JP6721079B2 - Can roll, vacuum film forming apparatus, and long film forming method - Google Patents

Description

INDUSTRIAL APPLICABILITY The present invention relates to a vacuum film forming apparatus for forming films such as sputtering while winding a long body (long heat-resistant resin film, metal foil, metal strip, etc.) conveyed by roll-to-roll around the outer peripheral surface of a can roll. In particular, the present invention relates to a can roll capable of suppressing wrinkles in a long body that tends to occur during film formation, a vacuum film forming apparatus, and a film forming method for a long body.

Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is made of a heat-resistant resin film with a metal film in which a metal film is formed on one surface or both surfaces of the heat-resistant resin film. In recent years, the wiring patterns formed on flexible wiring boards have become finer and denser, and it has become even more important that the heat-resistant resin film with a metal film itself is smooth without wrinkles. ..

This type of metal film-attached heat-resistant resin film can be produced by attaching a metal foil to the heat-resistant resin film with an adhesive (referred to as a method for producing a three-layer substrate), heat-resistant metal foil. By coating with a water-soluble resin solution and then manufacturing by drying (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method of forming a metal film on a heat-resistant resin film for manufacturing (referred to as a metallizing method) and the like have been conventionally known. The dry plating method (vacuum film forming method) in the metallizing method includes a vacuum vapor deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

Regarding the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on the polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. Further, in Patent Document 2, a first metal thin film formed by sputtering targeting a copper-nickel alloy and a second metal thin film formed by sputtering targeting copper are laminated in this order on a polyimide film. The disclosed flexible circuit board material (that is, a copper clad laminated resin film substrate) is disclosed. In addition, when vacuum-depositing a heat-resistant resin film such as a polyimide film to produce a heat-resistant resin film with a metal film, a sputtering web coater described below is generally used.

The above-mentioned sputtering method generally has an advantage of excellent adhesion to a formed metal thin film or the like, but it is said that the heat load applied to the heat resistant resin film is larger than that of the vacuum deposition method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, wrinkles are likely to occur in the film.

In order to prevent the formation of wrinkles, in the sputtering web coater, the heat-resistant resin film being formed is formed by winding a long heat-resistant resin film conveyed by roll-to-roll around the outer surface of the can roll having a cooling function. The method of cooling from the side is adopted. For example, Patent Document 3 discloses an unwinding and winding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding and winding type vacuum sputtering apparatus is equipped with a cooling roll that functions as a can roll, and further, a sub-roll (front feed roll) is provided at least on the heat-resistant resin film carry-in side (conveying upstream side) of the cooling roll. The sub roll is used to control the heat resistant resin film to be closely attached to the cooling roll.

By the way, even when tension is applied in the length direction to a long heat-resistant resin film on which a heat load is not acting, as shown in FIGS. 1(A) to 1(C), the central portion of the resin film is Wrinkles occur on the. That is, as shown in FIG. 1(A), when no tension is applied to the resin film in the length direction (tension release state), the resin film is flat without slack, but When tension is applied in the length direction (tension applied state), the resin film as a whole does not come into contact with the can roll (cooling roll) as shown in FIGS. 1B to 1C. Is stretched, and wrinkles are generated in the central portion of the resin film (slackened state).

For this reason, when tension (conveyance tension) is applied to the long heat-resistant resin film in the length direction, even if it is wound around the parallel can roll (parallel type can roll), Although it is extremely slight, as shown in FIG. 2(A), the heat-resistant resin film is in a state where wrinkles are generated in the central portion (a state of slackening).

Even if the above-mentioned "middle slack state" is extremely small, a gap is created in the "middle slack part" and the heat transfer efficiency with the parallel can roll (parallel type can roll) becomes insufficient, so the cooling effect is correspondingly increased. There was a problem that the wrinkles tended to be generated in the width direction in the above-mentioned "middle slack area" due to the heat load of the sputtering film formation. In particular, when the transport speed of the heat-resistant resin film is increased for the purpose of increasing the efficiency of sputtering film formation, it is necessary to perform sputtering film formation of the desired film thickness in a short time, so large power is applied to the sputtering cathode. Therefore, the heat load applied to the heat resistant resin film is further increased by that amount, and the above problem becomes remarkable.

To solve this problem, in Non-Patent Document 1, a "reverse crown-shaped" can roll in which the roll end side is processed higher than the roll center part is adopted, and the peripheral speed on the can roll end part side is the roll center. We have proposed a device in which wrinkles are less likely to occur in the width direction of the heat resistant resin film by making it faster than the part. However, the method of using the "reverse crown-shaped" can roll is an effective method when the grip force between the long resin film and the roll is weak in the air and the transport speed of the film is fast, but in a vacuum. It was not an effective method when the grip force between the long resin film and the roll was strong and the transport speed of the film was slow.

On the other hand, in order to solve the above-mentioned problem, in Patent Document 4, a drum type drum (crown shape type: calculated from Patent Document 4 in which the axial center portion is higher than the axial end portion of the roll is processed to have a higher axial center portion). It proposes a device in which wrinkles are less likely to occur in the width direction of the film by adopting a can roll of 2 to 3 mm higher than the end portion in the axial direction).

Then, when compared with the device of Non-Patent Document 1 that uses the "reverse crown-shaped" can roll, when the gripping force between the resin film and the roll is strong and the transport speed of the film is slow in vacuum, FIG. Since the device (method) of Patent Document 4 that uses a drum-shaped (crown-shaped) can roll as shown has an action of stretching a resin film around the outer peripheral surface of the crown-shaped can roll to extend the above-mentioned "slack portion". It was effective.

By the way, as shown in FIG. 4, the parallel type can roll and the crown type can roll described above are provided with a cylindrical portion 30 provided with a refrigerant circulation path inside and a rotation provided on a rotation center axis portion of the cylindrical portion 30. The main part is configured with the shaft 31, and the shape of the cylindrical part is set in consideration of the assumed use temperature of the roll (for example, the temperature of the outer peripheral surface of the can roll is 20° C.), The outer peripheral surface of the cylindrical portion is ground and polished to be processed into a parallel shape type or a crown shape type. Then, in the "parallel-shaped can roll" processed so that the diameter difference (α=α1-α2) between the diameter α1 at the axial center and the diameter α2 at both ends of the outer peripheral surface of the cylindrical portion 30 becomes 0, the roll concerned. When it is used under a temperature condition exceeding the expected temperature of use, the outer peripheral surface of the cylindrical portion 30 undergoes a large thermal expansion compared to the rotating shaft 31 (rotation that does not come into contact with a long resin film structurally. The temperature of the shaft 31 is smaller than that of the outer peripheral surface of the cylindrical portion 30), and the diameter difference (α=α1−α2) is naturally transformed into a positive “crown-shaped can roll”. Even in the case of "crown-shaped can rolls" processed so that the diameter difference (α = α1-α2) between the diameter α1 at the axial center of the outer peripheral surface and the diameter α2 at both ends is positive, the expected temperature of the roll is exceeded. When used under different temperature conditions, the outer peripheral surface of the cylindrical portion 30 undergoes a large thermal expansion as compared with the rotating shaft 31, so that the crown amount defined by the diameter difference (α=α1−α2) is the initial value. It naturally increases compared to the set value. Therefore, even if a large amount of power is applied to the sputtering cathode for the purpose of increasing the film formation efficiency, the original "parallel type can roll" is naturally transformed into a "crown type can roll", and Since the initial crown amount of "can roll" naturally increases, it was possible to suppress the generation of wrinkles in the long resin film to some extent.

However, when a large electric power is applied to the sputtering cathode for the purpose of further improving the film forming efficiency and the like, there is a limit to the effect of suppressing the generation of wrinkles.

JP-A-02-098994 Japanese Patent Laid-Open No. 06-097616 JP 62-247073 A JP, 10-008249, A

“The Mechanics of Web Handling”, David R. Roisum, Ph.D, TAPPI PRESS, (1998) p.83-84.

The present invention has been made in view of such a problem, and the problem is that even when the can roll is used under a temperature condition greatly exceeding the expected use temperature, the heat-resistant resin film is It is an object of the present invention to provide a can roll and a vacuum film forming apparatus capable of suppressing the generation of wrinkles in a scale, and a method for forming a long structure in which the generation of wrinkles is suppressed.

Therefore, the present inventor has conducted diligent research on a new can roll structure in which wrinkles are unlikely to occur in a long body even under a temperature condition that greatly exceeds the assumed use temperature. It has been found that when a metal material having a coefficient of thermal expansion larger than that of the shaft is used, a sufficient crown amount that can be used at the operating temperature is secured, and the temperature of the rotating shaft is controlled to be constant. It has been found that a sufficient amount of crown that can cope with the operating temperature can be secured even when a cooling means for use is attached. The present invention has been completed based on such technical findings.

That is, the first invention according to the present invention is
A cylindrical portion provided with a refrigerant circulation path inside, a pair of side plates closing the open end side of the cylindrical portion and having an opening in the center, and a proximal end side fitted into the opening of the side plate and a distal end side In a can roll that includes a pair of cylindrical rotary shafts that project outward from the side plates and that winds a long body that is conveyed by roll-to-roll in a vacuum chamber around the outer peripheral surface of the cylindrical portion to cool it,
A central shaft double pipe for introducing and discharging a refrigerant in a refrigerant circulation path provided inside the cylindrical portion, and a temperature of a cylindrical rotating shaft constituted by a rotating shaft refrigerant introducing pipe and a rotating shaft refrigerant discharging pipe. Characterized in that the cooling means for the rotating shaft for controlling the constant is provided in the cylindrical rotating shaft,
The second invention is
In the can roll described in the first invention,
It is characterized in that the cylindrical portion is made of a metal material having a larger thermal expansion coefficient than that of the metal material forming the cylindrical rotary shaft.

The third invention according to the present invention is
In the can roll described in the first invention or the second invention,
Machining into a parallel shape type in which the diameter difference (α=α1−α2) between the axial center diameter α1 and both end diameters α2 of the cylindrical outer peripheral surface is 0, or a crown shape type in which the diameter difference (α) is positive. Is characterized by
The fourth invention is
In the can roll according to any one of the first invention to the third invention,
In the crown-shaped can roll, the crown amount defined by the above-mentioned diameter difference (α) is changed within a range of 100 to 500 μm.

Next, a fifth invention according to the present invention is
A vacuum chamber, a transport mechanism for transporting the long body by roll-to-roll in the vacuum chamber, a can roll for winding the long body around the outer peripheral surface for cooling, and a vacuum for the long body wound on the can roll. In a vacuum film forming apparatus equipped with means for forming a film,
The can roll according to any one of the first invention to the fourth invention is characterized in that the can roll is configured.
The sixth invention is
In the vacuum film forming apparatus according to the fifth invention,
The vacuum deposition means is magnetron sputtering,
A seventh invention according to the present invention is
In the film forming method of a long body which is wound on the outer peripheral surface of the can roll in a vacuum chamber by roll-to-roll and which performs vacuum film formation on the long body wound on the can roll,
It is characterized in that the can roll is constituted by the can roll according to any one of the first invention to the fourth invention.

According to the can roll described in the first invention,
A central shaft double pipe for introducing and discharging a refrigerant in a refrigerant circulation path provided inside the cylindrical portion, and a temperature of a cylindrical rotating shaft constituted by a rotating shaft refrigerant introducing pipe and a rotating shaft refrigerant discharging pipe Cooling means for the rotating shaft that is controlled to be constant is provided in the cylindrical rotating shaft, and thermal expansion of the outer peripheral surface of the cylindrical portion is cooled due to temperature rise of the outer peripheral surface of the cylindrical portion when the elongated body is cooled. Since it becomes larger than the thermal expansion of the cylindrical rotary shaft equipped with the means, it is possible to increase the diameter difference (α=α1-α2) between the diameter α1 at the axial center of the outer peripheral surface of the cylindrical portion and the diameter α2 at both ends. Become.

And, even when the can roll is used under a temperature condition that greatly exceeds the assumed use temperature, the crown amount defined by the diameter difference (α=α1-α2) between the axial center diameter α1 and both end diameters α2. Since it is possible to increase the number of wrinkles, it is possible to suppress the generation of wrinkles in the long body.

FIG. 1(A) is a plan view showing the surface of a long body when no tension is applied to the long body (long heat-resistant resin film or the like) in the length direction (that is, the tension is released), FIG. 1(B) is a plan view showing the “middle slack portion” of the long body that occurs when tension is applied to the long body in the length direction (tension applied state), and FIG. FIG. 1B is a cross-sectional view taken along the line AA′ of FIG. FIG. 2(A) is a schematic cross-sectional view showing a “middle slack portion” that appears when a long body is wound around a parallel can roll (parallel type can roll) surface according to a conventional example, and FIG. 2(B) is a drum shape. FIG. 6 is a schematic cross-sectional view showing a state in which the “middle slack portion” is expanded in the width direction when a long body is wound around a (crown-shaped) can roll surface. Explanatory drawing of a vacuum film-forming apparatus. Explanatory drawing of the can roll provided with the cylindrical part in which the refrigerant circulation path was provided inside, and the cylindrical rotating shaft provided in the rotation center axis part of this cylindrical part. FIG. 5(A) shows the present invention processed so that the diameter difference (α=α1−α2) between the axial center diameter α1 and the both end diameters α2 of the outer peripheral surface of the cylindrical portion is 0 at the assumed use temperature of the roll. FIG. 5(B) is an explanatory view showing such a parallel type can roll, and FIG. 5(B) is a diameter α1 at the central portion in the axial direction of the outer peripheral surface of the cylindrical portion and both end diameters when the roll is used under temperature conditions exceeding the assumed use temperature of the roll. Explanatory drawing of the can roll according to the present invention in which the diameter difference (α=α1−α2) of α2 is positively changed and deformed into a crown shape. Explanatory drawing of the can roll which concerns on this invention with which the cooling means for the rotating shaft which controls the temperature of a cylindrical rotating shaft constant was attached.

Hereinafter, embodiments of the present invention will be described in detail.

(1) Can roll The can roll is, as shown in FIG. 4, a cylindrical portion 30, a pair of side plates 32 that closes the open end side of the cylindrical portion 30 and has an opening at the center, and the side plate 32. The cylindrical rotary shaft 31 has a base end side fitted in the opening, a front end side protruding outward from the side plate, and a bearing 35. Further, the cylindrical portion 30 of the can roll has a double structure called a jacket structure, and in the inner refrigerant circulation path, the inner introduction pipe 33 of the central shaft double pipe provided in the cylindrical rotary shaft 31 is provided. The refrigerant (heating medium) is introduced from the inside, and the refrigerant (heating medium) is discharged from the outer discharge pipe 34.

Then, in the can roll, the cylindrical portion 30 is cut and polished in a state where the temperature is assumed to be used (for example, 20° C.), and the can roll is processed into a parallel shape type, a crown shape type, an inverted crown shape type, or the like.

Further, in consideration of the weight of the large can roll, the cylindrical portion on the side where the long resin film contacts may be ground and polished so as to be parallel to the cylindrical rotation axis. For example, when a long resin film or the like is in contact with the upper side of the can roll, in consideration of the bending due to the weight of the can roll, the diameter of the central part in the axial direction of the roll is set so that the upper side of the cylindrical part is parallel to the cylindrical rotation axis. May be set to be thick (that is, a crown shape type). Alternatively, when a long resin film or the like is in contact with the lower side of the can roll, in consideration of the bending of the can roll due to its own weight, the lower side of the cylindrical portion is parallel to the tubular rotation axis, and the axial central portion of the roll is arranged. The diameter may be set to be small (that is, an inverted crown shape type).

The parallel-shaped can roll, which has been cut and polished so that the cylindrical portion is parallel to the tubular rotation axis under the assumed use temperature (for example, 20° C.) of the roll, has a temperature condition exceeding the above-mentioned use temperature. When used in, the thermal expansion of the metal material that forms the cylindrical portion causes the roll to naturally undergo thermal deformation into a crown-shaped mold with a thick central diameter in the axial direction. In a can roll machined to a crown shape with a thick central diameter, when used under temperature conditions that exceed the above expected temperature of use, the amount of crown due to the thermal expansion effect of the metal material that forms the cylinder However, since it naturally increases, it was possible to suppress the occurrence of wrinkles in a long body such as a long resin film to some extent as described above.

However, the optimum amount of crown that reduces the above-mentioned "middle sagging state" due to the wrinkling of a long body such as a resin film [diameter difference between the axial center diameter α1 of the outer peripheral surface of the cylindrical portion and both end diameters α2 (α=α1 -Defined in α2)] depends on the type and thickness of the long body, the heat load during film formation, the film thickness to be formed, the transport speed of the long body, etc. It is not preferable to predetermine the crown amount to a specific value based on the conditions. Therefore, it is desired that the crown amount be adjusted to an appropriate value in accordance with the temperature condition in which the can roll is used, instead of setting the crown amount to a specific value when manufacturing the can roll. However, in the conventional can roll, when the use temperature condition becomes extremely higher than expected, the effect of suppressing wrinkling in a long body such as a long resin film has a limit as described above. That is, the effect cannot be expected unless the amount of crown for the purpose of extending the above "medium slack state" is 100 µm or more, and if it exceeds 500 µm, the film approaches in the direction in which the speed of the film is fast (the direction in which the peripheral speed is fast). Wrinkles may occur in the center of the film due to the properties.

Therefore, as shown in FIGS. 5A and 5B, when a metal material having a large thermal expansion coefficient is used for the cylindrical portion 70 and a metal material having a small thermal expansion coefficient is used for the rotating shaft 71, By increasing the temperature, the thermal expansion of the outer peripheral surface of the cylindrical portion 70 becomes larger than the thermal expansion of the rotating shaft 71, so that the crown amount can be further increased as compared with the conventional can roll, which is efficient. .. When a metal material having a small thermal expansion coefficient is used for the cylindrical portion 70 and a metal having a large thermal expansion coefficient is used for the rotating shaft 71, the crown amount of the can roll is increased by lowering the temperature of the rotating shaft portion. It is also possible. However, if the components are extremely cooled in the vacuum chamber, the adsorption of water present in the vacuum chamber becomes a problem. Therefore, the former method of forming the cylindrical portion 70 using a metal material having a larger thermal expansion coefficient than the metal material forming the rotating shaft 71 is desirable.

Further, as shown in FIG. 6, even in the case of adopting the structure in which the cooling means for the rotating shaft for controlling the temperature of the cylindrical rotating shaft 41 to be constant is additionally provided, by increasing the temperature of the cylindrical portion 40, the cylindrical portion 40 Since the thermal expansion of the outer peripheral surface is larger than the thermal expansion of the cylindrical rotary shaft 41 (the expansion of the cylindrical rotary shaft is small due to the action of the cooling means), the crown amount is further increased as compared with the conventional can roll. It is possible and efficient. That is, the temperature of the cylindrical rotary shaft 41 is kept constant by adopting a structure in which the refrigerant enters through the rotary shaft refrigerant introduction pipe 46 that constitutes the cooling means and the refrigerant exits through the rotary shaft refrigerant discharge pipe 47 that also constitutes the cooling means. Can be controlled. In FIG. 6, reference numeral 42 is a side plate, reference numeral 43 is an inner introduction pipe of a central axis double pipe provided in the cylindrical rotary shaft 41, reference numeral 44 is an outer discharge pipe of the central shaft double pipe, and reference numeral 45 is Bearings are shown respectively.

(2) Vacuum Film Forming Apparatus A vacuum film forming apparatus according to an embodiment is exemplified by taking sputtering as an example of a vacuum film forming means and taking a long heat-resistant resin film as an example of a long body conveyed by roll-to-roll. The film device (sputtering web coater) will be described in detail.

The vacuum film-forming apparatus (sputtering web coater) according to the present embodiment, as shown in FIG. 3, has an unwinding roll 51 that unwinds a long heat-resistant resin film 52 in a vacuum chamber (decompression chamber) 50, A winding roll 64 that winds up the long heat-resistant resin film 52, and a refrigerant that is provided between the unwinding roll 51 and the winding roll 64 and whose temperature is regulated is circulated and is rotationally driven by a servo motor. The cooling can roll 56 and the long heat-resistant resin film 52 provided on the upstream side of the cooling can roll 56 and driven by the servo motor and supplied from the unwinding roll 51 are carried into the cooling can roll 56. The long heat-resistant resin film 52, which is provided on the downstream side of the front feed roll 55 and the cooling can roll 56, is rotationally driven by a servo motor, and is fed from the cooling can roll 56, is carried to the winding roll 64 side. It has a structure in which a rear feed roll 61 is arranged, and a magnetron sputtering cathode 57, 58, 59, 60 as a vacuum film forming means accompanied by a heat load is provided on the opposite side of the cooling can roll 56. It is provided along the outer peripheral surface of the roll 56. As the cooling can roll 56, the can roll shown in FIG. 6 provided with a rotating shaft cooling means for controlling the temperature of the cylindrical rotating shaft to be constant.

A free roll 53 for guiding the long heat-resistant resin film 52 and a tension for measuring the tension of the long heat-resistant resin film 52 are provided on the upstream conveying path from the unwinding roll 51 to the cooling can roll 56. A sensor roll 54 and a front feed roll 55 which is rotationally driven by a servo motor are arranged.

Then, the long heat-resistant resin film 52 is closely attached to the outer peripheral surface of the cooling can roll 56 by the front feed roll 55 whose peripheral speed is adjusted to be slower than that of the cooling can roll 56 which is rotationally driven by the servo motor. It is then transported.

Further, also on the downstream side conveyance path from the cooling can roll 56 to the winding roll 64, the tension sensor for measuring the tension of the rear feed roll 61 which is rotationally driven by the servo motor and the elongated heat resistant resin film 52. A roll 62 and a free roll 63 that guides the long heat-resistant resin film 52 are arranged.

Then, the long heat-resistant resin film 52 is discharged from the cooling can roll 56 toward the take-up roll 64 by the rear feed roll 61 whose peripheral speed is adjusted to be the same as or faster than that of the cooling can roll 56. It is supposed to be done.

In the unwinding roll 51 and the winding roll 64, the tension balance of the long heat-resistant resin film 52 is maintained by controlling the torque with a powder clutch or the like. Further, the long heat-resistant resin film 52 is unwound from the unwinding roll 51 by the rotation of the cooling can roll 56 and the front feed roll 55 and the rear feed roll 61 driven by a servo motor which rotates in conjunction with this. It is adapted to be wound around a winding roll 64.

Further, in the vacuum film forming apparatus (sputtering web coater), the magnetron sputtering cathodes 57, 58, 59 and 60 as the vacuum film forming means accompanied by heat load are provided along the outer peripheral surface of the cooling can roll 56 as described above. Has been.

When forming a film by sputtering, the pressure in the pressure reducing chamber of the sputtering web coater is reduced to an ultimate pressure of about 10 ⁻⁴ Pa, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the vacuum film forming apparatus (sputtering web coater) are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. Further, in order to maintain the reduced pressure state in the reduced pressure chamber of the sputtering web coater, the sputtering web coater is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil, which are not shown.

In the case of sputtering the metal film, a plate-shaped target (not shown) can be used, but when the plate-shaped target is used, nodules (growth of foreign matter) occur on the target. Sometimes. If this causes a problem, it is preferable to use a cylindrical rotary target that does not generate nodules and has high target usage efficiency. Further, since the vacuum film forming apparatus (sputtering web coater) shown in FIG. 3 assumes sputtering as a vacuum film forming means involving a heat load, magnetron sputtering cathodes 57, 58, 59 and 60 are shown. However, when the vacuum film forming means accompanied by a heat load is another film forming means such as vapor deposition, another film forming means is provided instead of the plate-shaped target. Examples of other vacuum film forming means include CVD (chemical vapor deposition) and vapor deposition.

(3) Long body and heat-resistant resin film with metal film (3-1) Long body Examples of the long body include long resin films, metal foils, and metal strips. Examples of the resin film include a long resin film such as a polyethylene terephthalate (PET) film and a long heat resistant resin film such as a polyimide film.

(3-2) Heat resistant resin film with metal film (copper clad laminated resin film substrate)
A heat-resistant resin film with a metal film (copper-clad laminated resin film substrate) can be manufactured by using the method for forming a long body according to the present invention.

The heat-resistant resin film with a metal film (copper-clad laminated resin film substrate) includes a base metal layer made of Ni, a Ni-based alloy, chromium or the like on the surface of the heat-resistant resin film, and copper laminated on the surface of the base metal layer. A structure composed of a thin film layer is exemplified. The copper clad laminated resin film substrate having such a structure is processed into a flexible wiring substrate by the subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the copper thin film layer) not covered with the resist by etching.

The layer made of the Ni alloy or the like is called a seed layer (base metal layer), and its composition is selected according to desired characteristics such as electric insulation and migration resistance of the copper clad laminated resin film substrate. Then, for the seed layer, various known alloys such as Ni—Cr alloy or Inconel, Conztantan and Monel can be used. When it is desired to further increase the thickness of the metal film (copper thin film layer) of the heat-resistant resin film with a metal film (copper-clad laminated resin film substrate), the metal film may be formed using a wet plating method. In addition, when a metal film is formed only by electroplating (that is, electrolytic plating), or when electroless plating is performed as the primary plating and wet plating such as electrolytic plating is used as the secondary plating in combination. is there. For the wet plating treatment, various conditions of the conventional wet plating method may be adopted.

Examples of the heat-resistant resin film used for the heat-resistant resin film with a metal film (copper-clad laminated resin film substrate) include polyimide-based film, polyamide-based film, polyester-based film, polytetrafluoroethylene-based film, polyphenylene sulfide. Examples of the resin film include a resin-based film, a polyethylene naphthalate-based film, or a liquid crystal polymer-based film. Flexibility as a heat-resistant resin film with a metal film (copper-clad laminated resin film), strength required for practical use, and wiring material It is preferable because it has a suitable electric insulation property.

As the heat-resistant resin film with a metal film (copper-clad laminated resin film), a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film has been exemplified. In addition, an oxide film, a nitride film, a carbide film, or the like can be used depending on the purpose.

Hereinafter, examples of the present invention will be specifically described with reference to comparative examples, but the technical configuration according to the present invention is not limited to the configurations of the following examples.

First, in this embodiment, the vacuum film forming apparatus (sputtering web coater) shown in FIG. 3 was used, and the heat-resistant resin film 52 as a long body had a width of 500 mm, a length of 800 m, and a thickness of 25 μm, which was produced by Ube Industries. A heat-resistant polyimide film "UPILEX (registered trademark)" manufactured by KK was used.

Further, in the can roll incorporated in the vacuum film forming apparatus (sputtering web coater), the cylindrical portion is parallel to the rotation axis under the condition of the assumed use temperature (20° C.) of the roll (that is, the axial center of the outer peripheral surface of the cylindrical portion). Applying a parallel type can roll that is cut and polished so that the part diameter α1 and the end part diameter α2 are the same), the center part diameter α1 and the end part diameter α2 are 900 mm, the width 750 mm, and the can roll Hard chrome plating is applied to the surface of the body (cylindrical part).

Further, the metal material forming the cylindrical portion of the can roll and the rotating shaft includes aluminum having a large thermal expansion coefficient (linear thermal expansion coefficient: 23 ppm/K) and stainless steel having a small thermal expansion coefficient (linear thermal expansion coefficient: 15 ppm/K). ) Is applied, as shown in Tables 1 to 4 below, a can roll having a cylindrical portion and a rotating shaft made of stainless steel, a can roll having a cylindrical portion and a rotating shaft made of aluminum (aluminum), Also, three types of can rolls each having a cylindrical portion made of aluminum having a large thermal expansion coefficient and a rotating shaft made of stainless steel having a small thermal expansion coefficient were manufactured. A can roll having a rotating shaft cooling means for controlling the temperature of 20° C. and a can roll having no cooling means were produced.

Further, the three types of can rolls (Examples 1 to 3) provided with the above-mentioned cooling means for the rotating shaft, and the rotating shaft made of stainless steel having a small thermal expansion coefficient and a cylindrical part made of aluminum having a large thermal expansion coefficient. The can roll (reference example 4) that is configured and is not provided with the rotating shaft cooling means is a can roll according to the example and the reference example, respectively, and the cylindrical portion and the tubular rotating shaft are made of stainless steel, respectively, and A can roll not provided with a rotating shaft cooling means (Comparative Example 1), and a can roll having a cylindrical portion and a tubular rotating shaft each made of aluminum (aluminum) and not provided with the rotating shaft cooling means. (Comparative example 2) was used as a can roll according to each comparative example.

Then, the can rolls according to Examples 1 to 3 and Reference Example 4 and the can rolls according to Comparative Examples 1 and 2 have an “axial direction” when used under the following temperature (20° C., 40° C., 60° C.) conditions. The crown amount (μm) defined by the diameter difference between the central diameter α1 and the diameters at both ends α2 (α=α1-α2), and the “maximum sputtering power without wrinkles (total of 4 units) kW” It was determined by experiment.

[Comparison of crown amount]
The can rolls according to Examples 1 to 3 and Reference Example 4 and Comparative Examples 1 and 2 were used under conditions of temperature of 20° C., 40° C., and 60° C. (based on the outer peripheral surface temperature of the cylindrical portion of each can roll). At this time, the crown amount (outer peripheral surface shape of the can roll) was measured.

Regarding the temperature of the outer peripheral surface of the cylindrical portion of each can roll, cold water of 20° C., hot water of 40° C., and 60° C. are individually supplied to each can roll from the inner introducing pipe indicated by reference numeral 33 in FIG. 4 and reference numeral 43 in FIG. And the temperature of the outer peripheral surface of the cylindrical portion of each can roll.

The results are shown in Tables 1 and 2 below.

[Rating]
(1) As can be seen from the comparison between Example 1 and Comparative Example 1, Example 2 and Comparative Example 2, and Example 3 and Reference Example 4, the comparison in which the cooling means for the rotating shaft is not provided In the can rolls according to Example 1, Comparative Example 2, and Reference Example 4, since the temperature of the cylindrical portion transfers heat to the rotating shaft, Examples 1 to 3 provided with the rotating shaft cooling means are attached. It is confirmed that the crown amount is smaller than that of the can roll. In particular, in the can roll according to Comparative Example 1, it is confirmed that it is difficult to secure a sufficient crown amount that can cope with the use temperature when used under a temperature condition that greatly exceeds the use expected temperature.

(2) It is also confirmed that when aluminum having a large thermal expansion coefficient is applied to the material of the cylindrical portion, the amount of crown is larger than that when stainless is applied.

[Maximum sputtering power without wrinkles]
Next, vacuum film forming apparatuses according to Examples 1 to 3 and Reference Example 4 and Comparative Examples 1 and 2 in which the can rolls according to Examples 1 to 3 and Reference Example 4 and Comparative Examples 1 and 2 are individually incorporated ( Using a sputtering web coater, the maximum sputter power at which wrinkles do not occur when a Ni-Cr film and a Cu film of a seed layer (base metal layer) are sequentially formed on a heat resistant resin film (heat resistant polyimide film) 52 It was measured.

The film forming conditions are as follows.

That is, a Ni—Cr target was used for the magnetron sputter target 57 shown in FIG. 3, a Cu target was used for the magnetron sputter targets 58, 59, 60, and argon gas was introduced at 300 sccm, and the applied power to each cathode was 5 kW. Power control was used. The tension of the unwinding roll 51 and the winding up roll 64 is set to 80 N, the heat resistant resin film (heat resistant polyimide film) 52 is set on the unwinding roll 51, and the heat resistant resin is passed through the can roll 56. The tip of the film (heat resistant polyimide film) 52 was attached to the winding roll 64. Further, the vacuum chamber 50 was evacuated to 5 Pa by a plurality of dry pumps, and further evacuated to 3×10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

Next, after the transport speed of the heat resistant resin film (heat resistant polyimide film) 52 was set to 3 m/min, argon gas was introduced into each magnetron sputter cathode 57, 58, 59, 60 to apply electric power, -The formation of the Cr film and the Cu film was started.

Then, the surface of the heat resistant resin film (heat resistant polyimide film) on the can roll 56 in each vacuum film forming apparatus (sputtering web coater) according to Examples 1 to 3 and Reference Example 4 and Comparative Examples 1 and 2 can be observed. From the window, under the control temperature (20° C., 40° C., 60° C.) conditions in the cylindrical portions of the can rolls according to Examples 1 to 3 and Reference Example 4 and Comparative Examples 1 and 2, the can roll 56 at a conveying speed of 3 m/min. The presence or absence of wrinkles in the heat-resistant resin film (heat-resistant polyimide film) conveyed above was observed, and the maximum sputtering power (total of four units) in which wrinkles did not occur due to the thermal load of sputtering was determined.

The results are shown in Tables 3 and 4 below.

[Rating]
(1) As can be confirmed by comparing “Table 1” and “Table 3” according to Examples 1 to 3 and “Table 2” and “Table 4” according to Comparative Examples 1 and 2 and Reference Example 4. In addition, the "crown amount" and the "maximum sputter power that does not cause wrinkles" are substantially proportional to each other, and the "maximum sputter power that does not cause wrinkles" tends to increase as the "crown amount" increases.

This is because the crown shape of the can roll eliminates the above-mentioned "slack state", improves the adhesion between the heat resistant resin film (heat resistant polyimide film) and the can roll, and the heat load due to sputtering is efficiently cooled by the can roll. It is thought that it was because it was done.

(2) Further, although not shown in each table, when the control temperature of the can roll cylindrical portion exceeds 80° C., the maximum sputter power at which wrinkles do not occur tends to be extremely reduced.

This is the cooling effect of the can roll (the effect of eliminating the "slack state" due to the crown shape, improving the adhesion between the heat-resistant resin film and the can roll, and efficiently cooling the heat load due to sputtering by the can roll). It is considered that, as a result, the temperature of the can roll is too high (when it exceeds 80° C.), and as a result, the cooling action of the heat resistant resin film becomes insufficient.

(3) In order to avoid the adverse effect that the temperature of the can roll is too high, the can roll surface shape at the assumed use temperature is cut and polished into a slight crown shape (that is, the crown amount is set larger than necessary). By not performing), it becomes possible to lower the control temperature of the cylindrical portion that provides the optimum crown amount.

(4) On the other hand, a method of cutting and polishing the can roll surface shape into a large crown shape (that is, setting a large crown amount) at the assumed use temperature to lower the control temperature of the can roll cylindrical portion to reduce the crown amount. In some cases, the temperature difference between the resin film cooled by the can roll before the sputtering film formation and the film surface due to the heat load of sputtering becomes large, and wrinkles may occur due to rapid thermal strain.

According to the can roll according to the present invention, a sufficient amount of crown can be secured even when the can roll is used in a temperature condition that greatly exceeds the assumed use temperature for the reason of increasing the film formation rate, and therefore, the heat resistant resin film or the like can be obtained. It is possible to suppress the generation of wrinkles. Therefore, it has industrial applicability for use in the production of a copper-clad laminated resin film (heat-resistant resin film with a metal film) used for flexible wiring boards of liquid crystal televisions, mobile phones and the like.

30 Cylindrical part 31 Cylindrical rotating shaft 32 Side plate 33 Inner introducing pipe 34 Outer discharging pipe 35 Bearing 40 Cylindrical part 41 Cylindrical rotating shaft 42 Side plate 43 Inner introducing pipe 44 Outer discharging pipe 45 Bearing 46 Rotating shaft refrigerant introducing pipe 47 Rotating shaft refrigerant Discharge pipe 50 Vacuum chamber (decompression chamber)
51 unwinding roll 52 long heat-resistant resin film 53 free roll 54 tension sensor roll 55 front feed roll 56 can roll 57 magnetron sputtering cathode 58 magnetron sputtering cathode 59 magnetron sputtering cathode 60 magnetron sputtering cathode 61 rear feed roll 62 tension sensor roll 63 Free roll 64 Winding roll 70 Cylindrical part 71 Rotating shaft

Claims (7)

A cylindrical portion provided with a refrigerant circulation path inside, a pair of side plates closed at the open end side of the cylindrical portion and provided with an opening at the center, and a base end side fitted into the opening of the side plate and a distal end side In a can roll that includes a pair of cylindrical rotary shafts that project outward from the side plates and that winds a long body that is conveyed by roll-to-roll in a vacuum chamber around the outer peripheral surface of the cylindrical portion to cool it,
A central shaft double pipe for introducing and discharging a refrigerant in a refrigerant circulation path provided inside the cylindrical portion, and a temperature of a cylindrical rotating shaft constituted by a rotating shaft refrigerant introducing pipe and a rotating shaft refrigerant discharging pipe. A can roll characterized in that cooling means for a rotating shaft for controlling a constant temperature is provided in the cylindrical rotating shaft. The can roll according to claim 1, wherein the cylindrical portion is configured by using a metal material having a thermal expansion coefficient larger than that of the metal material forming the tubular rotation shaft. Machining into a parallel shape type in which the diameter difference (α=α1−α2) between the axial center diameter α1 and both end diameters α2 of the cylindrical outer peripheral surface is 0, or a crown shape type in which the diameter difference (α) is positive. The can roll according to claim 1 or 2, wherein the can roll is provided. The can roll according to claim 1, wherein a crown amount defined by the diameter difference (α) in the crown-shaped can roll is changed within a range of 100 to 500 μm. A vacuum chamber, a transport mechanism for transporting the long body by roll-to-roll in the vacuum chamber, a can roll for winding the long body around the outer peripheral surface for cooling, and a vacuum for the long body wound on the can roll. In a vacuum film forming apparatus equipped with means for forming a film,
A vacuum film forming apparatus, wherein the can roll is formed by the can roll according to any one of claims 1 to 4. The vacuum film forming apparatus according to claim 5, wherein the means for performing the vacuum film forming is magnetron sputtering. In the film forming method of a long body which is wound on the outer peripheral surface of the can roll in a vacuum chamber by roll-to-roll and which performs vacuum film formation on the long body wound on the can roll,
A film forming method for a long body, characterized in that the can roll is constituted by the can roll according to any one of claims 1 to 4.

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