JPH08102068A - Formation of metal film and equipment therefor - Google Patents

Abstract

PURPOSE: To improve the adhesion strength of a metal film by irradiating a substrate with ultraviolet rays and thereafter forming a metal film on the substrate in a vacuum atmosphere. CONSTITUTION: In this equipment, a substrate 1 consisting of a PET film is allowed to travel inside a vacuum vessel 8 evacuated to 10<-4> to 10<-6> Torr at an e.g. 5m/min traveling speed by using a traveling device 2 composed of a supply roll 2a, a can roll 3 and a wind-up roll 2b. A magnetic metal 6 consisting of Co, etc., in a crucible 5 is irradiated with the electron beam that is emitted from an electron gun 7 and has 16kW power to melt and evaporate the metal 6. Ultraviolet lamps 10 each having 300W output and has 50 to 350nm wavelengths are disposed along the traveling path of the substrate 1 on the upstream side of the can roll 3. The surface molecules of the irradiated substrate 1 with the ultraviolet rays are excited, or radicals are formed from them to improve the bonding strength between the surface of the substrate 1 and the evaporated particles of the magnetic metal 6. The angle of incidence of each of the evaporated particles of the magnetic metal 6 incident on the surface of the substrate 1 is controlled by using a shield plate 4 to form the objective magnetic metal thin film having an e.g. 1,600Åthickness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a metal thin film type magnetic recording medium.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, there has been proposed a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 2, 31 is a cooling can roll,
32a is a supply side roll of the polyethylene terephthalate (PET) film 33, 32b is a winding side roll of the PET film 33, 34 is a shielding plate, 35 is a crucible, 36 is a magnetic metal, and 37 is a vacuum chamber. Then, after evacuating the vacuum chamber 37 to have a predetermined vacuum degree, the electron gun 38 is operated to scatter (evaporate) the magnetic metal 36 in the crucible 35,
A magnetic recording medium is manufactured by depositing (evaporating) evaporated particles of the magnetic metal 36 on the PET film 33.

By the way, the bonding force between the PET film 33 and the film (magnetic film) formed by the vapor deposition particles of the magnetic metal 36 in the metal thin film type magnetic recording medium thus obtained is only the adhesive force during vapor deposition. However, if this force is small, the magnetic film easily peels off. Therefore, in order to increase the bonding force, the PET film 33 is subjected to ion bombardment treatment prior to vapor deposition. That is, the physical bond strength was increased by cleaning the surface of the PET film 33 by ion bombardment, increasing the surface roughness, and making the vapor deposition particles bite into the PET film 33. Of.

However, if this ion bombardment process is performed outside the vacuum chamber 37, the PET film 33 subjected to the ion bombardment process will be exposed to the atmosphere once in order to be introduced into the vacuum chamber 37. Therefore, if dust or dirt adheres to the surface, there is a problem that the binding force is reduced. Therefore, it is not necessary to connect the ion bombardment processing chamber and the vacuum tank 37 with a communication passage or to provide the ion bombardment processing chamber in the vacuum tank 37 so that the ion bombarded PET film 33 is not exposed to the atmosphere. However, it is unavoidable that the gas used in the ion bombardment process leaks into the vacuum chamber 37, which deteriorates the vapor deposition characteristics and does not always give good results.

[0006]

DISCLOSURE OF THE INVENTION The present invention has focused on the fact that the support is made of a plastic such as PET film while advancing the examination of the above-mentioned problems, and has high energy (electron beam, ultraviolet ray, etc.). It was thought that, when irradiated with, the molecules on the surface of the plastic film were excited or radicals were generated, and if vaporized particles came flying there, the binding force of the vapor deposition particles would be increased. Further, it is considered that the irradiation of electron beam or ultraviolet ray does not bring oxygen gas or the like into the vacuum vapor deposition tank, so that the vapor deposition characteristics are not deteriorated and a high-performance magnetic film can be obtained.

Therefore, when the PET film 33 was immediately irradiated with an electron beam in the vapor deposition apparatus as shown in FIG. 2, the traveling property of the PET film 33 was deteriorated and the magnetic film was not formed neatly. . However, when it is irradiated with ultraviolet rays, there is no problem in the running property of the PET film, the magnetic film is formed neatly, and the surface of the PET film is activated by the irradiation of ultraviolet rays. PE
The adhesion strength of the magnetic particles deposited on the T film was high, and the peel strength of the magnetic film was high.

The present invention has been achieved on the basis of such knowledge, and an object of the present invention is to achieve a high adhesion strength of a metal film, to form a fine metal film, and to easily carry out the same. It is to provide the technology that can. An object of the present invention is a method for forming a metal film on a resin support, which comprises an ultraviolet irradiation step of irradiating the support with ultraviolet rays,
And a metal film forming step of depositing metal particles on the support which has been subjected to the ultraviolet irradiation by the ultraviolet irradiation step.

A method of forming a metal film on a resin support, which comprises an ultraviolet irradiation step of irradiating the support with ultraviolet rays, and a support irradiated with ultraviolet rays by the ultraviolet irradiation step. A metal film forming step of depositing metal particles, wherein the ultraviolet irradiation step is performed in a vacuum atmosphere,
This is achieved by the method for forming a metal film, which is characterized in that the metal film forming step is also performed in this vacuum atmosphere.

Further, there is provided an apparatus for depositing a metal film on a resin support, which comprises ultraviolet irradiation means for irradiating the support with ultraviolet rays, and a support irradiated with ultraviolet rays by the ultraviolet irradiation means. And a metal film forming means for depositing metal particles. Further, a device for forming a metal film on a running support, comprising a vacuum chamber, a metal material as a film forming source, a scattering means for scattering the metal material, and metal particles scattered by the scattering means. A support made of resin on which is deposited, a supply means for the support, a winding means for the support, a cooling can roll for guiding the traveling of the support on which the scattered metal particles are deposited, and this cooling can roll. And the supply means, and an ultraviolet irradiation means for irradiating the surface of the support on the side not contacted with the cooling can roll with ultraviolet rays. .

When the present invention is applied to a magnetic recording medium, examples of the support (preferably non-magnetic support) include polyester such as polyethylene terephthalate, polyamide, polyimide, polysulfone, polycarbonate and polypropylene. Polymer materials such as olefin resins, cellulose resins, and vinyl chloride resins are used. An undercoat layer for improving the adhesion is provided on the surface of the support, if necessary.
That is, by appropriately roughening the surface roughness, for example, to improve the adhesion of a thin film formed by the oblique vapor deposition method,
Further, in order to improve the runnability by making the surface roughness of the magnetic recording medium moderate, for example, by providing a binder resin coating film containing particles such as SiO ₂ and having a thickness of 0.005 to 0.1 μm. An undercoat layer is formed.

A metal magnetic film is provided on one surface (surface) of the support as described above. In addition, as a matter of course, in the present invention, the ultraviolet irradiation is performed before the metal magnetic film is provided. Examples of the material of the metal magnetic film include Fe and C
In addition to metals such as o and Ni, Co-Ni alloys, Co-Pt
Alloy, Co-Ni-Pt alloy, Fe-Co alloy, Fe-
A Ni alloy, an Fe-Co-Ni alloy, an Fe-Co-B alloy, a Co-Ni-Fe-B alloy, a Co-Cr alloy, or those containing a metal such as Al is used. The thickness of the metal magnetic film is, for example, 1000 to 20.
It is preferably about 00Å.

A back coat film is provided on the opposite surface (back surface) of the support. When the back coat film is composed of a metal film, ultraviolet irradiation is performed before the metal film (back coat film) is provided. As the material of the back coat film, for example, Cu-Al-X (where X is Mn, Fe, N
One or more selected from the group of i) type alloys and Al-Si type alloys can be used. Cu
When using an -Al-X alloy, the Al content is 5 to
It is preferably 30 at% and the X content is 5 at% or less. Particularly preferably, the Cu content is 70 to 90.
at%, Al content is 8 to 25 at%, Mn content is 0.5 to 4 at%, Fe content is 0.4 to 5 at%.
And the Ni content is 0.4 to 4 at%, Mn, F
It is preferable that the total content of e and Ni is 1 to 6 at%. When an Al-Si alloy is used, the Al content is preferably 15 to 70 at% and the Si content is preferably 15 to 70 at%.

The metal magnetic film and the back coat film may be formed by various dry plating means such as a vapor deposition method, a DC sputtering method, an AC sputtering method, a high frequency sputtering method, a DC magnetron sputtering method, a high frequency magnetron sputtering method and an ion beam sputtering method. Can be adopted. Therefore, the apparatus of the present invention is constructed by incorporating the ultraviolet irradiation means in these dry plating apparatuses.

It is preferable that an oxidizing gas is supplied at the time of forming these films to oxidize the surface layer portion so that a protective film made of an oxide film is formed. The ultraviolet ray used in the present invention has a wavelength of 50 nm to 350 n.
m is used. A lamp for irradiating ultraviolet rays having such a wavelength is arranged in a vacuum chamber (dry plating apparatus such as a vapor deposition apparatus) in which film formation is performed, and the ultraviolet irradiation is performed at a position before the film formation. Done. Then, after this, a magnetic film or the like is subsequently formed.

In the above description, the case of being applied to a magnetic recording medium has been described, but this is also applicable to a metal thin film type ink ribbon and the like. Hereinafter, the present invention will be described with reference to specific examples.

[0017]

【Example】

[Embodiment 1] FIG. 1 is a schematic view of an apparatus for manufacturing a magnetic recording medium according to the present invention. In the figure, 1 is a support made of a PET film, 2a is a supply side roll of the support 1, 2b is a winding side roll of the support 1, 3 is a cooling can roll, 4 is a shielding plate, 5 is a crucible, 6 Is a Co-based magnetic metal, 7 is an electron gun,
Reference numeral 8 is a vacuum tank, and 9 is an oxygen gas supply nozzle.

Reference numeral 10 denotes an ultraviolet irradiation lamp provided in the vacuum chamber 8 along the traveling path of the support 1 between the supply side roll 2a and the cooling can roll 3. In this embodiment, there is no conventional ion bombardment device. In the apparatus configured as described above, the inside of the vacuum chamber 8 is about 10 ⁻⁴ to 10 ⁻⁶ Torr, for example, 2 × 10 ⁻⁵ Tor.
After exhausting to a vacuum degree of rr, electron beam heating by an electron gun (16 kW) 7 evaporates the magnetic metal 6 in the crucible 5, and after this evaporation reaches a steady state, an ultraviolet irradiation lamp (output 300 W, wavelength 50 (-350 nm) 10 and the support 1 is run at 5 m / min. As a result, the support 1 that has been irradiated with ultraviolet rays
A magnetic metal (Co) 6 having a thickness of, for example, 1600Å is vapor-deposited on the surface to form a magnetic thin film.

When forming this magnetic thin film, the nozzle 9 is used.
O ₂ gas is supplied at a rate of 180 sccm from the nozzle port of No. 1 to forcibly oxidize the surface layer portion of the magnetic thin film formed by vapor deposition on the support 1. After the magnetic thin film is formed in this manner and wound on the winding side roll 2b, the winding side roll 2b is taken out and composed of carbon black having an average particle diameter of 20 nm, a vinyl chloride resin and a urethane prepolymer. A back coat coating material in which a binder resin is dispersed is applied by a direct gravure method to one surface of the support opposite to the magnetic layer to provide a back coat layer having a dry thickness of 0.5 μm.

Fluorine perfluoropolyether (grade: FOMBLIN ZDIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) was diluted with a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Limited) to a concentration of 0.1%. -Apply the dispersed coating material on the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dry at 70 ° C.

After that, slits were made to a predetermined width. [Example 2] In Example 1, two ultraviolet irradiation lamps having an output of 300 W were used, but the same procedure was performed except that the number was increased to three. [Embodiment 3] In Embodiment 1, two ultraviolet irradiation lamps having an output of 300 W were used, but the same operation was performed except that three ultraviolet irradiation lamps having an output of 500 W were used.

[Comparative Example 1] The same procedure as in Example 1 was carried out except that the ultraviolet irradiation lamp 10 was turned off and no ultraviolet irradiation was performed. [Comparative Example 2] The same procedure as in Example 1 was carried out except that ion bombardment treatment was carried out instead of UV irradiation.

[Characteristics] With respect to the magnetic tapes obtained in the above examples, the peeling strength of the magnetic film was examined.
It is shown in FIG. According to this, it can be seen that the adhesion strength of the film formed by vapor deposition on the film irradiated with ultraviolet rays is high. In particular, the adhesion strength is higher than that by the ion bombardment treatment, and
It is noted that the implementation is simple and the manufacturing cost is low.

[0024]

According to the present invention, a metal film having a high adhesion strength can be obtained easily and at low cost.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a schematic explanatory diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Support 2a Supply side roll 2b Winding side roll 3 Cooling can roll 4 Shielding plate 5 Crucible 6 Magnetic metal 8 Vacuum tank 10 Ultraviolet irradiation lamp

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigemi Wakabayashi 2606, Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.Institute of Information Sciences (72) Inventor Akira Shiga, 2606 Akabane, Kaiga-cho, Haga-gun, Tochigi Kao-sha ceremony Company Information Science Laboratory

Claims (4)

[Claims] 1. A method for forming a metal film on a resin-made support, which comprises an ultraviolet-irradiating step of irradiating the support with ultraviolet rays, and a support irradiated with ultraviolet rays by the ultraviolet-irradiating step. And a metal film forming step of depositing metal particles. 2. The method for forming a metal film according to claim 1, wherein the ultraviolet irradiation step is performed in a vacuum atmosphere, and the metal film forming step is also performed in the vacuum atmosphere. 3. An apparatus for depositing a metal film on a resin support, comprising: an ultraviolet irradiation means for irradiating the support with ultraviolet rays; and a support irradiated with ultraviolet rays by the ultraviolet irradiation means. A metal film forming apparatus, comprising: a metal film forming means for depositing metal particles. 4. An apparatus for forming a metal film on a moving support, comprising a vacuum chamber, a metal material as a film forming source, a scattering means for scattering the metal material, and a scattering means for scattering the metal material. A resin support on which the metal particles are deposited, a supply means for the support, a winding means for the support, a cooling can roll for guiding the travel of the support on which the scattered metal particles are deposited, An apparatus for depositing a metal film, comprising: an ultraviolet irradiation means for irradiating the surface of the support, which is between the cooling can roll and the supply means, and is not contacted with the cooling can roll, with ultraviolet light.