 3b, 3b of the support 3 are moved.
Is in contact with the rough ends 1b, 1b of the cooling can roll 1 having a width longer than the width of the support 3.

In the oblique vapor deposition apparatus configured as described above,
The vacuum chamber 10^-Four-10 ^-6True about Torr
After evacuating to an empty space, operate the electron gun 7 to activate the crucible.
Cooling can rolls by melting and evaporating the magnetic metal 6 in 5
For support 3 such as PET film attached to 1
By evaporating 0.04 to 1 μm thick magnetic metal.
Thus, a metal thin film type magnetic recording medium is manufactured. Incidentally, metal
When forming the magnetic thin film, supply oxygen to the vapor deposition area.
The surface layer of the metal magnetic thin film is oxidized and
A protective layer is formed and magnetic properties are improved.
It After this, the support 3 is taken up by the take-up roll 2b.
Go.

At the time of such film formation, scattered electrons from the electron beam are attached to the support 3 to be charged with static electricity, which lowers the running property of the support 3 and causes wrinkles. It may stick to the cooling can roll 1. For this reason, the magnetic film is not formed cleanly or is wound around the winding side roll 2b with wrinkles, and these wrinkles are transferred, and wrinkles are formed over a long area, resulting in a high incidence of defective products. Become.

However, when the cooling can roll 1 is constructed as described above, it becomes difficult for the support 3 to stick to the cooling can roll 1, the running property of the support 3 is good, and the magnetic film is formed neatly. A high-quality magnetic recording medium material can be obtained with high yield. In this way, the take-up side roll 2b on which the support 3 having a good metal magnetic thin film is taken up is taken out, and is made of carbon black having an average particle diameter of 20 nm, vinyl chloride resin and urethane prepolymer. A coating material for a back coat in which the binder resin is dispersed is applied to the surface of the support 3 on the side opposite to the magnetic layer by a direct gravure method to provide a back coat layer having a dry thickness of 0.5 μm.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) was diluted to 0.1% in a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Limited). -Apply the dispersed coating material on the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dry at 70 ° C.

After that, a magnetic tape or the like is obtained by slitting to a predetermined width. FIG. 3 is a front view of essential parts showing a second embodiment of a film forming apparatus according to the present invention, for example, a magnetic recording medium manufacturing apparatus. In the above-described embodiment, Ra of the end portion 1b of the cooling can roll 1 is micro-rough as 200 nm, but in this embodiment, the end portion 1b of the cooling can roll 1 has a depth of 0.15 mm. As shown in FIG. 3, the grooved grooves are formed by crossing each other. That is, the groove portions are obliquely formed so that the ends 1b, 1b of the cooling can roll 1 are macro-roughened. By doing so, the same effect can be obtained.

Since other technical ideas are the same as those of the above-mentioned embodiment, detailed description will be omitted.

[0017]

[Effect] A high-performance magnetic recording medium can be obtained with a high yield.

[Brief description of drawings]

FIG. 1 is an overall schematic view of a film forming apparatus (manufacturing apparatus for magnetic recording media).

FIG. 2 is a front view of a main part of a film forming apparatus (magnetic recording medium manufacturing apparatus).

FIG. 3 is a front view of a main part of a film forming apparatus (magnetic recording medium manufacturing apparatus).

FIG. 4 is a schematic diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can Roll 1a Cooling Can Roll Central Part 1b Cooling Can Roll End 2a Supply Side Roll 2b Winding Side Roll 3 Support 3b Support End 5 Crucible 6 Magnetic Metal 7 Electron Gun

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigemi Wakabayashi 2606, Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.Institute of Information Sciences (72) Inventor Akira Shiga, 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao-sha ceremony Company Information Science Laboratory

Claims (2)

[Claims] 1. A film forming apparatus for providing a metal thin film by depositing and depositing flying metal particles on a support, comprising: a vacuum chamber, a winding means for the support, and a supplying means for the support. A cooling can roll that guides the support running between the winding means and the supplying means of the support, and the surface of the cooling can roll on the end side is rougher than the surface on the central side. A film forming apparatus characterized in that 2. The surface roughness (center line average roughness) on the center side of the cooling can roll is 3 to 20 nm, and the surface roughness (center line average roughness) on the end side is 150 nm or more. The film forming apparatus according to claim 1, wherein