JP5920199B2 - Metal roll, manufacturing method thereof, and surface treatment apparatus using metal roll - Google Patents

Description

  The present invention relates to a cylindrical metal roll composed of an outer ring and an inner drum made of different metals, and a method for manufacturing the cylindrical metal roll. In particular, the present invention relates to a metal roll formed by welding an outer ring made of a metal different from a metal inner drum provided with a mechanism for circulating a coolant such as cooling water, and a manufacturing method thereof.

  In a liquid crystal panel, a notebook computer, a digital camera, a mobile phone, and the like, a flexible wiring board in which a wiring pattern is formed on a heat resistant resin film is used. This flexible wiring board is manufactured by applying a patterning process to a heat-resistant resin film with a metal film in which a metal film is formed on one or both sides of the heat-resistant resin film. There is a tendency to increase the density, and accordingly, a heat-resistant resin film with a metal film is required to be smooth without wrinkles.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, conventionally, a method in which a metal foil is attached to a heat-resistant resin film with an adhesive (manufacturing method of a three-layer substrate), a heat-resistant resin on the metal foil After coating the solution, dry and manufacture (casting method), heat-resistant resin film by vacuum film formation method alone or in combination with vacuum film formation method and wet plating method. A method (metalizing method) or the like is known. Examples of the vacuum film forming method used for the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  Regarding the metallizing method, Patent Document 1 describes a method of forming a conductor layer by sputtering copper after sputtering a chromium layer on a polyimide insulating layer. Patent Document 2 discloses a flexible film in which a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using a copper as a target are formed on a polyimide film in this order. Circuit board materials are disclosed. Film formation by these sputtering methods is generally excellent in adhesion, but it is said that the heat load applied to the heat-resistant resin film as a base material is larger than that of the vacuum deposition method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled.

  Therefore, a sputtering web coater equipped with a can roll is generally used in the process of forming a heat-resistant resin film with a metal film by forming a film on the heat-resistant resin film such as the polyimide film by a vacuum film formation method. Has been. This device performs sputtering while winding a long heat-resistant resin film transported by roll-to-roll around a can roll with a refrigerant circulated therein, and heat of the heat-resistant resin film during film formation. Since it can remove from a back surface side, generation | occurrence | production of a wrinkle can be prevented effectively.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus is provided with a cooling roll serving as a can roll. Further, a sub-roll is provided at least on the film feeding side or the feeding side of the cooling roll, thereby controlling the heat-resistant resin film to be in close contact with the cooling roll.

  By the way, as described above, the can roll that the sputtering web coater has has a long resin film that is conveyed in a vacuum by roll-to-roll, wound around the outer peripheral surface, and operates a cooling circulation mechanism provided inside to conduct heat. Thus, the long resin film is cooled. Therefore, aluminum having a high thermal conductivity and light weight and excellent machinability is suitable as a material for the can roll.

  Further, the outer surface of the can roll is generally often subjected to a surface treatment such as a mirror chrome plating treatment in order to prevent the wound film from being easily damaged or to increase the surface hardness. However, when the chrome plating treatment is performed on the surface of aluminum, the chrome plating may be peeled off due to the repeatedly applied thermal load. Therefore, the can roll cannot be made of aluminum having excellent heat conduction.

  In this regard, in the technical field of electrodeposition drums for producing electrolytic metal foil, a technique in which the inner drum and the outer ring are made of different metals is used. For example, Patent Document 4 describes a method of engraving a groove in the inner drum to increase the contact pressure per unit area with the outer ring, and Patent Document 5 has an unevenness between the inner drum and the outer ring. A method for sandwiching a metal plate is described. Patent Document 6 describes a method of sandwiching a grooved soft metal plate between an inner drum and an outer ring.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 Japanese Patent Laid-Open No. 56-112492 Japanese Patent Laid-Open No. 3-188292 Japanese Patent No. 3542080

  As described above, in a sputtering web coater that forms a film on a resin film in a vacuum, the can roll member mounted on the coater has good thermal conductivity, is lightweight, and has excellent machinability. Is suitable. However, when the chrome plating treatment was performed on the surface of aluminum, it sometimes peeled off. On the other hand, when chromium plating is applied to the surface of stainless steel, the plating hardly peels off because it adheres extremely strongly.

  Therefore, it is conceivable that the can roll body is made of aluminum, and only the surface portion to be subjected to chrome plating is made of stainless steel. That is, if the can roll can be composed of a stainless steel annular thick member (outer ring) and an aluminum cylindrical member (inner drum) inscribed therein, the thermal conductivity is high and the weight is light. And the can roll which the surface chromium plating does not peel easily is implement | achieved.

  However, when the technique of Patent Document 4 described above is applied to the production of this can roll, there are cases where a great restriction is imposed on the degree of freedom of the shape of the inner drum. Moreover, even if the technique of patent document 5 and 6 was applied and a metal plate was pinched | interposed between an inner drum and an outer ring, there existed concern that between both still loosened. Thus, it has been difficult to apply the electrodeposition drum manufacturing technique directly to the can roll manufacturing.

  Further, when the outer ring and the inner drum are made of different metals, an inner drum and an outer ring having an inner diameter slightly smaller than the outer diameter are prepared, and a method that has been adopted for a long time called shrink fitting is used. It is possible. In this method, while the outer ring is warmed and linearly expanded, the inner drum is fitted inside the outer ring, and it is not easily removed that the linear expansion coefficient of the metal of the outer ring is smaller than that of the metal of the inner drum. It is considered to be a condition.

  However, even in this shrink-fitting method, when the heat load repeatedly acts, the space between the inner drum and the outer ring may be loosened. The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to provide a metal roll that does not loosen during operation even if the outer ring and the inner drum are made of different metals. It is said.

To achieve the above object, a metal roll provided by the present invention, a metal inner drum having an axis of rotation, which is shrink-fit coupled to the outer peripheral surface of the inner drum, the dissimilar metals and the inner drum wall A metal roll comprising an outer ring having a thickness of 3 to 5 mm , wherein a plurality of grooves extending in the direction of the rotation axis are formed on the outer peripheral surface of the inner drum over the entire circumference at substantially equal intervals in the circumferential direction. The inner drum and the outer ring are welded to each other at a protruding portion between adjacent ones of the plurality of grooves .

  According to the present invention, it is possible to provide a highly reliable metal roll because there is almost no loosening between the inner drum and the outer ring even when a thermal load repeatedly acts during operation. It becomes possible.

It is a schematic diagram which shows one specific example of the processing apparatus of the long resin film by the roll-to-roll system provided with the can roll. It is process drawing which shows the manufacturing method of the conventional electrodeposition roll. It is process drawing which shows the manufacturing method of the metal roll of the 1st Embodiment of this invention. FIG. 4 is a partial perspective view illustrating in detail a part of the process diagram of FIG. 3. It is process drawing which shows the manufacturing method of the metal roll of the 2nd Embodiment of this invention. FIG. 6 is a partial perspective view illustrating a part of the process diagram of FIG. 5 in detail.

  First, as a first embodiment of a metal roll according to the present invention, a can roll having a refrigerant circulation mechanism therein will be described as an example. This can roll is composed of, for example, an aluminum inner drum having a rotating shaft, and an outer ring made of, for example, stainless steel inscribed in the outer peripheral surface of the inner drum. And the outer peripheral surface of these inner drums and the inner surface of the outer ring inscribed in this are welded mutually. With this configuration, it is composed of an inner drum made of a metal having high thermal conductivity, light weight and excellent machinability, and an outer ring made of a metal capable of adhering chromium plating extremely strongly. A metal roll can be provided.

  The inner drum and outer ring are preferably joined together by shrink fitting before welding. By shrink fitting before welding, the problem of loosening of the two when a repeated heat load is applied to the metal roll is less likely to occur even when the dissimilar metals have different expansion rates. The outer peripheral surface of the metal roll composed of the inner drum and the outer ring may be ground or polished. Since the inner drum and the outer ring are welded, there is no loosening between the inner drum and the outer ring during grinding or polishing.

  The metal roll having such a structure is a surface treatment apparatus for performing a surface treatment that applies a thermal load to a long strip such as a resin film such as a polyethylene terephthalate (PET) film or a heat-resistant resin film such as a polyimide film. Moreover, it can be suitably used as a can roll. This surface treatment apparatus will be described with reference to FIG. 1 by taking as an example the case where the long strip is a long heat-resistant resin film and the surface treatment to which a thermal load is applied is sputtering film formation.

  The surface treatment apparatus shown in FIG. 1 is a film forming apparatus 50 that is also referred to as a sputtering web coater, and is a long heat-resistant resin film (hereinafter referred to as a long resin film) F that is conveyed by a roll-to-roll method. It is preferably used when the film is continuously and efficiently formed on the surface of the film. With this film forming apparatus 50, it is possible to produce a long heat-resistant resin film with an inner metal film in which a metal film is formed by sputtering on the surface of the long resin film F.

More specifically, the main apparatus constituting the film forming apparatus 50 is housed in a vacuum chamber 51. During sputtering film formation, the vacuum chamber 51 is first depressurized to an ultimate pressure of about 10 ⁻⁴ Pa, and thereafter The pressure adjustment of about 0.1 to 10 Pa is performed by introducing the sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added according to the purpose.

  The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand the above-described reduced pressure atmosphere, and various types can be used. In order to maintain the reduced pressure state in the vacuum chamber 51 as described above, the film forming apparatus 50 includes various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  The long resin film F unwound from the unwinding roll 52 in the vacuum chamber 51 in such a reduced pressure atmosphere is guided to the can roll 56 through a predetermined transport path, and a film forming process is performed on the outer peripheral surface thereof. Then, it is wound up by a winding roll 64. A free roll 53 that guides the long resin film F and a tension sensor roll 54 that measures the tension of the long resin film F are disposed on the conveyance path from the unwinding roll 52 to the can roll 56.

  Further, the long resin film F fed from the tension sensor roll 54 toward the can roll 56 is adjusted with respect to the peripheral speed of the can roll 56 by a motor-driven feed roll 55 provided in the vicinity of the can roll 56. Accordingly, the long resin film 51 can be brought into close contact with the outer peripheral surface of the can roll 56 that is rotated by a rotation driving means such as a motor.

  Similarly to the conveyance path from the unwinding roll 52 to the can roll 56, the motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56 is also provided on the conveyance path from the can roll 56 to the take-up roll 64. A tension sensor roll 62 for measuring the tension of the long resin film F and a free roll 63 for guiding the long resin film F are arranged in this order.

  In the unwinding roll 52 and the winding roll 64, the tension balance of the long resin film F is maintained by torque control using a powder clutch or the like. Further, the long resin film F is unwound from the unwinding roll 52 and wound around the winding roll 64 by the rotation of the can roll 56 and the motor-driven feed rolls 55 and 61 that rotate in conjunction with the rotation of the can roll 56. It has become.

  Magnetron sputtering cathodes 57, 58, 59, 60 as film forming means are positioned along the transport path on the outer peripheral surface of the can roll 56 around which the long resin film F is wound at a position facing the outer peripheral surface of the can roll 56. Is provided. Thereby, a metal film can be formed by sputtering on the surface of the long resin film F wound around the outer peripheral surface of the can roll 56. At that time, since the temperature-controlled refrigerant circulates inside the can roll 56, the heat of the long resin film F by sputtering can be removed. In addition, the angle range in which the long resin film F is wound around the outer cylinder portion of the can roll 56 may be referred to as a holding angle of the long resin film F.

  Thereby, for example, a long heat resistant resin film with a metal film in which a film made of Ni alloy or the like and a Cu film are laminated on the surface of the heat resistant resin film is obtained. In addition, as a heat resistant resin film used for the heat resistant resin film with a metal film, for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, Examples thereof include liquid crystal polymer films. These heat-resistant resin films are preferable because they have flexibility as a flexible substrate with a metal film, strength necessary for practical use, and electrical insulation suitable as a wiring material.

  A film made of Ni alloy or the like is called a seed layer, and Ni—Cr alloy such as Inconel, or various known alloys such as Constantan and Monel can be used. It is appropriately selected according to desired characteristics such as insulation and migration resistance. When it is desired to make the metal film of the long heat-resistant resin film with a metal film thicker, the metal film may be formed using a wet plating method. Further, there are a case where the metal film is formed only by electroplating treatment, and a case where electroless plating treatment is performed as primary plating and wet plating methods such as electrolytic plating treatment are combined as secondary plating. The wet plating method may employ various conditions of general wet plating treatment.

  The heat resistant resin film with a metal film obtained by the above method can be processed into a flexible wiring board by, for example, a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  In the case of sputtering of a metal film, a plate-like target can be used as shown in FIG. 1, but when a plate-like target is used, nodules (growth of foreign matter) are generated on the target. There is. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency.

  In addition, since the film forming apparatus 50 for the long resin film F in FIG. 1 assumes a sputtering process as a process that requires a thermal load, magnetron sputtering cathodes 57, 58, 59, and 60 are illustrated. In the case where the heat-loading process is another process such as a vapor deposition process, other vacuum film forming means such as CVD (chemical vapor deposition) or vacuum deposition is provided in place of the plate target.

  In the above specific example, as a heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni-Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. Thus, an oxide film, a nitride film, a carbide film, or the like can be formed. In this case, the metal roll according to the present invention or a surface treatment apparatus using the same can also be used for forming an oxide film, a nitride film, a carbide film, or the like.

  Next, the manufacturing method of an above-mentioned can roll is demonstrated. A general can roll used in a film forming apparatus is manufactured by welding a stainless steel side plate to both ends of a stainless steel cylindrical member to form a drum-shaped roll, and providing a rotation shaft at the center axis portion. Is done. In addition, as described above, an electrodeposition roll composed of an inner drum and an outer ring made of different metals is manufactured by, for example, the method shown in FIG.

  That is, first, a cylindrically processed inner drum 1 is prepared, and after the side surface portion 2 and the rotary shaft 3 are attached to both ends thereof (step A), the inner drum 1 has a thick inner diameter slightly smaller than the outer diameter of the inner drum 1. An outer ring 4 is prepared, and the outer ring 4 is heated and expanded, so that the inner drum 1 is fitted into the inner ring 1 (step B), and the outer peripheral surface of the outer ring 4 is ground. The thin outer ring 4a is manufactured (Step C).

  On the other hand, the above-described can roll, which is a specific example of the metal roll of the present invention, can be produced by the method shown in FIG. Specifically, for example, an aluminum inner drum 11 made by cylindrical processing is prepared, and the side surface portion 12 and the rotary shaft 13 are attached to both ends thereof (step A1). Next, a thick outer ring 14 made of, for example, stainless steel having an inner diameter slightly smaller than the outer diameter of the inner drum 11 is prepared, and this is heated and shrink-fitted onto the inner drum 11 (step B1). In this shrink-fitting process, the inner diameter of the outer ring 14 is expanded by heating the outer ring 14 by a known heating method such as induction heating. Therefore, by inserting the inner drum 11 inside the outer ring 14 during that time, the inner ring 11 is cooled after cooling. The outer peripheral surface of the drum 11 and the inner peripheral surface of the outer ring 14 can be firmly coupled.

  After both of them are shrink-fitted, laser welding or electron beam welding is performed from the outer peripheral surface side of the outer ring 14 so that the inner drum 11 and the outer ring 14 are not loosened due to a temperature difference or the like (step C1). Thereafter, the outer peripheral surface of the outer ring 14 is thinly cylindrically ground to form a thin outer ring 14a (step D1). The outer peripheral surface of the thin outer ring 14a was hard chrome plated to form a plated outer ring 14b (step E1), and the outer peripheral surface of the plated outer ring 14b was further polished and polished. It is set as the outer ring 14c (process F1). This completes the can roll.

  4A to 4C are partial perspective views showing the steps A to C, respectively, and a state in which the refrigerant circulation pipe 16 is provided inside the inner drum 11 is shown. Yes. A refrigerant circulation path 17 is formed in a space defined by the refrigerant circulation pipe 16 and the inner peripheral surface of the inner drum 11. FIG. 4C shows a state in which a plurality of weld beads 15 extending in the central axis direction are formed at substantially equal intervals in the circumferential direction.

  In the above method, since the outer peripheral surface of the outer ring 14 is ground and polished after welding, it can be corrected even if a smoothness problem occurs on the outer peripheral surface of the can roll due to welding or the like. Laser welding or electron beam welding is preferably performed from the outer peripheral surface side of the outer ring 14 (surface side of the metal roll). The reason why laser welding or electron beam welding is used is that if these weldings are used, the output density is high, and heat can be efficiently transferred from the outer ring 14 to the inner drum 11 so that both can be welded well.

  Also, laser welding and electron beam welding can narrow the bead width at each welding location, so that even if the outer peripheral surface of the inner drum is grooved such as a cooling pipe as described later, welding is performed avoiding that portion. It is possible. That is, laser welding or electron beam welding hardly impairs the degree of freedom of the structure of the outer peripheral surface of the inner drum. In particular, electron beam welding is more preferable because a thin beam enters deep into the weld. In addition, although arc welding etc. are also known for welding, output density is low compared with laser welding or electron beam welding, and it is not suitable for manufacture of the metal roll (can roll) based on this invention.

  As described above, it is desirable that the outer ring member has a thickness that is expected to be ground and polished. In addition, since the outer ring is subjected to shrink fitting, welding, and grinding / polishing processes, it is necessary to consider them. Specifically, from the viewpoint of shrink fitting, the outer ring needs to have a certain thickness. For example, when the outer diameter of the inner drum is about 400 mm to 1000 mm, the thickness of the outer ring is preferably about 8 mm to 15 mm. On the other hand, from the viewpoint of welding, the heat of the laser or electron beam irradiated from the outer peripheral surface of the outer ring reaches the inner drum, and the outer ring and the inner drum are thereby welded. When welding, it is desirable that the thickness of the outer ring is thin, for example, a thickness of about 3 mm to 5 mm is desirable. The thickness of the inner drum is not particularly limited as long as the shape can be maintained even if the inner drum surface is processed such as grooving, but it is preferably thicker than the outer ring.

  If the outer ring is too thick, the heat of welding diffuses to the surroundings and a sufficient welding effect cannot be obtained. However, if the shrink-fitted outer ring is excessively polished before welding, the outer ring may loosen from the inner drum. Therefore, considering shrink fitting and welding, after outer ring shrink fitting on the inner drum, the outer ring is polished to such an extent that the outer ring does not loosen and can be welded, and further polished after laser welding or electron beam welding. Can be done.

  In the metal roll (can roll) according to the first embodiment of the present invention, the inner drum and the outer ring are shrink-fitted and further integrated by laser welding or electron beam welding. The inner drum and the outer ring are not loosened when the tightening stress is reduced or there is a heat load on the metal roll due to high-temperature heat treatment. Furthermore, even when only the outer ring is heated or the temperature of the outer ring is partially increased while the inner drum is cooled due to the heat load of the film formation, the gap between the inner drum and the outer ring is not loosened. Absent.

The linear expansion coefficient of the outer ring is preferably smaller than that of the inner drum. For example, when the inner drum is made of aluminum, the linear expansion coefficient is about 23 × 10 ⁻⁶ / K, and when the outer ring is made of stainless steel, the linear expansion coefficient is about 15 × 10 ⁻⁶ / K. . Thus, by making the coefficient of linear expansion of the outer ring smaller than that of the inner drum, when the can roll (metal roll) linearly expands, the contact portion between the inner drum and the outer ring does not peel off.

  On the contrary, if the linear expansion coefficient of the outer ring is larger than that of the inner drum, if the can roll is heated, the outer ring expands more than the inner drum. Therefore, it is preferable to select the materials of the outer ring and the inner drum in consideration of the linear expansion coefficient. In addition, when the linear expansion coefficient of the outer ring is smaller than that of the inner drum, deformation of the inner drum is restricted by the outer ring when the can roll (metal roll) linearly expands. Will also expand.

  By the way, it seems that the inner drum and the outer ring are not loosened only by shrink fitting. However, depending on the conditions, such as when the outer ring becomes too thin due to polishing and the tightening stress on the inner drum is reduced, when heat treatment is performed at a high temperature, or when temperature rise and fall are repeated, depending on the conditions It may loosen.

  The linear expansion coefficient indicates the degree of expansion when the temperature is raised, but indicates the degree of contraction when the temperature is lowered.As described above, the temperature is lowered when the linear expansion coefficient of the outer ring is smaller than that of the inner drum. Sometimes force is applied in the direction of peeling. As a result, if the temperature rise and fall are repeated, the outer ring and the inner drum will loosen due to the difference in the degree of contraction, or the outer peripheral surface of the metal roll (can roll) will be distorted and the initial circumferential direction will be reduced. The curved shape that was a perfect circle may be deformed.

  Therefore, Patent Documents 4 to 6 disclose techniques in which the outer ring and the inner drum do not loosen. For example, Patent Document 4 discloses a method of engraving a groove in an inner drum to increase the contact pressure per unit area with the outer ring. However, in the technique of Patent Document 4, it is necessary to limit the groove shape of the inner drum, and the degree of freedom in designing the inner drum is reduced. That is, even if it is necessary to provide a groove for circulating the refrigerant as described later on the outer peripheral surface of the inner drum, the dimensions cannot be freely designed. On the other hand, in the techniques of Patent Documents 5 and 6, a metal plate is sandwiched between the inner drum and the outer ring, but when such a metal plate is interposed, the difference between the linear expansion coefficients of the inner drum, the metal plate, and the outer ring. There is concern about loosening between these three members.

  On the other hand, in the above-described metal roll according to the first embodiment of the present invention, the outer ring is welded between the inner ring and the outer ring. There is no loosening between the inner drums. Moreover, since the thickness of the outer ring can be appropriately reduced, the long resin film being formed can be efficiently cooled, and the thermal conductance between the outer peripheral surface of the can roll and the long resin film wound around the can roll can be improved. In addition, the film temperature can be efficiently lowered during pre-treatment, film formation, or other heat-loading treatment.

  Therefore, the above-described can roll, which is an example of the first embodiment of the present invention, is mounted on a device that transports a long belt-like object by roll-to-roll, and surface treatment means that applies a thermal load to the outer peripheral surface of the can roll is provided. By performing the treatment on the surface of the band-like material wound around the outer peripheral surface so as to face each other, it is possible to eliminate the occurrence of wrinkling of the belt-like material even if the surface treatment is applied to the belt-like material. Since such a surface treatment apparatus can be used for manufacturing apparatuses for heat-resistant resin films with metal films, optical films, and the like, it can contribute to improving the quality and yield of various film products.

  In particular, in the sputtering web coater such as the film forming apparatus 50 described above, when the outer ring that bears the outer peripheral surface of the can roll 56 is loosened from the inner drum having the rotation shaft to which the driving force is transmitted from the rotation driving means, the unwinding is performed. The conveyance control of the long resin film F wound up from the roll 52 and wound up by the take-up roll 62 is disturbed, and defects such as wrinkles and scratches are generated on the surface of the long resin film F. This is because such a problem cannot be controlled by the can roll 56 having a driving force disposed in the middle of the transport path of the long resin film F. Patent Documents 4 to 6 are techniques relating to an electrodeposition drum used for the production of an electrolytic metal foil. Since the electrodeposition drum is at the starting point of the electrolytic metal foil, even if the surface of the electrodeposition drum is loose, strip-shaped electrolysis is performed. There is no major problem in conveying the metal foil.

  Thus, in the metal roll used for the can roll provided with the driving force arranged in the middle of the conveyance path of the long belt-like object, from the viewpoint of the quality of various film-like products, between the rotating shaft and the outer peripheral surface. There must be no looseness, and the inner drum having the rotating shaft and the outer ring having the outer peripheral surface must be firmly connected to each other. The metal roll according to the first embodiment of the present invention satisfies this purpose because it is welded after the inner drum and the outer ring are shrink-fitted.

  Next, a second embodiment of the metal roll of the present invention will be described. The metal roll according to the second embodiment of the present invention is composed of an inner drum and an outer ring of dissimilar metals welded to each other in the same manner as the metal roll according to the first embodiment. A plurality of grooves extending in the direction of the rotation axis are formed on the outer circumferential surface of the outer circumferential surface of the outer circumferential surface at substantially equal intervals in the circumferential direction.

  A refrigerant may be circulated in the groove of the inner drum, or a gas introduced into the gap between the outer peripheral surface of the can roll and the long resin film wound around the can roll may be circulated to increase the heat transfer coefficient. Good. When circulating the refrigerant, the refrigerant can flow to a portion closer to the outer peripheral surface of the can roll as compared with the case where the above-described refrigerant circulation pipe is provided inside the inner drum. Henceforth, this can roll is also called a surface cooling can roll).

  When introducing the introduced gas, it is necessary to drill a plurality of holes penetrating from the outer peripheral surface side of the outer ring toward the groove in a region facing each groove in the outer ring. Furthermore, it is necessary to provide a refrigerant circulation pipe or the like similar to the can roll of the first embodiment described above inside the inner drum.

  Next, a method for manufacturing a surface-cooling can roll as an example of a metal roll according to a second embodiment of the present invention will be described with reference to FIG. First, an inner drum 21 made of, for example, aluminum is manufactured by cylindrical processing, and a side surface portion 22 and a rotary shaft 23 are attached to both ends thereof, and a plurality of grooves extending in the central axis direction on the outer peripheral surface of the inner drum 21 by grooving. The groove 28 is formed over the entire circumference at substantially equal intervals in the circumferential direction (step A2). If the introduced gas is circulated through the plurality of grooves 28, a refrigerant circulation pipe (not shown) is provided inside the inner drum 21.

  Next, a thick outer ring 24 made of, for example, stainless steel having an inner diameter slightly smaller than the outer diameter of the inner drum 21 is prepared, and this is heated and shrink-fitted onto the inner drum 21 (step B2). Laser welding or electron beam welding is performed so that the inner drum 21 and the outer ring 24 are not loosened due to a temperature difference (step C2). Thereafter, as in the first embodiment described above, the outer ring 24 is thinly cylindrically ground and polished to form a thin outer ring 24a (step D2), and the outer ring plated by performing hard chrome plating. 24b (step E2) and the outer ring 24c polished and polished (step F2). Thereby, the surface cooling can roll is completed. In addition, a device (not shown) such as a rotary joint for distributing and supplying the refrigerant and the introduced gas flowing therethrough is attached to the groove 28 of the inner drum 21.

  The steps A2 to C2 will be described in more detail with reference to the partial perspective views of FIGS. 6A to 6D. With respect to the inner drum 21 subjected to cylindrical grinding as shown in FIG. A plurality of grooves 28 as shown in FIG. 6B are formed on the outer peripheral surface side. The dimensions of the grooves 28 are appropriately designed according to specifications such as the type and flow rate of the refrigerant when circulating the refrigerant and the gas pressure and flow rate of the introduced gas when circulating the introduced gas. Next, as shown in FIG. 6C, a thick outer ring 24 is prepared, and this is heated and shrink-fitted on the outer peripheral side of the inner drum 21.

  Next, as shown in FIG. 6D, the outer ring 24 and the inner drum 21 are joined by laser welding or electron beam welding. At this time, a laser or an electron beam is irradiated from the outer peripheral surface of the outer ring 24 toward the ridge portion 29 so that welding is performed at the ridge portion 29 between the adjacent grooves 28, and the inner drum 21. The laser or electron beam is scanned along the central axis direction.

  Thereby, as shown in FIG.6 (d), the weld bead 25 can be formed in the protrusion part 29 between the adjacent groove | channels 28 along a center axis direction. In this way, in order to weld the inner peripheral surface of the outer ring 24 at the protruding portion 29 between the grooves 28 of the inner drum 21, the welding width can be reduced as in laser welding or electron beam welding, and the output density can be reduced. High welding is preferred.

  As mentioned above, although the embodiment of the metal roll of the present invention has been described by taking the example of the can roll included in the sputtering web coater that performs the sputtering film forming process on the long resin film conveyed by roll-to-roll, the present invention is applied. The invention is not limited to the embodiments and specific examples, but covers the claims of the present invention and equivalents thereof.

[Example 1]
A metal roll comprising an aluminum inner drum and a stainless outer ring is produced according to the production method shown in FIG. 3, and this is used as a can roll 56 of a film forming apparatus 50 (sputtering web coater) as shown in FIG. The long resin film F was used for sputtering to form a long heat-resistant resin film with a metal film.

  More specifically, an aluminum pipe with a finished outer diameter of 798 mm and a thickness of 15 mm was prepared as the inner drum 11, and a stainless steel pipe with a finished inner diameter of 797 mm and a thickness of 10 mm was prepared as the outer ring 14. The inner drum pipe and the outer ring pipe are cut and polished so that these pipes can be shrink-fitted well, and the outer ring pipe is heated and expanded to produce an inner drum pipe. It was baked into. Next, a coolant circulation path was formed inside the inner drum pipe, and the outer peripheral surface of the outer ring pipe was cut and polished to a thickness of 4 mm (outer diameter 802 mm).

  A YAG laser having a wavelength of 1.06 μm and an output of 10 kW was irradiated from the outer peripheral surface side of the outer ring pipe, and the inner drum pipe and the outer ring pipe were welded at an angle of 2 ° in the circumferential direction. At that time, each weld bead extended in the central axis direction. Thereafter, cutting and cylindrical polishing were performed until the outer diameter of the can roll reached 800 mm. Thereafter, hard chrome plating was applied to the outer peripheral surface of the outer ring pipe to complete a can roll having a diameter of 800 mm and a width of 750 mm.

  The can roll is mounted on the film forming apparatus 50, and a Ni—Cr film as a seed layer and a Cu film on the seed layer are stacked on the surface of the long resin film F. A -Cr target was used, and a Cu target was used for the magnetron sputtering targets 58-60. Argon gas was introduced at 300 sccm, and the power applied to each cathode was 5 kW. Furthermore, the tension of the unwinding roll 52 and the winding roll 64 was 80 N, and the temperature of the can roll refrigerant was controlled to 20 ° C. using water.

  And the front-end | tip part of the elongate resin film F set to the unwinding roll 52 was pulled out, and it attached to the winding roll 64 via various rolls, such as the can roll 56 which demarcates the conveyance path | route of a roll-to-roll. For the long resin film F, a heat-resistant polyimide film “Kapton (registered trademark)” manufactured by Toray DuPont Co., Ltd. having a width of 500 mm, a length of 800 m, and a thickness of 25 μm was used.

The vacuum chamber 51 was evacuated to 5 Pa with a plurality of dry pumps, and then further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. In this state, while conveying the long resin film F at a conveyance speed of 4 m / min, argon gas is introduced into each magnetron sputtering cathode and electric power is applied, and the film thickness as a seed layer is formed on the surface of the long resin film F. A long heat-resistant resin film with a metal film in which a 10 nm Ni—Cr film and a 100 nm thick Cu film were formed was prepared.

  After performing the film forming process on all the long resin films F, the film forming apparatus 50 was stopped and the can roll 56 was visually examined. As a result, the hard chrome plating on the outer peripheral surface was not peeled off, and when it was initially mounted. It was kept in good condition. In addition, no defects such as wrinkles were found in the produced long heat-resistant resin film with a metal film.

[Example 2]
Although the same inner drum and outer ring as Example 1 were used, the surface cooling can roll which provided the some groove | channel on the outer peripheral surface of the inner drum according to the manufacturing method shown in FIG. Similarly, it was mounted on the film forming apparatus 50 to produce a long heat-resistant resin film with a metal film.

  Specifically, after cutting and polishing the outer peripheral surface of the inner drum pipe and the inner peripheral surface of the outer ring pipe so that good shrink fitting can be performed, the outer peripheral surface of the inner drum pipe is angled in the circumferential direction. 180 grooves 5 for a refrigerant introduction path having a width of 5 mm and a depth of 5 mm extending in the central axis direction every 2 ° were formed by a groove cutting cutter. Thereafter, the outer ring pipe was heated and expanded, and shrink-fitted into the inner drum pipe. Then, the surface of the outer ring pipe was cut and polished to a thickness of 4 mm (outer diameter 802 mm).

  A YAG laser having a wavelength of 1.06 μm and an output of 10 kW is irradiated from the outer peripheral surface side of the outer ring pipe toward the projecting portion 29 between the adjacent grooves 28 for the refrigerant introduction path, and is further scanned in the direction of the rotation axis. The inner drum pipe and the outer ring pipe were joined together. Thereafter, in the same manner as in Example 1, cutting and cylindrical polishing were performed until the outer diameter reached 800 mm, and the outer peripheral surface was plated with hard chrome to complete the surface cooling can roll. This surface cooling can roll was mounted on the film forming apparatus 50 in the same manner as in Example 1, and a long heat-resistant resin film with a metal film was produced under the same conditions as in Example 1.

  After film formation processing was performed on all the long resin films F, the film formation apparatus 50 was stopped and the can roll was visually examined. As a result, the hard chrome plating on the outer peripheral surface was not peeled off, but remained as originally mounted. Was in good condition. In addition, no defects such as wrinkles were found in the produced long heat-resistant resin film with a metal film.

[Comparative Example 1]
Although the same inner drum and outer ring as Example 1 were used, the can roll was produced according to the manufacturing method shown in FIG. That is, shrink fitting was performed, but welding was not performed. Thereafter, in the same manner as in Example 1, cutting and cylindrical polishing were performed until the outer diameter reached 800 mm, and hard chrome plating was applied to the outer peripheral surface to complete a can roll. In Comparative Example 1, there was a problem that the thinned outer ring loosened during the cutting / cylindrical polishing process. The can roll was mounted on the film forming apparatus 50 in the same manner as in Example 1, and a long heat-resistant resin film with a metal film was produced under the same conditions as in Example 1.

  As a result, the can roll of this comparative example 1 did not cause any peeling of the hard chrome plating. However, as described above, loosening occurred during the cutting / polishing process of the outer ring. In addition, wrinkles were generated in the long resin film F during film formation because the contact pressure between the outer ring and the inner drum was considered not uniform in the circumferential direction.

[Comparative Example 2]
A can roll was produced in the same manner as in Comparative Example 1 except that both the inner drum and the outer ring were made of aluminum. The can roll was mounted on the film forming apparatus 50 in the same manner as in Example 1, and a long heat-resistant resin film with a metal film was produced under the same conditions as in Example 1.

  As a result, in the can roll of Comparative Example 2, peeling of the hard chrome plating occurred. Furthermore, since loosening occurred during the cutting / polishing process of the outer ring, the smoothness of the outer peripheral surface of the can roll was poor, and the contact pressure between the outer ring and the inner drum was considered not uniform in the circumferential direction. Thus, wrinkles occurred in the long resin film F during film formation.

DESCRIPTION OF SYMBOLS 11 Inner drum 12 Side surface part 13 Rotating shaft 14 Outer ring 15 Welding bead 16 Refrigerant circulation pipe 17 Refrigerant circulation path 21 Inner drum 22 Side surface part 23 Rotating shaft 24 Outer ring 25 Welding bead 28 Groove 29 Projection part 50 Film forming apparatus 51 Vacuum chamber 52 Unwinding roll 53 Free roll 54 Tension sensor roll 55 Feed roll 56 Can roll 57 Magnetron sputtering cathode 58 Magnetron sputtering cathode 59 Magnetron sputtering cathode 60 Magnetron sputtering cathode 61 Feed roll 62 Tension sensor roll 63 Free roll 64 Winding roll F Long resin film

Claims (8)

It is a metal roll comprising a metal inner drum having a rotating shaft and a shrink fit on the outer peripheral surface of the inner drum, the inner drum being a dissimilar metal outer ring with a thickness of 3 to 5 mm , On the outer peripheral surface of the inner drum, a plurality of grooves extending in the rotation axis direction are provided over the entire circumference at substantially equal intervals in the circumferential direction, and the plurality of grooves adjacent to each other. A metal roll characterized in that the inner drum and the outer ring are welded to each other at a protruding portion between them.   The metal roll according to claim 1, wherein a linear expansion coefficient of the outer ring is smaller than a linear expansion coefficient of the inner drum. A can roll having a mechanism for circulating a refrigerant or a heating medium therein and having a transport path for winding a long strip transported by roll-to-roll on the outer peripheral surface, and provided opposite to the outer peripheral surface of the can roll And a surface treatment device for performing a surface treatment for applying a thermal load to the belt wound around the outer peripheral surface, wherein the can roll is a metal roll according to claim 1 or 2. There is provided a surface treatment apparatus. The surface treatment apparatus according to claim 3 , wherein the surface treatment means is a dry plating means. The surface treatment apparatus according to claim 4 , wherein the dry plating means is a sputtering cathode. A metal inner drum having a rotating shaft and an inner diameter smaller than the outer diameter of the inner drum, and an outer ring made of a metal different from that of the inner drum are prepared. A step of inscribed and joining the inner surface of the outer ring, a step of cutting and / or polishing the outer peripheral surface until the outer ring has a thickness of 3 to 5 mm, and a laser or A method for producing a metal roll, comprising a step of irradiating an electron beam to weld the outer ring and the inner drum to each other. A step of providing a plurality of grooves extending in the direction of the rotation axis on the outer peripheral surface of the inner drum before the connecting step, and having a substantially uniform interval in the circumferential direction over the entire circumference. The method for producing a metal roll according to claim 6, wherein the welding is performed at a protruding portion between adjacent ones of the grooves. The method of manufacturing a metal roll according to claim 6 or 7, wherein a linear expansion coefficient of the outer ring is smaller than a linear expansion coefficient of the inner drum.

Images