JPH0773463A - Method and device for producing magnetic recording medium - Google Patents

Method and device for producing magnetic recording medium

Info

Publication number
JPH0773463A
JPH0773463A JP22099593A JP22099593A JPH0773463A JP H0773463 A JPH0773463 A JP H0773463A JP 22099593 A JP22099593 A JP 22099593A JP 22099593 A JP22099593 A JP 22099593A JP H0773463 A JPH0773463 A JP H0773463A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
magnetic recording
support
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22099593A
Other languages
Japanese (ja)
Inventor
Noriyuki Kitaori
典之 北折
Osamu Yoshida
修 吉田
Hirohide Mizunoya
博英 水野谷
Akira Shiga
章 志賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP22099593A priority Critical patent/JPH0773463A/en
Publication of JPH0773463A publication Critical patent/JPH0773463A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain a high reproduced output by running a longsized supporting body tilting at an angle to magnetic particles which come flying to obtain the magnetic recording medium where the scanning direction of a VTR and the growing direction of magnetic particles approximately coincide with each other. CONSTITUTION:A supply roll 2a, a cooling can 1, and a take-up roll 2b are so attached that their axes are inclined at an angle alpha to the horizontal direction. Consequently, the supporting body 3 which is wound up around the take-up roll 2b from the supply roll 2a through the cooling can 1 is constituted at the angle alpha to the perpendicular direction. A magnetic metal 5 in a crucible 4 is evaporated by heating with a resistance, a high frequency, an electron beam, or the like after a vacuum vessel 6 is evacuated to the degree of the vacuum in a prescribed range, and the magnetic metal 5 is vapor-deposited to the supporting body 3 like a PET film to obtain the metallic thin film magnetic recording medium.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気記録媒体の製造方
法並びに装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing method and apparatus.

【0002】[0002]

【発明の背景】磁気テープ等の磁気記録媒体において
は、高密度記録化の要請から、非磁性支持体上に設けら
れる磁性層として、バインダ樹脂を用いた塗布型のもの
ではなく、バインダ樹脂を用いない金属薄膜型のものが
提案されている。すなわち、真空蒸着、スパッタリング
あるいはイオンプレーティングといった乾式メッキ手段
により磁性層を構成した磁気記録媒体が提案されている
ことは周知の通りである。そして、この種の磁気記録媒
体は磁性体の充填密度が高いことから、高密度記録に適
したものである。
BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

【0003】このような乾式メッキ手段による磁気記録
媒体の製造装置は、図2(a),(b)のように構成さ
れているものが一般的である。尚、図2中、21は冷却
キャン、22aはポリエチレンテレフタレート(PE
T)フィルム23の供給側ロール、22bはPETフィ
ルム23の巻取側ロール、24はルツボ、25は磁性金
属、26は真空容器である。そして、真空容器26内を
所定の真空度のものに排気した後、電子銃27を作動さ
せてルツボ24内の磁性金属25を蒸発させ、PETフ
ィルム23に対して磁性金属25の蒸発粒子を堆積(蒸
着)させることによって磁気記録媒体が製造されてい
る。
An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIGS. 2 (a) and 2 (b). In FIG. 2, 21 is a cooling can and 22a is polyethylene terephthalate (PE
T) A supply-side roll for the film 23, 22b a roll for winding the PET film 23, 24 a crucible, 25 a magnetic metal, and 26 a vacuum container. Then, after evacuating the inside of the vacuum vessel 26 to a predetermined vacuum degree, the electron gun 27 is operated to evaporate the magnetic metal 25 in the crucible 24, and evaporated particles of the magnetic metal 25 are deposited on the PET film 23. A magnetic recording medium is manufactured by (vapor deposition).

【0004】ところで、ヘリカルスキャン方式のビデオ
テープレコーダ(VTR)と、これに装着される磁気テ
ープとの関係を検討して行く中で、両者の関係は次のよ
うになっていることが指摘されている。すなわち、磁気
テープは、図3に示す如く、VTRのシリンダ31に巻
き付けられており、その走査方向は、図4に示す如く、
磁気テープ30の長手方向に対して斜目になっている。
ところが、従来の磁気テープ30における堆積(成長)
した磁性粒子の方向は、磁気テープの面に対して垂直
で、かつ、長手方向に沿って平行なものであり、この為
VTRによる走査方向と磁性粒子の成長方向とは明らか
に食い違っており、この食い違いを是正すれば再生出力
の増大が図れるであろうとの提案(特開平5−1979
48号公報)がなされるに至った。
By the way, as the relationship between the helical scan type video tape recorder (VTR) and the magnetic tape mounted thereon is examined, it is pointed out that the relationship between them is as follows. ing. That is, the magnetic tape is wound around the cylinder 31 of the VTR as shown in FIG. 3, and its scanning direction is as shown in FIG.
It is oblique to the longitudinal direction of the magnetic tape 30.
However, deposition (growth) on the conventional magnetic tape 30
The direction of the magnetic particles is perpendicular to the surface of the magnetic tape and parallel to the longitudinal direction. Therefore, the scanning direction by the VTR and the growth direction of the magnetic particles are obviously different from each other. Proposal that the reproduction output can be increased by correcting this discrepancy (Japanese Patent Laid-Open No. 5-1979).
48 gazette).

【0005】すなわち、図2に示されるような磁気記録
媒体の製造装置において、ルツボ24を傾けておき、こ
のような状態のもので磁性金属25を蒸発させ、堆積
(蒸着)させれば、図5に示されるような磁気記録媒体
が得られ、このものはVTRによる走査方向と磁性粒子
の成長方向とが一致したものとなっており、再生出力が
向上したものになると謳われている。
That is, in the apparatus for manufacturing a magnetic recording medium as shown in FIG. 2, if the crucible 24 is tilted and the magnetic metal 25 is evaporated and deposited in this state, The magnetic recording medium as shown in FIG. 5 is obtained, and it is said that the scanning direction by the VTR and the growing direction of the magnetic particles coincide with each other, and the reproduction output is improved.

【0006】本発明者も、この提案になる装置を試作
し、磁気記録媒体を試作してみたが、従来のものと何ら
変わるものではなく、すなわち図5に示されるような構
造の磁気記録媒体ではなかった。しかしながら、図5に
示されるような構造の磁気記録媒体が好ましいものであ
ろうことは予測されるので、かかる構造あるいはこれに
近い構造の磁気記録媒体の作製技術の開発に邁進した。
The inventor of the present invention also prototyped a device according to this proposal and prototyped a magnetic recording medium. However, it is no different from the conventional one, that is, the magnetic recording medium having the structure shown in FIG. Was not. However, since it is expected that the magnetic recording medium having the structure shown in FIG. 5 will be preferable, the inventors have made efforts to develop a technique for producing a magnetic recording medium having such a structure or a structure close to this structure.

【0007】[0007]

【発明の開示】本発明の目的は、VTRによる走査方向
と磁性粒子の成長方向とが略一致した磁気記録媒体の製
造技術を提供することである。この本発明の目的は、金
属磁性粒子を長尺状の支持体に堆積させて磁性層を構成
する磁気記録媒体の製造方法であって、飛来して来る磁
性粒子に対して長尺状の支持体を傾けて走行させること
を特徴とする磁気記録媒体の製造方法によって達成され
る。
DISCLOSURE OF THE INVENTION An object of the present invention is to provide a technique for manufacturing a magnetic recording medium in which the scanning direction by VTR and the growth direction of magnetic particles are substantially the same. An object of the present invention is a method for producing a magnetic recording medium in which metal magnetic particles are deposited on a long-sized support to form a magnetic layer, and long-sized support is provided for flying magnetic particles. This is achieved by a method for manufacturing a magnetic recording medium, which is characterized by tilting a body to run.

【0008】尚、傾斜角度(α)が媒体上を走査するヘ
ッドが支持体の長手方向に対する角度と同じ角度である
よう走行させられることが好ましい。具体的には、傾斜
角度(α)は、4〜15°程度である。又、金属磁性粒
子を長尺状の支持体に堆積させて磁性層を構成する磁気
記録媒体の製造装置であって、金属磁性粒子の飛来源
と、この飛来源から飛来する金属磁性粒子が堆積する前
記支持体をガイドする傾斜状の冷却キャンと、この傾斜
状の冷却キャンに沿って前記支持体を走行させる走行手
段とを具備してなることを特徴とする磁気記録媒体の製
造装置によって達成される。
It is preferable that the head for scanning the medium has an inclination angle (α) which is the same as the angle with respect to the longitudinal direction of the support. Specifically, the inclination angle (α) is about 4 to 15 °. A magnetic recording medium manufacturing apparatus in which metallic magnetic particles are deposited on a long-sized support to form a magnetic layer, wherein a flying source of metallic magnetic particles and metallic magnetic particles flying from this flying source are deposited. And an inclined cooling can for guiding the support, and traveling means for causing the support to travel along the inclined cooling can. To be done.

【0009】尚、冷却キャンの傾斜角度(α)は媒体上
を走査するヘッドが支持体の長手方向に対する角度と同
じ角度であるよう設けられてなることが好ましい。具体
的には、傾斜角度(α)は、4〜15°程度である。そ
して、上記のような製造方法や製造装置が用いられたな
らば、図5に示されるような構造の磁気記録媒体が得ら
れ、このものは高い再生出力が得られる。
It is preferable that the inclination angle (α) of the cooling can is set so that the head for scanning the medium has the same angle as the angle with respect to the longitudinal direction of the support. Specifically, the inclination angle (α) is about 4 to 15 °. When the manufacturing method or manufacturing apparatus as described above is used, a magnetic recording medium having a structure as shown in FIG. 5 is obtained, and a high reproduction output can be obtained from this magnetic recording medium.

【0010】以下、具体的な実施例を挙げて説明する。A concrete example will be described below.

【0011】[0011]

【実施例】図1は、本発明になる磁気記録媒体の製造装
置の第1実施例を示す概略側面図である。同図中、1は
冷却キャン、2aは支持体3の供給側ロール、2bは支
持体3の巻取側ロール、4はルツボ、5は磁性金属、6
は真空容器である。
1 is a schematic side view showing a first embodiment of an apparatus for manufacturing a magnetic recording medium according to the present invention. In the figure, 1 is a cooling can, 2a is a supply side roll of the support 3, 2b is a winding side roll of the support 3, 4 is a crucible, 5 is a magnetic metal, 6
Is a vacuum container.

【0012】本実施例における供給側ロール2a、冷却
キャン1、及び巻取側ロール2bの軸芯は水平方向に対
してα(αは、8mmVTR用のものである場合には、
5°)の角度をなすように取り付けられており、従って
供給側ロール2aから冷却キャン1を介して巻取側ロー
ル2bに巻き取られて行く支持体3が鉛直方向に対して
αの角度をなすように傾斜して構成されている。
In the present embodiment, the axes of the supply side roll 2a, the cooling can 1 and the winding side roll 2b are α with respect to the horizontal direction (α is for 8 mm VTR,
The support 3 is attached so as to form an angle of 5 °). Therefore, the support 3 wound from the supply-side roll 2a to the winding-side roll 2b via the cooling can 1 forms an angle α with respect to the vertical direction. It is constructed to be inclined.

【0013】尚、支持体3は非磁性のものであり、この
支持体3はPET等のポリエステル、ポリアミド、ポリ
イミド、ポリスルフォン、ポリカーボネート、ポリプロ
ピレン等のオレフィン系の樹脂、セルロース系の樹脂、
塩化ビニル系の樹脂といった高分子材料、ガラスやセラ
ミック等の無機系材料、アルミニウム合金などの金属材
料が用いられる。そして、支持体3面上には、必要に応
じて磁性層(磁性薄膜)の密着性を向上させる為のアン
ダーコート層が設けられている。すなわち、表面の粗さ
を適度に粗すことにより、例えば斜め蒸着法により構成
される磁性薄膜の密着性を向上させ、さらに磁気記録媒
体表面の表面粗さを適度なものとして走行性を改善する
為、例えばSiO2 等の粒子を含有させた厚さが0.0
05〜0.1μmの塗膜を設けることによってアンダー
コート層が構成されている。
The support 3 is non-magnetic, and the support 3 is made of polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose resin,
Polymer materials such as vinyl chloride resins, inorganic materials such as glass and ceramics, and metal materials such as aluminum alloys are used. An undercoat layer for improving the adhesion of the magnetic layer (magnetic thin film) is provided on the surface of the support 3 as needed. That is, by appropriately roughening the surface roughness, for example, the adhesion of the magnetic thin film formed by the oblique vapor deposition method is improved, and the surface roughness of the magnetic recording medium surface is moderated to improve the running property. Therefore, for example, the thickness containing particles such as SiO 2 is 0.0
The undercoat layer is formed by providing a coating film having a thickness of 05 to 0.1 μm.

【0014】ルツボ4に充填される磁性金属5として
は、例えばFe,Co,Ni等の金属の他に、Co−N
i合金、Co−Pt合金、Co−Ni−Pt合金、Fe
−Co合金、Fe−Ni合金、Fe−Co−Ni合金、
Fe−Co−B合金、Co−Ni−Fe−B合金、Co
−Cr合金、あるいはこれらにAl等の金属を含有させ
たもの等が挙げられる。
The magnetic metal 5 to be filled in the crucible 4 is, for example, a metal such as Fe, Co or Ni, and Co--N.
i alloy, Co-Pt alloy, Co-Ni-Pt alloy, Fe
-Co alloy, Fe-Ni alloy, Fe-Co-Ni alloy,
Fe-Co-B alloy, Co-Ni-Fe-B alloy, Co
-Cr alloys, alloys containing these metals such as Al, or the like.

【0015】上記のように構成させた装置において、真
空容器6内を10-4〜10-6Torr程度の真空度のも
のに排気した後、抵抗加熱、高周波加熱、電子ビーム加
熱などによりルツボ4内の磁性金属5を蒸発させ、PE
Tフィルム等の支持体3に対して0.04〜1μm厚さ
磁性金属5を蒸着させることによって金属薄膜型の磁気
記録媒体が製造される。尚、磁性薄膜の形成に際して、
蒸着部分に酸素を供給し、強制酸化させることによって
磁性薄膜の表層部分を酸化させ、酸化膜による保護層を
形成するようにすることが好ましい。尚、この酸化膜か
ら構成される保護層の厚さは数十Å程度のものであり、
この程度の厚さの酸化膜は自然酸化で構成される場合も
あり、このような時には強制酸化の手段を講じなくても
良い場合がある。
In the apparatus constructed as described above, the vacuum vessel 6 is evacuated to a vacuum degree of about 10 -4 to 10 -6 Torr, and then the crucible 4 is heated by resistance heating, high frequency heating, electron beam heating or the like. Evaporate the magnetic metal 5 inside, PE
A metal thin film type magnetic recording medium is manufactured by depositing a magnetic metal 5 having a thickness of 0.04 to 1 μm on a support 3 such as a T film. When forming the magnetic thin film,
It is preferable that the surface layer of the magnetic thin film is oxidized by supplying oxygen to the vapor deposition portion and forcibly oxidizing it to form a protective layer of an oxide film. The thickness of the protective layer composed of this oxide film is about several tens of liters,
An oxide film having such a thickness may be formed by natural oxidation, and in such a case, it may not be necessary to take measures for forced oxidation.

【0016】この後、巻取側ロール2bを取り出し、そ
して平均粒径20nmのカーボンブラック及び塩化ビニ
ル系樹脂とウレタンプレポリマーとからなるバインダ樹
脂を分散させてなるバックコート用の塗料をダイレクト
グラビア法により磁性層とは反対側の支持体3に塗布
し、乾燥厚さが0.5μmのバックコート層を設ける。
そして、フッ素パーフルオロポリエーテル(グレード:
FOMBLIN ZDIAC カルボキシル基変性、日
本モンテジソン社製)をフッ素不活性液体(フロリナー
ト、FC−84、住友スリーエム社製)に0.1%とな
るよう希釈・分散させた塗料をダイ塗工方式により乾燥
後の厚さが20Å程度となるよう磁性面に塗布し、10
0℃で乾燥させる。
After that, the winding side roll 2b is taken out, and a back coat paint obtained by dispersing carbon black having an average particle size of 20 nm and a binder resin composed of a vinyl chloride resin and a urethane prepolymer is prepared by a direct gravure method. Is applied to the support 3 on the side opposite to the magnetic layer to provide a back coat layer having a dry thickness of 0.5 μm.
Fluorine perfluoropolyether (grade:
FOMBLIN ZDIAC Carboxyl group-modified, manufactured by Nippon Montedison Co., Ltd. was diluted and dispersed in a fluorine-inert liquid (Fluorinert, FC-84, Sumitomo 3M Co., Ltd.) to a concentration of 0.1%, and then dried by a die coating method. Is applied to the magnetic surface so that the thickness is about 20Å
Dry at 0 ° C.

【0017】この後、所定の幅にスリットし、磁気テー
プにする。このようにして得られた磁気記録媒体の磁性
層の構造を調べると、図5に示されるような構造のもの
であった。そして、この磁気記録媒体と図2のように構
成された装置を用いて作製された磁気記録媒体とを比べ
ると、本実施例のようにして得られた磁気テープは、再
生出力が2dB高いものであった。
After that, the magnetic tape is slit into a predetermined width. When the structure of the magnetic layer of the magnetic recording medium thus obtained was examined, the structure was as shown in FIG. When this magnetic recording medium is compared with the magnetic recording medium manufactured by using the apparatus configured as shown in FIG. 2, the magnetic tape obtained in this example has a reproduction output higher by 2 dB. Met.

【0018】[0018]

【効果】本発明によれば、再生出力の高い磁気記録媒体
が得られる。
According to the present invention, a magnetic recording medium having a high reproduction output can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明になる磁気記録媒体の製造装置の概略側
面図
FIG. 1 is a schematic side view of a magnetic recording medium manufacturing apparatus according to the present invention.

【図2】従来の磁気記録媒体の製造装置の説明図FIG. 2 is an explanatory diagram of a conventional magnetic recording medium manufacturing apparatus.

【図3】VTRの回転ヘッドに巻き付けられた磁気テー
プの説明図
FIG. 3 is an explanatory diagram of a magnetic tape wound around a rotary head of a VTR.

【図4】磁気テープのトラック方向を示す説明図FIG. 4 is an explanatory diagram showing a track direction of a magnetic tape.

【図5】磁性粒子の成長方向を示した磁気記録媒体の模
式図
FIG. 5 is a schematic diagram of a magnetic recording medium showing the growth direction of magnetic particles.

【符号の説明】[Explanation of symbols]

1 冷却キャン 2a 供給側ロール 2b 巻取側ロール 3 支持体 4 ルツボ 5 磁性金属 6 真空容器 1 Cooling Can 2a Supply Side Roll 2b Winding Side Roll 3 Support 4 Crucible 5 Magnetic Metal 6 Vacuum Container

───────────────────────────────────────────────────── フロントページの続き (72)発明者 志賀 章 栃木県芳賀郡市貝町大字赤羽2606 花王株 式会社情報科学研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Shiga 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 金属磁性粒子を長尺状の支持体に堆積さ
せて磁性層を構成する磁気記録媒体の製造方法であっ
て、飛来して来る磁性粒子に対して長尺状の支持体を傾
けて走行させることを特徴とする磁気記録媒体の製造方
法。
1. A method of manufacturing a magnetic recording medium in which metallic magnetic particles are deposited on a long support to form a magnetic layer, wherein a long support is provided for magnetic particles coming in. A method of manufacturing a magnetic recording medium, which comprises running the vehicle at an angle.
【請求項2】 媒体上を走査するヘッドが支持体の長手
方向に対する角度と同じ角度だけ傾けて走行させること
を特徴とする請求項1の磁気記録媒体の製造方法。
2. A method of manufacturing a magnetic recording medium according to claim 1, wherein the head for scanning the medium is tilted by the same angle as the angle with respect to the longitudinal direction of the support for traveling.
【請求項3】 金属磁性粒子を長尺状の支持体に堆積さ
せて磁性層を構成する磁気記録媒体の製造装置であっ
て、金属磁性粒子の飛来源と、この飛来源から飛来する
金属磁性粒子が堆積する前記支持体をガイドする傾斜状
の冷却キャンと、この傾斜状の冷却キャンに沿って前記
支持体を走行させる走行手段とを具備してなることを特
徴とする磁気記録媒体の製造装置。
3. An apparatus for producing a magnetic recording medium, wherein magnetic magnetic particles are deposited on a long-sized support to form a magnetic layer, and the flying source of the metallic magnetic particles and the metallic magnetism flying from the flying source. Manufacture of a magnetic recording medium comprising an inclined cooling can for guiding the support on which particles are deposited, and a traveling means for causing the support to travel along the inclined cooling can. apparatus.
【請求項4】 媒体上を走査するヘッドが支持体の長手
方向に対する角度と同じ角度だけ冷却キャンが傾斜させ
られて設けられたことを特徴とする請求項3の磁気記録
媒体の製造装置。
4. The apparatus for manufacturing a magnetic recording medium according to claim 3, wherein the head for scanning the medium is provided with the cooling can inclined by the same angle as the angle with respect to the longitudinal direction of the support.
JP22099593A 1993-09-06 1993-09-06 Method and device for producing magnetic recording medium Pending JPH0773463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22099593A JPH0773463A (en) 1993-09-06 1993-09-06 Method and device for producing magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22099593A JPH0773463A (en) 1993-09-06 1993-09-06 Method and device for producing magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0773463A true JPH0773463A (en) 1995-03-17

Family

ID=16759824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22099593A Pending JPH0773463A (en) 1993-09-06 1993-09-06 Method and device for producing magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0773463A (en)

Similar Documents

Publication Publication Date Title
US4495242A (en) Magnetic recording medium
JPH11250437A (en) Magnetic recording medium and magnetic recording and reproducing system
JPH0773463A (en) Method and device for producing magnetic recording medium
JPH0765373A (en) Device for producing magnetic recording medium
US4546725A (en) Apparatus for manufacturing magnetic recording media
JPH0773432A (en) Magnetic recording medium and method and device for its production
JPH0790585A (en) Thin film deposition system
JPH0762536A (en) Film forming device
JPH07243032A (en) Thin film forming device
JP2843236B2 (en) Method and apparatus for manufacturing magnetic recording medium
JPH0793751A (en) Production of magnetic recording medium
JPH06101029A (en) Production of magnetic recording medium
JPH0798831A (en) Magnetic recording medium, its production and producing device
JPH0927110A (en) Magnetic recording medium and its production
JPH0762535A (en) Film forming device
JPH0841642A (en) Film forming device
JPH07238378A (en) Device for producing metallic thin film body
JPH0991659A (en) Magnetic recording medium and its production
JPH06333225A (en) Thin film magnetic recording medium
JPH07320264A (en) Device for producing magnetic recording medium and method therefor
JPH07243026A (en) Metallic thin film body and its production
JPH0786033A (en) Thin film and formation thereof
JPH06101028A (en) Production device for magnetic recording medium and production of the same
JPH06111311A (en) Magnetic recording medium
JPH0765372A (en) Method and device for producing magnetic recording medium