JP6544249B2 - CAN ROLL, VACUUM FILM FORMING APPARATUS, AND FILM FORMING METHOD OF LONG BODY - Google Patents

Description

  The present invention relates to a vacuum film forming apparatus for forming a film such as sputtering while winding a long body (long heat resistant resin film, metal foil, metal strip or the like) conveyed by roll-to-roll around the outer peripheral surface of a can roll. In particular, the present invention relates to a can roll, a vacuum film forming apparatus, and a film forming method for a long body that can suppress wrinkles of a long body that is easily generated during film formation.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones and the like. The flexible wiring board is manufactured from a heat resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat resistant resin film. In recent years, the wiring patterns formed on flexible wiring boards are becoming increasingly finer and higher in density, and it has become even more important that the heat resistant resin film with metal film itself is smooth and free of wrinkles. .

  As a method of producing a heat resistant resin film with a metal film of this type, a method of producing by sticking a metal foil to a heat resistant resin film with an adhesive (referred to as a method of producing a three-layer substrate), heat resistance to metal foil By coating with a reactive resin solution and drying it (called casting method), dry plating method (vacuum film forming method) or combination of dry plating method (vacuum film forming method) and wet plating method A method (referred to as a metallizing method) and the like of forming a metal film on a heat-resistant resin film and manufacturing it is conventionally known. Further, as the above-mentioned dry plating method (vacuum film forming method) in the metallizing method, there are a vacuum evaporation method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  As for the metallizing method, Patent Document 1 discloses a method of sputtering chromium on a polyimide insulating layer and then sputtering copper to form a conductor layer on the polyimide insulating layer. Further, in Patent Document 2, a first metal thin film formed by sputtering using a copper-nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A flexible circuit board material (i.e., a copper-clad laminated resin film substrate) is disclosed. When a heat-resistant resin film such as a polyimide film is vacuum-film-formed to produce a heat-resistant resin film with a metal film, it is general to use a sputtering web coater described below.

  While the sputtering method generally has the advantage of being excellent in the adhesion of a thin metal film or the like formed as a film, it is said that the heat load applied to the heat resistant resin film is large compared to the vacuum evaporation method. It is also known that wrinkles are easily generated in the film when a large heat load is applied to the heat resistant resin film during film formation.

  In order to prevent the occurrence of wrinkles, in the sputtering web coater, the long heat resistant resin film conveyed by roll-to-roll is wound around the outer peripheral surface of the can roll having a cooling function, and the heat resistant resin film being formed is back The method of cooling from the side is adopted. For example, Patent Document 3 discloses a unwinding and winding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding and winding type vacuum sputtering apparatus is equipped with a cooling roll that functions as a can roll, and a sub roll (front feed roll) is provided on the carrying-in side (conveyance upstream side) of at least the heat resistant resin film of the cooling roll. It is provided and control is made to adhere the heat resistant resin film to the cooling roll by this sub roll.

  By the way, even when tension is applied in the longitudinal direction to the long heat-resistant resin film not subjected to heat load, as shown in FIGS. 1 (A) to (C), the central portion of the resin film皺 occurs on the That is, as shown in FIG. 1 (A), when no tension in the lengthwise direction is applied to the resin film (tension release state), the resin film has no slack and is flat, but the resin film is When tension is applied in the longitudinal direction (tension application state), the entire resin film is also in a conveyance state not in contact with the can roll (cooling roll) as shown in FIGS. 1 (B) to (C). Is extended and wrinkles are generated at the center of the resin film (middle sagging condition).

  For this reason, when tension (conveyance tension) is applied to the long heat-resistant resin film in the length direction, even in a state of being wound around a parallel can roll (parallel shape type can roll), Although it is very slight, as shown in FIG. 2 (A), it is in a state in which wrinkles are generated at the central portion of the heat resistant resin film (middle sagging state).

  Even if the above-mentioned "middle sagging state" is very slight, a gap is produced in "the middle sagging site" and the heat conduction efficiency with the parallel can roll (parallel shape type can roll) becomes insufficient. There is a problem that it is lowered and wrinkles in the width direction are easily generated in the above-mentioned "middle slack portion" due to the thermal load of sputtering film formation. In particular, when the transport speed of the heat resistant resin film is increased for the purpose of enhancing the efficiency of sputtering film formation, etc., it is necessary to perform sputtering film formation of a desired film thickness in a short time, and high power is applied to the sputtering cathode. Therefore, the heat load to be applied to the heat resistant resin film is further increased, and the above problem becomes remarkable.

  In order to solve this problem, in Non-Patent Document 1, a "reverse crown shape" can roll which is processed at a high roll end side compared to the roll center is adopted, and the peripheral speed on the can roll end side is the roll center We have proposed a device that is less likely to cause wrinkles in the width direction of the heat resistant resin film so as to be faster than the part. However, the method of adopting a "reverse crown shape" can roll is an effective method when the grip of the long resin film and the roll is weak in the atmosphere and the transport speed of the film is high, but in vacuum It was not effective when the grip of the long resin film and the roll was strong and the transport speed of the film was slow.

  On the other hand, in order to solve the above problems, in Patent Document 4, a drum shape in which the axial direction central portion is processed higher than the axial direction end side of the roll (Crown shape type; By using a can roll (approximately 2 to 3 mm higher than the axial end side), it is proposed a device in which wrinkles are less likely to occur in the width direction of the film.

  When the grip of the resin film and the roll is strong and the transport speed of the film is low in vacuum as compared with the device of Non-Patent Document 1 using a "reverse crown shape" can roll, the state shown in FIG. As shown, the apparatus (method) of Patent Document 4 using a drum-shaped (crown-shaped) can roll has an effect of winding a resin film around the outer peripheral surface of a crown-shaped can roll and stretching the above-mentioned "middle slack portion". It was effective.

  The above-described parallel-shaped can roll and crown-shaped can roll are, as shown in FIG. 4, a cylindrical portion 30 provided with a refrigerant circulation passage inside, and a rotation center shaft portion of the cylindrical portion 30. The main part is constituted by the shaft 31, and the shape of the cylindrical part is set in consideration of the assumed use temperature of the roll (for example, the temperature of the outer peripheral surface of the can roll is used at 20 ° C.) The outer peripheral surface of the cylindrical portion is ground and polished to be processed into a parallel shape type or a crown shape type. Then, in the “parallel-shaped can roll” processed so that the difference in diameter (α = α1−α2) between the axial central portion diameter α1 and the both end portions diameter α2 of the outer peripheral surface of the cylindrical portion 30 becomes 0 When used under a temperature condition that exceeds the use temperature of use, the outer peripheral surface of the cylindrical portion 30 thermally expands significantly compared to the rotation shaft 31 (rotational which does not contact structurally long resin film etc. The shaft 31 deforms naturally into a “crown-shaped can roll” in which the temperature difference is small compared to the outer peripheral surface of the cylindrical portion 30 and the diameter difference (α = α1−α2) is positive, and the cylindrical portion 30 Even in the case of a "crown-shaped can roll" processed so that the diameter difference (α = α1-α2) between the axial center portion diameter α1 and the both end portions diameter α2 of the outer peripheral surface becomes positive The rotating shaft 31 when used under different temperature conditions Since the outer peripheral surface of the cylindrical portion 30 as compared to large thermal expansion, crown value defined above diameter difference (α = α1-α2) increases naturally compared to the initial set value. For this reason, even if a large power is applied to the sputtering cathode for the purpose of enhancing the film formation efficiency etc., the original "parallel-shaped can roll" is naturally deformed to a "crown-shaped can roll" and "crown-shaped Since the initial crown amount naturally increases, it was possible to suppress the occurrence of wrinkles in the long resin film to some extent.

  However, in the case where a large power is applied to the sputtering cathode for the purpose of further enhancing the film formation efficiency etc., there is a limit to the effect of suppressing the generation of the above-mentioned wrinkles.

Unexamined-Japanese-Patent No. 02-098994 Japanese Patent Application Publication No. 06-097616 JP-A-62-247073 Japanese Patent Application Laid-Open No. 10-008249

“The Mechanics of Web Handling”, David R. Roisum, Ph.D., TAPPI PRESS, (1998) p. 83-84

  The present invention has been made focusing on such problems, and the problem to be solved is that, even when the can roll is used under the temperature condition far exceeding the intended use temperature, the length of the heat resistant resin film, etc. An object of the present invention is to provide a can roll and a vacuum film forming apparatus capable of suppressing the generation of wrinkles in a large body, and providing a film forming method of an elongated body in which the generation of wrinkles is suppressed.

  Therefore, as a result of the present inventor's intensive research on a new can roll structure in which wrinkles are not easily generated in a long body even under a temperature condition far exceeding the use temperature, rotation of the can roll with respect to the cylindrical portion of the can roll. It turns out that it is found that a sufficient crown amount corresponding to the operating temperature can be secured when it is configured using a metal material having a thermal expansion coefficient larger than that of the axis, and the rotation axis controls the temperature of the rotation axis constant. It has been found that a sufficient amount of crown that can cope with the operating temperature can be secured even when a cooling means is attached. The present invention has been completed based on such technical findings.

That is, the first invention according to the present invention is
A cylindrical body provided with a refrigerant circulation passage inside and a rotary shaft provided on a rotation center shaft portion of the cylindrical part, and an elongated body conveyed by roll-to-roll in a vacuum chamber is wound around the cylindrical outer peripheral surface In the cooling can
It is characterized in that the cylindrical portion of a metal material coefficient of thermal expansion is greater than the metallic material constituting the rotary shaft is constituted.

The second invention according to the present invention is
In the can roll according to the first invention ,
Processed into a parallel shape type in which the diameter difference (α = α1−α2) between the axial center portion diameter α1 and the both end portions diameter α2 of the outer peripheral surface of the cylindrical portion is 0 or a crown shape type in which the diameter difference (α) is positive It is characterized by being
The third invention is
In the can roll according to any one of the first to second inventions,
It is characterized in that the crown amount defined by the above-mentioned difference in diameter (α) in the crown-shaped can roll is changed in the range of 100 to 500 μm.

Next, a fourth invention according to the present invention is
A vacuum chamber, a transport mechanism for transporting the long body by roll-to-roll in the vacuum chamber, a can roll for winding and cooling the long body around the outer peripheral surface, and a vacuum for the long body wound around the can roll In a vacuum deposition apparatus comprising means for depositing a film,
The above-mentioned can roll is constituted by the can roll according to any one of the first to third inventions,
The fifth invention is
In the vacuum deposition apparatus according to the fourth invention,
The means for applying the vacuum deposition is magnetron sputtering, and
In addition, the sixth invention according to the present invention is
In the film forming method of an elongated body, the elongated body conveyed by roll-to-roll in the vacuum chamber is wound around the outer peripheral surface of the can roll, and vacuum film formation is performed on the elongated body wound around the can roll.
The above-mentioned can roll is constituted by the can roll according to any one of the first to third inventions.

According to the can roll described in the first invention,
The cylindrical portion is formed using a metal material having a thermal expansion coefficient larger than that of the metal material forming the rotation shaft, and the outer peripheral surface of the cylindrical portion is caused by the temperature rise of the outer peripheral surface of the cylindrical portion when the elongated body is cooled. Since the thermal expansion is larger than the thermal expansion of the rotary shaft, it is possible to increase the difference in diameter (α = α1−α2) between the axial center diameter α1 and the both end diameters α2 of the outer peripheral surface of the cylindrical portion .

  And, even when the can roll is used under the temperature condition largely exceeding the use assumed temperature, the crown amount defined by the diameter difference (α = α1-α2) between the axial direction central portion diameter α1 and the both end portion diameter α2 As a result, it is possible to suppress the occurrence of wrinkles in a long body.

FIG. 1 (A) is a plan view showing the surface of a long body when no tension is applied to the long body (long heat resistant resin film etc.) in the longitudinal direction (ie, in a tension released state); FIG. 1 (B) is a plan view showing the “sagging part” of the elongated body generated when tension is applied to the elongated body in the longitudinal direction (tension applied state), and FIG. 1 (C) is a view AA 'plane sectional drawing of 1 (B). Fig. 2 (A) is a schematic cross-sectional view showing a "sagging portion" that appears when a long body is wound around a parallel can roll (parallel shape type can roll) surface according to the conventional example, and FIG. 2 (B) is a drum shape The schematic cross section showing the state where the above-mentioned "middle slack part" is expanded in the cross direction, when a long body is wound around the can roll surface of (crown shape type). Explanatory drawing of a vacuum film-forming apparatus. Explanatory drawing of the can roll which comprises the cylindrical part in which the refrigerant | coolant circulation path was provided inside, and the rotating shaft provided in the rotation center axis part of this cylindrical part. FIG. 5A shows the present invention in which the difference in diameter (α = α1−α2) between the axial central portion diameter α1 and the both end portions diameter α2 of the outer peripheral surface of the cylindrical portion is zero at the assumed use temperature of the roll. FIG. 5 (B) is an axial center diameter α1 of the outer peripheral surface of the cylindrical portion and both end diameters when used under temperature conditions exceeding the use assumed temperature of the roll. Explanatory drawing of the can roll concerning this invention which the diameter difference ((alpha) = (alpha) 1- (alpha) 2) of (alpha) 2 fluctuate | varies positively, and is deform | transformed into a crown shape type | mold. Explanatory drawing of the can roll which concerns on the reference example by which the cooling means for rotating shafts which controls the temperature of a rotating shaft uniformly was attached.

  Hereinafter, embodiments according to the present invention will be described in detail.

(1) Can-roll As shown in FIG. 4, the can-roll is composed of a cylindrical portion 30, a side plate 32, and a rotating shaft 31 having a bearing 35. In addition, the cylindrical portion 30 of the can roll has a double structure called a jacket structure, and the inner side thereof is filled with a refrigerant (thermal medium) from the inner introduction pipe 33 of the central axis double pipe on the rotating shaft 31 The refrigerant (thermal medium) is discharged from the discharge pipe 34.

  Then, the cylindrical portion 30 is cut and polished in a state where the can roll is controlled to the use assumed temperature (for example, 20 ° C.) of the roll, and is processed into a parallel shape type, a crown shape type, a reverse crown shape type or the like.

  Further, in consideration of the weight of the large-sized can roll, the cylindrical portion on the side in contact with the long resin film or the like may be ground and polished so as to be parallel to the rotation axis. For example, when a long resin film or the like is in contact with the upper side of the can roll, the diameter in the axial center of the roll is increased so that the upper side of the cylindrical portion becomes parallel to the rotation axis It may be set (that is, a crown shape). Alternatively, when a long resin film or the like contacts the lower side of the can roll, the axial center diameter of the roll is set so that the lower side of the cylindrical portion is parallel to the rotation axis, taking into consideration the deflection of the can roll due to its own weight. It may be set to be thin (that is, reverse crown shape).

  The parallel-shaped can roll, which is cut and polished so that the cylindrical part is parallel to the rotation axis under the use assumed temperature (for example, 20 ° C.) condition of the roll, is used under the temperature condition exceeding the use assumed temperature. In the above case, the axial center portion of the roll is naturally thermally deformed into a thick crown shape due to the thermal expansion action of the metal material constituting the cylindrical portion, and the axial center portion of the roll under the above assumed temperature conditions In the case of a can roll cut and polished into a large crown shape, the crown amount is natural due to the thermal expansion of the metal material that constitutes the cylindrical portion when used under temperature conditions exceeding the above-mentioned assumed temperature for use As mentioned above, it was possible to suppress to some extent the occurrence of wrinkles in a long resin film or the like.

  However, the optimum crown amount to reduce the above-mentioned "sagging condition" caused by the occurrence of wrinkles of a resin film or the like [a diameter difference between an axial center portion α1 of the outer peripheral surface of the cylindrical portion and a diameter α2 at both ends (α = α1 -Α2) depends on the type, thickness, thermal load at the time of film formation, film thickness to be film-formed, transport speed of the long material, etc. It is not preferable to previously set the crown amount to a specific value based on the conditions. For this reason, it is desirable to adjust the crown amount to an appropriate value in accordance with the temperature conditions under which the can roll is used, instead of determining the crown amount to a specific value at the time of manufacturing the can roll. However, in the conventional can roll, when the use temperature condition becomes extremely high temperature beyond assumption, the limit exists in the suppression effect of the wrinkles generation | occurrence | production in a long resin film etc. long object as mentioned above. That is, the effect can not be expected unless the crown amount for the purpose of stretching the above-mentioned "medium sagging state" is not 100 μm or more, and when it exceeds 500 μm, the film moves closer to the direction of high film speed (direction of high peripheral speed) Wrinkling may occur at the center of the film due to the properties.

  Therefore, as shown in FIGS. 5A and 5B, when a metal material having a large thermal expansion coefficient is adopted for the cylindrical portion 70 and a metal material having a small thermal expansion coefficient is adopted for the rotating shaft 71, By raising the temperature, the thermal expansion of the outer peripheral surface of the cylindrical portion 70 becomes larger than the thermal expansion of the rotary shaft 71, so it becomes possible to increase the crown amount more than conventional can rolls, which is efficient. . When a metal material having a small thermal expansion coefficient is adopted for the cylindrical portion 70 and a metal having a large thermal expansion coefficient is adopted for the rotating shaft 71, the crown amount of the can roll is increased by lowering the temperature of the rotating shaft portion. It is also possible. However, if the parts are extremely cooled in the vacuum chamber, adsorption of water present in the vacuum chamber becomes a problem. Therefore, the former method of forming the cylindrical portion 70 by using a metal material having a thermal expansion coefficient larger than that of the metal material forming the rotary shaft 71 is desirable.

  Further, even in the case of adopting a configuration provided with cooling means for a rotating shaft for controlling the temperature of the rotating shaft 41 at a constant level as shown in FIG. 6, the outer peripheral surface of the cylindrical portion 40 by raising the temperature of the cylindrical portion 40 Since the thermal expansion of the rotary shaft 41 is larger than the thermal expansion of the rotary shaft 41 (the expansion of the rotary shaft is small by the action of the cooling means), the crown amount can be further increased compared to the conventional can roll, which is efficient It is. That is, the temperature of the rotating shaft 41 is controlled to be constant by adopting a structure in which the refrigerant enters from the rotating shaft refrigerant introduction pipe 46 constituting the cooling means and the refrigerant flows out from the rotating shaft refrigerant discharge pipe 47 likewise constituting the cooling means. It is possible to In FIG. 6, reference numeral 42 denotes a side plate, reference numeral 43 denotes an inner introduction pipe of the central axis double pipe, reference numeral 44 denotes an outer discharge pipe of the central axis double pipe, and reference numeral 45 denotes a bearing.

(2) Vacuum film forming apparatus A sputtering system as an example of vacuum film forming means, and a long heat resistant resin film as an example of a long body conveyed by roll-to-roll The film apparatus (sputtering web coater) will be described in detail.

  The vacuum film forming apparatus (sputtering web coater) according to the present embodiment includes a unwinding roll 51 for unwinding a long heat-resistant resin film 52 in a vacuum chamber (pressure reducing chamber) 50 as shown in FIG. A take-up roll 64 for taking up the long heat-resistant resin film 52, and a refrigerant which is provided between the take-out roll 51 and the take-up roll 64 and whose temperature is controlled internally is circulated and rotationally driven by a servomotor. And the long heat resistant resin film 52 provided on the upstream side of the cooling can roll 56 and rotationally driven by the servomotor and supplied from the unwinding roll 51 are carried into the cooling can roll 56. The front feed roll 55 and the downstream side of the cooling can roll 56 are rotationally driven by a servomotor and cooled A feed roll 61 is disposed after the long heat-resistant resin film 52 delivered from the can roll 56 is carried out to the take-up roll 64 side, and on the opposite side of the cooling can roll 56. Magnetron sputtering cathodes 57, 58, 59, 60 are provided along the outer peripheral surface of the cooling can roll 56 as vacuum film forming means accompanied by heat load. In addition, as the cooling can roll 56, the above-mentioned can roll which comprised the cylindrical part using the metal material whose thermal expansion coefficient is larger than the metal material which comprises a rotating shaft is used.

  In addition, on the upstream side conveyance path from the unwinding roll 51 to the cooling can roll 56, the tension for measuring the tension of the free roll 53 for guiding the long heat resistant resin film 52 and the long heat resistant resin film 52 A sensor roll 54 and a front feed roll 55 rotationally driven by a servomotor are respectively disposed.

  Then, the long heat-resistant resin film 52 is in close contact with the outer peripheral surface of the cooling can roll 56 by the front feed roll 55 which is adjusted so that the peripheral speed is lower than the cooling can roll 56 rotationally driven by the servomotor. Is to be transported.

  Also, on the downstream side conveyance path from the cooling can roll 56 to the take-up roll 64, a tension sensor for measuring the tension of the rear feed roll 61 rotationally driven by the servomotor and the long heat resistant resin film 52 A roll 62 and a free roll 63 for guiding the long heat-resistant resin film 52 are disposed.

  Then, the long heat-resistant resin film 52 is discharged from the cooling can roll 56 toward the take-up roll 64 by the post feed roll 61 adjusted so that the peripheral speed is equal to or faster than the cooling can roll 56. It is supposed to be

  Further, in the unwinding roll 51 and the winding roll 64, the tension balance of the long heat-resistant resin film 52 is maintained by torque control using a powder clutch or the like. Further, the long heat-resistant resin film 52 is unwound from the unwinding roll 51 by the rotation of the cooling can roll 56 and the front feed roll 55 and the rear feed roll 61 driven by the servomotor which rotates in conjunction with this. It is adapted to be taken up by a take-up roll 64.

  In the vacuum deposition apparatus (sputtering web coater), as described above, the magnetron sputtering cathodes 57, 58, 59, 60 as vacuum deposition means with thermal load are provided along the outer circumferential surface of the cooling can roll 56. It is done.

Then, at the time of sputtering, the pressure was reduced to vacuum chamber of a sputtering web coater until approximately ultimate pressure 10 ^-4 Pa, the pressure adjustment of about 0.1~10Pa is performed by the introduction of the sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added according to the purpose. The shape and material of the vacuum film forming apparatus (sputtering web coater) are not particularly limited as long as they can withstand a reduced pressure state, and various types are used. Further, in order to maintain the reduced pressure state in the pressure reducing chamber in the sputtering web coater, the sputtering web coater is provided with various devices such as a dry pump, a turbo molecular pump, a cryo coil, etc. which are not shown.

  In the case of sputtering deposition of a metal film, a plate-like target (not shown) can be used, but when a plate-like target is used, nodules (growth of foreign matter) occur on the target. Sometimes. If this is a problem, it is preferable to use a cylindrical rotary target which has no generation of nodules and high target usage efficiency. Further, since the vacuum film forming apparatus (sputtering web coater) shown in FIG. 3 assumes sputtering as a vacuum film forming means accompanied by a heat load, magnetron sputtering cathodes 57, 58, 59, 60 are shown. However, when the vacuum film forming means with a thermal load is another film forming means such as vapor deposition, other film forming means is provided instead of the plate-like target. Other vacuum deposition means include CVD (chemical vapor deposition) and vapor deposition.

(3) Long body and heat resistant resin film with metal film (3-1) Long body A long body includes a long resin film, a metal foil, a metal strip and the like. And as a resin film, a long resin film like a polyethylene terephthalate (PET) film, a long heat-resistant resin film like a polyimide film, etc. are illustrated.

(3-2) Heat resistant resin film with metal film (Copper-clad laminated resin film substrate)
The heat resistant resin film with a metal film (copper-clad laminated resin film substrate) can be manufactured using the film-forming method of the elongate body which concerns on this invention.

  As the heat resistant resin film with a metal film (copper-clad laminated resin film substrate), a base metal layer made of Ni, a Ni-based alloy, chromium or the like on the heat resistant resin film and copper laminated on the surface of the base metal layer The structure comprised with a thin film layer is illustrated. The copper-clad laminated resin film substrate having such a structure is processed into a flexible wiring substrate by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the above-mentioned copper thin film layer) not covered with a resist by etching.

  The layer made of the above Ni alloy or the like is called a seed layer (underlying metal layer), and its composition is selected according to desired properties such as electrical insulation and migration resistance of the copper-clad laminated resin film substrate. For the seed layer, various known alloys such as Ni-Cr alloy or inconel, konztangan or monel can be used. When it is desired to further increase the thickness of the metal film (copper thin film layer) of the heat resistant resin film with metal film (copper-clad laminated resin film substrate), the metal film may be formed using a wet plating method. In addition, when forming a metal film only by electroplating process (namely, electrolytic plating process) and performing electroless plating processing as primary plating and performing it combining wet plating methods, such as electrolytic plating processing, as secondary plating. is there. The wet plating process may employ various conditions of the wet plating method according to a conventional method.

  Moreover, as a heat resistant resin film used for the said heat resistant resin film with a metal film (copper-clad laminated resin film board | substrate), a polyimide type film, a polyamide type film, a polyester type film, a polytetrafluoroethylene type film, a polyphenylene sulfide, for example Resin films selected from polyethylene films, polyethylene naphthalate films, and liquid crystal polymer films; flexibility as a heat resistant resin film with a metal film (copper-clad laminated resin film), strength necessary for practical use, wiring material It is preferable from the point of having suitable electrical insulation.

  In addition, although the structure which laminated metal films, such as a Ni-Cr alloy and Cu, on the elongate heat resistant resin film was illustrated as said heat resistant resin film with a metal film (copper-clad laminated resin film), except the said metal film Depending on the purpose, it is also possible to use an oxide film, a nitride film, a carbide film or the like.

  Examples of the present invention will be specifically described below with reference to comparative examples, but the technical configuration according to the present invention is not limited to the configurations of the following examples.

  First, in the present embodiment, the vacuum film forming apparatus (sputtering web coater) shown in FIG. 3 is used, and a heat resistant resin film 52 as a long body has a width of 500 mm, a length of 800 m and a thickness of 25 μm. A heat-resistant polyimide film "UPILEX (registered trademark)" manufactured by Co., Ltd. was used.

  Further, the can roll incorporated in the vacuum film forming apparatus (sputtering web coater) has the cylindrical portion parallel to the rotation axis under the assumed use temperature (20 ° C.) condition of the roll (that is, the axial center of the outer peripheral surface of the cylindrical portion) Apply a parallel-shaped can roll that has been cut and polished so that the part diameter α1 and the both end diameters α2 are the same), the central part diameter α1 and the both ends diameter α2 are 900 mm, width 750 mm, and can roll Hard chrome plating is applied to the surface of the main body (cylindrical part).

  In addition, the metal material that composes the cylindrical portion of the can roll and the rotation shaft includes aluminum with a large thermal expansion coefficient (linear thermal expansion coefficient: 23 ppm / K) and stainless steel with a small thermal expansion coefficient (linear thermal expansion coefficient: 15 ppm / K ), And as shown in Tables 1 to 4 below, a can roll in which the cylindrical portion and the rotation axis are respectively made of stainless steel, and a can roll in which the cylindrical portion and the rotation axis are respectively made of aluminum (aluminum), Also, three types of can rolls made of aluminum having a large thermal expansion coefficient and having a cylindrical portion and having a rotational axis made of stainless steel having a small thermal expansion coefficient are manufactured, and the temperature of the rotational axis is further set for each of the three types of can rolls. The can roll with which the cooling means for rotating shafts which controls to 20 degreeC was attached, and the can roll which is not attached with a cooling means were produced.

In addition, three types of can rolls ( Reference Examples 1 and 2 and Example 3 ) to which the above-mentioned cooling means for a rotating shaft is attached, and a stainless steel having a cylindrical portion made of aluminum having a large thermal expansion coefficient and having a small thermal expansion coefficient. The can roll according to the reference example and the embodiment (Example 4) in which the rotation shaft is configured and the cooling means for the rotation shaft is not provided is the can roll according to the reference example and the embodiment, and the cylindrical portion and the rotation shaft are respectively made of stainless steel And the can roll (comparative example 1) to which the cooling means for said rotating shaft is not provided, and the can roll in which the cylindrical part and the rotating shaft are respectively made of aluminum (aluminum) and the cooling means for the rotating shaft is not provided Each of (Comparative Example 2) was a can roll according to a comparative example.

And, when used under the following temperature (20 ° C., 40 ° C., 60 ° C.) conditions, the can rolls according to reference examples 1 to 2 and examples 3 to 4 and the can rolls according to comparative examples 1 to 2 The crown amount (μm) defined by the diameter difference (α = α1−α2) between the axial center portion diameter α1 and the both end portions diameter α2 and “the maximum sputtering power (total of four units) kW that does not generate wrinkles” Were determined by experiments respectively.

[Crown amount comparison]
The can rolls according to Reference Examples 1 to 2 and Examples 3 to 4 and Comparative Examples 1 to 2 are used under conditions of temperatures of 20 ° C., 40 ° C. and 60 ° C. (based on the outer peripheral surface temperature of the cylindrical portion of each can roll). The crown amount (the outer peripheral surface shape of the can roll) was measured.

  In addition, about the cylinder part outer peripheral surface temperature in each can roll, cold water of 20 ° C., warm water of 40 ° C., 60 ° C. is individually added to each can roll from the inner introduction pipe shown by reference numeral 33 in FIG. The temperature is injected into the cylinder outer peripheral surface temperature of each can roll.

  The results are shown in Tables 1 and 2 below.

[Evaluation]
(1) Comparison with the above-mentioned cooling means for a rotating shaft, as confirmed from the comparison between Reference Example 1 and Comparative Example 1, Reference Example 2 and Comparative Example 2, and Example 3 and Example 4. In the can rolls according to Example 1, Comparative Example 2 and Example 4, since the temperature of the cylindrical portion is transferred to the rotating shaft, Reference Examples 1 to 2 provided with the above-mentioned cooling means for the rotating shaft , It is confirmed that the crown amount is smaller than that of the can roll according to the third embodiment . In particular, in the can roll according to Comparative Example 1, it is confirmed that it is difficult to secure a sufficient crown amount capable of coping with the use temperature when used under a temperature condition far exceeding the use assumed temperature.

(2) When aluminum having a large thermal expansion coefficient is applied to the material of the cylindrical portion, it is also confirmed that the crown amount is increased as compared with the case where stainless steel is applied.

[Maximum sputter power that soot does not occur]
Next, reference examples 1 and 2 in which the can rolls according to reference examples 1 and 2 and examples 3 and 4 and comparative examples 1 and 2 are separately incorporated, and vacuums according to examples 3 and 4 and comparative examples 1 and 2 When a Ni-Cr film and a Cu film of a seed layer (underlying metal layer) are sequentially formed on a heat resistant resin film (heat resistant polyimide film) 52 using a film forming apparatus (sputtering web coater), no wrinkles are generated The maximum sputter power was measured.

  The film forming conditions are as follows.

That is, a Ni-Cr target is used for the magnetron sputtering target 57 shown in FIG. 3, a Cu target is used for the magnetron sputtering targets 58, 59, and 60, argon gas is introduced at 300 sccm, and the power applied to each cathode is 5 kW. Power control was done. The tension of the unwinding roll 51 and the winding roll 64 is 80 N, and the heat resistant resin film (heat resistant polyimide film) 52 is set on the unwinding roll 51, and the heat resistant resin passes through the can roll 56. The leading end of the film (heat-resistant polyimide film) 52 was attached to the take-up roll 64. In addition, the vacuum chamber 50 was evacuated to 5 Pa with a plurality of dry pumps, and then evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and a cryocoil.

  Next, after setting the transport speed of the heat resistant resin film (heat resistant polyimide film) 52 to 3 m / min, argon gas is introduced into each of the magnetron sputtering cathodes 57, 58, 59, 60 to apply electric power to Ni. The film formation of a Cr film and a Cu film was started.

And the heat resistant resin film (heat resistant polyimide film) surface on the can roll 56 in each vacuum film-forming apparatus (sputtering web coater) which concerns on reference example 1-2 and Example 3-4 and comparative example 1-2 is observed. From the possible window, the transfer speed 3 m / min under controlled temperature (20 ° C., 40 ° C., 60 ° C.) condition in the cylindrical part of the can roll according to the reference example 1-2, the example 3-4 and the comparative example 1-2. Of the heat-resistant resin film (heat-resistant polyimide film) transported on the can roll 56 at the same time, and the maximum sputtering power (total of four units) that does not cause the generation of wrinkles due to the thermal load of sputtering I asked for.

  The results are shown in Tables 3 and 4 below.

[Evaluation]
(1) By comparison of "Table 2" and "Table 4" concerning "Table 1" and "Table 3" concerning reference examples 1-2 and Example 3 , and comparative examples 1-2 and Example 4 As confirmed, the "crown amount" and the "maximum spatter power causing no wrinkles" are substantially proportional to each other, and when the "crown amount" increases, the "maximum spatter power causing no wrinkles" also tends to increase. there were.

  This is because the crowned shape of the can roll eliminates the above-mentioned "slack condition", the adhesion between the heat resistant resin film (heat resistant polyimide film) and the can roll is improved, and the thermal load due to sputtering is efficiently cooled by the can roll. It is thought that it was because

(2) Also, although not shown in the respective tables, when the control temperature of the can roll cylindrical portion exceeds 80 ° C., the maximum sputtering power which does not generate wrinkles tends to extremely decrease.

  This is the cooling effect of the above-mentioned can roll (the crown shape eliminates the "slack condition" and the adhesion between the heat resistant resin film and the can roll is improved, and the thermal load due to sputtering is efficiently cooled by the can roll) In comparison with the above, it is considered that the result is that the cooling action of the heat resistant resin film is insufficient as a result of the temperature of the can roll being too high (when it exceeds 80 ° C.).

(3) In order to avoid the adverse effect that the temperature of the can roll is too high, the can roll surface shape at the assumed use temperature is cut and polished into a slight crown shape (that is, the crown amount is set larger than necessary) By doing this, it is possible to lower the control temperature of the cylindrical portion to achieve the optimum crown amount.

(4) On the other hand, a method of cutting and polishing the canroll surface shape at the assumed use temperature into a large crown shape (that is, setting the crown amount large) and reducing the control temperature of the canroll cylindrical portion to reduce the crown amount In some cases, the temperature difference between the resin film cooled by the can roll before the sputtering film formation and the film surface due to the thermal load of the sputtering becomes large and wrinkles due to rapid thermal distortion may occur.

  According to the can roll according to the present invention, a sufficient amount of crown can be secured even when used under temperature conditions far exceeding the use temperature, for the purpose of increasing the film forming speed, etc. It becomes possible to control the occurrence of pressure sores. For this reason, it has industrial applicability used for manufacture of the copper clad laminated resin film (heat-resistant resin film with a metal film) used for flexible wiring boards, such as a liquid crystal television and a mobile telephone.

Reference Signs List 30 cylindrical portion 31 rotary shaft 32 side plate 33 inner introduction pipe 34 outer discharge pipe 35 bearing 40 cylindrical portion 41 rotary shaft 42 side plate 43 inner introduction pipe 44 outer discharge pipe 45 bearing 46 rotary shaft refrigerant introduction pipe 47 rotary shaft refrigerant discharge pipe 50 vacuum Chamber (decompression chamber)
Reference Signs List 51 unwinding roll 52 long heat resistant resin film 53 free roll 54 tension sensor roll 55 front feed roll 56 can roll 57 magnetron sputtering cathode 58 magnetron sputtering cathode 59 magnetron sputtering cathode 60 magnetron sputtering cathode 61 rear feed roller 62 tension sensor roll 63 free roll 64 take-up roll 70 cylindrical portion 71 rotation axis

Claims (6)

A cylindrical body provided with a refrigerant circulation passage inside and a rotary shaft provided on a rotation center shaft portion of the cylindrical part, and an elongated body conveyed by roll-to-roll in a vacuum chamber is wound around the cylindrical outer peripheral surface In the cooling can
A can roll characterized in that a cylindrical portion is formed by using a metal material having a thermal expansion coefficient larger than that of the metal material constituting the rotating shaft. Processed into a parallel shape type in which the diameter difference (α = α1−α2) between the axial center portion diameter α1 and the both end portions diameter α2 of the outer peripheral surface of the cylindrical portion is 0 or a crown shape type in which the diameter difference (α) is positive The can roll according to claim 1 , characterized in that: The can roll according to any one of claims 1 to 2 , wherein the crown amount defined by the difference in diameter (α) in the crown-shaped can roll is changed in a range of 100 to 500 μm. A vacuum chamber, a transport mechanism for transporting the long body by roll-to-roll in the vacuum chamber, a can roll for winding and cooling the long body around the outer peripheral surface, and a vacuum for the long body wound around the can roll In a vacuum deposition apparatus comprising means for depositing a film,
The vacuum film forming apparatus according to any one of claims 1 to 3, wherein the can roll is configured. 5. The vacuum film forming apparatus according to claim 4 , wherein the means for forming the vacuum film is magnetron sputtering. In the film forming method of an elongated body, the elongated body conveyed by roll-to-roll in the vacuum chamber is wound around the outer peripheral surface of the can roll, and vacuum film formation is performed on the elongated body wound around the can roll.
The film-forming method of the elongate body characterized by the said can-roll comprised by the can-roll in any one of Claims 1-3 .

Images