JPH0762535A - Film forming device - Google Patents

Abstract

PURPOSE:To prevent the wrinkling of a substrate and to form a beautiful film by forming a specified groove in a roll for guiding the substrate on which a flying metallic particle is deposited in a dry plating means. CONSTITUTION:A flying particle (metallic material and magnetic metal material) is deposited on a substrate in a dry plating means such as vacuum deposition, sputtering to form the film of a magnetic recording medium. The substrate is guided by a can roll, and a groove is formed in the peripheral side face of the roll. The groove is formed in the circumferential direction of the roll or formed on the surface practically in the shape of a V.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a film such as a magnetic metal thin film.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 5, 21 is a cooling can roll,
22a is a polyethylene terephthalate (PET) film 23 supply side roll, 22b is a PET film 23 winding side roll, 24 is a crucible, 25 is a magnetic metal, and 26 is a vacuum container. Then, after evacuating the inside of the vacuum container 26 to have a predetermined vacuum degree, the electron gun is operated to operate the crucible 24.
The magnetic recording medium is manufactured by evaporating the magnetic metal 25 in the inside and depositing (evaporating) evaporated particles of the magnetic metal 25 on the PET film 23.

However, it has been found that there is a problem such as deposition unevenness when forming a magnetic film using such a deposition apparatus.

[0005]

DISCLOSURE OF THE INVENTION While the research on the above problems has been earnestly promoted, it has become clear that the problem of vapor deposition unevenness lies in the PET film 23. That is, the PET film 23 guided by the can roll 21 is 1 to 5 kg.
/ A tension of about the width is applied to the roll 22a from the supply side 22a to the winding side 22b, but when it is attached to the can roll 21, the direction crossing the axial direction of the can roll 21 (PET film) I noticed that streaky wrinkles were formed along the longitudinal direction 23. Then, when the vaporized particles of the magnetic metal 25 fly and are deposited (deposited) on the place where the line-shaped wrinkles are formed, the wrinkles are formed so as to be transferred as they are, and uneven deposition occurs. It was speculated that it might be.

By the way, it was thought that, even if wrinkles were generated, if these wrinkles were immediately removed, no problem would occur. Therefore, as a result of pushing forward with research for removing wrinkles, it is necessary to form a groove in the can roll 21 in view that wrinkles disappear if stress stress, which is a cause of wrinkles in the PET film 23, is alleviated. I thought it would be good. That is, if the groove is formed in the can roll 21, when the wrinkle portion hits the groove, the stress strain causing the wrinkle is alleviated and the wrinkle disappears.
By the way, when the magnetic metal was vapor-deposited on the support attached to the grooved can roll, no vapor deposition unevenness occurred.

The present invention has been achieved based on such knowledge, and an object of the present invention is to provide a technique for forming a fine film. An object of the present invention is a film forming apparatus for forming a film by depositing flying particles on a support, wherein a groove is formed on a roll on which the support is guided. Achieved by a membrane device.

When the film forming apparatus is a magnetic recording medium manufacturing apparatus, the flying particles are a magnetic metal material and the support is a non-magnetic support. The roll is a can roll, and a groove is formed on the peripheral side surface of the can roll, for example, along the circumferential direction in a substantially C-shape. It should be noted that the invention can be applied to a manufacturing apparatus other than the magnetic recording medium, and in such a case, the flying particles may be a metal material other than the magnetic metal material.

The groove formed on the roll has a width of 1
A cross section having a triangular shape with a depth of about 3 mm and a depth of about 0.2 to 1 mm is preferable.

[0010]

1 to 3 show an embodiment of a film forming apparatus according to the present invention, for example, a magnetic recording medium manufacturing apparatus.
Is a schematic view of the whole, FIG. 2 is a front view of a main part (can roll), and FIG. In each drawing, 1 is a cooling can roll, 2a is a supply side roll, 2b is a winding side roll, and polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose type A support 3 having a nonmagnetic thickness of about 10 μm and a width of about 200 mm, which is made of resin, a polymer material such as vinyl chloride resin, an inorganic material such as glass or ceramics, or a metal material such as an aluminum alloy, is fed from the supply side roll 2a. It is wound around the can roll 1 and then wound around the winding roll 2b.

As can be seen from FIGS. 2 and 3, in the cylindrical can roll 1 having a diameter of about 250 mm, several grooves 1a are formed on the circumferential side surface of the can roll 1 along the circumferential direction at intervals of 20 to 50 mm. ing. As can be seen from FIG. 3, the groove 1a has a width of about 1 to 3 mm, for example, 2 mm and a depth of 0.2.
It is formed in an isosceles triangle shape of about 1 mm, for example, 0.5 mm.

A magnetic layer (magnetic layer) is formed on the surface of the non-magnetic support 3.
Undercoat layer to improve the adhesion of
It is provided. That is, the surface roughness can be adjusted to an appropriate degree.
By, for example, a magnetic thin film formed by the oblique deposition method.
Of the metal thin film surface roughness
In order to improve the running property as an appropriate one, for example, SiO ₂
The thickness of 0.005 to 0.1 μm containing particles such as
The undercoat layer is formed by applying a coating film.
ing.

Reference numeral 4 is a crucible, and in this crucible 4,
For example, in addition to metals such as Fe, Co and Ni, Co-Ni alloys, Co-Pt alloys, Co-Ni-Pt alloys, Fe-C
o alloy, Fe-Ni alloy, Fe-Co-Ni alloy, Fe
-Co-B alloy, Co-Ni-Fe-B alloy, Co-C
r alloy, or these are filled with magnetic metal 5 such as Al or Ta.

As a constituent material of the crucible 4, for example,
MgO, ZrO, BeO, Al₂O ₃, Si₃N_Four, B
N, ThO₂, CaO, SiO₂, B_FourCeramic such as C
Weaving like a cous or plain weave or a weave
Examples include ceramics with intervening carbon fibers.
It Among them, the preferred one is B_FourC crucible
Is a crucible made of ceramics with a carbon fiber interposed.
The inner wall of the crucible 4 in which the magnetic metal 5 is placed is a rear
Many sharp-angled recesses are formed like the Shiki coast
Of.

Reference numeral 6 is a vacuum container. In the apparatus configured as described above, the inside of the vacuum container 6 is 10 ⁻⁴ to 10 ⁻⁶ To.
After exhausting to a vacuum degree of about rr, the magnetic metal 5 in the crucible 4 is melted and evaporated by resistance heating, high frequency heating, electron beam heating, etc., and the PET film etc. attached to the can roll 1 is supported. 0.04 to 1μ for body 3
A metal thin film type magnetic recording medium is manufactured by vapor-depositing the magnetic metal 5 having a thickness of m. At the time of forming the magnetic thin film, it is preferable to supply oxygen to the vapor deposition portion and forcibly oxidize it to oxidize the surface layer portion of the magnetic thin film to form a protective layer of an oxide film. However, the thickness of the protective layer composed of this oxide film is about several tens of liters, and an oxide film of this thickness may be composed of natural oxidation. In some cases, no action is required.

By the way, wrinkles are generated on the support during the conventional formation of the magnetic thin film. Whether the wrinkles are generated on the support is a result of the radiation heat from the molten magnetic metal 5 in the crucible 4 and the heat from the deposited magnetic metal acting on the support 3 attached to the can roll 1. It was thought. However, in this embodiment, since the groove 1a is formed in the can roll 1, even if a wrinkle occurs, when this wrinkle reaches the groove 1a, the stress strain is alleviated and the wrinkle is eliminated. It is supposed to be done.

Therefore, there is no problem that the magnetic film cannot be made clean as in the case of being attached to a conventional cylindrical can roll, that is, vapor deposition unevenness does not occur, and the magnetic film is formed beautifully, and recording is performed. -A magnetic recording medium having excellent reproduction characteristics can be obtained. In this way, the take-up roll 2b, on which the support 3 having a magnetic thin film having no vapor deposition unevenness is wound, is taken out, and carbon black having an average particle diameter of 20 nm, a vinyl chloride resin, and a urethane prepolymer are taken out. A back coat paint containing a binder resin made of is coated on the surface of the support 3 on the side opposite to the magnetic layer by a direct gravure method to give a dry thickness of 0.5 μm.
m back coat layer is provided.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) was diluted to 0.1% in a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Limited). -Apply the dispersed coating material on the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dry at 70 ° C.

After that, a magnetic tape or the like is obtained by slitting into a predetermined width. FIG. 4 is a front view of a can roll showing another embodiment of a film forming apparatus according to the present invention, for example, a magnetic recording medium manufacturing apparatus. Also in this embodiment, the basic technical idea that the groove 1a is formed in the can roll 1 is the same, and the shape thereof is different. For example, this is an example in which the groove 1a is formed in a substantially C-shape on the surface of the can roll, and other suitable patterns can be used.

[0020]

According to the present invention, a magnetic film is formed neatly and a high performance magnetic recording medium can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of an embodiment of a film forming apparatus according to the present invention.

FIG. 2 is a main part (can roll) of a film forming apparatus according to the present invention.
Front view of

FIG. 3 is an explanatory view showing a shape of a groove formed on a can roll.

FIG. 4 is a main part (can roll) of a film forming apparatus according to the present invention.
Front view of

FIG. 5 is a schematic explanatory view of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of Codes] 1 can roll 1a groove 2a supply side roll 2b winding side roll 3 support 5 magnetic metal

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Shiga 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.

Claims (6)

[Claims] 1. A film forming apparatus for forming a film by depositing flying particles on a support, wherein a groove is formed on a roll on which the support is guided. . 2. The film forming apparatus according to claim 1, wherein the roll is a can roll, and a groove is formed on a peripheral side surface of the can roll. 3. The film forming apparatus according to claim 1, wherein the groove is formed along the circumferential direction of the can roll. 4. The film forming apparatus according to claim 1, wherein the groove is formed in a canopy shape on the surface of the can roll. 5. The flying particles are metallic materials.
~ The film forming apparatus according to claim 4. 6. The film forming apparatus according to claim 1, wherein the flying particles are a magnetic metal material, the support is a non-magnetic support, and the obtained film is a magnetic recording medium.