JP6979265B2 - A method and a winding device for winding a long substrate, and a surface treatment device for a long substrate provided with the winding device. - Google Patents

Description

INDUSTRIAL APPLICABILITY The present invention relates to a winding method and a winding device for winding a long substrate conveyed by roll-to-roll to a winding core, and surface treatment of a long substrate such as a roll-to-roll sputtering device provided with the winding device. Regarding the device.

A flexible wiring board having a wiring circuit on a resin film is used for a display panel such as a liquid crystal panel, a notebook computer, a digital camera, a mobile phone, and the like. Such a flexible wiring board can be manufactured by patterning a resin film with a metal film having a metal film on one side or both sides of the resin film. In recent years, the wiring pattern of the above-mentioned flexible wiring board has tended to become more delicate and denser, and along with this, a resin film with a metal film is required to be smooth and have no wrinkles or stripes in appearance. ..

Conventionally, as a method for manufacturing a resin film with a metal film, a method of sticking a metal foil to a resin film with an adhesive (a method of manufacturing a three-layer substrate), a method of coating a metal foil with a resin solution, and then drying the film. (Casting method), a method of forming a metal film on a resin film by the vacuum film forming method alone, or by using a vacuum film forming method and a wet plating method in combination (metalizing method). Has been done. Further, as the vacuum film forming method used for the metallizing method, there are a vacuum vapor deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

Regarding the metallizing method, for example, Patent Document 1 describes a method in which a chromium layer is sputtered and formed on a polyimide insulating layer and then a copper layer is sputtered and formed to form a conductor layer. Although the film formation by such sputtering is generally excellent in adhesion, it is said that the heat load applied to the resin film as a base material is larger than that of the vacuum vapor deposition method. It is also known that when a large heat load is applied to the resin film during film formation, wrinkles are likely to occur on the film.

Therefore, in a step of forming a resin film such as a polyimide film by sputtering to produce a resin film with a metal film, a sputtering web coater provided with a can roll is generally used. As described in Patent Document 2, this apparatus performs sputtering film formation while winding a long resin film conveyed by roll-to-roll around a can roll in which a refrigerant is circulated inside. Since the heat generated in the resin film by the film formation on the front surface side of the film can be immediately removed from the back surface side thereof, the adverse effect of the heat load during the sputtering film formation can be suppressed and the occurrence of wrinkles can be effectively prevented. Can be done.

By the way, in the conductive substrate used for the touch panel sensor of the display panel, it has been attempted to use a transparent resin film in which fine metal wiring is arranged instead of the conventional ITO electrode in order to increase the size and speed up the response. There is. Such a conductive substrate can also be manufactured from a resin film with a metal film in the same manner as the flexible wiring substrate described above, but when copper is used for the metal wiring, the copper has a metallic luster, so that the display can be displayed by reflection. It may cause a problem of reduced visibility. Therefore, a black blackening layer may be provided on the surface of the metal wiring. For example, Patent Document 3 discloses a touch sensor panel provided with a blackening layer.

Japanese Unexamined Patent Publication No. 2-98994 Japanese Unexamined Patent Publication No. 62-247073 Japanese Unexamined Patent Publication No. 2013-225276

In the above metallizing method, when a long substrate conveyed by roll-to-roll in a vacuum chamber or the like is wound around a cylindrical winding core, stripes are formed on both ends of the wound long substrate. A pattern may occur. In particular, in a resin film with a metal film provided with a blackening layer made of a black chemically indefinite ratio metal oxide on the surface of the copper layer, if a striped pattern occurs, the appearance will be poor and the product value will be high. It will be damaged. The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to propose a winding method and a winding device in which striped patterns are less likely to occur at both ends of a wound long substrate. It is supposed to be.

In order to achieve the above object, the method for winding a long resin film with a metal film provided by the present invention has a thickness of 5 to 100 μm in which a blackened layer is formed by being conveyed by roll-to-roll under a reduced pressure atmosphere. Moreover, it is a method of winding a long resin film with a metal film by winding a long resin film with a metal film having a width of 20 to 80 cm on a cylindrical winding core having an outer diameter of 8 to 25 cm (the long resin film with a metal film). (Except for those that are wound into a roll around the winding core while heating the resin film ), when the long resin film with a metal film is wound around the winding core, it first comes into contact with the outer peripheral surface of the winding core. At the tip of a long resin film with a metal film to be wound around, both ends in the width direction are positioned 50 to 200 μm farther from the center of rotation of the winding core than the center in the width direction. Of the outer peripheral surface of the long resin film with a metal film so that both ends in the width direction of the long resin film with a metal film are located farther from the center axis of rotation of the winding core than the central part in the width direction. A step of 50 to 200 μm and a width of 10 mm or less, which extends continuously in the circumferential direction, only at the place where both ends in the width direction are wound and between both edges of the long resin film with a metal film. It is characterized in that it is wound around the winding core provided with a convex stepped portion.

Further, the winding device for a long resin film with a metal film provided by the present invention is conveyed by roll-to-roll under a reduced pressure atmosphere, and has a thickness of 5 to 100 μm and a width of 20 to 80 cm in which a blackened layer is formed. a a metal film with elongated resin film winding device of the cylindrical reeling metal film with elongated resin film winding core outer diameter 8～25Cm (heating the metal film with elongated resin film while excluding those for winding into a roll in the winding preparative core), take-preparative and the metal film with elongated resin at the point where both widthwise ends of the metal film with elongated resin film of the outer peripheral surface of the core is wound It is characterized in that a convex step portion having a step length of 50 to 200 μm and a width of 10 mm or less, which extends continuously in the circumferential direction, is provided only in a portion that fits between both edges of the film.

According to the present invention, it is possible to almost eliminate the generation of striped patterns at both ends in the width direction, which tends to occur when the surface-treated long substrate is wound around the take-up core, so that the yield of the surface treatment of the long substrate can be eliminated. Can be enhanced.

It is a front view which shows a specific example of the vacuum film forming apparatus in which the winding apparatus which concerns on this invention is preferably used. It is a perspective view which shows typically the tension in the longitudinal direction generated when a long substrate is wound around a winding core. It is a perspective view which shows a specific example of the winding apparatus which concerns on this invention. It is a front view which shows the winding apparatus of the Example of this invention.

First, referring to FIG. 1, as a specific example of a surface treatment apparatus in which the winding apparatus for a long substrate of the present invention is preferably used, for a long substrate conveyed by a roll-to-roll method in a vacuum atmosphere. A vacuum film forming apparatus capable of continuously and efficiently performing a film forming process under a heat load will be described. In the following description, a case where a long resin film substrate is used as an example of a long substrate and a sputtering film forming process is performed as an example of a film forming process under a heat load will be described as an example.

The vacuum film forming apparatus 10 of the long resin film substrate F (hereinafter, also simply referred to as the long substrate F) shown in FIG. 1 is also referred to as a sputtering web coater, and serves as an unwinding means provided in the unwinding chamber 11. The long substrate F unwound from the unwinding core 14 is wound around the outer peripheral surface of the can roll 20 provided in the film forming chamber 12 to cool the film, and the film forming process is performed by a sputtering mechanism as a surface processing means for applying a heat load. After the above, the winding core 26 as a winding means provided in the winding chamber 13 is used for winding.

Specifically, among the roll-to-roll transport paths of the long substrate F from the unwinding core 14 to the take-up core 26, the long substrate F is guided between the unwinding core 14 and the can roll 20. The free rolls 16 and 17, the tension sensor rolls 15 and 18 for measuring the tension of the long substrate F, and the motor-driven front feed roll 19 provided immediately upstream of the can roll 20 are arranged in the order of these codes. Has been done.

The front feed roll 19 plays a role of adjusting the speed of the long substrate F sent out from the tension sensor roll 18 toward the can roll 20 with respect to the peripheral speed of the can roll 20, thereby causing water inside. The long substrate F, which is continuously conveyed, is surely brought into close contact with the outer peripheral surface of the can roll 20 in which the refrigerant such as the above is circulated, and can be efficiently cooled.

The transport path from the can roll 20 to the take-up core 26 is also the same as the transport path from the unwind core 14 to the can roll 20 described above, the motor-driven rear feed roll 21 that adjusts the peripheral speed of the can roll 20. Tension sensor rolls 22 and 25 for measuring the tension of the long substrate F, and free rolls 23 and 24 for guiding the long substrate F are arranged in the order of these codes.

In the unwinding core 14 and the winding core 26, the tension balance of the long substrate F is maintained by torque control by a powder clutch or the like. Further, the long substrate F is unwound from the unwinding core 14 by the rotation of the can roll 20 and the motor-driven front feed roll 19 and the rear feed roll 21 that rotate in conjunction with the rotation of the can roll 20, and the long substrate F is unwound to the winding core 26. It is supposed to be.

Around the canroll 20, four plate-shaped magnetron sputtering cathodes 30, 31, 32 and 33 are wound around the outer peripheral surface along a transport path defined on the outer peripheral surface of the canroll 20. It is provided so as to face F. In the case of sputtering film formation of a metal film, a plate-shaped target can be used, but when a plate-shaped target is used, nodules (growth of foreign matter) may occur on the target. If this is a problem, it is preferable to use a cylindrical rotary target that is less prone to nodules and has higher target utilization efficiency.

The vacuum film forming apparatus 10 described above includes a free roll (not shown) for changing the transport direction of the long substrate F, a dry pump for depressurizing the inside of the vacuum chamber and maintaining the state, and a turbo molecule. Vacuum exhaust equipment (not shown) such as pumps and cryocoils is provided. With this vacuum exhaust facility, the film forming chamber 12 of the vacuum film forming apparatus 10 is ^{depressurized to an ultimate pressure of about 10 -4} Pa, and then pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. Sputtering film formation is performed under this pressure condition. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the vacuum chamber are not particularly limited as long as they can withstand the above-mentioned decompression state, and various ones can be used.

By the metallizing method using the vacuum film forming apparatus 10 as described above, for example, a film such as a Ni-based alloy and a Cu film can be continuously laminated by sputtering on the surface of a long resin film. Even if a large amount of power is applied to the sputtering cathode and a high heat load is applied to the long resin film, the heat can be immediately removed by the canroll 20, so that high-speed film formation becomes possible. Therefore, it is possible to manufacture a high-quality resin film with a metal film without wrinkles with high productivity, and it is possible to reduce the cost.

The film made of the Ni alloy or the like is called a seed layer, and its composition is selected according to desired characteristics such as electrical insulation and migration resistance of the resin film with a metal film. Various known alloys such as Ni—Cr alloy, Inconel, Constantan, and Monel can be used for this seed layer, and the film thickness is generally 3 to 100 nm. Further, when it is desired to further increase the thickness of the metal film such as the Cu film laminated on the seed layer by about 50 nm to 12 μm, a general wet plating treatment may be performed as a post-treatment of the vacuum film formation treatment. In the wet plating treatment as the post-treatment, there are cases where the metal film is thickened only by electroplating treatment and cases where the metal film is thickened by a combination of a plurality of wet plating methods having different plating conditions. Examples of the latter case include a method in which electroless plating is performed as primary plating and electrolytic plating is performed as secondary plating.

In addition, on the long resin film substrate, an oxide film, a nitride film, or the like may be formed in place of a metal film such as a Ni—Cr alloy or Cu, or in addition to the metal film. The types and film thicknesses of these oxide films and nitride films are appropriately determined according to the purpose, and chemically indefinite ratio films are also included. The film thickness of these oxide films (including chemically indefinite ratios) and nitride films (including chemically indefinite ratios) is generally preferably in the range of 3 to 100 nm.

The resin film with a metal film produced by the above method is then subjected to patterning processing on the metal film by a subtractive method or a semi-additive method to form a wiring circuit. Here, in the subtractive method, the surface of the resin film with a metal film is covered with a resist, and the resist other than the portion of the metal film (for example, the above Cu film) that is desired to remain as wiring is removed to provide an opening. This is a method of manufacturing a wiring substrate by etching a metal film exposed from this opening.

On the other hand, in the semi-additive method, the surface of a resin film with a metal film is covered with a resist, the resist of the portion of the metal film to be thickened as wiring is removed to provide an opening, and the metal film exposed from this opening is provided. This is a method in which a wiring having a film thickness is formed on the surface by electroplating, the resist is removed, and then the whole is etched to remove an unnecessary metal film to prepare a wiring substrate. Therefore, the film thickness of the metal film of the resin film with the metal film differs depending on the method for manufacturing the flexible wiring board described above. Generally, the film thickness of the metal film when the subtractive method is adopted is 5 to 12 μm, and the film thickness of the metal film when the semi-additive method is adopted is 5 μm or less.

Examples of the resin film used for the resin film with a metal film include a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, and a liquid crystal polymer film. Resin film can be mentioned. These materials are preferable because they have the flexibility as a flexible substrate required for a resin film with a metal film, the strength required for practical use, and the suitable electrical insulation as a wiring material. Further, it is desirable that the resin film has a thickness of 5 to 100 μm and a width of about 20 to 80 cm because it is easy to handle and can be satisfactorily sputtered.

By the way, in a conductive substrate used as a member for a touch panel sensor, in order to make the reflection of a metal film such as the above-mentioned Cu film inconspicuous, the surface of the metal film is chemically composed of an indefinite ratio of metal oxide or the like in black. A blackening layer may be provided. The blackened layer is composed of an indefinite ratio of oxides such as copper, nickel, and tungsten, and appears black to the naked eye. These chemically indefinite ratio films can be produced by appropriately adding oxygen gas or nitrogen gas to the sputtering gas at the time of the above-mentioned sputtering film formation.

However, when a blackened layer is formed on the surface of the metal film and then wound by the winding core, fringes that can be visually confirmed may occur at both ends of the wound resin film with the metal film in the width direction. In particular, when the film thickness of the metal film (for example, Cu film) provided with the blackened layer is 5 μm or less, the blackened layer may have fringes that can be clearly confirmed visually. It is presumed that this fringe is due to alteration caused by uneven winding of the metal film at both ends and the center in the width direction when the long substrate is wound around the winding core. Of course, even when the blackening layer is not provided on the surface of the metal film (for example, Cu film), the stripes cannot be visually confirmed, but the deterioration of the metal film occurs due to uneven winding as described above. it seems to do.

The occurrence of the above-mentioned stripes becomes particularly remarkable when the long substrate is wound under a reduced pressure atmosphere. The reason is that when a long substrate is wound around a winding core under atmospheric pressure, the atmosphere is entrained between the wound long substrates, and the entrained air acts on the long substrate during winding. This is because it acts to relieve the tension in the longitudinal direction (transportation direction). On the other hand, when the long substrate is wound around the winding core under a reduced pressure atmosphere, almost no gas is entrained between the wound long substrates. The substrate is rolled up. At that time, as shown by the black arrow in FIG. 2, the distribution of the tension in the width direction of the long substrate F is the strongest in the central portion in the width direction and the weakest in both ends in the width direction.

Therefore, in a specific example of the present invention, as shown in FIG. 3, on the outer peripheral surface of the take-up core 26, both ends in the width direction of the long substrate F are continuously extended in the circumferential direction. The existing convex step portion 26a is provided. As a result, the tension in the longitudinal direction at both ends of the long substrate F in the width direction can be adjusted to be higher, and the tension in the center portion in the width direction and the tension in both ends in the width direction during winding by the winding core 26 can be adjusted. The tension can be made almost equal. As a result, deterioration of the long substrate F can be suppressed, so that the generation of striped patterns at both ends in the width direction can be almost eliminated.

That is, by providing the convex step portion 26a, the portion of the outer peripheral surface of the winding core 26 that is in contact with both ends in the width direction of the long substrate F is outside the portion that is in contact with the central portion in the width direction of the long substrate F. Since the diameter becomes large, that is, the outer circumference becomes long, both ends in the width direction of the long substrate F are wound so as to be located farther from the rotation center axis O of the winding core 26 than the center portion in the width direction. To go. As a result, when the long substrate F is wound following the rotation of the take-up core 26, both ends of the long substrate F in the width direction are stretched in the longitudinal direction by the convex step portion 26a. Therefore, tension is applied in the longitudinal direction by that amount. As a result, the tension in the longitudinal direction that is insufficient at both ends of the long substrate F in the width direction can be supplemented, so that partial winding (biased winding) can be prevented, and as a result, a resin film with a metal film can be prevented. It is possible to prevent the occurrence of stripes at both ends in the width direction.

The winding core 26 of a specific example of the present invention preferably has an outer diameter of about 8 to 25 cm, and is not particularly limited as long as the length is longer than the width of the long substrate F to be wound. A pair of convex stepped portions 26a continuous in the circumferential direction provided at locations of the outer peripheral surface of the winding core 26 in contact with both ends in the width direction of the long substrate F have a stepped step of 50 to 200 μm. preferable. If this step exceeds 200 μm, it becomes easy to be charged by rubbing between adjacent layers of the long substrate F wound around the winding core 26, and the potential difference generated by the charging causes discharge to spoil the appearance of the product. Discharge marks may occur. On the other hand, if the step is less than 50 μm, it becomes difficult to prevent the occurrence of the above-mentioned fringes during winding.

It is desirable that the length of the long substrate F overlapping with each convex step portion 26a in the width direction is 10 mm or less. For example, when a pair of convex step portions 26a fits between both edges of the long substrate F, it is preferable that each convex step portion 26a has a width of 10 mm or less. In addition, each convex step portion 26a may be arranged only in the portion overlapping with the long substrate F, or may reach from the position overlapping with the long substrate F to the edge portion of the winding core 26. Further, each convex step portion 26a may be attached with a band-shaped resin film or metal leaf so as to generate a step on the flat outer peripheral surface of the winding core 26, or the convex step portion may be formed. It may be machined from a cylindrical member.

As described above, even if the winding core 26 is not provided with the convex step portion 26a, the convex step portion 26a as described above is formed on the outer peripheral surface of the guide roll most adjacent to the winding core on the transport path of the long substrate F. It is considered that the same effect can be obtained even if a stepped portion is provided. That is, even if a guide roll having a convex step portion on the outer peripheral surface is used, it is possible to increase the tension in the longitudinal direction at both ends in the width direction of the long substrate F as in the case of the winding core 26 described above. However, after that, when the winding core is wound around the outer peripheral surface, a force that contracts in the longitudinal direction acts on both ends in the width direction of the long substrate F, so that both ends in the width direction of the long substrate F are rubbed and charged. It was confirmed that the problem of discharge was caused as a result.

Although the winding core of one specific example of the present invention and the winding device having the same have been described above, the present invention is not limited to such a specific example and varies within the range not deviating from the gist of the present invention. It can be carried out in various embodiments. For example, since the vacuum film forming apparatus 10 of FIG. 1 performs a sputtering film forming process as a process to which a heat load is applied, a magnetron sputtering cathode is shown, but the process to which a heat load is applied is CVD (chemical vapor deposition). In the case of other surface treatments such as vapor deposition and vapor deposition, other vacuum film forming means are provided in place of the plate-shaped target.

Further, although the description has been given by taking as an example a film forming apparatus for a long resin film under a reduced pressure atmosphere, the present invention is not limited to a reduced pressure atmosphere, and for example, a drying apparatus using a heater in atmospheric pressure is also used. The take-up core and take-up device according to the present invention can be preferably used. As the long substrate used in this case, a resin film such as a polyethylene terephthalate (PET) film or a resin film such as a polyimide film, as well as a metal foil or a metal strip can be used.

[Example 1]
Using the film forming apparatus (sputtering web coater) shown in FIG. 1, a resin film with a metal film was produced by using oxygen gas as the reactive gas. Specifically, for the can roll 20, a stainless steel roll body having an outer diameter of 600 mm and a width of 750 mm was plated with hard chrome, and a refrigerant was circulated inside the roll body to control the temperature to about 0 ° C. .. A Cu target for a metal layer was attached to the magnetron sputtering cathodes 30 and 31, and a Cu-Ni target for a blackening layer was attached to the magnetron sputtering cathodes 32 and 33.

A cylindrical member having an outer diameter of 180 mm and a length of 700 mm as shown in FIG. 4 is used for the winding core 26, and a strip-shaped resin film having a thickness of 75 μm and a width of 8 mm is attached to both ends thereof over the entire circumference. , A pair of convex step portions 26a having a step of 75 μm were provided. For the long substrate F, a PET film having a thickness of 50 μm, a width of 600 mm, and a length of 1200 m was used. As a result, the overlap between each convex step portion 26a and the PET film in the width direction became 8 mm.

The vacuum chamber 10 was exhausted to 5 Pa by a plurality of dry pumps, and then further exhausted to 3 × 10 ^-3 Pa by using a plurality of turbo molecular pumps and cryocoils. Then, while transporting the PET film at a transport speed of 2 m / min, the cathodes 30 and 31 are formed with power control so that a Cu film having a film thickness of 80 nm can be obtained, and the cathodes 32 and 33 are formed with argon gas. A mixed gas of 500 sccm and 50 sccm of oxygen gas was introduced, and a film was formed under power control so that a chemically indefinite ratio Ni—Cu oxide film having a film thickness of 30 nm could be obtained as a blackening layer. In this state, a PET film was formed to form a film of 1200 m. When the resin film with a metal film wound around the winding core 26 after the film formation was visually confirmed, no stripes were formed at both ends thereof.

[Example 2]
A resin film with a metal thin film was produced in the same manner as in Example 1 except that the step of the convex step portion 26a was set to 180 μm. When the resin film with a metal film wound on the winding core 26 after forming a film of 1200 m of the PET film was visually confirmed, no stripes were generated at both ends thereof.

[Comparative Example 1]
A resin film with a metal thin film was produced in the same manner as in Example 1 except that a flat take-up core having no convex step portion 26a was used. When the resin film with a metal film wound on the winding core after forming a film of 1200 m of the PET film was visually confirmed, stripes were found at both ends.

[Reference example]
A guide roll is provided immediately upstream of the take-up core 26, and a convex step portion having a step of 75 μm is provided at both ends of the outer peripheral surface thereof so as to overlap with the PET film by 8 mm, respectively. A resin film with a thin film was produced. When the resin film with a metal film wound around the take-up core 26 was visually confirmed after forming a PET film for 1200 m, almost no striped pattern was generated at both ends, but both ends of the take-up core 26 were formed. There was a discharge mark that was thought to be due to the charge of the film.

F Long substrate O Rotation center axis 10 Vacuum film forming apparatus 11 Unwinding chamber 12 Film forming chamber 13 Winding chamber 14 Unwinding core 16, 17, 23, 24 Free roll 15, 18, 22, 25 Tension sensor roll 19 In front Feed roll 20 Can roll 21 After feed roll 26 Winding core 26a Convex stepped portion 30, 31, 32, 33 Magnetron sputtering cathode

Claims (5)

A long resin film with a metal film having a thickness of 5 to 100 μm and a width of 20 to 80 cm, which is conveyed by roll-to-roll under a reduced pressure atmosphere and has a blackened layer formed therein, is wound into a cylindrical shape having an outer diameter of 8 to 25 cm. wound on the core to a winding method of the metal film with elongated resin film (excluding those for winding into a roll in the winding preparative core while heating the metal film with elongated resin film), the winding preparative core to the time of winding the metal film with elongated resin film, the distal end portion of the first winding metal film with elongated resin film taken in contact with the outer peripheral surface of the winding core, the widthwise end portions the width direction By locating the take-up core 50 to 200 μm away from the center axis of rotation of the take-up core, both ends of the long resin film with a metal film in the width direction rotate the take-up core more than the center part in the width direction. At the outer peripheral surface where both ends in the width direction of the long resin film with a metal film are wound so as to be located farther from the central axis, and between both edges of the long resin film with a metal film. A metal characterized in that it is wound around the winding core provided with a convex step portion having a step of 50 to 200 μm and a width of 10 mm or less, which extends continuously in the circumferential direction only in the fitting portion. How to wind a long resin film with a film. A long resin film with a metal film having a thickness of 5 to 100 μm and a width of 20 to 80 cm, which is conveyed by roll-to-roll under a reduced pressure atmosphere and has a blackened layer formed therein, is wound into a cylindrical shape having an outer diameter of 8 to 25 cm. A winding device for a long resin film with a metal film to be wound around a core (excluding a device that winds the long resin film with a metal film into a roll while heating the winding core). Only in the outer peripheral surface where both ends of the long resin film with a metal film are wound and which fits between both edges of the long resin film with a metal film , each is continuous in the circumferential direction. A winding device for a long resin film with a metal film, characterized in that a convex step portion having an extending step of 50 to 200 μm and a width of 10 mm or less is provided. The winding of a long resin film with a metal film according to claim 2, wherein the outer peripheral surface of the winding core has substantially the same outer diameter except for the convex stepped portion. Device. A length provided with a surface treatment means for surface-treating a long resin film conveyed by roll-to-roll in a vacuum chamber and a winding means consisting of a cylindrical core for winding the surface-treated long resin film. a surface treatment apparatus of the continuous resin film, a surface treatment apparatus of the long resin film, wherein the winding means, characterized in that a winding device of a metal film with elongated resin film according to claim 2 or 3 .. A roll-to-roll sputtering apparatus according to claim 4, wherein the surface treatment means is a sputtering cathode.

Images